JPH0437580U - - Google Patents
Info
- Publication number
- JPH0437580U JPH0437580U JP7615490U JP7615490U JPH0437580U JP H0437580 U JPH0437580 U JP H0437580U JP 7615490 U JP7615490 U JP 7615490U JP 7615490 U JP7615490 U JP 7615490U JP H0437580 U JPH0437580 U JP H0437580U
- Authority
- JP
- Japan
- Prior art keywords
- gap
- filled
- inert gas
- ipa
- working device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
第１図はこの考案に係るＩＰＡ作業装置の一実
施例の断面図である。 １……内槽、２……開口部、３……スライド式
ドア、４……底板、５……超音波振動子、６……
凝縮コイル、７……樋、８……外槽、９……空隙
、１０……保持部材、１１……不活性ガス導入口
、１２……開口部、１３……スライド式ドア、１
４……被洗浄物、１５……不活性ガス排出口、１
６……不活性ガス。
施例の断面図である。 １……内槽、２……開口部、３……スライド式
ドア、４……底板、５……超音波振動子、６……
凝縮コイル、７……樋、８……外槽、９……空隙
、１０……保持部材、１１……不活性ガス導入口
、１２……開口部、１３……スライド式ドア、１
４……被洗浄物、１５……不活性ガス排出口、１
６……不活性ガス。
Claims (1)
- 超音波振動子５を有し、内部において洗浄／乾
燥あるいは加振作業を行う内槽１を、空隙９を保
つて気密性を有する外槽８内に位置せしめると共
に前記空隙９内に不活性ガス１６を充満せしめた
ことを特徴とするＩＰＡ作業装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7615490U JPH0437580U (ja) | 1990-07-19 | 1990-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7615490U JPH0437580U (ja) | 1990-07-19 | 1990-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437580U true JPH0437580U (ja) | 1992-03-30 |
Family
ID=31617369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7615490U Pending JPH0437580U (ja) | 1990-07-19 | 1990-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437580U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993014885A1 (en) * | 1992-01-22 | 1993-08-05 | Japan Field Co., Ltd. | Washing system |
-
1990
- 1990-07-19 JP JP7615490U patent/JPH0437580U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993014885A1 (en) * | 1992-01-22 | 1993-08-05 | Japan Field Co., Ltd. | Washing system |