JPH0436140Y2 - - Google Patents

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Publication number
JPH0436140Y2
JPH0436140Y2 JP1986111092U JP11109286U JPH0436140Y2 JP H0436140 Y2 JPH0436140 Y2 JP H0436140Y2 JP 1986111092 U JP1986111092 U JP 1986111092U JP 11109286 U JP11109286 U JP 11109286U JP H0436140 Y2 JPH0436140 Y2 JP H0436140Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
insulating member
piston
actuator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986111092U
Other languages
Japanese (ja)
Other versions
JPS6316470U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986111092U priority Critical patent/JPH0436140Y2/ja
Publication of JPS6316470U publication Critical patent/JPS6316470U/ja
Application granted granted Critical
Publication of JPH0436140Y2 publication Critical patent/JPH0436140Y2/ja
Expired legal-status Critical Current

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Description

【考案の詳細な説明】 考案の目的 [産業上の利用分野] 本考案はアクチユエータに関し、詳しくは圧電
素子を用いた圧電アクチユエータに関する。
[Detailed Description of the Invention] Purpose of the Invention [Industrial Field of Application] The present invention relates to an actuator, and specifically relates to a piezoelectric actuator using a piezoelectric element.

[従来の技術] 圧電素子は応答性が良いため、従来より、各種
のアクチユエータに広く応用されている。例え
ば、圧電素子の高速応答性を利用した内燃機関の
燃料噴射弁(特開昭48−4823等)が知られてい
る。このような燃料噴射弁に用いられた圧電アク
チユエータでは、圧電素子の一端は金属製のケー
ス等に固定され、他端はピストン等の移動部材等
に取り付けられており、圧電素子には、これを伸
縮させるために数百ボルトの電圧が印加される。
従つて、こうした圧電アクチユエータでは、圧電
素子とケースあるいは移動部材等との電気的絶縁
性を確保すべく、圧電素子の伸縮方向の端面に絶
縁部材を接着していた。
[Prior Art] Since piezoelectric elements have good responsiveness, they have been widely applied to various actuators. For example, a fuel injection valve for an internal combustion engine (Japanese Patent Application Laid-Open No. 48-4823, etc.) that utilizes the high-speed response of a piezoelectric element is known. In a piezoelectric actuator used in such a fuel injection valve, one end of the piezoelectric element is fixed to a metal case, etc., and the other end is attached to a moving member such as a piston. A voltage of several hundred volts is applied to make it expand and contract.
Therefore, in such a piezoelectric actuator, an insulating member is bonded to the end surface of the piezoelectric element in the direction of expansion and contraction in order to ensure electrical insulation between the piezoelectric element and the case or moving member.

[考案が解決しようとする問題点] しかしながら、こうした従来の圧電アクチユエ
ータには以下の如き問題点があつた。即ち、 (1) 組立時、圧電素子の端面に絶縁部材がずれて
接着されると、駆動する際に接触面圧が高くな
ると共に、圧電素子に曲げ応力が加わり、圧電
素子が破損する場合があるという問題があつ
た。
[Problems to be solved by the invention] However, such conventional piezoelectric actuators have the following problems. That is, (1) If the insulating member is misaligned and adhered to the end face of the piezoelectric element during assembly, the contact pressure will increase during driving, and bending stress will be applied to the piezoelectric element, which may damage the piezoelectric element. There was a problem.

(2) また、圧電素子の伸縮量は0.1mm前後と小さ
いものの、100μsec以下の時間で移動するので
加速度が大きい。従つて、移動時に圧電素子と
絶縁部材との間に大きな力が加わり、接着部が
剥離する場合があつた。この剥離により圧電素
子と絶縁部材とがずれ、上記(1)と同様の不具合
が駆動中においても発生するという問題があつ
た。
(2) Also, although the amount of expansion and contraction of the piezoelectric element is small at around 0.1 mm, the acceleration is large because it moves in a time of 100 μsec or less. Therefore, during movement, a large force is applied between the piezoelectric element and the insulating member, and the bonded portion may peel off. This peeling causes the piezoelectric element and the insulating member to become misaligned, resulting in the problem that the same problem as described in (1) above occurs even during driving.

そこで本考案は上記の問題点を解決することを
目的とし、高信頼性の圧電アクチユエータを提供
することを目的としてなされた。
Therefore, the present invention was made with the aim of solving the above-mentioned problems and providing a highly reliable piezoelectric actuator.

考案の構成 [問題点を解決するための手段] かかる目的を達成すべく、本考案は問題点を解
決するための手段として次の構成を取つた。即
ち、アクチユエータ本体に摺動自在に支持された
ピストンと、上記アクチユエータ本体に固定され
たアウタカバとの間に圧電素子を配置し、上記圧
電素子と上記ピストン若しくは上記アウタカバの
少なくとも導電性部材により形成された側との間
に絶縁部材を設けた圧電アクチユエータにおい
て、 上記絶縁部材が、 上記圧電素子側に上記圧電素子とはめあう上記
圧電素子の伸縮量より深い有底の嵌合孔を有し、
かつ、上記アウタカバ若しくは上記ピストン側に
上記アウタカバ若しくは上記ピストンに設けた嵌
合孔とはめあう凸部を備え、 また、上記アクチユエータ本体と上記ピストン
との間に介装され上記ピストンを上記圧電素子が
縮小する方向に付勢するばねを備え たことを特徴とする圧電アクチユエータの構成が
それである。
Structure of the invention [Means for solving the problems] In order to achieve the above object, the present invention has the following structure as a means for solving the problems. That is, a piezoelectric element is disposed between a piston slidably supported by the actuator body and an outer cover fixed to the actuator body, and the piezoelectric element and the piston or the outer cover are formed of at least a conductive member. In the piezoelectric actuator, the insulating member has a bottomed fitting hole on the piezoelectric element side that is deeper than the expansion and contraction amount of the piezoelectric element that fits into the piezoelectric element,
The outer cover or the piston side is provided with a convex portion that fits into a fitting hole provided in the outer cover or the piston, and the piezoelectric element is interposed between the actuator main body and the piston and connects the piston. This is the structure of a piezoelectric actuator characterized by having a spring biased in a direction of contraction.

[作用] 上記構成を有する本考案の圧電アクチユエータ
は、絶縁部材の嵌合孔が圧電素子の径方向のずれ
を制限すると共に、アウタカバ若しくはピストン
の嵌合孔が絶縁部材の嵌合部のずれを制限しなが
ら圧電素子が伸縮し、該伸縮によりピストンを移
動する。また、ばねが絶縁部材を介して、圧電素
子を縮小方向に付勢し、圧電素子をアウタカバと
ピストンとの間に保持する。
[Function] In the piezoelectric actuator of the present invention having the above configuration, the fitting hole of the insulating member limits displacement of the piezoelectric element in the radial direction, and the fitting hole of the outer cover or piston limits displacement of the fitting portion of the insulating member. The piezoelectric element expands and contracts while restricting, and the piston moves due to the expansion and contraction. Further, the spring biases the piezoelectric element in the contraction direction via the insulating member, and holds the piezoelectric element between the outer cover and the piston.

[実施例] 以下本考案の実施例を図面に基づいて詳細に説
明する。
[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

第1図は本考案の一実施例である圧電アクチユ
エータの断面図である。この圧電アクチユエータ
はアクチユエータ本体1に摺動自在に支持された
金属製のピストン2を備えている。このピストン
2の摺動部2aにはバツクアツプリング4により
変形を防止されるOリング6を装着すると共に、
ピストン2の上端部2bとアクチユエータ本体1
との間には皿バネ8と皿バネ8の付勢力を調整す
るリング状のプリロード調整用スペーサ10とを
装着している。
FIG. 1 is a sectional view of a piezoelectric actuator that is an embodiment of the present invention. This piezoelectric actuator includes a metal piston 2 that is slidably supported on an actuator body 1. An O-ring 6 that is prevented from being deformed by a back-up spring 4 is attached to the sliding portion 2a of the piston 2, and
Upper end 2b of piston 2 and actuator body 1
A disc spring 8 and a ring-shaped preload adjustment spacer 10 for adjusting the urging force of the disc spring 8 are installed between the disc spring 8 and the disc spring 8.

上記ピストン2の上端にはアルミナを主成分と
した電気的絶縁性を有する下絶縁部材12を介し
て圧電素子14が配設されている。この圧電素子
14の上端には同じくアルミナを主成分とした電
気的絶縁性を有する上部絶縁部材16を介して金
属製のアウタカバ18が設けられ、皿バネ8が圧
電素子14をその縮小方向に付勢して、下部及び
上部絶縁部材12,14を介して、アウタカバ1
8とピストン2との間に圧電素子14を保持する
ようにされている。この構成については後述す
る。
A piezoelectric element 14 is disposed at the upper end of the piston 2 via a lower insulating member 12 which is electrically insulating and is mainly composed of alumina. A metal outer cover 18 is provided at the upper end of the piezoelectric element 14 via an upper insulating member 16 which is also made of alumina as a main component and has electrical insulation properties, and a disc spring 8 holds the piezoelectric element 14 in its contracting direction. the outer cover 1 through the lower and upper insulating members 12 and 14.
A piezoelectric element 14 is held between the piston 8 and the piston 2. This configuration will be described later.

上記圧電素子14の詳細を第2図に示す。この
圧電素子14は圧電単体を多数積層した積層構造
体20とその両端面に各々設けられたステンレス
製の電極22,24とから構成されている。一方
の電極22から延出された3本の接続部22aが
積層構造体20の側面軸方向に沿つて等間隔に設
けられている。また、他の電極24からも同様に
延出された3本の接続部24aが上記各接続部2
2aの間に積層構造体20の側面軸方向に沿つて
等間隔に設けられている。
Details of the piezoelectric element 14 are shown in FIG. 2. This piezoelectric element 14 is composed of a laminated structure 20 in which a large number of piezoelectric elements are laminated, and stainless steel electrodes 22 and 24 provided on both end faces of the laminated structure 20, respectively. Three connecting portions 22a extending from one electrode 22 are provided at equal intervals along the axial direction of the side surface of the laminated structure 20. In addition, three connecting portions 24a extending similarly from other electrodes 24 are connected to each of the connecting portions 24a.
2a are provided at regular intervals along the axial direction of the side surface of the laminated structure 20.

また、ピストン2の上端には嵌合孔2cが穿設
され、下部絶縁部材12の下端に突設された嵌合
部としての凸部12aがこの嵌合孔2cに嵌挿さ
れている。次に、下部絶縁部材12の上端の構成
について、第1図のA−A断面図である第3図に
拠つて説明する。図示するように、下部絶縁部材
12の上端には圧電素子14の外径よりわずかに
大きい有底の嵌合孔12bが穿設されている。こ
の嵌合孔12bの深さは圧電素子14の伸縮量よ
り十分大きい値である。また、嵌合孔12bには
等間隔に6個の溝12cも設けられており、この
溝12cの位置と圧電素子14の接続部22a,
24aの位置とを合せて嵌合孔12bに圧電素子
14の一端が嵌挿されている。
Further, a fitting hole 2c is formed at the upper end of the piston 2, and a convex portion 12a as a fitting portion protruding from the lower end of the lower insulating member 12 is fitted into the fitting hole 2c. Next, the configuration of the upper end of the lower insulating member 12 will be described with reference to FIG. 3, which is a sectional view taken along line AA in FIG. 1. As shown in the figure, a bottomed fitting hole 12b that is slightly larger than the outer diameter of the piezoelectric element 14 is bored at the upper end of the lower insulating member 12. The depth of the fitting hole 12b is sufficiently larger than the amount of expansion and contraction of the piezoelectric element 14. Moreover, six grooves 12c are also provided at equal intervals in the fitting hole 12b, and the position of the grooves 12c and the connection part 22a of the piezoelectric element 14,
One end of the piezoelectric element 14 is fitted into the fitting hole 12b, aligning with the position of the piezoelectric element 24a.

一方、圧電素子14の上端に配設された上部絶
縁部材16の下端にも下部絶縁部材12の嵌合孔
12b及び溝12cと同形状の嵌合孔16b及び
溝16cが形成されている。この溝16cの位置
と圧電素子14の接続部22a,24aの位置と
を合せて嵌合孔16bに圧電素子14の他端が嵌
挿されている。一方、上部絶縁部材16の上端に
突設された嵌合部としての凸部16aはアウタカ
バ18に穿設された嵌合孔18aに嵌合されてい
る。
On the other hand, a fitting hole 16b and a groove 16c having the same shape as the fitting hole 12b and groove 12c of the lower insulating member 12 are also formed at the lower end of the upper insulating member 16 disposed at the upper end of the piezoelectric element 14. The other end of the piezoelectric element 14 is fitted into the fitting hole 16b by aligning the position of this groove 16c with the position of the connecting parts 22a, 24a of the piezoelectric element 14. On the other hand, a convex portion 16a serving as a fitting portion protruding from the upper end of the upper insulating member 16 is fitted into a fitting hole 18a formed in the outer cover 18.

このアウタカバ18はパツキン25を介してア
クチユエータ本体1にボルト26により固定され
ると共に、アウタカバ18にはハーメチツクシー
ル28を介して2本の電極30,32が挿入され
ている。一方の電極30は圧電素子14の一方の
電極22の接続部22aとリード線34により接
続されると共に、他方の電極32は圧電素子14
の他方の電極24の接続部24aとリード線36
により接続されている。
This outer cover 18 is fixed to the actuator main body 1 with bolts 26 through a packing 25, and two electrodes 30 and 32 are inserted into the outer cover 18 through a hermetic seal 28. One electrode 30 is connected to the connection part 22a of one electrode 22 of the piezoelectric element 14 by a lead wire 34, and the other electrode 32 is connected to the connection part 22a of one electrode 22 of the piezoelectric element 14.
The connecting portion 24a of the other electrode 24 and the lead wire 36
connected by.

更に、アクチユエータ本体1内にはアクチユエ
ータ本体1の内壁と圧電素子14の側面とを絶縁
する絶縁スリーブ38が嵌挿されている。
Furthermore, an insulating sleeve 38 is fitted into the actuator body 1 to insulate the inner wall of the actuator body 1 from the side surface of the piezoelectric element 14 .

上記構成を有する本実施例の圧電アクチユエー
タは、第1図の状態から電極30,32を介して
下部絶縁部材12及び上部絶縁部材16により周
囲から絶縁された圧電素子14に正電圧にを印加
すると、圧電素子14は伸長する。この伸長によ
り皿バネ8のバネ力に抗して、下部絶縁部材12
と共にピストン2を図下方に移動する。この時、
圧電素子14の一端がはめあわされた下部絶縁部
材12の嵌合孔12b及びピストン2の嵌合孔2
cとはめあわされた下部絶縁部材12の凸部12
aにより、圧電素子14は、径方向の動きを制限
される。これと共に、圧電素子14の他端がはめ
あわされた上部絶縁部材16の嵌合孔16b及び
アウタカバ18の嵌合孔18aとはめあわされた
上部絶縁部材16の凸部16aにより、圧電素子
14は、径方向の動きを制限される。
The piezoelectric actuator of this embodiment having the above-mentioned configuration is configured such that when a positive voltage is applied from the state shown in FIG. , the piezoelectric element 14 expands. Due to this expansion, the lower insulating member 12 resists the spring force of the disc spring 8.
At the same time, the piston 2 is moved downward in the figure. At this time,
The fitting hole 12b of the lower insulating member 12 into which one end of the piezoelectric element 14 is fitted and the fitting hole 2 of the piston 2
The convex portion 12 of the lower insulating member 12 fitted with c
a, the piezoelectric element 14 is restricted in its radial movement. At the same time, the piezoelectric element 14 is caused by the fitting hole 16b of the upper insulating member 16 into which the other end of the piezoelectric element 14 is fitted and the convex portion 16a of the upper insulating member 16 into which the fitting hole 18a of the outer cover 18 is fitted. , radial movement is restricted.

また、この状態から圧電素子14への正電圧を
取り去ると、下部絶縁部材12及び上部絶縁部材
16により径方向の動きを制限された圧電素子1
4は径方向にずれることなく縮小する。この縮小
で、ピストン2は皿バネ8の伸長力により下部絶
縁部材12と共に図上方に移動する。この際、ピ
ストン2及び下部絶縁部材12が圧電素子14の
縮小する動きに追従することができなかつた場合
でも、圧電素子14は十分な深さを有する嵌合孔
12bから抜けることがない。
Furthermore, when the positive voltage to the piezoelectric element 14 is removed from this state, the piezoelectric element 1 whose radial movement is restricted by the lower insulating member 12 and the upper insulating member 16
4 is reduced without shifting in the radial direction. With this contraction, the piston 2 moves upward in the drawing together with the lower insulating member 12 due to the extension force of the disc spring 8. At this time, even if the piston 2 and the lower insulating member 12 are unable to follow the shrinking movement of the piezoelectric element 14, the piezoelectric element 14 will not come out of the fitting hole 12b having a sufficient depth.

上述したごとく本実施例の圧電アクチユエータ
に拠ると圧電素子14の両端に設けた下部絶縁部
材12及び上部絶縁部材16により圧電素子14
を周囲から良好に絶縁する。また、圧電素子14
の伸縮時には、下部絶縁部材12に設けられた凸
部12a、嵌合孔12b及び上部絶縁部材16に
設けられた凸部16a、嵌合孔16bにより圧電
素子14の径方向のずれをも防止する。よつて、
圧電素子14のずれによるシヨートの発生を招く
ことがない。更に、本圧電アクチユエータは圧電
素子14と下部絶縁部材12及び上部絶縁部材1
6との接着が不要であり、圧電素子14の径方向
のずれのない正確な組立をはめあいで容易に行な
うことができ、しかも、接着剤を用いたことによ
る平坦度や平行度の悪化により、圧電素子14に
偏荷重が加わつて、圧電素子14に亀裂や割れが
生ずるといつたことがない。
As described above, according to the piezoelectric actuator of this embodiment, the lower insulating member 12 and the upper insulating member 16 provided at both ends of the piezoelectric element 14
be well isolated from the surrounding environment. Moreover, the piezoelectric element 14
When expanding and contracting, the piezoelectric element 14 is also prevented from shifting in the radial direction by the protrusion 12a and fitting hole 12b provided on the lower insulating member 12 and the protrusion 16a and fitting hole 16b provided on the upper insulating member 16. . Then,
There is no occurrence of shoots due to displacement of the piezoelectric element 14. Furthermore, this piezoelectric actuator includes a piezoelectric element 14, a lower insulating member 12, and an upper insulating member 1.
There is no need for adhesion to the piezoelectric element 14, and accurate assembly without radial deviation of the piezoelectric element 14 can be easily performed by fitting.Moreover, since the flatness and parallelism are deteriorated by using the adhesive, There is no possibility that an unbalanced load will be applied to the piezoelectric element 14, causing cracks or cracks in the piezoelectric element 14.

尚、下部絶縁部材12は第4図に示す第2実施
例のごとく、ピストン2に穿設した嵌合孔2dに
下部絶縁部材12の外周を嵌合した構成として径
方向のずれを防止してもよい。
Note that, as in the second embodiment shown in FIG. 4, the lower insulating member 12 has a structure in which the outer periphery of the lower insulating member 12 is fitted into a fitting hole 2d formed in the piston 2 to prevent displacement in the radial direction. Good too.

以上本考案の実施例について説明したが、本考
案はこのような実施例に何等限定されるものでは
なく、本考案の要旨を逸脱しない範囲において
種々なる態様で実施し得ることは勿論である。
Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments in any way, and it goes without saying that the present invention can be implemented in various forms without departing from the gist of the present invention.

考案の効果 以上、詳記したように本考案の圧電アクチユエ
ータによると、絶縁部材により圧電素子を周囲か
ら良好に絶縁すると共に、接着剤を用いなくて
も、組立時及び駆動時において径方向のずれを防
止し、シヨートの発生を招くことがないという優
れた効果を奏する。また、接着剤を用いることな
く、ピストン若しくはアウタカバ及び圧電素子を
絶縁部材とはめあわせることにより容易に正確な
組立を行うことができる。しかも、接着剤による
平坦度や平行度の悪化により圧電素子に亀裂や割
れが発生するのを防止できる。更に、絶縁部材が
圧電素子にずれて取り付けられることによる圧電
素子の破損を防止することができるという効果も
奏する。従つて、圧電アクチユエータの故障率を
改善することができる。
Effects of the Invention As detailed above, according to the piezoelectric actuator of the present invention, the piezoelectric element is well insulated from the surroundings by the insulating member, and radial misalignment can be avoided during assembly and driving without using adhesive. It has the excellent effect of preventing the occurrence of shoots. Further, by fitting the piston or outer cover and the piezoelectric element with the insulating member without using adhesive, accurate assembly can be easily performed. Furthermore, it is possible to prevent cracks and cracks from occurring in the piezoelectric element due to deterioration of flatness and parallelism due to the adhesive. Furthermore, it is possible to prevent damage to the piezoelectric element due to the insulating member being attached to the piezoelectric element in a shifted manner. Therefore, the failure rate of the piezoelectric actuator can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示す圧電アクチユ
エータの断面図、第2図は圧電素子の部品図、第
3図は第1図のA−A断面図、第4図は他の実施
例を示す断面図、である。 2……ピストン、12……下部絶縁部材、14
……圧電素子、16……上部絶縁部材。
Fig. 1 is a sectional view of a piezoelectric actuator showing one embodiment of the present invention, Fig. 2 is a parts diagram of a piezoelectric element, Fig. 3 is a sectional view taken along line AA in Fig. 1, and Fig. 4 is another embodiment. FIG. 2... Piston, 12... Lower insulating member, 14
... Piezoelectric element, 16 ... Upper insulating member.

Claims (1)

【実用新案登録請求の範囲】 アクチユエータ本体に摺動自在に支持されたピ
ストンと、上記アクチユエータ本体に固定された
アウタカバとの間に圧電素子を配置し、上記圧電
素子と上記ピストン若しくは上記アウタカバの少
なくとも導電性部材により形成された側との間に
絶縁部材を設けた圧電アクチユエータにおいて、 上記絶縁部材が、 上記圧電素子側に上記圧電素子とはめあう上記
圧電素子の伸縮量より深い有底の嵌合孔を有し、
かつ、上記アウタカバ若しくは上記ピストン側に
上記アウタカバ若しくは上記ピストンに設けた嵌
合孔とはめあう凸部を備え、 また、上記アクチユエータ本体と上記ピストン
との間に介装され上記ピストンを上記圧電素子が
縮小する方向に付勢するばねを備え たことを特徴とする圧電アクチユエータ。
[Claims for Utility Model Registration] A piezoelectric element is disposed between a piston slidably supported by an actuator body and an outer cover fixed to the actuator body, and at least one of the piezoelectric element and the piston or the outer cover is disposed. In a piezoelectric actuator in which an insulating member is provided between the side formed by the conductive member and the insulating member, the insulating member has a bottomed fitting on the piezoelectric element side that is deeper than the expansion and contraction amount of the piezoelectric element that is fitted with the piezoelectric element. has a hole,
The outer cover or the piston side is provided with a convex portion that fits into a fitting hole provided in the outer cover or the piston, and the piezoelectric element is interposed between the actuator main body and the piston and connects the piston. A piezoelectric actuator characterized by comprising a spring biased in a direction of contraction.
JP1986111092U 1986-07-18 1986-07-18 Expired JPH0436140Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986111092U JPH0436140Y2 (en) 1986-07-18 1986-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986111092U JPH0436140Y2 (en) 1986-07-18 1986-07-18

Publications (2)

Publication Number Publication Date
JPS6316470U JPS6316470U (en) 1988-02-03
JPH0436140Y2 true JPH0436140Y2 (en) 1992-08-26

Family

ID=30990694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986111092U Expired JPH0436140Y2 (en) 1986-07-18 1986-07-18

Country Status (1)

Country Link
JP (1) JPH0436140Y2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5711426U (en) * 1980-06-23 1982-01-21
JPS6188772A (en) * 1984-10-05 1986-05-07 Nippon Soken Inc Actuator using piezoelectric element
JPS6153956B2 (en) * 1979-10-18 1986-11-20 Canon Kk

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153956U (en) * 1984-09-13 1986-04-11

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153956B2 (en) * 1979-10-18 1986-11-20 Canon Kk
JPS5711426U (en) * 1980-06-23 1982-01-21
JPS6188772A (en) * 1984-10-05 1986-05-07 Nippon Soken Inc Actuator using piezoelectric element

Also Published As

Publication number Publication date
JPS6316470U (en) 1988-02-03

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