JPH04351222A - Bonding wire coil, and method and device for coiling bonding wire - Google Patents

Bonding wire coil, and method and device for coiling bonding wire

Info

Publication number
JPH04351222A
JPH04351222A JP2401700A JP40170090A JPH04351222A JP H04351222 A JPH04351222 A JP H04351222A JP 2401700 A JP2401700 A JP 2401700A JP 40170090 A JP40170090 A JP 40170090A JP H04351222 A JPH04351222 A JP H04351222A
Authority
JP
Japan
Prior art keywords
bonding wire
spool
winding
degrees
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2401700A
Other languages
Japanese (ja)
Other versions
JP2827512B2 (en
Inventor
Masanobu Matsuzawa
松沢 正信
Kiyoshi Furukawa
潔 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2401700A priority Critical patent/JP2827512B2/en
Publication of JPH04351222A publication Critical patent/JPH04351222A/en
Application granted granted Critical
Publication of JP2827512B2 publication Critical patent/JP2827512B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/30Handled filamentary material
    • B65H2701/36Wires
    • B65H2701/361Semiconductor bonding wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/786Means for supplying the connector to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

PURPOSE:To smoothen feeding of a wire and to increase length of a spool coil by making crossing angle of a bonding wire of the (n)th turn and the (n+1)th turn in each side of reciprocated coiling to be the specific angle or more. CONSTITUTION:In the bonding wire coil having multi-layer state by reciprocatively coiling the bonding wire 14 to the spool 6 from one end to the other end and further, from the other end to the one end repeating this, the crossing angle of bonding wire of the (n)th turn and the (n+1)th turn in each side of reciprocated coiling, is made to be >=0.03 deg.. In this result, it can be prevented that the (n+1)th turn's coil is inserted into the (n)th turn's coil and the feeding of wire is smoothened and the length of spool coil can be increased. By this method, this can be kept up with bonding speed and workability of the bonding work can be improved.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、半導体素子のボンディ
ングワイヤ、即ち半導体素子のチップ電極と外部リード
部とを接続するために使用されるワイヤをスプールへ巻
取って得られるボンディングワイヤ巻線、該ボンディン
グワイヤ巻線を製造するために用いられるボンディング
ワイヤの巻取方法、及び該ボンディングワイヤ巻線を製
造するために用いられる巻取装置に関する。
[Industrial Application Field] The present invention relates to a bonding wire for a semiconductor device, that is, a bonding wire winding obtained by winding a wire used for connecting a chip electrode and an external lead portion of a semiconductor device onto a spool. The present invention relates to a bonding wire winding method used for manufacturing the bonding wire winding, and a winding device used for manufacturing the bonding wire winding.

【0002】0002

【従来の技術】従来、半導体素子のボンディングワイヤ
(以下、「ワイヤ」と略称する。)をスプールに巻取る
場合には、一層状の整列巻きにしていた。
2. Description of the Related Art Conventionally, when bonding wires (hereinafter simply referred to as "wires") for semiconductor devices are wound onto spools, they are wound in a single layer in an aligned manner.

【0003】ところが、最近、ボンディング速度の増加
に伴い、ボンディング作業の作業性向上のため、スプー
ル巻線の長さを増加する必要が生じた。そのため、最近
、スプールにワイヤを往復して多層状に巻取る、往復多
層状の巻取方法が用いられている。
However, recently, as bonding speeds have increased, it has become necessary to increase the length of the spool winding in order to improve the workability of bonding operations. Therefore, recently, a reciprocating multilayer winding method has been used in which the wire is wound back and forth around a spool in a multilayered manner.

【0004】0004

【発明が解決しようとする課題】上記のようにスプール
にワイヤを往復多層状に巻取る場合、ワイヤを整列巻き
、即ち隣接するワイヤとワイヤの間隙が0となる巻き方
としたのでは巻線がほぐれにくくなり断線の原因となる
ため、ワイヤは所定のピッチを存して巻取られる。とこ
ろが、この場合、往側若しくは復側において、n回目と
(n+1)回目の巻線を平行若しくは平行に近い状態と
なるようにすると、(n+1)回目の巻線がn回目の巻
線間にはさみ込まれてしまい、ボンディング作業時にく
り出し不良が生ずるという欠陥が生じた。本発明は、上
記欠陥を除去することを目的とするものである。
[Problems to be Solved by the Invention] When winding a wire around a spool in multiple layers in a reciprocating manner as described above, it is difficult to wind the wire in an aligned manner, that is, in a winding manner in which the gap between adjacent wires is zero. The wire is wound at a predetermined pitch to prevent it from unraveling and cause wire breakage. However, in this case, if the n-th and (n+1)-th windings are made to be parallel or nearly parallel on the forward or return side, the (n+1)-th winding is connected between the n-th windings. This caused a defect in that the material was jammed in, resulting in poor extraction during bonding work. The present invention aims to eliminate the above defects.

【0005】[0005]

【課題を解決するための手段】請求項1記載の発明は、
スプールにボンディングワイヤを一端から他端へ、さら
に他端から一端へと往復させて巻取り、これを繰り返し
て多層状にしたボンディングワイヤ巻線において、往復
各側のn回目と(n+1)回目のボンディングワイヤの
交差角を0.03度以上としたボンディングワイヤ巻線
である。
[Means for solving the problem] The invention according to claim 1 includes:
In a bonding wire winding in which a bonding wire is wound on a spool by reciprocating from one end to the other end and then from the other end to one end, and this is repeated to form a multilayer bonding wire, the nth and (n+1) reciprocating This is a bonding wire winding in which the crossing angle of the bonding wires is 0.03 degrees or more.

【0006】請求項2記載の発明は、前記交差角を0.
03度以上の一定値とした請求項1記載のボンディング
ワイヤ巻線である。
[0006] According to a second aspect of the invention, the intersection angle is set to 0.
2. The bonding wire winding according to claim 1, wherein the bonding wire winding has a constant value of 0.03 degrees or more.

【0007】請求項3記載の発明は、前記交差角を0.
03度以上の不定値とした請求項1記載のボンディング
ワイヤ巻線である。
[0007] In the third aspect of the invention, the intersection angle is set to 0.
2. The bonding wire winding according to claim 1, wherein the bonding wire winding has an undefined value of 0.3 degrees or more.

【0008】請求項4記載の発明は、スプールにボンデ
ィングワイヤを一端から他端へ、さらに他端から一端へ
と往復させて巻取り、これを繰り返して多層状にするボ
ンディングワイヤの巻取方法において、往復各側のn回
目と(n+1)回目のボンディングワイヤの交差角を0
.03度以上とするボンディングワイヤの巻取方法であ
る。
The invention as set forth in claim 4 provides a bonding wire winding method in which the bonding wire is wound on a spool by reciprocating from one end to the other end and then from the other end to the one end, and this is repeated to form a multilayer structure. , the intersection angle of the n-th and (n+1)-th bonding wires on each side of the reciprocation is 0.
.. This is a method of winding a bonding wire with an angle of 0.03 degrees or more.

【0009】請求項5記載の発明は、前記交差角を0.
03度以上の一定値とする請求項4記載のボンディング
ワイヤの巻取方法である。
[0009] According to a fifth aspect of the invention, the intersection angle is set to 0.
5. The bonding wire winding method according to claim 4, wherein the bonding wire is wound at a constant value of 0.03 degrees or more.

【0010】請求項6記載の発明は、前記交差角を0.
03度以上の不定値とする請求項4記載のボンディング
ワイヤの巻取方法である。
[0010] In the invention as set forth in claim 6, the intersection angle is set to 0.
5. The bonding wire winding method according to claim 4, wherein the bonding wire is wound at an undefined value of 0.3 degrees or more.

【0011】請求項7記載の発明は、スプールを該スプ
ールの軸回りに回転可能に支持するスプール支持部と、
前記スプールの近傍において、ボンディングワイヤを通
過可能に支持するワイヤ支持部と、前記スプールを回転
駆動する回転駆動部と、前記ワイヤ支持部と前記スプー
ルのうちの少なくとも一方を、スプールの軸方向に、他
方に対して接近又は離隔せしめるように横送り移動させ
る横送り駆動部と、前記回転駆動部の回転運動及び前記
横送り駆動部の横送り運動を制御する制御部とを備え、
前記回転駆動部及び前記横送り駆動部を駆動制御しつつ
スプールにワイヤを往復させて巻取るようにしたボンデ
ィングワイヤ巻取装置において、前記制御部は、前記横
送り駆動部の横送り移動速度を調整して、往復各側のn
回目と(n+1)回目のボンディングワイヤの交差角を
0.03度以上とする半導体素子のボンディングワイヤ
の巻取装置である。
[0011] The invention according to claim 7 provides a spool support portion that rotatably supports the spool around the axis of the spool;
In the vicinity of the spool, a wire support part that supports the bonding wire so that it can pass therethrough, a rotation drive part that rotationally drives the spool, and at least one of the wire support part and the spool in the axial direction of the spool, A cross-feed drive section that moves the cross-feed so as to approach or separate from the other, and a control section that controls the rotational movement of the rotary drive section and the cross-feed movement of the cross-feed drive section,
In the bonding wire winding device that winds the wire by reciprocating it around the spool while controlling the rotation drive unit and the lateral feed drive unit, the control unit controls the lateral feed movement speed of the lateral feed drive unit. Adjust and reciprocate n on each side
This is a winding device for a bonding wire for a semiconductor element, in which the crossing angle between the bonding wires for the first and (n+1)th times is 0.03 degrees or more.

【0012】請求項8記載の発明は、前記制御部は、前
記交差角を0.03度以上の一定値とするように前記横
送り駆動部の横送り移動速度を調整する請求項7記載の
ボンディングワイヤの巻取装置である。
The invention according to claim 8 is the invention according to claim 7, wherein the control section adjusts the traverse movement speed of the traverse feed drive section so that the intersection angle is a constant value of 0.03 degrees or more. This is a bonding wire winding device.

【0013】請求項9記載の発明は、前記制御部は、前
記交差角を0.03度以上の不定値とするように前記横
送り駆動部の横送り移動速度を調整する請求項7記載の
ボンディングワイヤの巻取装置である。
The invention according to claim 9 is the invention according to claim 7, wherein the control section adjusts the traverse movement speed of the traverse feed drive section so that the intersection angle is an undefined value of 0.03 degrees or more. This is a bonding wire winding device.

【0014】[0014]

【作用】本発明では、スプールにワイヤを巻取る際、往
側若しくは復側において、n回目と(n+1)回目の巻
線の交差角が0.03度以上となっているため、(n+
1)回目の巻線がn回目の巻線間にはさまれることが防
止される。
[Operation] In the present invention, when winding the wire onto the spool, the crossing angle between the nth and (n+1)th windings is 0.03 degrees or more on the outgoing or returning side.
1) The th winding is prevented from being sandwiched between the n th windings.

【0015】[0015]

【実施例】【Example】

(第1実施例)  以下に本発明の第1実施例を添付図
面を参照して説明する。まず、ワイヤをスプールに巻取
る巻取装置の基本構成について説明する。
(First Embodiment) A first embodiment of the present invention will be described below with reference to the accompanying drawings. First, the basic configuration of a winding device for winding wire onto a spool will be explained.

【0016】図2において、符号2は回転駆動軸であり
、巻取装置本体4の内部に配設されたサーボモータの出
力軸に連結されている。この回転駆動軸2の端部には、
スプール6が装着され、前記サーボモータの回転により
、スプール6が回転駆動されるようになっている。
In FIG. 2, reference numeral 2 denotes a rotational drive shaft, which is connected to an output shaft of a servo motor disposed inside the winding device main body 4. As shown in FIG. At the end of this rotary drive shaft 2,
A spool 6 is attached, and the spool 6 is rotationally driven by the rotation of the servo motor.

【0017】前記巻取装着本体4の内部には、往復駆動
機構(サーボ機構)が配設され、該往復駆動機構には、
軸8の基端部が連結されている。また、軸8の先端部に
は、ワイヤ14を通過可能に支持するローラ10が回転
自在に取着されている。そして該軸8は、前記往復駆動
機構により、スプール6の軸方向(図2の矢印a方向及
び矢印b方向)に往復運動を行うように構成されている
A reciprocating drive mechanism (servo mechanism) is disposed inside the winding mounting main body 4, and the reciprocating drive mechanism includes:
The base ends of the shafts 8 are connected. Further, a roller 10 that supports the wire 14 so as to pass therethrough is rotatably attached to the tip of the shaft 8. The shaft 8 is configured to reciprocate in the axial direction of the spool 6 (in the directions of arrows a and b in FIG. 2) by the reciprocating drive mechanism.

【0018】そして、前記巻取装置本体4の内部に配設
された、マイクロコンピュータよりなる制御部12が、
スプール6の回転運動と軸8の往復運動とを連動すべく
制御することにより、スプール6の一端部(フランジ部
)にその巻始部を止着されたワイヤ14は、該スプール
6に往復多層状に巻取られてゆく。
[0018] A control unit 12 consisting of a microcomputer, disposed inside the winding device main body 4,
By controlling the rotational movement of the spool 6 and the reciprocating movement of the shaft 8 in conjunction with each other, the wire 14 whose winding start portion is fixed to one end (flange) of the spool 6 can be moved back and forth to the spool 6 many times. It is rolled up in layers.

【0019】次に、上記巻取装置によるワイヤ14の巻
線形態の一例を図1を参照して説明する。
Next, an example of the winding form of the wire 14 by the above-mentioned winding device will be explained with reference to FIG.

【0020】ワイヤ14は、その巻始部をスプール6の
一端部に止着された後、スプール6が等速回転しながら
軸8がスプール6の軸方向に往復運動することにより、
スプール6に巻き込まれる。
After the wire 14 has its winding start portion fixed to one end of the spool 6, the shaft 8 reciprocates in the axial direction of the spool 6 while the spool 6 rotates at a constant speed.
Caught up in spool 6.

【0021】ここで、軸8が一方の側(図2の矢印a方
向)に送られるときにスプール6に巻取られたワイヤを
往側巻線とし、逆に、軸8が他方の側(図2の矢印b方
向)に送られるときにスプール6に巻取られたワイヤを
復側巻線とし、また、平面視したときに往側若しくは復
側の巻線がなす直線と、スプール6の軸方向の直線とが
成す鋭角θ(図2参照)を巻角と定義する。
Here, the wire wound around the spool 6 when the shaft 8 is sent to one side (in the direction of arrow a in FIG. The wire wound around the spool 6 when being fed in the direction of the arrow b in FIG. The acute angle θ (see FIG. 2) formed by the straight line in the axial direction is defined as the winding angle.

【0022】図1において、二点鎖線20はスプール6
に巻取られたn回目の往側巻線を、破線22は同じくn
回目の復側巻線を、実線24は(n+1)回目の往側巻
線を、それぞれ示すものとする。
In FIG. 1, a chain double-dashed line 20 indicates the spool 6.
The dashed line 22 indicates the nth outgoing winding wound in
The solid line 24 represents the (n+1)th outgoing winding, and the solid line 24 represents the (n+1)th outgoing winding.

【0023】本実施例にかかるワイヤの巻取方法は、初
期ピッチとして、1回目の往側巻線のピッチP1及び1
回目の復側巻線のピッチP2を与えた後、n回目(nは
自然数)の往側巻線と(n+1)回目の往側巻線の交差
角(図1のω)が0.03度以上の一定値(例えば0.
1度)となり、同様にn回目の復側巻線と(n+1)回
目の復側巻線の交差角も0.03度以上の一定値となる
ように順次巻取っていくものである。
The wire winding method according to this embodiment uses pitches P1 and 1 of the first outgoing winding as the initial pitch.
After giving the pitch P2 of the returning winding, the intersection angle (ω in Fig. 1) between the nth (n is a natural number) outgoing winding and the (n+1)th outgoing winding is 0.03 degrees. A certain value (for example, 0.
1 degree), and similarly, the winding is sequentially performed so that the intersection angle between the n-th return winding and the (n+1)-th return winding becomes a constant value of 0.03 degrees or more.

【0024】上記において、交差角を一定にするとは、
往側及び復側の、(n+1)回目の巻線の巻角をn回目
の巻線の巻角より、(イ)交差角度分常に増加させる場
合と、(ロ)交差角度分常に減少させる場合と、(ハ)
交差角度分の増加、減少を交互に繰り返す場合とがある
が、いずれであってもよい。
[0024] In the above, keeping the intersection angle constant means that
When the winding angle of the (n+1)th winding on the forward and return sides is always increased by (a) the crossing angle from the winding angle of the nth winding, and (b) when the winding angle is always decreased by the crossing angle. And (ha)
There are cases where the increase and decrease by the intersection angle are repeated alternately, but either is acceptable.

【0025】上記の如くワイヤを巻取ることにより、往
側若しくは復側において、(n+1)回目の巻線がn回
目の巻線間にはさみ込まれることを防止することができ
、ワイヤの送りを円滑にして、従来以上のスプール巻線
の長さの増長が可能となる。
By winding the wire as described above, it is possible to prevent the (n+1)th winding from being caught between the nth windings on the forward or backward side, and to reduce the feeding of the wire. This makes it possible to increase the length of the spool winding more than before.

【0026】なお、上記(イ)、(ロ)、(ハ)の各設
定において、交差角を変化させてワイヤを巻取った場合
の、巻きほどき試験の結果を、表1に示す。表1は、直
径50.8のスプールに各条件において長さ1000 
のワイヤを巻き取った後、該スプールを、ボンディング
時におけるスプールの繰り出し速度とほぼ同一の速度(
周速約0.015m/s)でワイヤがほどける方向に回
転させ、これにより巻きほどき性の有無を目視により判
定したものである。また、目視による判定は、ワイヤが
、図3における状態Xのように垂下した状態のときを正
常と、同図における状態Yのようにワイヤの巻きほどき
端が回転方向に引きずられた状態を異常と、それぞれ判
定する。
Table 1 shows the results of an unwinding test when the wire was wound with varying crossing angles in each of the above settings (a), (b), and (c). Table 1 shows a spool with a diameter of 50.8 mm and a length of 1000 mm under each condition.
After winding up the wire, the spool is moved at approximately the same speed as the spool payout speed during bonding (
The wire was rotated at a circumferential speed of approximately 0.015 m/s) in a direction in which the wire would unwind, and the presence or absence of unwindability was visually determined. In addition, visual judgment is made when the wire is in a hanging state as in state X in Figure 3, which is normal, and in the state in which the unwound end of the wire is dragged in the rotational direction, as in state Y in the same figure. Each is judged as abnormal.

【0027】[0027]

【表1】[Table 1]

【0028】なお、表1において、(イ)の場合の初期
ピッチP1、P2は、1回目の往側巻線の巻角(以下、
「初期往側巻角」という。)が3.5度、同復側巻線の
巻角(以下、「初期復側巻角」という。)が3.5度と
なるように与えている。同様に、(ロ)の場合の初期往
側巻角は3.5度、初期復側巻角は3.5度であり、(
ハ)の場合の初期往側巻角は3.5度、初期復側巻角は
3.5度である。
In Table 1, the initial pitches P1 and P2 in case (A) are the winding angle of the first outgoing winding (hereinafter referred to as
This is called the "initial outward winding angle." ) is 3.5 degrees, and the winding angle of the same backward winding (hereinafter referred to as "initial backward winding angle") is 3.5 degrees. Similarly, in case (b), the initial forward winding angle is 3.5 degrees, the initial backward winding angle is 3.5 degrees, and (
In case c), the initial forward winding angle is 3.5 degrees, and the initial backward winding angle is 3.5 degrees.

【0029】表1より、上記(イ)、(ロ)、(ハ)の
場合共に交差角を0.03度以上とすることにより、巻
きほどき性が正常となることがわかる。
From Table 1, it can be seen that in all cases (a), (b), and (c) above, by setting the crossing angle to 0.03 degrees or more, the unwinding property becomes normal.

【0030】(第2実施例)  以下に本発明の第2実
施例を添付図面を参照して説明する。なお、上述の第1
実施例と同一の構成要素には同一の番号を付したので、
その説明を省略する。
(Second Embodiment) A second embodiment of the present invention will be described below with reference to the accompanying drawings. In addition, the above-mentioned first
The same components as in the example are given the same numbers, so
The explanation will be omitted.

【0031】図4に示す巻取装置が図2のものと異なる
点は、乱数発生手段として巻取装置本体4の内部に乱数
発生装置16が配設されている点である。この乱数発生
装置16は、制御部12に乱数データを与えるためのも
のであり、これにより制御部12は後述の乱数を用いた
制御が可能となる。
The winding device shown in FIG. 4 differs from the winding device shown in FIG. 2 in that a random number generator 16 is provided inside the winding device main body 4 as a random number generating means. This random number generator 16 is for providing random number data to the control unit 12, and thereby the control unit 12 can perform control using random numbers, which will be described later.

【0032】本実施例に係るワイヤの巻取方法も、初期
ピッチとしてP1及びP2を与えて、ワイヤを往復多層
状に巻取っていく点では上記第1実施例と同様である。 但し、本実施例に係る巻取方法では、n回目の往側巻線
と(n+1)回目の往側巻線の交差角を0.03度以上
の不定値(但し、スプールの形状等により、自ずと上限
値が存在する。)とし、同様にn回目の復側巻線と(n
+1)回目の復側巻線の交差角も0.03度以上の不定
値にするものである。上記0.03度以上の不定値(以
下、「不定値」と略称する。)は、前述の乱数発生装置
16より送られる乱数データを基にして制御部12によ
り造られるものである。
The wire winding method according to this embodiment is similar to the first embodiment in that the wire is wound in a reciprocating multi-layered manner by giving initial pitches of P1 and P2. However, in the winding method according to this embodiment, the intersection angle between the n-th outgoing winding and the (n+1)th outgoing winding is set to an undefined value of 0.03 degrees or more (however, depending on the shape of the spool, etc. ), and similarly, the nth backward winding and (n
The crossing angle of the +1) return winding is also set to an undefined value of 0.03 degrees or more. The indefinite value of 0.03 degrees or more (hereinafter abbreviated as "indeterminate value") is created by the control unit 12 based on random number data sent from the random number generator 16 described above.

【0033】上記において、交差角を不定値にするとは
、往側及び復側の、(n+1)回目の巻線の巻角をn回
目の巻線の巻角より、(ニ)不定値分常に増加させる場
合と、(ホ)不定値分常に減少させる場合と、(ヘ)不
定値分をランダムに増加及び減少させる場合とがあるが
、いずれであってもよい。
[0033] In the above, setting the crossing angle to an indefinite value means that the winding angle of the (n+1)th winding on the forward and return sides is always set by (d) an indefinite value from the winding angle of the nth winding. There are cases in which it is increased, (e) cases in which it is constantly decreased by an undefined value, and (f) cases in which the indeterminate value is randomly increased and decreased, and any of these cases may be used.

【0034】上記の如くワイヤを巻取ることにより、第
1実施例と同様に、往側若しくは復側において、(n+
1)回目の巻線がn回目の巻線間にはさみ込まれること
を防止することができ、ワイヤの送りを円滑にして、従
来以上のスプール巻線の長さの増長が可能となる。
By winding the wire as described above, (n+
1) It is possible to prevent the th winding from being sandwiched between the n-th windings, and the wire can be fed smoothly, making it possible to increase the length of the spool winding more than before.

【0035】[0035]

【表2】[Table 2]

【0036】なお、上記(ニ)、(ホ)、(へ)の各設
定において、上記表1と同一の条件で巻きほどき試験を
行った場合の結果を表2に示す。表2において、(ニ)
の場合の初期往側巻角は3.5度、初期復側巻角は3.
5度、(ホ)の場合の初期往側巻角は3.5度、初期復
側巻角は3.5度、(ヘ)の場合の初期往側巻角は3.
5度、初期復側巻角は3.5度である。
Table 2 shows the results of an unwinding test conducted under the same conditions as in Table 1 for each of the settings (d), (e), and (f) above. In Table 2, (d)
In the case of , the initial forward winding angle is 3.5 degrees, and the initial backward winding angle is 3.
5 degrees, the initial forward winding angle in case (e) is 3.5 degrees, the initial backward winding angle is 3.5 degrees, and the initial forward winding angle in case (f) is 3.5 degrees.
5 degrees, and the initial backward winding angle is 3.5 degrees.

【0037】表2より、上記(ニ)、(ホ)、(ヘ)の
場合共に不定値を0.03度以上の不定値とすることに
より巻きほどき性が正常となることがわかる。
From Table 2, it can be seen that in the above cases (d), (e), and (f), the unwinding property becomes normal when the undefined value is set to an undefined value of 0.03 degrees or more.

【0038】なお、上述した図2及び図4の巻取装置に
おいて、軸8を固定し、回転駆動軸2をスプール6の軸
方向に往復移動させてもよく、又、軸8と回転駆動軸2
の双方を往復移動させる構成としてもよい。また、軸8
の往復移動速度を一定とし、回転駆動軸の回転速度を調
整することにより巻き角を調整するような構成としても
よい。
In the winding device shown in FIGS. 2 and 4 described above, the shaft 8 may be fixed and the rotary drive shaft 2 may be reciprocated in the axial direction of the spool 6, or the shaft 8 and the rotary drive shaft may be 2
It is also possible to have a configuration in which both of them are moved back and forth. Also, axis 8
The reciprocating speed of the rotary drive shaft may be kept constant, and the winding angle may be adjusted by adjusting the rotational speed of the rotary drive shaft.

【0039】[0039]

【発明の効果】本発明に係る巻取方法若しくは巻取装置
によれば、往側若しくは復側において、(n+1)回目
の巻線がn回目の巻線間にはさみ込まれることを防止す
ることができ、ワイヤの送りを円滑にして、従来以上の
スプール巻線の長さの増長を図ることが可能となる。従
って、本発明に係るスプール巻線を用いることにより、
ボンディング速度の高速化に対応することができ、ボン
ディング作業の作業性を向上させることができる効果が
存する。
[Effects of the Invention] According to the winding method or the winding device according to the present invention, it is possible to prevent the (n+1)th winding from being sandwiched between the nth windings on the forward side or the backward side. This makes it possible to smoothly feed the wire and increase the length of the spool winding compared to the conventional method. Therefore, by using the spool winding according to the present invention,
This has the effect of being able to cope with higher bonding speeds and improving the workability of bonding work.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】スプールの巻線形態に係る説明図である。FIG. 1 is an explanatory diagram of the winding form of a spool.

【図2】本発明の第1実施例に係る巻取装置の平面図で
ある。
FIG. 2 is a plan view of a winding device according to a first embodiment of the present invention.

【図3】巻きほどき試験の説明図である。FIG. 3 is an explanatory diagram of an unwinding test.

【図4】本発明の第2実施例に係る巻取装置の平面図で
ある。
FIG. 4 is a plan view of a winding device according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

2      回転駆動軸 4      巻取装置本体 6      スプール 8      軸 10    ローラ 12    制御部 14    ワイヤ 16    乱数発生装置 2 Rotation drive shaft 4 Winding device body 6 Spool 8 Axis 10 Roller 12 Control section 14 Wire 16 Random number generator

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】  スプールにボンディングワイヤを一端
から他端へ、さらに他端から一端へと往復させて巻取り
、これを繰り返して多層状にしたボンディングワイヤ巻
線において、往復各側のn回目と(n+1)回目のボン
ディングワイヤの交差角を0.03度以上としたことを
特徴とするボンディングワイヤ巻線。
Claim 1: In a bonding wire winding in which a bonding wire is wound on a spool by reciprocating from one end to the other end and then from the other end to one end, and this is repeated to form a multilayer, the nth reciprocation on each side A bonding wire winding characterized in that the crossing angle of the (n+1)th bonding wire is 0.03 degrees or more.
【請求項2】  前記交差角を0.03度以上の一定値
とした請求項1記載のボンディングワイヤ巻線。
2. The bonding wire winding according to claim 1, wherein the crossing angle is a constant value of 0.03 degrees or more.
【請求項3】  前記交差角を0.03度以上の不定値
とした請求項1記載のボンディングワイヤ巻線。
3. The bonding wire winding according to claim 1, wherein the crossing angle is an undefined value of 0.03 degrees or more.
【請求項4】  スプールにボンディングワイヤを一端
から他端へ、さらに他端から一端へと往復させて巻取り
、これを繰り返して多層状にするボンディングワイヤの
巻取方法において、往復各側のn回目と(n+1)回目
のボンディングワイヤの交差角を0.03度以上とする
ことを特徴とするボンディングワイヤの巻取方法。
4. A bonding wire winding method in which a bonding wire is wound on a spool by reciprocating from one end to the other end and then from the other end to one end, and this is repeated to form a multilayer bonding wire. A method for winding a bonding wire, characterized in that the crossing angle between the bonding wires for the first and (n+1)th time is 0.03 degrees or more.
【請求項5】  前記交差角を0.03度以上の一定値
とする請求項4記載のボンディングワイヤの巻取方法。
5. The bonding wire winding method according to claim 4, wherein the crossing angle is a constant value of 0.03 degrees or more.
【請求項6】  前記交差角を0.03度以上の不定値
とする請求項4記載のボンディングワイヤの巻取方法。
6. The bonding wire winding method according to claim 4, wherein the crossing angle is an undefined value of 0.03 degrees or more.
【請求項7】  スプールを該スプールの軸回りに回転
可能に支持するスプール支持部と、前記スプールの近傍
において、ボンディングワイヤを通過可能に支持するワ
イヤ支持部と、前記スプールを回転駆動する回転駆動部
と、前記ワイヤ支持部と前記スプールのうちの少なくと
も一方を、スプールの軸方向に、他方に対して接近又は
離隔せしめるように横送り移動させる横送り駆動部と、
前記回転駆動部の回転運動及び前記横送り駆動部の横送
り運動を制御する制御部とを備え、前記回転駆動部及び
前記横送り駆動部を駆動制御しつつスプールにワイヤを
往復させて巻取るようにしたボンディングワイヤ巻取装
置において、  前記制御部は、前記横送り駆動部の横
送り移動速度を調整して、往復各側のn回目と(n+1
)回目のボンディングワイヤの交差角を0.03度以上
とすることを特徴とする半導体素子のボンディングワイ
ヤの巻取装置。
7. A spool support part that rotatably supports a spool around an axis of the spool, a wire support part that supports a bonding wire so as to be able to pass therethrough in the vicinity of the spool, and a rotation drive that rotationally drives the spool. a cross-feeding drive portion that transversely moves at least one of the wire support portion and the spool in the axial direction of the spool so as to move it toward or away from the other;
A control unit that controls the rotational movement of the rotational drive unit and the lateral movement of the lateral feed drive unit, and the wire is reciprocated on the spool and wound while controlling the rotational drive unit and the lateral feed drive unit. In the bonding wire winding device, the control unit adjusts the traverse movement speed of the traverse feed drive unit, and adjusts the traverse movement speed of the traverse feed drive unit so that the
) A winding device for a bonding wire for a semiconductor device, characterized in that the crossing angle of the second bonding wire is 0.03 degrees or more.
【請求項8】  前記制御部は、前記交差角を0.03
度以上の一定値とするように前記横送り駆動部の横送り
移動速度を調整する請求項7記載のボンディングワイヤ
の巻取装置。
8. The control unit sets the intersection angle to 0.03.
8. The bonding wire winding device according to claim 7, wherein the traverse movement speed of the traverse movement drive unit is adjusted to a constant value equal to or higher than 100.degree.
【請求項9】  前記制御部は、前記交差角を0.03
度以上の不定値とするように前記横送り駆動部の横送り
移動速度を調整する請求項7記載のボンディングワイヤ
の巻取装置。
9. The control unit sets the intersection angle to 0.03.
8. The bonding wire winding device according to claim 7, wherein the traverse movement speed of the traverse movement drive unit is adjusted to an undefined value greater than or equal to 1.
JP2401700A 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor Expired - Fee Related JP2827512B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2401700A JP2827512B2 (en) 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2401700A JP2827512B2 (en) 1990-12-12 1990-12-12 Bonding wire winding, bonding wire winding method and winding device therefor

Publications (2)

Publication Number Publication Date
JPH04351222A true JPH04351222A (en) 1992-12-07
JP2827512B2 JP2827512B2 (en) 1998-11-25

Family

ID=18511537

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0999317A (en) * 1995-10-04 1997-04-15 Nittoku Eng Co Ltd Material winder for wire member
JP2002134548A (en) * 2000-10-24 2002-05-10 Tanaka Electronics Ind Co Ltd Rewinding guide of bonding wire and rewinding method using the same
US7926478B2 (en) 2003-12-25 2011-04-19 A.L.M.T. Corp. Super abrasive grain wire saw winding structure, super abrasive grain wire saw cutting device, and super abrasive grain wire saw winding method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116218U (en) * 1981-01-12 1982-07-19
JPS57190496U (en) * 1981-05-28 1982-12-02
JPS58133836U (en) * 1982-03-03 1983-09-09 日本電気株式会社 Fixing mechanism for input/output equipment
JPH01138422U (en) * 1988-03-15 1989-09-21

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57116218U (en) * 1981-01-12 1982-07-19
JPS57190496U (en) * 1981-05-28 1982-12-02
JPS58133836U (en) * 1982-03-03 1983-09-09 日本電気株式会社 Fixing mechanism for input/output equipment
JPH01138422U (en) * 1988-03-15 1989-09-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0999317A (en) * 1995-10-04 1997-04-15 Nittoku Eng Co Ltd Material winder for wire member
JP2002134548A (en) * 2000-10-24 2002-05-10 Tanaka Electronics Ind Co Ltd Rewinding guide of bonding wire and rewinding method using the same
US7926478B2 (en) 2003-12-25 2011-04-19 A.L.M.T. Corp. Super abrasive grain wire saw winding structure, super abrasive grain wire saw cutting device, and super abrasive grain wire saw winding method

Also Published As

Publication number Publication date
JP2827512B2 (en) 1998-11-25

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