JPH04373189A - Gas laser tube - Google Patents
Gas laser tubeInfo
- Publication number
- JPH04373189A JPH04373189A JP15134891A JP15134891A JPH04373189A JP H04373189 A JPH04373189 A JP H04373189A JP 15134891 A JP15134891 A JP 15134891A JP 15134891 A JP15134891 A JP 15134891A JP H04373189 A JPH04373189 A JP H04373189A
- Authority
- JP
- Japan
- Prior art keywords
- gas laser
- tube
- laser tube
- light
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000006866 deterioration Effects 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は、反射不要波長光を管
外に放出させるようにしたガスレ−ザ管に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser tube which emits light of wavelengths not required for reflection outside the tube.
【０００２】0002
【従来の技術】従来、ガスレ−ザ管は図３に示すように
構成され、図中の符号１は螺旋状の直熱含浸型陰極、２
は放電細管、３は陽極、４は陰極１を取り囲む陰極容器
、５、６はミラ−支持円筒、７、８はミラ−基板、９、
１０は誘電体多層膜ミラ−、１１はブリュ−スタ−ガラ
ス基板、１２は放熱フィンである。2. Description of the Related Art Conventionally, a gas laser tube is constructed as shown in FIG.
3 is a discharge capillary, 3 is an anode, 4 is a cathode container surrounding the cathode 1, 5 and 6 are mirror support cylinders, 7 and 8 are mirror substrates, 9,
10 is a dielectric multilayer film mirror, 11 is a Brewster glass substrate, and 12 is a heat radiation fin.
【０００３】動作時には、放電細管２で陽極３と陰極１
との間で放電させ、この放電により励起されたガス原子
が元の状態に戻る時に光を発し、更に両端のミラ−７、
８の間で光を往復させレ−ザ光を作り出している。During operation, the discharge capillary 2 connects the anode 3 and the cathode 1.
The gas atoms excited by this discharge emit light when they return to their original state, and the mirrors 7 at both ends,
The light is sent back and forth between the two to create laser light.
【０００４】0004
【発明が解決しようとする課題】上記のような従来のガ
スレ−ザ管においては、放電により得られた光をレ−ザ
作用するために、ミラ−９、１０で共振器を構成し、出
力ミラ−１０から数％のレ−ザ光として取出している。
この時、放電は必要なレ−ザ光のみでなく、その他の波
長の光も同時に発生する。この必要波長外の光がミラ−
９、１０に作用して、出力ミラ−１０に対しては透過率
の劣化、吸収の増加、高反射ミラ−９に対しては反射率
の低下、吸収の増加等を招いている。この結果、レ−ザ
出力が低下して短寿命であった。[Problems to be Solved by the Invention] In the conventional gas laser tube as described above, mirrors 9 and 10 constitute a resonator in order to perform a laser action on the light obtained by discharge, and the output Several percent of the laser light is extracted from the mirror 10. At this time, the discharge generates not only the necessary laser light but also light of other wavelengths. This light outside the required wavelength is mirrored.
9 and 10, the output mirror 10 suffers from a decrease in transmittance and an increase in absorption, and the high reflection mirror 9 suffers from a decrease in reflectance and an increase in absorption. As a result, the laser output decreased and the life span was shortened.
【０００５】この発明は、以上のような不都合を解決す
るものであり、反射不要波長光を管外に放出させ、不要
波長光による誘電体多層膜ミラ−の劣化を防止してレ−
ザ出力の低下を抑制し、長寿命を図ったガスレ−ザ管を
提供することを目的とする。[0005] The present invention solves the above-mentioned inconveniences by emitting unnecessary wavelength light for reflection outside the tube and preventing deterioration of the dielectric multilayer mirror due to unnecessary wavelength light.
An object of the present invention is to provide a gas laser tube that suppresses a decrease in laser output and has a long life.
【０００６】[0006]
【課題を解決するための手段】この発明は、陰極、放電
細管及び陽極が縦列配設されると共に両端にそれぞれ誘
電体多層膜ミラ−が設けられ、更に放電細管とミラ−と
の間に、不要波長光をほぼ１００％反射する干渉フィル
タ−が光軸に対してブリュ−スタ−角で配置されてなる
ガスレ−ザ管である。[Means for Solving the Problems] According to the present invention, a cathode, a discharge capillary, and an anode are arranged in series, and a dielectric multilayer film mirror is provided at each end, and further between the discharge capillary and the mirror, This is a gas laser tube in which an interference filter that reflects almost 100% of unnecessary wavelength light is arranged at a Brewster angle with respect to the optical axis.
【０００７】[0007]
【作用】この発明によれば、反射不要波長光を管外に放
出させ、不要波長光による誘電体多層膜ミラ−の劣化を
防止することにより、レ−ザ光の出力低下が抑制された
長寿命のガスレ−ザ管が得られる。[Operation] According to the present invention, by emitting unnecessary wavelength light to the outside of the tube and preventing deterioration of the dielectric multilayer mirror due to unnecessary wavelength light, the laser beam output can be suppressed from decreasing. A gas laser tube with a long life can be obtained.
【０００８】[0008]
【実施例】以下、図面を参照して、この発明の一実施例
を詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.
【０００９】即ち、この発明によるガスレ−ザ管は図１
に示すように構成され、従来例（図３）と同一箇所は同
一符号を付すことにすると、螺旋状の直熱含浸型陰極１
、放電細管２及び陽極３が一直線上に所定間隔で縦列配
設されている。そして、陰極１は陰極容器４に取り囲ま
れ、この陰極容器４にはミラ−支持円筒５が突設されて
いる。このミラ−支持円筒５の端部にはミラ−基板７が
固着され、このミラ−基板７の内面には誘電体多層膜か
らなる高反射ミラ−９が設けられている。一方、放電細
管２にはミラ−支持円筒６が突設され、このミラ−支持
円筒６の端部にはミラ−基板８が固着され、このミラ−
基板８の内面には誘電体多層膜からなる出力ミラ−１０
が設けられている。That is, the gas laser tube according to the present invention is shown in FIG.
The structure is as shown in FIG. 3, and the same parts as in the conventional example (Fig. 3) are given the same symbols.
, discharge capillary tubes 2, and anodes 3 are arranged in tandem in a straight line at predetermined intervals. The cathode 1 is surrounded by a cathode container 4, and a mirror support cylinder 5 is protruded from the cathode container 4. A mirror substrate 7 is fixed to the end of the mirror support cylinder 5, and a high reflection mirror 9 made of a dielectric multilayer film is provided on the inner surface of the mirror substrate 7. On the other hand, a mirror support cylinder 6 is protruded from the discharge capillary 2, and a mirror substrate 8 is fixed to the end of the mirror support cylinder 6.
On the inner surface of the substrate 8 is an output mirror 10 made of a dielectric multilayer film.
is provided.
【００１０】更に、この発明では、放電細管２と各誘電
体多層膜ミラ−９、１０との間に、それぞれ不要波長光
をほぼ１００％反射する干渉フィルタ−１４、１５が光
軸に対してブリュ−スタ−角で配置されている。具体的
には、ミラ−支持円筒５内にブリュ−スタ−ガラス基板
１１が配設され、このブリュ−スタ−ガラス基板１１の
内面に、干渉フィルタ−１４が設けられている。又、ミ
ラ−支持円筒６内にブリュ−スタ−ガラス基板１３が配
設され、このブリュ−スタ−ガラス基板１３の内面に、
干渉フィルタ−１５が設けられている。各干渉フィルタ
−１４、１５は図２に示すような分光透過特性を有して
いるが、ガスレ−ザ管として必要な波長のみ、特に可視
光に対しては完全な透過特性を持ち、不要波長光をほぼ
１００％反射する。これらは、周知の誘電体多層膜によ
って形成出来る。尚、放電細管２の外周には、多数の放
熱フィン１２が突設されている。Furthermore, in the present invention, interference filters 14 and 15 that reflect almost 100% of unnecessary wavelength light are provided between the discharge capillary tube 2 and each of the dielectric multilayer mirrors 9 and 10, respectively, with respect to the optical axis. It is arranged at Brewster's angle. Specifically, a Brewster glass substrate 11 is disposed within the mirror support cylinder 5, and an interference filter 14 is provided on the inner surface of the Brewster glass substrate 11. Further, a Brewster glass substrate 13 is disposed within the mirror support cylinder 6, and on the inner surface of this Brewster glass substrate 13,
An interference filter 15 is provided. Each of the interference filters 14 and 15 has spectral transmission characteristics as shown in FIG. Reflects almost 100% of light. These can be formed using a well-known dielectric multilayer film. Note that a large number of heat radiation fins 12 are provided protruding from the outer periphery of the discharge capillary tube 2 .
【００１１】さて、動作時には、放電細管２で発生した
不要波長光を干渉フィルタ−１４、１５のブリュ−スタ
−角で反射し、管外へ放射する。従って、共振器ミラ−
９、１０へは不要波長光は到達せず、干渉フィルタ−１
４、１５により必要なレ−ザ光のみ透過され、更にブリ
ュ−スタ−角で入射することにより、最小の損失でミラ
−９、１０に到達して増幅される。従って、共振器ミラ
−９、１０の透過率の変化および吸収を防止出来、レ−
ザ出力の低下が抑制され長寿命のガスレ−ザ管が得られ
る。尚、上記の実施例では、２つの干渉フィルタ−１４
、１５を設けたが、必要に応じどちらか一方にだけ設け
ても良い。During operation, unnecessary wavelength light generated in the discharge capillary tube 2 is reflected by the Brewster angle of the interference filters 14 and 15 and radiated outside the tube. Therefore, the resonator mirror
No unnecessary wavelength light reaches 9 and 10, and the interference filter 1
Only the necessary laser light is transmitted through the mirrors 4 and 15, and is further incident at the Brewster angle, so that it reaches the mirrors 9 and 10 with minimum loss and is amplified. Therefore, changes in transmittance and absorption of the resonator mirrors 9 and 10 can be prevented, and the radiation
A gas laser tube with a long life can be obtained by suppressing a decrease in laser output. Note that in the above embodiment, two interference filters 14
, 15 are provided, but they may be provided only on either one of them if necessary.
【００１２】0012
【発明の効果】この発明によれば、放電細管とミラ−と
の間に、不要波長光をほぼ１００％反射する干渉フィル
タ−がブリュ−スタ−角で配置されているので、不要波
長光がミラ−に達する前にカットされる。この結果、ミ
ラ−の分光透過率の変化および光の吸収が防止され、レ
−ザ出力の低下が抑制され、長寿命のガスレ−ザ管を提
供することが出来る。Effects of the Invention According to the present invention, an interference filter that reflects almost 100% of unnecessary wavelength light is placed between the discharge capillary and the mirror at the Brewster angle. It is cut before reaching the mirror. As a result, a change in the spectral transmittance of the mirror and light absorption are prevented, a decrease in laser output is suppressed, and a long-life gas laser tube can be provided.
【図１】この発明の一実施例に係るガスレ−ザ管を示す
断面図。FIG. 1 is a sectional view showing a gas laser tube according to an embodiment of the present invention.
【図２】この発明のガスレ−ザ管で用いる干渉フィルタ
−の分光透過特性を示す特性曲線図。FIG. 2 is a characteristic curve diagram showing the spectral transmission characteristics of the interference filter used in the gas laser tube of the present invention.
【図３】従来のガスレ−ザ管を示す断面図。FIG. 3 is a sectional view showing a conventional gas laser tube.
１…陰極、２…放電細管、３…陽極、４…陰極容器、９
、１０…誘電体多層膜ミラ−、１４、１５…干渉フィル
タ−。1...Cathode, 2...Discharge capillary, 3...Anode, 4...Cathode container, 9
, 10... Dielectric multilayer film mirror, 14, 15... Interference filter.
Claims (1)
れ、更に両端にそれぞれ誘電体多層膜からなる共振器ミ
ラ−が設けられてなるガスレ−ザ管において、上記放電
細管と上記ミラ−との間に、不要波長光をほぼ１００％
反射する干渉フィルタ−が光軸に対してブリュ−スタ−
角で配置されてなることを特徴とするガスレ−ザ管。1. A gas laser tube comprising a cathode, a discharge capillary, and an anode arranged in tandem, and further provided with a resonator mirror made of a dielectric multilayer film at each end, wherein the discharge capillary and the mirror During this time, almost 100% of unnecessary wavelength light is removed.
The reflective interference filter is aligned with Brewster toward the optical axis.
A gas laser tube characterized in that it is arranged at a corner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15134891A JPH04373189A (en) | 1991-06-24 | 1991-06-24 | Gas laser tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15134891A JPH04373189A (en) | 1991-06-24 | 1991-06-24 | Gas laser tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04373189A true JPH04373189A (en) | 1992-12-25 |
Family
ID=15516601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15134891A Pending JPH04373189A (en) | 1991-06-24 | 1991-06-24 | Gas laser tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04373189A (en) |
-
1991
- 1991-06-24 JP JP15134891A patent/JPH04373189A/en active Pending
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