JPH0437551A - Head for ink jet printer - Google Patents

Head for ink jet printer

Info

Publication number
JPH0437551A
JPH0437551A JP14357690A JP14357690A JPH0437551A JP H0437551 A JPH0437551 A JP H0437551A JP 14357690 A JP14357690 A JP 14357690A JP 14357690 A JP14357690 A JP 14357690A JP H0437551 A JPH0437551 A JP H0437551A
Authority
JP
Japan
Prior art keywords
ink
head
printing
temperature
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14357690A
Other languages
Japanese (ja)
Inventor
Masamitsu Uehara
正光 上原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP14357690A priority Critical patent/JPH0437551A/en
Publication of JPH0437551A publication Critical patent/JPH0437551A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To print characters on a matter to be printed even if an ink printer head is maintained at high temperature as ink ejection orifices are arranged on an almost flat surface by setting differences in a shortest distance formed between ejection orifices and the surface of a matter to be printed at a printing temperature below a specified size value. CONSTITUTION:Where the coefficient of thermal expansion of a material used for a nose plate 5 is larger than that of a material used for a head case 3, an ink jet head 2 is significantly curved instead of being flat at a temperature applied when it is manufactured. However, when ink is ejected at high temperature, the head 2 is almost flat and ink kept at high temperature is ejected and therefore, stable character printing is ensured. If the temperature is maintained at a specified high level so that the difference in distance between nozzles 4 and a matter to be printed 6 is insignificant, print quality becomes high and if the distance is 1 mm or less, satisfactory print quality is ensured.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインクジェットプリンタ用ヘッドに関する。さ
らに詳しくは、印字時と非印字時の温度が異なるインク
ジェットプリンタ用ヘッドのインクを噴出させるための
複数の噴出口群の構造に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inkjet printer head. More specifically, the present invention relates to a structure of a plurality of ejection port groups for ejecting ink of an inkjet printer head that has different temperatures during printing and non-printing.

〔従来の技術〕[Conventional technology]

従来のインクジェットプリンタ用ヘッドは製造時に複数
のインク噴出口群かほぼ同−平面となるように構造され
ていた。
Conventional inkjet printer heads have been constructed so that a plurality of ink ejection orifice groups are substantially coplanar during manufacture.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかし、前述の従来技術では印字安定性を向上させるな
どの目的でインクジェットプリンタ用ヘッドを外部環境
温度より高温の所定温度に保持して印字を行なう際に主
として熱膨張のために、インクを噴出させるための複数
の噴出口群を含む面が曲面となってしまい、紙等の被印
字物表面との距離が前記各々の噴出口群で異なってしま
い、印字が不ぞろいになるという技術課題があった。
However, in the above-mentioned conventional technology, in order to improve printing stability, the inkjet printer head is maintained at a predetermined temperature higher than the external environmental temperature and when printing, ink is ejected mainly due to thermal expansion. There was a technical problem in that the surface containing a plurality of jet nozzle groups was curved, and the distance from the surface of the printing object such as paper was different for each jet nozzle group, resulting in uneven printing. .

そこで本発明はこのような技術課題を解決するもので、
その目的とするところは、高温に保持しても複数のイン
ク噴出口群かほぼ平面上に配置され、被印刷物上に安定
な印字を行なえることがてきるインクジェットプリンタ
用ヘッドを提供するところにある。
Therefore, the present invention solves these technical problems,
The purpose is to provide an inkjet printer head that has a plurality of ink jet nozzle groups arranged on a substantially flat surface and can perform stable printing on a printing substrate even when maintained at high temperatures. be.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のインクジェットプリンタ用ヘッドは、インクを
噴出させるための複数の噴出口群と前記インクを噴出さ
せる手段と、印字を行なうため所定の温度に設定する手
段とから主に構成され、前記インクを被印刷物に噴出し
て印字を行なうインクジェットプリンタ用ヘッドにおい
て、前記印字を行なう温度下で前記複数の噴出口群の各
々と前記被印刷物表面とで構成される最短距離の各々の
差が1mm以下となるように設置したことを特徴とする
The head for an inkjet printer of the present invention mainly includes a plurality of jetting ports for jetting ink, a means for jetting the ink, and a means for setting a predetermined temperature for printing. In an inkjet printer head that performs printing by jetting onto a printing material, the difference between the shortest distances between each of the plurality of jetting port groups and the surface of the printing material under the temperature at which the printing is performed is 1 mm or less. It is characterized by being installed so that

〔作 用〕[For production]

本発明の上記の構成によれば、インクジェットプリンタ
用ヘッドを構成している各々の材料の熱膨脹の差を小さ
くするか、それらの熱膨脹による増加分を考慮して、印
字時の高温度で複数のインク噴出口群がほぼ同一平面上
に配列するように製造時にあらかしめ小さく設定してお
くことで、安定で整った良好な印字を得ることができる
According to the above configuration of the present invention, the difference in thermal expansion of each material constituting the inkjet printer head is reduced, or the increase due to thermal expansion is taken into consideration to By setting the ink ejection ports to be small at the time of manufacture so that they are arranged on substantially the same plane, it is possible to obtain stable, uniform, and good printing.

〔実 施 例〕〔Example〕

第1図は本発明の一実施例を示す主要構成部の部分断面
図である。第2図は第1図において、インクを噴出する
ための複数のノズル4の中心を通るような切断面Aで切
断した部分断面図であって印字動作をしていない冷却時
の構成を示す図である。
FIG. 1 is a partial sectional view of the main components showing one embodiment of the present invention. FIG. 2 is a partial cross-sectional view of FIG. 1 taken along a cutting plane A that passes through the centers of a plurality of nozzles 4 for ejecting ink, and shows the configuration during cooling when no printing operation is being performed. It is.

第1図を用いて本発明の主要構成要素とインクジェット
プリンタ用ヘッドの動作について以下に説明する。適度
な高温(本実施例では70℃〜190℃)に保持したイ
ンク1をインクジェットヘッド2の中に満たし、所定の
粘度を有する液体とした。この時インク1は加熱装置で
あるヒータ17を用いてインクジェットヘッド2を介し
て加熱を行なった。
The main components of the present invention and the operation of the inkjet printer head will be explained below using FIG. The inkjet head 2 was filled with ink 1 maintained at a moderately high temperature (70° C. to 190° C. in this example) to form a liquid having a predetermined viscosity. At this time, the ink 1 was heated through the inkjet head 2 using a heater 17 which is a heating device.

インクジェットへラド2は図に示すように、ヘッドケー
ス3とインクを噴出させるための複数のノズル4を形成
したノズルプレート5で外側を囲ったライン型ヘッドと
して構成した。前記インクジェットヘッド2の中に振動
子6をスペーサ10を介してノズルプレート5と一定の
間隔を保持するように、さらにノズル4とほぼ同一のピ
ッチとなるように設置した。振動子6は電気電導性を有
する振動板8および圧電体7を図に示すようにはり合わ
せ、一方圧電体7の他方の面に薄膜電極9を形成した。
As shown in the figure, the inkjet head 2 is configured as a line-type head surrounded by a head case 3 and a nozzle plate 5 having a plurality of nozzles 4 for ejecting ink. The vibrator 6 was installed in the inkjet head 2 via a spacer 10 so as to maintain a constant distance from the nozzle plate 5, and at substantially the same pitch as the nozzle 4. The vibrator 6 had a diaphragm 8 having electrical conductivity and a piezoelectric body 7 bonded together as shown in the figure, and a thin film electrode 9 was formed on the other surface of the piezoelectric body 7.

圧電体7は振動板8と薄膜電極9間にあらかしめ直流電
圧を長時間印加して分極を行なった。振動子6は駆動電
源11を用いて所定のパルス電圧を印加し、蓄積された
電荷を放電させたところ、−変度形した後回に示すもと
の位置にもどり、インク滴14がノズル4より噴出方向
13に噴出し、被印刷物16上に良好な印字を形成した
。二の後、噴出したインク滴14と同量を図に示してい
ないがインク1の供給部より供給方向15に供給した。
The piezoelectric body 7 was polarized by applying a DC voltage between the diaphragm 8 and the thin film electrode 9 for a long time. When a predetermined pulse voltage is applied to the vibrator 6 using the drive power supply 11 to discharge the accumulated charge, the vibrator 6 returns to its original position shown in the following section, and the ink droplet 14 is directed to the nozzle 4. The ink was ejected in the ejection direction 13 and a good print was formed on the printing material 16. After 2, the same amount as the ejected ink droplets 14 was supplied in the supply direction 15 from an ink 1 supply section (not shown).

複数の振動子6に駆動電源11より適度に変調した駆動
電圧を与えることにより多数のインク滴14を紙等の被
印刷物16上に噴出させ、良好な印字を得た。次に本発
゛明に用いた主な材料と形状について説明する。インク
1はパラフィンワックス、カルナバワックスおよびベヘ
ン酸等の染料溶解助剤を各々1〜60重量パーセントの
割合で加熱溶解し、その中にニグロシン等の黒色染料や
他の染料を1〜8重量パーセント同様に溶解したものを
用いた。高温に保持した時の粘度は2〜30mPa−5
の範囲の一定の値である。インク1はこれらの他に高温
で前述の粘度となる有機物の中にカーボンブラックや顔
料の微粒子ならびに染料や顔料を付着または結合させた
微粒子を混合した非線型流動性液体を用いてもかまわな
い。ヘッドケース3は適度な熱伝導性を与える材料たと
えば、シリコン、アルミナ等のセラミクス類等を用いた
。ノズルプレート5とスペーサ10は同一材料もしくは
熱膨張係数の差や比が小さい材料の組合せを用いた。特
にスペーサ10は振動板8の共通電極とするために、導
電性材料もしくは絶縁材料表面に導電性膜を形成したも
のを用いた。本発明に用いたノズルプレート5およびス
ペーサ1Gの材料は、たとえば金属ではニッケル、銅、
タンタル、モリブデン、鉄・ニッケル合金、鉄、鉄・ニ
ッケル・コバルト合金、ステンレス、クロムおよびこれ
らを少なくとも一種を含む合金である。他の材料では、
ガラス類、アルミナ、窒化ケイ素等のセラミクス類、シ
リコン、サファイア等を用いた。
By applying appropriately modulated drive voltages from the drive power supply 11 to the plurality of vibrators 6, a large number of ink droplets 14 were ejected onto a printing medium 16 such as paper, and good printing was obtained. Next, the main materials and shapes used in the present invention will be explained. Ink 1 is prepared by heating and dissolving dye dissolving aids such as paraffin wax, carnauba wax, and behenic acid at a ratio of 1 to 60 weight percent each, and adding a black dye such as nigrosine and other dyes at a similar rate of 1 to 8 weight percent. The solution was used. Viscosity when kept at high temperature is 2-30mPa-5
is a constant value in the range of . In addition to these, the ink 1 may be a non-linear fluid liquid in which carbon black, fine particles of pigment, and fine particles to which dyes or pigments are attached or bonded are mixed in an organic material that has the above-mentioned viscosity at high temperatures. The head case 3 is made of a material that provides appropriate thermal conductivity, such as ceramics such as silicon and alumina. The nozzle plate 5 and the spacer 10 are made of the same material or a combination of materials with a small difference or ratio of thermal expansion coefficients. In particular, the spacer 10 is made of a conductive material or an insulating material with a conductive film formed on its surface in order to serve as a common electrode for the diaphragm 8. The materials of the nozzle plate 5 and spacer 1G used in the present invention include, for example, metals such as nickel, copper,
Tantalum, molybdenum, iron/nickel alloy, iron, iron/nickel/cobalt alloy, stainless steel, chromium, and alloys containing at least one of these. In other materials,
Glasses, alumina, ceramics such as silicon nitride, silicon, sapphire, etc. were used.

またポリイミド、ポリエーテルサルフォン、ポリエーテ
ルエーテルケトン、ポリフェニルサルフォン等の耐熱性
プラスチックでも良好な動作を得た。ノズル4は直径2
0μm〜300um間でインク滴14の形状、スペーサ
を考慮して所定の一定値とした。圧電体7にはチタン酸
ジルコン酸鉛系のピエゾエレクトリック効果を示す強誘
電体セラミクスを用い、薄膜電極9を蒸着またはスパッ
タリングもしくはメツキ法によって厚さ0.1μm〜2
0μmの間の一定値に形成した。
Good operation was also obtained with heat-resistant plastics such as polyimide, polyethersulfone, polyetheretherketone, and polyphenylsulfone. Nozzle 4 has a diameter of 2
A predetermined constant value was set between 0 μm and 300 μm in consideration of the shape of the ink droplet 14 and the spacer. The piezoelectric body 7 is made of lead zirconate titanate-based ferroelectric ceramics exhibiting a piezoelectric effect, and a thin film electrode 9 is formed by vapor deposition, sputtering, or plating to a thickness of 0.1 μm to 2 μm.
It was formed to a constant value between 0 μm.

第1図において、高温の所定の温度に保持させて良好な
印字をさせたところ被印刷物6と複数のノズル4の各々
の距離の平均値は0.3+*m〜5■lの中の一定値(
好ましくは0.3〜1.5mmの中の一定値)であった
。この時該各々の距離の差は最大1龍てあった。該各々
の差が小さければ一層印字品質は良好となるも、11■
以内であればおおむね良好な印字品質が確保された。
In Fig. 1, when maintaining a high temperature at a predetermined temperature to achieve good printing, the average distance between the printing material 6 and each of the plurality of nozzles 4 is constant within 0.3 + * m to 5 ■ l. value(
It is preferably a constant value of 0.3 to 1.5 mm). At this time, the difference in distance between them was at most 1 dragon. The smaller the difference between each, the better the print quality will be, but 11
Within this range, generally good print quality was ensured.

次に前述の印字良好なインクジェットプリンタ用ヘッド
を毎時1℃〜毎秒12℃の間で冷却し、製造時の温度に
した断面図を第2図に示す。第2図はノズルプレート5
に用いた材料の熱膨脹係数がヘッドケース3に用いた材
料の前記係数より大きい場合である。図に示すように製
造時の温度ではインクジェットヘッド2は平面ではなく
大きく曲っているが、前記述べたように高温に保持しイ
ンクを噴出する場にはほぼ平面となって安定な印字が得
られる。ここで本発明のインクジェットヘッド2の製造
方法の原理を簡単に説明する。本発明のインクジェット
ヘッド2は前述の構成部品を高温で溶解する合金を用い
て接合した。−例をあげれば、金・スズ合金の構成比を
変化させて溶解温度を調整し、印字に必要な高温の所定
の温度よりも5℃〜150℃高温で固化するように設定
した。こうすることにより、前記合金の溶解温度以上に
保持し、これを徐々に冷却することにより前記インクジ
ェットヘッド2のインク噴出温度において確実に前記各
構成部品を固定することができたばかりでなく、残留応
力も少なく、変形も少ない印字安定性の良好なヘッドが
得られた。本実施例とは逆にノズルプレート5に用いた
材料の熱膨脹係数がヘッドケース3に用いた材料の該係
数より小さい場合は第2図と反対にインクジェットヘッ
ド2が曲がったが(第2図に対し上に凸に設定される)
いずれも高温に保持して印字を行なったところ、前述と
同様に複数のノズル4と被印刷物6間の各々の最短距離
の差が11以下であれば同等の良好な結果が得られた。
Next, FIG. 2 shows a cross-sectional view of the above-mentioned head for an inkjet printer with good printing, cooled at a temperature between 1° C. per hour and 12° C. per second to the temperature at which it was manufactured. Figure 2 shows nozzle plate 5.
This is a case where the coefficient of thermal expansion of the material used for the head case 3 is larger than the coefficient of thermal expansion of the material used for the head case 3. As shown in the figure, at the manufacturing temperature, the inkjet head 2 is not flat but curved, but as mentioned above, when held at a high temperature and ejecting ink, it becomes almost flat and stable printing can be achieved. . Here, the principle of the method for manufacturing the inkjet head 2 of the present invention will be briefly explained. The inkjet head 2 of the present invention is made by joining the above-mentioned components using an alloy that melts at high temperatures. - For example, the melting temperature was adjusted by changing the composition ratio of the gold/tin alloy, and the melting temperature was set to be 5°C to 150°C higher than the predetermined high temperature required for printing. By doing this, by maintaining the temperature above the melting temperature of the alloy and gradually cooling it, it was possible not only to securely fix each of the components at the ink jetting temperature of the inkjet head 2, but also to reduce residual stress. A head with good printing stability was obtained, with little deformation. Contrary to this example, when the coefficient of thermal expansion of the material used for the nozzle plate 5 was smaller than that of the material used for the head case 3, the inkjet head 2 bent, contrary to FIG. (set convex upward)
When printing was carried out while maintaining the temperature in both cases, similar good results were obtained as long as the difference in the shortest distances between the plurality of nozzles 4 and the printing substrate 6 was 11 or less, as described above.

また外部環境の温度が変化してもヒータ17を用いてそ
れ以上の高温でインクジェットヘッド2を保持している
ためほとんど左右されず、インク粘度も一定で安定な印
字が得られた。第3図(a)、(b)を用いてさらにわ
かり易く説明する。第3図(a)は所定の高温に保持し
た場合の断面図であって、複数のノズル4と被印刷物6
との距離の一例であるB、 Cはその大きさがほぼ等し
く差は1 mm以下としたところ、良好な印字を得た。
Further, even if the temperature of the external environment changes, since the inkjet head 2 is maintained at a higher temperature using the heater 17, it is hardly affected by the change, and the ink viscosity is also constant, resulting in stable printing. This will be explained more clearly using FIGS. 3(a) and 3(b). FIG. 3(a) is a cross-sectional view when the temperature is maintained at a predetermined high temperature, and shows a plurality of nozzles 4 and a printing material 6.
B and C, which are an example of the distance between the two, were almost equal in size and the difference was 1 mm or less, and good printing was obtained.

これをインクジェットヘッド2を接合し冷却した温度で
ある製造時の温度まで低下させると、第3図(b)のよ
うに全体がたわみ、ノズル4と被印刷物6との距離の一
例であるB−1C′は図に示すようにその差が大きくな
った。すなわち本発明の実施例ではこれらの現象を逆に
利用してあらかじめインクジェットヘッド2の構成部品
の熱膨脹係数を考慮することにより、高温でのインク噴
出時にインクジェットヘッド2のノズル4と被印刷物6
の距離を一定以内に保持することができ安定な印字品質
の得られるインクジェットプリンタ用ヘッドを得た。
When this temperature is lowered to the manufacturing temperature, which is the temperature at which the inkjet head 2 is bonded and cooled, the entire body bends as shown in FIG. As shown in the figure, the difference was large for 1C'. That is, in the embodiment of the present invention, by taking advantage of these phenomena in advance and considering the coefficient of thermal expansion of the constituent parts of the inkjet head 2 in advance, the nozzle 4 of the inkjet head 2 and the printing substrate 6 when ejecting ink at high temperatures are
The present invention provides an inkjet printer head that can maintain the distance within a certain range and provide stable print quality.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば外部環境より高温で
印字をするために、外部環境の温度が変化しても、それ
以上の高温にインクジェットプリンタ用ヘッドを保持す
ることにより、インクの粘度が一定になり安定なインク
噴出が得られるばかりでなく、インク噴射時にインクジ
ェットヘッドに形成されている複数のノズルと被印刷物
との距離が一定とすることができるため、複数の噴出し
たインク滴の各々の飛行する距離も一定となりさらに高
印字品質の印字ができるという効果も有する。またイン
ク噴出時にヘッドのたわみを少なくすることができるた
めに噴出するインク滴の方向も整い等間隔な美しい印字
をすることができるという効果も有する。
As described above, according to the present invention, in order to print at a higher temperature than the external environment, even if the temperature of the external environment changes, by maintaining the inkjet printer head at a higher temperature, the viscosity of the ink can be reduced. Not only can stable ink jetting be obtained by keeping the distance constant, but also the distance between the multiple nozzles formed in the inkjet head and the printing material can be kept constant during ink jetting, so the distance between the multiple jetted ink droplets can be kept constant. The distance traveled by each printer is also constant, which also has the effect of enabling high-quality printing. In addition, since the deflection of the head can be reduced when ejecting ink, the direction of the ejected ink droplets is also aligned and beautiful printing can be performed at equal intervals.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図ならびに第3図は各々本発明の実施
例を示す主要構成部分断面図。 4・・・ノズル 6 ・ ・ ・振動子 17 ・ ・ ・ヒータ 以 上 出願人 セイコーエプソン株式会社 代理人 弁理士 鈴 木 喜三部(他1名)第1図 第2図
FIG. 1, FIG. 2, and FIG. 3 are sectional views of main components each showing an embodiment of the present invention. 4... Nozzle 6 ・ ・ ・ Vibrator 17 ・ ・ ・ Heater and above Applicant: Seiko Epson Corporation Representative Patent attorney: Kizobe Suzuki (and 1 other person) Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] インクを噴出させるための複数の噴出口群と前記インク
を噴出させる手段と、印字を行なうため所定の温度に設
定する手段とから主に構成され、前記インクを被印刷物
に噴出して印字を行なうインクジェットプリンタ用ヘッ
ドにおいて、前記印字を行なう温度下で前記複数の噴出
口群の各々と前記被印刷物表面とで構成される最短距離
の各々の差が5mm以下となるように設置したことを特
徴とするインクジェットプリンタ用ヘッド。
Mainly composed of a plurality of ejection ports for ejecting ink, means for ejecting the ink, and means for setting a predetermined temperature for printing, and performs printing by ejecting the ink onto the substrate. The head for an inkjet printer is characterized in that the head is installed such that the difference between the shortest distances between each of the plurality of ejection port groups and the surface of the printing medium is 5 mm or less under the temperature at which the printing is performed. head for inkjet printers.
JP14357690A 1990-06-01 1990-06-01 Head for ink jet printer Pending JPH0437551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14357690A JPH0437551A (en) 1990-06-01 1990-06-01 Head for ink jet printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14357690A JPH0437551A (en) 1990-06-01 1990-06-01 Head for ink jet printer

Publications (1)

Publication Number Publication Date
JPH0437551A true JPH0437551A (en) 1992-02-07

Family

ID=15341956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14357690A Pending JPH0437551A (en) 1990-06-01 1990-06-01 Head for ink jet printer

Country Status (1)

Country Link
JP (1) JPH0437551A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003525786A (en) * 2000-03-09 2003-09-02 シルバーブルック リサーチ ピーティワイ リミテッド Thermal expansion compensation for modular printhead assemblies

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003525786A (en) * 2000-03-09 2003-09-02 シルバーブルック リサーチ ピーティワイ リミテッド Thermal expansion compensation for modular printhead assemblies
US7942499B2 (en) 2000-03-09 2011-05-17 Silverbrook Research Pty Ltd Method of aligning two or more printhead modules mounted to a support member in a printer

Similar Documents

Publication Publication Date Title
JPH06218917A (en) Ink jet head
JPS59194860A (en) Liquid jet recording head
JPS57182452A (en) Multinozzle head
JP2001205810A (en) Ink-jet head
JPH0437551A (en) Head for ink jet printer
JPH05131624A (en) Ink-jet recording head and ink-jet recording device
JP3285601B2 (en) Liquid jet recording head and method of manufacturing the same
JP2002046282A (en) Liquid drop ejection head and microactuator
JPH0437552A (en) Ink jet recording device
JP2001105590A (en) Ink jet head
US6637868B2 (en) Inkjet head and method of manufacturing the same
JPH0437550A (en) Ink jet printer head
JP2907956B2 (en) Liquid jet recording head substrate, liquid jet recording head using the substrate, and liquid jet recording apparatus provided with the liquid jet recording head
JP2812975B2 (en) Liquid jet recording device
JPH04338548A (en) Ink jet printer
JPH0437549A (en) Head for ink jet printer
JP3989248B2 (en) Inkjet head manufacturing method
JPS62264961A (en) Drip jet recorder
JP2002103632A (en) Liquid drop discharge head, its manufacturing method and ink jet recorder
JPS62191156A (en) Liquid jet recording head
JPH054337A (en) Hot melt ink jet recording device
JPH0994951A (en) Ink jet apparatus
JPH1016229A (en) Ink jet recording head and its manufacturing method
JP3406921B2 (en) Method for manufacturing liquid jet recording head
JPS62249747A (en) Ink jet recording head