JPH04360769A - High-speed air current floating injection-machining device - Google Patents

Abstract

PURPOSE:To perform grinding, polishing and the formation of a thin film with optimum surface structure and properties by performing the etching process of grinding-polishing and the deposition process of forming the thin film such as a protecting film layer by a machining device based on the same principle. CONSTITUTION:In a high-speed air current floating type injection device, the machined face 32 of a workpiece 6 is levitated by a gas-bearing slider face 8 so as to be movable, and solid gas two-phase mixed flows 28, 29 containing grain is jetted at high speed from injection nozzles 21, 22 disposed at a glass slider part 17 to machine the machined face 32.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] This invention is directed to solid gas containing fine particles.
The present invention relates to a processing device that processes a workpiece by jetting a phase mixture flow at high speed.

0002

[Prior Art] For example, in magnetic hard disks used in computer information storage devices, in order to achieve high-density recording, a thin metal film or thin oxide film is coated on the surface of a substrate (disk substrate) by a smooth plating method as a recording medium. It is formed using a thin film technique such as vapor deposition.

However, in order to form such a smooth recording medium thin film, various surface treatments of the substrate performed in the disk manufacturing process are important. The manufacturing process for disks can be broadly divided into: ■The process of grinding the surface of a substrate made of materials such as aluminum or glass.

[0004] ■ A step of preparing the surface of the ground substrate and polishing the surface obtained. (2) A step of forming a magnetic layer to become a magnetic recording medium on the polished surface. ■Process of forming a protective film to protect the surface of this magnetic layer. Contains. In step (2), the surface accuracy of the substrate has not been improved that much, the surface accuracy is rough, and the surface runout is large, so it is necessary to grind the surface of the substrate before proceeding to the next step. For this purpose, we currently grind with a diamond tool, etc. to remove surface roughness and surface runout, and provide a non-magnetic surface treatment.

[0005] In the step (2), this base treatment layer is polished using, for example, an ultra-precision polishing film. This polishing device uses a polishing film made by coating a polyester film with fine particles uniformly dispersed in an abrasive material or binder resin with a sharp particle size distribution, which is then rolled into a long roll for continuous automatic polishing by mechanization. I try to do this.

In step (2), a magnetic film is applied to the substrate whose surface has been surface-treated using such a polishing device using a plating device, a vapor deposition device, or the like. Also in the step (2), a vapor deposition device, a sputtering device, etc. are used to deposit the protective film. As mentioned above, the surface treatment apparatuses operated in each process have different operating principles, and require adjustment, maintenance, etc. commensurate with each apparatus, making management complicated. Furthermore, when looking at individual devices, for example, the polishing device used in step (2) has the following drawbacks. That is, 1) It is difficult to assemble, adjust, and maintain the feeding mechanism that feeds the long roll at a constant speed.

2) Because polishing is performed by applying pressure from both sides in the radial direction of the substrate, surface runout is inevitably large. 3) Inconvenience occurs because the thickness of the abrasive applied to the abrasive tape varies. 4) Easily affected by uneven winding of the abrasive tape at the beginning and end. Furthermore, it takes time to form a thin film using the vapor deposition equipment, sputtering equipment, etc. used in the step (2), and it is difficult to uniformly control the thin film.

[0008]

[Problems to be Solved by the Invention] The present invention has been made in order to eliminate such conventional drawbacks.
Etching processes such as grinding and polishing and deposition processes that form thin films such as protective film layers are performed using processing equipment based on the same operating principle, and grinding, polishing, and thin film formation are performed with optimal surface structure and surface properties. Our goal is to provide processing equipment that makes this possible.

[0009]

[Means for Solving the Problems] The high-speed airflow floating type jet machining device of the present invention floats the surface of the workpiece to be machined on a gas bearing slider surface and makes it movable, and the jet jet is arranged on the gas bearing slider section. It is characterized by machining the surface to be machined by jetting a solid-gas two-phase mixed flow containing fine particles from a nozzle at high speed.

[0010] The gas bearing slider surface has a plurality of injection nozzles and is supported by a gimbal having a pivot bearing approximately in the center of the gas bearing slider portion, thereby floating the gas bearing slider surface in a stable attitude relative to the workpiece surface.
The method is characterized in that a solid-gas two-phase mixed flow containing fine particles is injected from an injection nozzle at high speed to process a workpiece. Further, by having a plurality of injection nozzles and supporting the gas bearing slider portion with a gimbal having a pivot bearing approximately at the center thereof, the attitude of the gas bearing slider surface is inclined, and the direction of exposure from each of the plurality of injection nozzles is reduced. The method is characterized in that a solid-gas two-phase mixed flow containing fine particles is injected at high speed at an angle to the processing surface, thereby processing the workpiece into an optimal surface structure and surface texture.

[0011] Also, by injecting a solid-gas two-phase mixed flow containing fine particles onto the workpiece surface from one of the plurality of injection nozzles, and injecting or suctioning gas from the other injection nozzle, dust after processing is removed. It is characterized in that it is removed using the gas.

0012

[Operation] As described above, the high-speed air-floating injection machining device of the present invention rotates the workpiece at a constant speed, sends the injection nozzle in the radial direction at a constant speed, and creates a solid-gas two-phase mixture containing fine particles. Since the flow is injected onto the surface to be processed at a predetermined injection pressure, the surface to be processed can be made to have a uniform surface shape and structure. Alternatively, since the height of the injection nozzle and the posture of the injection nozzle can be changed with the above structure, good grinding, polishing, and
Can perform thin film processing and dust removal work. Furthermore, the surface treatment can be easily attached and detached.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 to 4. First, FIG. 1 is a configuration diagram of a high-speed airflow floating type jet machining apparatus 1 according to an embodiment of the present invention. 2 to 4 are partially enlarged explanatory views, FIG. 2 is a partially enlarged cross-sectional view near the injection nozzle, and FIG. 3 is a bottom view near the injection nozzle, as seen from the workpiece side, which will be explained later. be. FIG. 4 is an overall front view (enlarged detailed view).

First, referring to FIG. 1, 2 is a rotary table on which a workpiece is mounted, 3 is a rotating shaft, and 4 is a rotary table on which a workpiece is mounted.
is the hub cradle. Although not shown here, the rotary shaft 3 and the rotary table 2 are press-fitted with a hub holder 4, and the thus integrated rotary shaft 3 is supported by two upper and lower bearings built into the bearing housing. The rotating shaft 3 is coupled to the motor shaft and rotates in the rotating direction 2 at a constant speed.
Rotates in 3 directions. As the workpiece 6, a magnetic disk substrate is mounted here as an example.

As shown in FIGS. 3 and 4 in addition to FIG. 1, the workpiece 6 has a structure in which the workpiece mounting surface 5 of the rotary table 2 can be vacuum chucked. Next, radial direction 24
Injection nozzles 21 and 22 with gas bearing sliders are mounted on an actuator 7 that is movable, and these injection nozzles 21 and 22 are movable from the inner diameter to the outer diameter of the workpiece 6. Here, the outer peripheral surface of the rotary table 2, the inner peripheral surface of the hub pedestal 4, and the surface of the workpiece 6 are assumed to be on the same plane. The effect of this is that the solid-gas two-phase mixed flow containing fine particles 2
8 and 29 are the injection holes 26 and 27 of the injection nozzles 21 and 22.
When the jet streams 30 and 31 are jetted at high speed onto the workpiece surface 32 of the workpiece 6, if they are formed on the same plane, the jet flows 30 and 31 can be jetted onto the workpiece surface 32 without being disturbed, resulting in a good result. The surface structure and surface texture can be processed, and the gas bearing slider surface (twin body 18) of the gas bearing slider section 17 can be floated in a stable posture.

Next, the movable portion 8 will be explained. first,
The injection nozzles 21 and 22 are the gas bearing slider part 1
7, so that it is perpendicular to the gas bearing slider surface 18, and the injection nozzles 21 and 22 are
The open ends of the injection holes 26 and 27 are adhesively fixed so that they are flush with the depth of the slider groove 25 of the gas bearing slider section 17. In addition, the symbols 19 and 2 of the gas bearing slider section 17 are
The part indicated by 0 is a tapered gas bearing slider for stably floating the surface-processed object 6 from the surface to be processed 32. 33 is the pivot bearing 14
This is the mounting surface of the mounting groove 16 for adhesively fixing the attached gimbal 12. Here, the gimbal 12 has a pivot bearing 14 at the center of the gimbal, and a U-shaped slit 13 is cut around the pivot bearing 14. That is, only the gimbal 12 near the pivot bearing inside this U-shaped slit 13 is connected to the gas bearing slider section 17.
It is adhesively fixed to the mounting surface 33 of the mounting groove 16 of. Further, the other end of the gimbal 12 is spot welded 15 to the tip of the suspension 10.

As a result, the suspension 10 and the gimbal 12 are connected at one end of the gimbal by spot welding 15, and the other end of the gimbal is in contact with the pivot bearing 14 of the gimbal 12 at the surface of the suspension 10. Pivot bearing 14 and gas bearing slider section 17
Since the mounting groove 33 is fixed with adhesive, the gas bearing slider portion 17 rotates in the direction of the arrow 34 or 35 using the pivot bearing 14 as a fulcrum. That is, depending on the levitation conditions, the injection nozzles 21 and 22 may be placed in a position perpendicular to the surface to be processed 32;
By rotating 1 and 22 in directions 34 and 35, it is also possible to take an inclined posture. Also, gimbal 1
Both the suspension 10 and the gimbal 12 utilize plates made of stainless spring steel, and the gimbal 12 has a smaller spring constant than the suspension 10. Further, the suspension 10 has a cross-sectional shape that is bent upward as shown by reference numeral 11 in order to increase rigidity. Also, suspension 1
The base of 0 is fastened to the actuator 7 with a screw 9 via a reinforcing plate 37, and has a structure that allows it to move on the workpiece surface 32 of the workpiece 6 in the direction of the arrow 24 from the inner circumference to the outer circumference of the workpiece 6. ing.

Next, the operation will be explained. First, the disk substrate 6 (workpiece) is placed on the mounting surface 5 of the rotary table 2.
When the gas bearing slider section 17 is mounted on the disc substrate 6 in the radial direction 24 of the disk substrate 6 by moving the actuator 7 rightward, the gas bearing slider section 17 is moved to a position away from the outer circumference of the substrate 6. and substrate 6
Although not shown, is positioned on the mounting surface 5 of the rotary table 2 by a handler and vacuum chucked. Then, turn on the power to the motor, and the substrate 6 will be connected to the injection nozzle 21.
, 22 are controlled while varying the rotation speed of the motor so as to rotate at a constant linear velocity, and at the same time, the injection nozzles 21 and 22 are moved in the radial direction of the arrow 24 at a constant velocity.

In this case, a solid-gas two-phase mixed flow 2 containing fine particles
8 and 29 are supplied through the pipe 36 and the injection nozzle 2
A solid-gas two-phase mixed flow is injected from 1 and 22 at high speed, and becomes a solid-gas two-phase jet containing fine particles, which can grind or polish the surface of the substrate 6, or form a protective film. . In addition, here, the height H2 of the injection nozzles 21 and 22 with respect to the substrate 6 is the height H2 of the gas bearing slider surface 18.
However, when the injection nozzles 21 and 22 are moved in the radial direction of the arrow 24, the influence of the amount of surface runout of the substrate 6 and the injection pressure of the injection nozzles 21 and 22 are determined. The influence extends to H1 and H2. Therefore, as described above, when the injection nozzles 21 and 22 are moved in the direction of the arrow 24, due to the configuration of the suspension 10 and the pivot bearing 14 of the gimbal 12, in order to obtain the optimum injection pressure and injection posture, the injection The suspension 10 plays the role of an injection pressure adjustment panel, and the pivot bearing 14 of the gimbal 12 moves the injection nozzle 21 so that the nozzles 21 and 22 move slightly up and down on the surface of the substrate 6 to achieve the optimum injection height H2. , 22 plays a role in assuming the injection posture.

That is, the spring pressure of the suspension 10 is determined so that the spring pressure of the suspension 10 and the injection pressure of the injection nozzles 21 and 22 are balanced at the injection height H2 and the gas bearing height H1. Next, an example of the solid-gas two-phase mixed jets 28 and 29 will be described. First, when grinding the substrate 6, fine particles such as SiC, Al2 O3, etc. with a particle size of 5 to 15 μm are mixed with a gas such as air or dry nitrogen, and the injection pressure is 3 to 10 kg/cm.
A solid-gas two-phase mixed flow 28, 29 of 2 is supplied through the pipe, and is injected from the injection holes 26, 27 of the injection nozzles 21, 22 onto the surface of the substrate 6 for grinding. After being ground, the surface of the substrate 6 is subjected to a base treatment, but it is necessary to further polish the base-treated surface. In this invention, fine particles with a particle size of 0.01 to 1 are used for this polishing process.
Composite fine particles made by adhering μm SiC, Al2 O3, etc. to fine particles such as nylon with a particle size of 5 μm are mixed with a gas such as air or dry nitrogen, and the injection pressure is 3 to 10 kg/cm2.
A solid-gas two-phase mixed flow 28, 29 is supplied through the pipe 36, and is injected from the injection holes 26, 27 of the injection nozzles 21, 22 onto the surface-treated substrate 6 for polishing. Grinding and polishing using this method reduces the particle size to 1/10 of the particle size.
The same surface roughness of the processed surface 32 as ~1/100 can be obtained. For example, in the case of a brittle material (ceramic, etc.), the gimbal 12 34 on the gas bearing slider surface 18 due to the effect of the pivot bearing 14.
When the linear velocity of the substrate 6 is lowered and the injection nozzles 21, 22 are tilted, the injection streams 30, 31 will be affected by the impact force. Weak, fine particles are substrate 6
Since it hits the surface 32 weakly, it is possible to prevent cracks from occurring on the surface 32 to be processed, and to perform optimal grinding and polishing.

Next, the explanation returns to the substrate 6. A magnetic thin film layer on which information is recorded is formed on the surface of the polished substrate 6 using a thin film technique such as vapor deposition or sputtering. In order to protect this magnetic thin film layer, a protective film is applied, and in this invention, using the apparatus of the invention described above, fine particles such as SiO2, Si3 N4, etc. with a particle size of 0.01 to 0.1 μm are deposited. is mixed with a gas such as air or dry nitrogen, and a solid-gas two-phase mixed jet 28, 29 with an injection pressure of 1 to 3 kg/cm2 is sent through a pipe 36 to the injection nozzle 2.
Injected onto the magnetic thin film layer from the injection holes 26 and 27 of 1 and 22,
Forms a thin film. In addition, the solid-gas two-phase mixed flow containing the fine particles described above is injected from one injection hole 26 onto the substrate 6, and the processed dust is transferred to a gas (for example, air, dry air, etc.) from the injection hole 27 of the other injection nozzle 22. Dust can also be removed by injecting or suctioning nitrogen, etc.

In this embodiment, the substrate 6 of a magnetic hard disk is used as an example of the workpiece, but optical disks, semiconductor wafers, and other arts and crafts can also be processed while rotating these objects. Its surface can be processed with ultra precision.

[0023]

Effects of the Invention As explained above, the high-speed airflow floating type jet machining device of the present invention rotates the workpiece at a constant speed, sends the jet nozzle in the radial direction at a constant speed, and removes solid particles containing fine particles. Since the gas two-phase mixed flow is injected onto the surface of the workpiece at a predetermined injection pressure, ultra-precision machining can be performed on the workpiece with a homogeneous surface shape and structure. Or the height of the injection nozzle,
Since the posture of the injection nozzle can be changed with the above-described structure, good grinding, polishing, thin film processing, and dust removal work can be performed. Furthermore, the surface treatment can be easily attached and detached. As described above, the present invention has many excellent effects.

[Brief explanation of drawings]

[Fig. 1] A configuration diagram of a high-speed airflow floating type jet processing apparatus according to an embodiment of the present invention.

[Figure 2] Partially enlarged sectional view near the injection nozzle

[Figure 3] Bottom view near the injection nozzle

[Figure 4] Overall front view (enlarged detailed view)

[Explanation of symbols]

1 High-speed airflow floating injection processing device 2 Rotary table 3 Rotating shaft 4 Hub pedestal 5 Workpiece mounting surface 6 Workpiece (substrate) 7 Actuator 8 Movable part 9 Screw 10 Suspension 11 Cross-sectional shape bent at the top of the suspension 1
2 Gimbal 13 U-shaped slit 14 Pivot bearing 15 Spot welding 16 Mounting groove 17 Gas bearing slider section 18 Gas bearing slider surface (twin body) 19,
20 Taper gas bearing slider 21, 22
Injection nozzle 23 Rotation direction 24 Radial direction 25 Slider grooves 26, 27 Injection holes 28, 29 Solid-gas two-phase mixed flow 30, 31 Injection flow 32 Work surface 33 Mounting surface of mounting groove 34, 35 The rotation direction of the injection nozzle arrow 36
Pipe 37 Suspension reinforcement plate

Claims (4)

[Claims] 1. The surface of the workpiece to be machined is floated on a gas bearing slider surface to be freely movable, and a solid-gas two-phase mixed flow containing fine particles is injected at high speed from an injection nozzle arranged on the gas bearing slider part, A high-speed airflow floating processing injection device that processes workpieces. 2. A gas bearing slider surface having a plurality of injection nozzles and supported by a gimbal having a pivot bearing approximately at the center of the gas bearing slider portion to levitate the gas bearing slider surface in a stable attitude relative to the workpiece surface, 2. The high-speed air floating type jet machining apparatus according to claim 1, wherein the workpiece is machined by jetting a solid-gas two-phase mixed flow containing fine particles from a jet nozzle at high speed. 3. A plurality of injection nozzles are provided, and the gas bearing slider section is supported by a gimbal having a pivot bearing approximately at the center thereof, so that the posture of the gas bearing slider surface is inclined, and the orientation of the plurality of injection nozzles is The high-speed air stream according to claim 1, characterized in that the solid-gas two-phase mixed flow containing fine particles is injected at high speed from each side at an angle toward the workpiece surface to process the workpiece into an optimal surface structure and surface texture. Floating injection processing equipment. 4. Dust after processing is removed by injecting a solid-gas two-phase mixed flow containing fine particles onto the workpiece surface from one of the plurality of injection nozzles, and injecting or suctioning gas from the other injection nozzle. 2. The high-speed airflow floating type jet machining apparatus according to claim 1, wherein said gas is used for removal.