JPH04355419A - Objective lens - Google Patents
Objective lensInfo
- Publication number
- JPH04355419A JPH04355419A JP22983091A JP22983091A JPH04355419A JP H04355419 A JPH04355419 A JP H04355419A JP 22983091 A JP22983091 A JP 22983091A JP 22983091 A JP22983091 A JP 22983091A JP H04355419 A JPH04355419 A JP H04355419A
- Authority
- JP
- Japan
- Prior art keywords
- group
- aberration correction
- objective lens
- aberration
- condensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004075 alteration Effects 0.000 claims abstract description 82
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 230000000694 effects Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
- 201000009310 astigmatism Diseases 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 206010010071 Coma Diseases 0.000 description 2
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- Lenses (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】この発明は、光ディスク装置に用
いられる高性能の対物レンズに関し、特に、光軸に対し
て回転非対称な収差を補正することができる対物レンズ
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-performance objective lens used in an optical disc device, and more particularly to an objective lens capable of correcting rotationally asymmetric aberrations with respect to the optical axis.
【0002】0002
【従来の技術】従来から、光軸に関して回転対称な収差
、例えば球面収差を補正する手段として、最も集光側に
平行平面を有するレンズが特願平1−224177号に
開示されている。2. Description of the Related Art Hitherto, Japanese Patent Application No. 1-224177 discloses a lens having a parallel plane closest to the condensing side as means for correcting rotationally symmetrical aberrations with respect to the optical axis, such as spherical aberrations.
【0003】この構成によれば、収差の発生を抑えつつ
、長いワーキングディスタンスを確保することができ、
かつ異なる種類の媒体に対して容易に転用することがで
きる汎用性に富んだレンズ系を提供することができる。According to this configuration, it is possible to secure a long working distance while suppressing the occurrence of aberrations,
Furthermore, it is possible to provide a highly versatile lens system that can be easily applied to different types of media.
【0004】0004
【発明が解決しようとする課題】しかしながら、特願平
1−224177号に開示されるレンズは、製造上の誤
差で発生する偏心コマ収差、レンズ面の曲率が方向によ
って異なることに起因する非点収差等の光軸に対して回
転非対称な収差を補正することはできない。[Problems to be Solved by the Invention] However, the lens disclosed in Japanese Patent Application No. 1-224177 suffers from eccentric coma aberration caused by manufacturing errors and astigmatism caused by the fact that the curvature of the lens surface differs depending on the direction. It is not possible to correct aberrations that are rotationally asymmetric with respect to the optical axis, such as aberrations.
【0005】そのため、非常に開口数(N.A.)が大
きいレンズ、すなわち厳しい収差補正が要求されるレン
ズを組み立てる際には、回転非対称な収差が要求される
レベルより大きく残存し、回折限界の性能を引き出すこ
とが難しかった。Therefore, when assembling a lens with a very large numerical aperture (N.A.), that is, a lens that requires severe aberration correction, rotationally asymmetric aberrations that are greater than the required level remain, and the diffraction limit is exceeded. It was difficult to bring out the best performance.
【0006】[0006]
【発明の目的】この発明は、上記の課題に鑑みてなされ
たものであり、光軸に対して回転非対称な収差を容易に
補正することができる対物レンズを提供することを目的
とする。OBJECTS OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide an objective lens that can easily correct rotationally asymmetric aberrations with respect to the optical axis.
【0007】[0007]
【課題を解決するための手段】この発明にかかる対物レ
ンズは、上記の目的を達成させるため、主として集光作
用を持つ集光群と、主として集光群の光軸に対して回転
非対称な収差を補正する収差補正群と、集光群と収差補
正群とを相対的に光軸回りに回転自在に支持する鏡枠と
から構成され、集光群のパワーをφa,収差補正群の最
も絶対値が大きい方向のパワーをφbとして,|φa/
φb|>50
を満たすことを特徴とする。[Means for Solving the Problems] In order to achieve the above object, the objective lens according to the present invention has a focusing group that mainly has a light focusing function and an aberration that is rotationally asymmetric with respect to the optical axis of the focusing group. It consists of an aberration correction group that corrects the aberration correction group, and a lens frame that supports the condensing group and the aberration correction group relatively rotatably around the optical axis. Letting the power in the direction where the value is large be φb, |φa/
It is characterized by satisfying φb|>50.
【0008】[0008]
【実施例】以下、この発明を図面に基づいて説明する。
図1及び図2は、この発明の一実施例を示したものであ
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below based on the drawings. 1 and 2 show an embodiment of the present invention.
【0009】図示した対物レンズは、図中左側となる光
源側から右側となる集光点側に向けて、第1〜第5レン
ズ1,2,3,4,5により構成される集光群10と、
収差補正群としてのプリズム6とが順に配列して構成さ
れている。The illustrated objective lens has a condensing group consisting of first to fifth lenses 1, 2, 3, 4, and 5, from the light source side on the left side to the condensing point side on the right side of the figure. 10 and
Prisms 6 as an aberration correction group are arranged in order.
【0010】集光群10は、前部鏡筒20により支持さ
れ、プリズム6は、この前部鏡筒20の集光点側の段部
に嵌合する後部鏡筒21により支持されている。後部鏡
筒21は、前部鏡筒20に対して集光群10の光軸回り
に回転自在に設けられており、前部鏡筒20に集光点側
から螺合する抑えリング22によって固定されている。The condensing group 10 is supported by a front lens barrel 20, and the prism 6 is supported by a rear lens barrel 21 that fits into a stepped portion of the front lens barrel 20 on the converging point side. The rear lens barrel 21 is rotatably provided around the optical axis of the condensing group 10 with respect to the front lens barrel 20, and is fixed by a retaining ring 22 that is screwed onto the front lens barrel 20 from the condensing point side. has been done.
【0011】この例では、収差補正群としてプリズム6
を用いることにより、偏心コマ収差等の回転非対称な収
差を補正することができる。なお、収差補正群としては
、偏心コマ収差を補正するためにはプリズムの他にも光
軸に対して傾斜して設けられた平行平面板を用いること
ができ、非点収差を補正するためにはシリンダーレンズ
やトーリックレンズといった方向によってパワーが異な
る光学素子を用いることができる。In this example, the prism 6 is used as the aberration correction group.
By using this, it is possible to correct rotationally asymmetric aberrations such as eccentric coma aberration. As an aberration correction group, in addition to a prism, a parallel plane plate tilted with respect to the optical axis can be used to correct decentered comatic aberration, and a parallel plane plate tilted with respect to the optical axis can be used to correct eccentric comatic aberration. can use optical elements such as cylinder lenses and toric lenses that have different powers depending on the direction.
【0012】組立時には、集光群10の各レンズを前部
鏡筒20に収納して収差を測定し、収差の種類に応じて
収差補正群として用いる光学素子の種類を選択する。ま
た、収差量に応じて平行平面板の傾斜角度、プリズムの
頂角、シリンダーレンズ、トーリックレンズの曲率半径
を決定する。During assembly, each lens of the condensing group 10 is housed in the front lens barrel 20, aberrations are measured, and the type of optical element used as the aberration correction group is selected depending on the type of aberration. In addition, the inclination angle of the parallel plane plate, the apex angle of the prism, and the radius of curvature of the cylinder lens and toric lens are determined according to the amount of aberration.
【0013】次に、決定された収差補正群の光学素子を
後部鏡筒21に組み付けた後、後部鏡筒21を前部鏡筒
20に嵌合させ、前部鏡筒20と後部鏡筒21とを相対
的に回転させて収差の方向性と収差補正群6の方向性と
を一致させる。方向性を一致させた後、抑えリング22
を締め付けて後部鏡筒21を固定する。Next, after assembling the determined optical elements of the aberration correction group into the rear lens barrel 21, the rear lens barrel 21 is fitted into the front lens barrel 20, and the front lens barrel 20 and the rear lens barrel 21 The directionality of the aberration and the directionality of the aberration correction group 6 are made to coincide with each other by rotating them relatively. After matching the direction, press the holding ring 22
to fix the rear lens barrel 21.
【0014】なお、この発明にかかる対物レンズは、集
光群10のパワーをφa、収差補正群6の最も絶対値が
大きい方向のパワーをφbとして、
|φa/φb|>50
の条件を満たしている。The objective lens according to the present invention satisfies the following condition: |φa/φb|>50, where the power of the condensing group 10 is φa, and the power of the aberration correction group 6 in the direction of the largest absolute value is φb. ing.
【0015】この条件を満たさない場合には、収差補正
群20のパワーが過大となり、収差補正群20の形状の
誤差、及び集光群10と収差補正群20との間隔の誤差
に対する許容幅が小さくなり、収差補正群の製造、組み
付けが困難となる。If this condition is not met, the power of the aberration correction group 20 becomes excessive, and the tolerance for errors in the shape of the aberration correction group 20 and errors in the distance between the condensing group 10 and the aberration correction group 20 becomes too large. This makes it difficult to manufacture and assemble the aberration correction group.
【0016】図3は、この発明にかかる対物レンズの数
値実施例を示したものである。具体的な数値構成は表1
に示されている。図4は、この構成による球面収差、非
点収差を示し、図5は波面収差を示している。なお、図
5の波面収差は、左側がメリディオナル、右側がサジタ
ルを示しており、収差量を表す縦軸の単位は波長λであ
る。FIG. 3 shows a numerical example of the objective lens according to the present invention. The specific numerical structure is shown in Table 1.
is shown. FIG. 4 shows spherical aberration and astigmatism due to this configuration, and FIG. 5 shows wavefront aberration. Note that the wavefront aberration in FIG. 5 shows meridional on the left and sagittal on the right, and the unit of the vertical axis representing the amount of aberration is wavelength λ.
【0017】また、表中、NAは開口数、fは焦点距離
、ωは半画角、fBはバックフォーカス、λは使用波長
、rは曲率半径、dは面間隔、Nはd−line(58
8nm)での屈折率、Nλは使用波長での屈折率である
。In the table, NA is the numerical aperture, f is the focal length, ω is the half angle of view, fB is the back focus, λ is the wavelength used, r is the radius of curvature, d is the interplanar distance, and N is the d-line ( 58
8 nm), and Nλ is the refractive index at the wavelength used.
【0018】[0018]
【表1】[Table 1]
【0019】上記のレンズは、設計通りに加工、組み立
てられた場合には図4、図5に示したように十分な性能
を出すことができるが、加工誤差、偏心等によって性能
が劣化した場合には、第13面、第14面を構成する平
行平面板を傾け、あるいはプリズム等の部材と置き換え
ることにより、収差補正群としての機能を発揮させ、収
差を補正することができる。When the above lens is processed and assembled as designed, it can provide sufficient performance as shown in FIGS. 4 and 5, but if the performance deteriorates due to processing errors, eccentricity, etc. In this case, by tilting the plane-parallel plates constituting the 13th and 14th surfaces or replacing them with members such as prisms, it is possible to function as an aberration correction group and correct aberrations.
【0020】例えば、第5レンズが0.01mm偏心し
た場合、波面収差は図6に示すようなコマ収差を示す。
これを補正するためには、平行平面板を0.34゜傾け
ることにより波面差は図7に示した通りに改善される。
この場合、|φa/φb|=∞となる。For example, when the fifth lens is decentered by 0.01 mm, the wavefront aberration exhibits comatic aberration as shown in FIG. In order to correct this, the wavefront difference is improved as shown in FIG. 7 by tilting the parallel plane plate by 0.34°. In this case, |φa/φb|=∞.
【0021】収差補正群として平行平面板を利用する場
合には、面精度が出し易いために誤差の発生が少なく、
また、収差補正群のパワーは0となるため集光群と収差
補正群との距離によって収差変化が全く発生しない。When a parallel plane plate is used as the aberration correction group, it is easy to obtain surface accuracy, so errors occur less;
Further, since the power of the aberration correction group is 0, no aberration change occurs depending on the distance between the condensing group and the aberration correction group.
【0022】平行平面板をプリズムに置き換える場合に
は、頂角を0.060°に設定することにより波面収差
は図8に示した通りに改善される。この場合にも|φa
/φb|=∞となる。When the parallel plane plate is replaced with a prism, the wavefront aberration is improved as shown in FIG. 8 by setting the apex angle to 0.060°. In this case also |φa
/φb|=∞.
【0023】次に、第1レンズの第1面がニュートン縞
0.5本分の非対称成分をもつ場合、波面収差は図9に
示すような非点収差を示す。この非点収差を補正する場
合、平行面板を曲率半径−8000mmのシリンダーレ
ンズに置き換えることにより、波面収差は図10示した
通りに改善される。この場合には|φa/φb|=37
12となる。Next, when the first surface of the first lens has an asymmetric component equivalent to 0.5 Newtonian fringes, the wavefront aberration exhibits astigmatism as shown in FIG. When correcting this astigmatism, the wavefront aberration is improved as shown in FIG. 10 by replacing the parallel plate with a cylinder lens having a radius of curvature of -8000 mm. In this case |φa/φb|=37
It becomes 12.
【0024】また、第1レンズの手前側に曲率半径−4
4000mmのBK7、T=1.20mmのシリンダー
レンズを付加することにより、波面収差は図11示すよ
うに改善される。この場合には|φa/φb|=204
00となる。In addition, a radius of curvature of −4 is provided on the front side of the first lens.
By adding a 4000 mm BK7, T=1.20 mm cylinder lens, wavefront aberration is improved as shown in FIG. 11. In this case |φa/φb|=204
It becomes 00.
【0025】[0025]
【効果】以上説明したように、この発明によれば主な集
光作用を持つレンズ群と製作上発生する収差を補正する
収差補正群とを分けることにより、収差発生の感度が高
いレンズを動かすことなしに、回転非対称な収差を容易
に補正することができる。[Effect] As explained above, according to the present invention, by separating the lens group that has the main light focusing function and the aberration correction group that corrects aberrations that occur during manufacturing, the lenses that are more sensitive to aberrations can be moved. Rotationally asymmetric aberrations can be easily corrected without any problems.
【図1】 実施例にかかる対物レンズの一部を破断し
た分解側面図である。FIG. 1 is a partially cutaway exploded side view of an objective lens according to an example.
【図2】 (A)は図1に示した対物レンズの組立状
態での一部を破断した側面図、(B)は収差補正群側か
ら見た正面図である。2(A) is a partially cutaway side view of the objective lens shown in FIG. 1 in an assembled state, and FIG. 2(B) is a front view seen from the aberration correction group side.
【図3】 数値実施例のレンズ断面図である。FIG. 3 is a cross-sectional view of a lens in a numerical example.
【図4】 数値実施例の設計値における球面収差、非
点収差図である。FIG. 4 is a diagram of spherical aberration and astigmatism at design values of numerical examples.
【図5】 数値実施例の設計値における波面収差図で
ある。FIG. 5 is a wavefront aberration diagram at design values of a numerical example.
【図6】 数値実施例の第5レンズが偏心した場合の
波面収差図である。FIG. 6 is a wavefront aberration diagram when the fifth lens of the numerical example is decentered.
【図7】 図6の状態から平行平面板を傾けて収差を
補正した後の波面収差図である。7 is a wavefront aberration diagram after aberrations are corrected by tilting the parallel plane plate from the state shown in FIG. 6. FIG.
【図8】 図6の状態から平行平面板をプリズムに置
換して収差を補正した後の波面収差図である。8 is a wavefront aberration diagram after aberrations are corrected by replacing the parallel plane plate with a prism from the state shown in FIG. 6. FIG.
【図9】 数値実施例の第1レンズ第1面が非点収差
を持つ場合の波面収差図である。FIG. 9 is a wavefront aberration diagram when the first surface of the first lens in the numerical example has astigmatism.
【図10】 図9の状態から平行平面板をシリンダー
レンズに置換して収差を補正した後の波面収差図である
。10 is a wavefront aberration diagram after aberrations are corrected by replacing the parallel plane plate with a cylindrical lens from the state shown in FIG. 9. FIG.
【図11】 図9の状態から集光群の光源側にシリン
ダーレンズを挿入して収差を補正した後の波面収差図で
ある。11 is a wavefront aberration diagram after aberrations are corrected by inserting a cylinder lens on the light source side of the condensing group from the state of FIG. 9; FIG.
10…集光群 6…プリズム(収差補正群) 20…前部鏡筒 21…後部鏡筒 22…抑えリング 10...Focusing group 6... Prism (aberration correction group) 20...Front lens barrel 21... Rear lens barrel 22...Retaining ring
Claims (7)
て前記集光群の光軸に対して回転非対称な収差を補正す
る収差補正群と、 前記集光群と前記収差補正群とを
相対的に光軸回りに回転自在に支持する鏡枠とから構成
され、前記集光群のパワーをφa、前記収差補正群の最
も絶対値が大きい方向のパワーをφbとして、|φa/
φb|>50 を満たすことを特徴とする対物レンズ。1. A condensing group that mainly has a condensing effect; an aberration correction group that mainly corrects aberrations that are rotationally asymmetric with respect to the optical axis of the condensing group; and the condensing group and the aberration correction group. It is composed of a lens frame that is relatively rotatably supported around the optical axis, and where the power of the condensing group is φa, and the power of the aberration correction group in the direction of the largest absolute value is φb, |φa/
An objective lens that satisfies φb|>50.
とが順に配列していることを特徴とる請求項1に記載の
対物レンズ。2. The objective lens according to claim 1, wherein the condensing group and the aberration correction group are arranged in order from the light source side.
とが順に配列していることを特徴とる請求項1に記載の
対物レンズ。3. The objective lens according to claim 1, wherein the aberration correction group and the condensing group are arranged in order from the light source side.
を持った平行平面板であることを特徴とする請求項1に
記載の対物レンズ。4. The objective lens according to claim 1, wherein the aberration correction group is a parallel plane plate tilted with respect to the optical axis.
特徴とする請求項1に記載の対物レンズ。5. The objective lens according to claim 1, wherein the aberration correction group is a prism.
ることを特徴とする請求項1に記載の対物レンズ。6. The objective lens according to claim 1, wherein the aberration correction group is a cylinder lens.
ることを特徴とする請求項1に記載の対物レンズ。7. The objective lens according to claim 1, wherein the aberration correction group is a toric lens.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22983091A JPH04355419A (en) | 1991-05-31 | 1991-05-31 | Objective lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22983091A JPH04355419A (en) | 1991-05-31 | 1991-05-31 | Objective lens |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04355419A true JPH04355419A (en) | 1992-12-09 |
Family
ID=16898344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22983091A Pending JPH04355419A (en) | 1991-05-31 | 1991-05-31 | Objective lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04355419A (en) |
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US5852518A (en) * | 1995-05-26 | 1998-12-22 | Nikon Corporation | Projection optical unit and projection exposure apparatus comprising the same |
US6235438B1 (en) | 1997-10-07 | 2001-05-22 | Nikon Corporation | Projection exposure method and apparatus |
US6268903B1 (en) | 1995-01-25 | 2001-07-31 | Nikon Corporation | Method of adjusting projection optical apparatus |
US6603612B2 (en) | 2000-05-10 | 2003-08-05 | Sharp Kabushiki Kaisha | Object lens barrel, object lens barrel drive unit and optical information recording and reproducing unit |
JP2006171183A (en) * | 2004-12-14 | 2006-06-29 | Nikon Corp | Condenser lens for microscope |
US7626773B2 (en) | 2004-11-08 | 2009-12-01 | Panasonic Corporation | Lens unit |
-
1991
- 1991-05-31 JP JP22983091A patent/JPH04355419A/en active Pending
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US6958803B2 (en) | 1993-12-22 | 2005-10-25 | Nikon Corporation | Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics |
KR100396872B1 (en) * | 1993-12-22 | 2004-05-17 | 가부시키가이샤 니콘 | Projection exposure equipment |
US6262793B1 (en) | 1993-12-22 | 2001-07-17 | Nikon Corporation | Method of manufacturing and using correction member to correct aberration in projection exposure apparatus |
KR100422824B1 (en) * | 1993-12-22 | 2004-03-16 | 가부시키가이샤 니콘 | Transfer and Exposure Method |
EP0660169A1 (en) * | 1993-12-22 | 1995-06-28 | Nikon Corporation | Projection exposure apparatus |
US6268903B1 (en) | 1995-01-25 | 2001-07-31 | Nikon Corporation | Method of adjusting projection optical apparatus |
US6377333B1 (en) | 1995-01-25 | 2002-04-23 | Nikon Corporation | Method of adjusting projection optical apparatus |
US5852518A (en) * | 1995-05-26 | 1998-12-22 | Nikon Corporation | Projection optical unit and projection exposure apparatus comprising the same |
US6235438B1 (en) | 1997-10-07 | 2001-05-22 | Nikon Corporation | Projection exposure method and apparatus |
US6603612B2 (en) | 2000-05-10 | 2003-08-05 | Sharp Kabushiki Kaisha | Object lens barrel, object lens barrel drive unit and optical information recording and reproducing unit |
US7626773B2 (en) | 2004-11-08 | 2009-12-01 | Panasonic Corporation | Lens unit |
JP2006171183A (en) * | 2004-12-14 | 2006-06-29 | Nikon Corp | Condenser lens for microscope |
JP4706249B2 (en) * | 2004-12-14 | 2011-06-22 | 株式会社ニコン | Microscope condenser lenses |
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