JPH04370751A - Photoelectronic spectroscope - Google Patents

Abstract

PURPOSE:To obtain a photoelectronic spectral device where a solid image matches a photoelectronic image. CONSTITUTION:This device is provided with an electrostatic lens system 4, a spectrometer 5, an electronic detector 6, a display device 10, and an electron gun 2 and an X-rays source emits X rays, thus enabling a photoelectron to be discharged from a sample 1. The electron gun 2 performs scanning with a two-dimensionally and thinly constricted electron beam for enabling a secondary electron and a reflection electron to be generated from the sample 1, while the electrostatic lens system 4 forms images of the photoelectron, the secondary electron, or the reflection electron which are discharged from the sample 1 and then sends them to the spectrometer 5. The spectrometer 5 obtains spectrum of an electron according to kinetic energy of the electron for enabling it to reach the electronic detector 6, the electronic detector 6 detects the photoelectron, the secondary electron, or the reflection electron which reach from the spectrometer 5, and the display device 10 displays the detected photoelectron, the secondary electron, or the reflection electron image twodimensionally.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photoelectron spectrometer, and more particularly to a photoelectron spectrometer capable of obtaining a secondary electron image and a backscattered electron image in addition to a photoelectron image.

0002

2. Description of the Related Art Photoelectron spectroscopy is a method in which a sample is irradiated with X-rays, photoelectrons emitted from the sample are detected by energy spectroscopy, and information about elements and their chemical bonding states is obtained from the kinetic energy of the photoelectrons. Furthermore, a photoelectron image can also be obtained by forming an image of electrons emitted from the sample on the position of a detector combined with a lens system in correspondence with the position on the sample. Since a photoelectron image contains information about a specific element, it is first necessary to select the target region by looking at the three-dimensional shape and composition image of the sample. Furthermore, in order to interpret optical images, it is necessary to see the relationship between stereoscopic images, compositional images, and photoelectron images.

0003

[Problems to be Solved by the Invention] Generally, an optical microscope is used to grasp a three-dimensional image. However, when selecting a field of view using an optical microscope, there is a problem that the field of view of the optical microscope and the field of view of the photoelectron image do not necessarily match. Further, tedious scanning is required to match the two fields of view.

Another method for grasping a three-dimensional image is to irradiate electrons over a wide area and detect the generated secondary electrons or reflected electrons with the same detector through the same lens system that detects photoelectrons. Another method is to obtain a backscattered electron image. In this case, since the lens system, spectrometer, and detector are common to the photoelectron image, the fields of view of both images completely match. However, this method has the problem of low image resolution.

The present invention has been made in view of the above-mentioned points, and its object is to provide a photoelectron spectrometer in which the optical axes of a stereoscopic image and a photoelectron image are made to coincide with each other, thereby providing excellent resolution, and in which the fields of view of the stereoscopic image and the photoelectron image are completely matched. Our goal is to provide the following.

[0006]

[Means for Solving the Problems] According to the present invention, the above-mentioned object includes an X-ray gun, an electrostatic lens system, a spectrometer, an electron detector, a display device, and an electron gun, and the X-ray gun The electron gun scans with a narrowly focused electron beam to generate secondary electrons and backscattered electrons from the sample, and the electrostatic lens system generates secondary electrons and backscattered electrons from the sample. The photoelectrons, secondary electrons, or backscattered electrons are imaged and sent to a spectrometer, and the spectrometer separates the electrons according to the kinetic energy of the electrons, and the electrons reach an electron detector. Alternatively, this can be achieved by detecting secondary electrons or reflected electrons, and using a display device that two-dimensionally displays an image of the detected photoelectrons, secondary electrons, or reflected electrons.

[0007]

[Operation] The sample is irradiated with a finely focused electron beam from an electron gun while scanning, and the emitted secondary electrons and backscattered electrons are detected by the same detector through the same lens system. A photoelectron spectrometer in which the optical axes of the image and the secondary electron image or backscattered electron image coincide with each other can be obtained.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a layout diagram showing a photoelectron spectrometer according to an embodiment of the present invention. A microprobe scanning electron gun 2, an X-ray gun 11, a lens system 4, and a two-dimensional detector 6 are arranged in a vacuum chamber. A finely focused electron beam 3 from an electron gun is irradiated onto the sample 1 while being scanned by a deflection coil 9, and secondary electrons or reflected electrons emitted from the irradiated portion pass through a lens system and enter a spectrometer 5. The electrons that have passed through the spectrometer are separated according to their energy, reach the two-dimensional detector 6, and form an image. The signal is processed by a signal processing circuit 7, and a photoelectron image, a secondary electron image, or a backscattered electron image is displayed on a CRT screen, which is a display device 10. The entire operation is controlled by a control circuit 8.

Acceleration voltage 1KV, electron beam current 1×10-8
A, irradiated with an electron beam with a probe diameter of approximately 0.5 μm for 1K
eV reflected electrons were detected.

0010

[Effects of the Invention] According to the present invention, an X-ray gun, an electrostatic lens system, a spectroscope, an electron detector, a display device, and an electron gun are provided.
An X-ray gun irradiates a sample with X-rays and causes the sample to emit photoelectrons, while an electron gun scans with a narrowly focused electron beam to generate secondary electrons and backscattered electrons from the sample. focuses photoelectrons, secondary electrons, or backscattered electrons emitted from the sample and sends them to a spectrometer, which separates the electrons according to their kinetic energy and reaches an electron detector. The display device displays a two-dimensional image of the detected photoelectrons, secondary electrons, or backscattered electrons, so it is smaller than the electron gun. A photoelectron spectrometer that scans and irradiates a sample with an electron beam, and detects the emitted secondary electrons and backscattered electrons with the same detector through the same lens system, with good resolution and essentially the same photoelectron image and 3D image. is obtained.

[Brief explanation of drawings]

[Fig. 1] Layout diagram showing a photoelectron spectrometer according to an embodiment of the present invention.

[Explanation of symbols]

1 Sample 2 Electron gun 3. Electron beam 4 Electrostatic lens system 5 Spectrometer 6 Two-dimensional detector 7 Signal processing circuit 8 Control circuit 9 Electronic deflection coil 10 Display device

Claims (1)

[Claims] Claim 1: An X-ray gun comprising an X-ray gun, an electrostatic lens system, a spectrometer, an electron detector, a display device, and an electron gun, the X-ray gun irradiating a sample with X-rays and emitting photoelectrons from the sample. The electron gun generates secondary electrons and backscattered electrons from the sample by scanning with a narrowly focused electron beam, and the electrostatic lens system images the photoelectrons, secondary electrons, or backscattered electrons emitted from the sample. The spectrometer separates the electrons according to their kinetic energy and reaches an electron detector. The electron detector detects the photoelectrons, secondary electrons, or reflected electrons that have arrived from the spectrometer. The display device 1. A photoelectron spectroscopy device that displays an image of detected photoelectrons, secondary electrons, or reflected electrons in a two-dimensional manner.