JPH0437257U - - Google Patents

Info

Publication number
JPH0437257U
JPH0437257U JP8005490U JP8005490U JPH0437257U JP H0437257 U JPH0437257 U JP H0437257U JP 8005490 U JP8005490 U JP 8005490U JP 8005490 U JP8005490 U JP 8005490U JP H0437257 U JPH0437257 U JP H0437257U
Authority
JP
Japan
Prior art keywords
evaporation
mask material
target
evaporation target
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8005490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8005490U priority Critical patent/JPH0437257U/ja
Publication of JPH0437257U publication Critical patent/JPH0437257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8005490U 1990-07-26 1990-07-26 Pending JPH0437257U (hu)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8005490U JPH0437257U (hu) 1990-07-26 1990-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8005490U JPH0437257U (hu) 1990-07-26 1990-07-26

Publications (1)

Publication Number Publication Date
JPH0437257U true JPH0437257U (hu) 1992-03-30

Family

ID=31624768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8005490U Pending JPH0437257U (hu) 1990-07-26 1990-07-26

Country Status (1)

Country Link
JP (1) JPH0437257U (hu)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479954U (hu) * 1990-11-21 1992-07-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479954U (hu) * 1990-11-21 1992-07-13

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