JPH04355356A - Image display for cathode luminescence analyzer - Google Patents

Abstract

PURPOSE:To achieve a display in color similar to that of light detected when a detecting ray for surface analysis is visible light. CONSTITUTION:A wavelength spectrum of fluorescence which is radiated from a sample 3 excited by an electron beam and a visible wavelength range is divided into a plurality of sections beforehand. A video lookup table which has a three-primary color structure of one color representing a section for every section is prepared to determine a display color of the fluorescence detected depending on which section the fluorescence spectrum obained by a detection means belongs to.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image display device for use in cathodoluminescence analysis using an electron beam microanalyzer or the like.

0002

2. Description of the Related Art When performing analysis using an electron beam microanalyzer, a measurement area on the surface of a sample is two-dimensionally scanned with an electron beam, and X-rays emitted from the sample excited by the electron beam are spectrally analyzed. That is, the wavelength of X-rays is separated, the intensity of the separated X-rays is measured, the detected signal is replaced with a digital signal based on the wavelength and intensity, and the digital signal is converted into a display signal using a conversion table. In this way, conventional surface analyzers split X-rays into spectra, so when displaying the analysis results as an image, X-rays have no color, so when converting wavelengths into colors, the measurer must use the X-ray wavelength. The relationship between the color and the display color was specified appropriately. However, recently, it has become increasingly common to measure visible light emitted by cathodoluminescence to observe impurities, lattice defects, crystal structure abnormalities, etc. In such cases, the above-mentioned If the measurer specifies the display color appropriately, as in the case of The problem is that it is not possible for anyone to know the color of the fluorescent light being emitted, and therefore it is not possible for anyone to intuitively interpret the analysis results.

0003

SUMMARY OF THE INVENTION When the detection line in surface analysis is visible light, it is an object of the present invention to display the detection line in a color close to the color of the detection light.

0004

[Means for solving the problem] A detection means for detecting the wavelength spectrum of light emitted from a sample excited by an electron beam, and a color to be displayed on an image display means determined from the spectrum data obtained by the detection means. A cathodoluminescence analysis comprising: a position reading means for reading the position of a sample surface irradiated with an electron beam; and a means for determining a pixel display position of an image display means in response to a position signal from the position reading means. In the apparatus, the display color determining means is provided with a video look-up table that divides the visible wavelength range into a plurality of sections and associates a three-primary color signal configuration of one color representing the color of the section for each section, The display color of the detected fluorescence is determined depending on which of the above categories the fluorescence spectrum obtained by the detection means belongs to.

[0005]

[Operation] The visible light wavelength range is intuitively divided into 5 to 7 color bands, and these color bands allow the visible wavelength range to be divided into multiple wavelength ranges, with one color corresponding to each category. be able to. Further, this one color can be displayed by a certain composition ratio of the three primary colors. In the present invention, a correspondence table between such wavelength ranges and display colors is created, and the display color of the image display is determined depending on which of the wavelength categories in the correspondence table the detected fluorescence spectrum belongs to. and the display color will approximately match.

[0006]

Embodiment FIG. 1 shows an embodiment of the present invention. 1 is sample 3
2 is an electron gun that irradiates an electron beam, 2 is a sample stage,
It is driven two-dimensionally by an axis pulse motor 4 and a Y-axis pulse motor 5. A total reflection mirror 6 focuses fluorescence emitted from the sample 3 excited by the electron beam onto the entrance slit of the spectrometer 7. 8 is a data collection section, which includes a spectrometer 7 and
, the spectral measurement data and position data obtained from the Y-axis pulse motors 4 and 5 are converted into image display data. As the spectrometer 7, a spectrometer that performs wavelength scanning and a detector such as a photomultiplier are used. A frame memory 9 stores video data for one frame of a display image. Reference numeral 10 denotes a video look-up table memory, which stores a table of composition ratios of three primary color signals of display colors for each wavelength division in the visible light range, as shown in Table 1 below.

[Table 1] Reference numeral 11 denotes an image display unit that determines which wavelength category in the above table in the video lookup table memory 10 the wavelength currently being analyzed belongs to, determines the display color, and displays the information in the frame memory 9. A colored image is displayed on the CRT 12 using the data in the frame memory.

[0007]

[Effects of the Invention] According to the present invention, the light emitted from the sample is automatically displayed in substantially the same color on the image display device, making it possible to easily determine the identity of the component from the image. This makes cathodoluminescence analysis of samples much easier.

[Brief explanation of drawings]

[Fig. 1] Block diagram of one embodiment of the present invention

[Explanation of symbols]

1 Electron gun 2 Sample stage 3
Sample 4 X-axis pulse motor 5
Y-axis pulse motor 6
Total reflection mirror 7 Spectrometer 8 Data collection section 9
frame memory 10
Video lookup table 11
CRT

Claims (1)

[Claims] 1. A detection means for detecting a wavelength spectrum of light emitted from a sample excited by an electron beam; and means for determining a color to be displayed on an image display means from spectrum data obtained by the detection means; A cathodoluminescence analyzer provided with a position reading means for reading the position of a sample surface irradiated with an electron beam, and a means for determining a pixel display position of an image display means in correspondence with a position signal from the position reading means. The display color determining means divides the visible wavelength range into a plurality of sections, and includes a video lookup table in which each section is associated with a three-primary color signal configuration of one color representing the color of the section, 1. An image display device for a cathodoluminescence analyzer, characterized in that the display color of detected fluorescence is determined depending on which of the above categories the detected fluorescence spectrum belongs to.