JPH0436243U - - Google Patents

Info

Publication number

JPH0436243U

JPH0436243U JP7761090U JP7761090U JPH0436243U JP H0436243 U JPH0436243 U JP H0436243U JP 7761090 U JP7761090 U JP 7761090U JP 7761090 U JP7761090 U JP 7761090U JP H0436243 U JPH0436243 U JP H0436243U

Authority

JP

Japan

Prior art keywords

semiconductor wafers

carrier

stores

outer peripheral

compressed air

Prior art date

1990-07-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 5
• 230000037431 insertion Effects 0.000 claims 1
• 238000003780 insertion Methods 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000012050 conventional carrier Substances 0.000 description 1