JPH0436227U - - Google Patents
Info
- Publication number
- JPH0436227U JPH0436227U JP7760890U JP7760890U JPH0436227U JP H0436227 U JPH0436227 U JP H0436227U JP 7760890 U JP7760890 U JP 7760890U JP 7760890 U JP7760890 U JP 7760890U JP H0436227 U JPH0436227 U JP H0436227U
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- vacuum chamber
- chamber
- semiconductor manufacturing
- neutralizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003472 neutralizing effect Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7760890U JPH0436227U (it) | 1990-07-20 | 1990-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7760890U JPH0436227U (it) | 1990-07-20 | 1990-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0436227U true JPH0436227U (it) | 1992-03-26 |
Family
ID=31620154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7760890U Pending JPH0436227U (it) | 1990-07-20 | 1990-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436227U (it) |
-
1990
- 1990-07-20 JP JP7760890U patent/JPH0436227U/ja active Pending