JPH0438037U - - Google Patents

Info

Publication number
JPH0438037U
JPH0438037U JP8037690U JP8037690U JPH0438037U JP H0438037 U JPH0438037 U JP H0438037U JP 8037690 U JP8037690 U JP 8037690U JP 8037690 U JP8037690 U JP 8037690U JP H0438037 U JPH0438037 U JP H0438037U
Authority
JP
Japan
Prior art keywords
polishing
wafer
jig
pressurizing
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8037690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8037690U priority Critical patent/JPH0438037U/ja
Publication of JPH0438037U publication Critical patent/JPH0438037U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP8037690U 1990-07-27 1990-07-27 Pending JPH0438037U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8037690U JPH0438037U (US06815460-20041109-C00097.png) 1990-07-27 1990-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8037690U JPH0438037U (US06815460-20041109-C00097.png) 1990-07-27 1990-07-27

Publications (1)

Publication Number Publication Date
JPH0438037U true JPH0438037U (US06815460-20041109-C00097.png) 1992-03-31

Family

ID=31625381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8037690U Pending JPH0438037U (US06815460-20041109-C00097.png) 1990-07-27 1990-07-27

Country Status (1)

Country Link
JP (1) JPH0438037U (US06815460-20041109-C00097.png)

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