JPH0435778Y2 - - Google Patents

Info

Publication number
JPH0435778Y2
JPH0435778Y2 JP1985156104U JP15610485U JPH0435778Y2 JP H0435778 Y2 JPH0435778 Y2 JP H0435778Y2 JP 1985156104 U JP1985156104 U JP 1985156104U JP 15610485 U JP15610485 U JP 15610485U JP H0435778 Y2 JPH0435778 Y2 JP H0435778Y2
Authority
JP
Japan
Prior art keywords
diaphragm
fixed
electrode
movable electrode
fixed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985156104U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262944U (US07166745-20070123-C00016.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985156104U priority Critical patent/JPH0435778Y2/ja
Publication of JPS6262944U publication Critical patent/JPS6262944U/ja
Application granted granted Critical
Publication of JPH0435778Y2 publication Critical patent/JPH0435778Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1985156104U 1985-10-11 1985-10-11 Expired JPH0435778Y2 (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (US07166745-20070123-C00016.png) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (US07166745-20070123-C00016.png) 1985-10-11 1985-10-11

Publications (2)

Publication Number Publication Date
JPS6262944U JPS6262944U (US07166745-20070123-C00016.png) 1987-04-18
JPH0435778Y2 true JPH0435778Y2 (US07166745-20070123-C00016.png) 1992-08-25

Family

ID=31077410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985156104U Expired JPH0435778Y2 (US07166745-20070123-C00016.png) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPH0435778Y2 (US07166745-20070123-C00016.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Also Published As

Publication number Publication date
JPS6262944U (US07166745-20070123-C00016.png) 1987-04-18

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