JPH0436243U - - Google Patents

Info

Publication number
JPH0436243U
JPH0436243U JP7761090U JP7761090U JPH0436243U JP H0436243 U JPH0436243 U JP H0436243U JP 7761090 U JP7761090 U JP 7761090U JP 7761090 U JP7761090 U JP 7761090U JP H0436243 U JPH0436243 U JP H0436243U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
carrier
stores
outer peripheral
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7761090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7761090U priority Critical patent/JPH0436243U/ja
Publication of JPH0436243U publication Critical patent/JPH0436243U/ja
Pending legal-status Critical Current

Links

JP7761090U 1990-07-20 1990-07-20 Pending JPH0436243U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7761090U JPH0436243U (US06826419-20041130-M00005.png) 1990-07-20 1990-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7761090U JPH0436243U (US06826419-20041130-M00005.png) 1990-07-20 1990-07-20

Publications (1)

Publication Number Publication Date
JPH0436243U true JPH0436243U (US06826419-20041130-M00005.png) 1992-03-26

Family

ID=31620157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7761090U Pending JPH0436243U (US06826419-20041130-M00005.png) 1990-07-20 1990-07-20

Country Status (1)

Country Link
JP (1) JPH0436243U (US06826419-20041130-M00005.png)

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