JPH04348237A - Temperature detection element - Google Patents
Temperature detection elementInfo
- Publication number
- JPH04348237A JPH04348237A JP1607791A JP1607791A JPH04348237A JP H04348237 A JPH04348237 A JP H04348237A JP 1607791 A JP1607791 A JP 1607791A JP 1607791 A JP1607791 A JP 1607791A JP H04348237 A JPH04348237 A JP H04348237A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- detection element
- silicon carbide
- carbide fiber
- temperature detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 239000000835 fiber Substances 0.000 claims abstract description 21
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 230000004044 response Effects 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000691 Re alloy Inorganic materials 0.000 description 2
- 229910000629 Rh alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 2
- 229920003257 polycarbosilane Polymers 0.000 description 2
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 2
- LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002074 melt spinning Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920001558 organosilicon polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、例えば800〜150
0℃の高温度下にて常用可能な耐熱性及び応答性に優れ
た温度検出素子に関するものである。[Industrial Application Field] The present invention is applicable to
The present invention relates to a temperature detection element with excellent heat resistance and responsiveness that can be used regularly at temperatures as high as 0°C.
【0002】0002
【従来の技術】従来、温度を検出するための温度検出素
子としては、測温抵抗体、熱電対、セラミックサーミス
タ等が多くの使用目的に使用されているが、これらは一
般的にその常用温度が低いものが多い。[Prior Art] Conventionally, resistance temperature detectors, thermocouples, ceramic thermistors, etc. have been used for many purposes as temperature detection elements for detecting temperature. Many of them are low.
【0003】そこで、比較的高温度側において常用され
るものとして、白金−ロジウム合金を用いた熱電対、タ
ングステン−レニウム合金を用いた熱電対などが数多く
提供され実用化されている〔例えば、工業炉ハンドブッ
ク(日本工業炉協会編、昭和53年版)P.583など
〕。Therefore, many thermocouples using platinum-rhodium alloys, thermocouples using tungsten-rhenium alloys, etc., which are commonly used at relatively high temperatures, have been provided and put into practical use. Furnace Handbook (edited by Japan Industrial Furnace Association, 1978 edition) P. 583 etc.].
【0004】0004
【発明が解決しようとする課題】しかし、上述の周知の
白金−ロジウム合金またはタングステン−レニウム合金
を用いた熱電対等は、上記高温側、より具体的には80
0〜1500℃程度の温度にあっては以下のような問題
があった。[Problems to be Solved by the Invention] However, the above-mentioned well-known thermocouples etc. using platinum-rhodium alloy or tungsten-rhenium alloy are
At temperatures of about 0 to 1500°C, there are the following problems.
【0005】■ 感度が低下する。■ 充分な応答
速度が得られない。■ 耐熱性など、使用雰囲気によ
り連続使用時間に制約が免がれない。■ 高価な材料
を用いるためコスト高になる。■ Sensitivity decreases. ■ Sufficient response speed cannot be obtained. ■ Continuous use time is inevitably limited depending on the environment in which it is used, such as heat resistance. ■ The cost is high because it uses expensive materials.
【0006】近年、特に車輌等内燃機関燃焼ガス等の高
温ガス温度計測、高温炉内温度計測、各種ガス流定点連
続測温などにおいて、上記問題点を解決するような温度
検出素子の提供に対する要求は著しく高い。本発明は、
かかる問題を解決し上記要求に応じることのできる温度
検出素子を提供することを目的とする。[0006] In recent years, there has been a demand for the provision of temperature detection elements that can solve the above-mentioned problems, especially in high-temperature gas temperature measurement such as combustion gas of internal combustion engines such as vehicles, temperature measurement in high-temperature furnaces, continuous temperature measurement at various gas flow points, etc. is significantly high. The present invention
It is an object of the present invention to provide a temperature detection element that can solve these problems and meet the above requirements.
【0007】[0007]
【課題を解決するための手段】本発明は、端子(電極)
間に、繊維直径3〜200μm の炭化ケイ素繊維フィ
ラメントを1〜複数本配列設置したことを特徴とする温
度検出素子である。[Means for Solving the Problems] The present invention provides a terminal (electrode)
This temperature sensing element is characterized in that one or more silicon carbide fiber filaments having a fiber diameter of 3 to 200 μm are arranged in between.
【0008】本発明において使用される炭化ケイ素繊維
としては、ポリカルボシラン、ポリチタノカルボシラン
などの有機ケイ素高分子化合物を溶融紡糸し、ついで不
融化,焼成してなる主としてβ−SiC で構成される
連続長繊維が好ましく使用される。The silicon carbide fiber used in the present invention is made mainly of β-SiC, which is obtained by melt-spinning an organic silicon polymer compound such as polycarbosilane or polytitanocarbosilane, and then making it infusible and firing it. Continuous long fibers are preferably used.
【0009】前記焼成温度は、少なくとも1000℃が
必要で温度検出素子として1000℃〜1500℃の常
用温度を要する場合は、その常用温度まで焼成しておく
ことが必要である。焼成温度が1500℃を超えると、
フィラメントに劣化を生じてしまい好ましくない。The firing temperature must be at least 1000°C, and if the temperature detection element requires a commonly used temperature of 1000°C to 1500°C, it is necessary to perform the firing up to the commonly used temperature. When the firing temperature exceeds 1500℃,
This is not preferable because it causes deterioration of the filament.
【0010】この炭化ケイ素繊維の常温比抵抗は108
〜102 Ω・cm,サーミスタ定数Bは1000〜
3000Kと、常法により十分温度変化を電気的に検出
できるものとなる。[0010] The specific resistance of this silicon carbide fiber at room temperature is 108
~102 Ω・cm, thermistor constant B is 1000~
3000K, which is sufficient to electrically detect temperature changes using conventional methods.
【0011】又、これら炭化ケイ素繊維フィラメントを
固定する端子(電極)は、該繊維に比し、低い比抵抗の
、常用される温度に十分な耐熱性を要するものであれば
よく、この条件に適合した金属材料又は炭素材料の中か
ら適宜選択使用すればよい。[0011] Furthermore, the terminals (electrodes) for fixing these silicon carbide fiber filaments may be of any type as long as they have a lower specific resistance than the fibers and have sufficient heat resistance to the temperatures at which they are commonly used. An appropriate metal material or carbon material may be selected and used.
【0012】端子間に固定する炭化ケイ素繊維フィラメ
ントは、1〜500本で十分で、端子間距離は0.1m
m以上好ましくは0.5〜100mmである。端子間距
離が0.1mm未満となると温度検出用として素子構成
手段が煩雑化する等好ましくない。又これが100mm
を超えると端子間抵抗が大きくなり電気的な検出特性が
低下しやはり好ましくない。[0012] It is sufficient to fix 1 to 500 silicon carbide fiber filaments between the terminals, and the distance between the terminals is 0.1 m.
m or more, preferably 0.5 to 100 mm. If the distance between the terminals is less than 0.1 mm, it is undesirable because the device configuration means for temperature detection becomes complicated. Also this is 100mm
Exceeding this is also undesirable since the resistance between the terminals increases and the electrical detection characteristics deteriorate.
【0013】次に、炭化ケイ素繊維フィラメントの直径
は、200μm 以下であれば十分な検出ができるが、
特に好ましくは30μm 以下であり、少なくとも応答
速度(熱時定数:τ)50msec以下とすることがで
きる。Next, sufficient detection is possible if the diameter of the silicon carbide fiber filament is 200 μm or less;
Particularly preferably, the thickness is 30 μm or less, and the response speed (thermal time constant: τ) can be at least 50 msec or less.
【0014】[0014]
【作用】この発明の温度検出素子においては、3〜20
0μm 径の炭化ケイ素繊維フィラメントが1〜複数本
配列されて居り、該炭化ケイ素繊維が著しく耐熱性に優
れ、かつ適宜な固有抵抗とサーミスタ定数を有すること
、ならびに細い繊維状であることからその熱容量が小さ
く、短時間で雰囲気温度と平衡することになり、上記特
性を示す作用を呈する。[Function] In the temperature detection element of this invention, 3 to 20
One or more silicon carbide fiber filaments with a diameter of 0 μm are arranged, and the silicon carbide fiber has extremely excellent heat resistance, has appropriate specific resistance and thermistor constant, and is thin fibrous, so its heat capacity is high. is small, the temperature reaches equilibrium with the ambient temperature in a short period of time, and the effect exhibits the above-mentioned characteristics.
【0015】[0015]
【実施例】以下実施例を示し本発明を具体的に説明する
。
実施例1〜5
ポリカルボシランを延伸率を変えて溶融紡糸し、径の異
なる紡糸フィラメントを得た。これを200℃,50分
間不融化処理を行なったのち、1200〜1400℃に
て30〜60分焼成し表1に示す特性の炭化ケイ素繊維
フィラメント(組成Si:56wt%,C:28wt%
,O:11wt%,Hなど残部:5wt%)を得た。[Examples] The present invention will be specifically explained below with reference to Examples. Examples 1 to 5 Polycarbosilane was melt-spun with different drawing ratios to obtain spun filaments with different diameters. This was subjected to infusibility treatment at 200°C for 50 minutes, and then fired at 1200 to 1400°C for 30 to 60 minutes to form a silicon carbide fiber filament with the characteristics shown in Table 1 (composition: Si: 56 wt%, C: 28 wt%).
, O: 11 wt%, balance such as H: 5 wt%).
【0016】得られた繊維フィラメント1を50mmに
切断し、各々50本ずつ図1に示すように、アルミナ絶
縁台3により支持された白金製の電極2a,2b間に接
続固定(電極間距離:2mm)して本発明の温度検出素
子を得た。尚図1において、4a,4bは炭素又は黒鉛
製電極ピンである。The obtained fiber filament 1 was cut into 50 mm pieces, and 50 pieces each were connected and fixed between platinum electrodes 2a and 2b supported by an alumina insulating stand 3 (distance between the electrodes: 2 mm) to obtain the temperature sensing element of the present invention. In FIG. 1, 4a and 4b are electrode pins made of carbon or graphite.
【0017】次にこれを電気炉内に設置し、1200℃
まで昇温し、同温度に保持したまま外部から電気炉のの
ぞき穴を通してアーク光をシャッター速度5×10−5
sec で照射し、熱時定数(平衡値の63%まで電圧
が変化するのに要する時間)を測定した。その結果を同
表1に示す。Next, this was placed in an electric furnace and heated to 1200°C.
While keeping the temperature at the same temperature, arc light is passed through the peephole of the electric furnace from the outside at a shutter speed of 5 x 10-5.
sec and the thermal time constant (the time required for the voltage to change to 63% of the equilibrium value) was measured. The results are shown in Table 1.
【0018】[0018]
【表1】[Table 1]
【0019】上表1の結果によれば、実施例は特に応答
速度等に優れた特性を示すことが明らかであった。さら
に、同電気炉を使用して1200℃までの昇降温をくり
返し、抵抗変化による温度検知を行ないつつ、検出素子
の劣化状況を測定した。その結果100回のくり返し昇
温においても、検知性能に異常はなくまた素子の劣化も
なかった。According to the results shown in Table 1 above, it was clear that the examples exhibited excellent characteristics, particularly in response speed and the like. Furthermore, using the same electric furnace, the temperature was repeatedly raised and lowered to 1200° C., and the state of deterioration of the detection element was measured while detecting the temperature by resistance change. As a result, even when the temperature was raised 100 times, there was no abnormality in the detection performance and no deterioration of the element.
【0020】比較例
市販の白金−白金ロジウム熱電対(線径100μm )
を熱時定数を小さくするために保護管を設けることなく
、実施例1〜5と同一の方法で熱時定数を測定した結果
は230[msec]であった。また実施例1〜5と同
一の方法で熱電対の検知性能および劣化を測定した結果
7回のくりかえし昇温において異常となり使用不可能と
なった。Comparative Example Commercially available platinum-platinum rhodium thermocouple (wire diameter 100 μm)
The thermal time constant was measured in the same manner as in Examples 1 to 5 without providing a protective tube to reduce the thermal time constant, and the result was 230 [msec]. In addition, the detection performance and deterioration of the thermocouple were measured in the same manner as in Examples 1 to 5, and as a result, it became abnormal after seven repeated temperature rises and became unusable.
【0021】[0021]
【発明の効果】この発明の温度検出素子は、3〜200
μm 径の炭化ケイ素繊維フィラメントが1〜複数本配
列されてなり、該炭化ケイ素繊維が著しく耐熱性に優れ
、かつ適宜な固有抵抗とサーミスタ定数を有すること、
ならびに細い繊維状であることからその熱容量が小さく
、短時間で雰囲気温度と平衡することになり、結果的に
上記温度特性及び応答特性を著しく改善し得るのであり
、その工業的利用効果は非常に大きい。Effect of the invention: The temperature detection element of this invention has a temperature of 3 to 200
one to a plurality of silicon carbide fiber filaments having a diameter of μm are arranged, and the silicon carbide fiber has extremely excellent heat resistance and has an appropriate specific resistance and thermistor constant;
In addition, since it is thin fibrous, its heat capacity is small, and it reaches equilibrium with the ambient temperature in a short period of time.As a result, the above-mentioned temperature characteristics and response characteristics can be significantly improved, and its industrial use effect is extremely high. big.
【図1】本発明温度検出素子の一実施態様の斜面図であ
る。FIG. 1 is a perspective view of one embodiment of the temperature detection element of the present invention.
1 炭化ケイ素フィラメント 2 電極 1 Silicon carbide filament 2 Electrode
Claims (1)
0μm の炭化ケイ素繊維フィラメントを1〜複数本配
列設置したことを特徴とする温度検出素子。[Claim 1] Between terminals (electrodes), fiber diameter 3 to 20
A temperature detection element characterized by having one or more silicon carbide fiber filaments of 0 μm arranged in an array.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1607791A JPH04348237A (en) | 1991-01-14 | 1991-01-14 | Temperature detection element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1607791A JPH04348237A (en) | 1991-01-14 | 1991-01-14 | Temperature detection element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04348237A true JPH04348237A (en) | 1992-12-03 |
Family
ID=11906497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1607791A Withdrawn JPH04348237A (en) | 1991-01-14 | 1991-01-14 | Temperature detection element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04348237A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6143207A (en) * | 1996-09-18 | 2000-11-07 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Wide-range thermistor material and method for producing it |
DE102005014106A1 (en) * | 2005-03-22 | 2006-09-28 | E.G.O. Elektro-Gerätebau GmbH | A method for manufacturing a fast response accurate temperature sensor has two conductors between which a thin wire is connected assembled on a ceramic carrier |
-
1991
- 1991-01-14 JP JP1607791A patent/JPH04348237A/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6143207A (en) * | 1996-09-18 | 2000-11-07 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Wide-range thermistor material and method for producing it |
DE102005014106A1 (en) * | 2005-03-22 | 2006-09-28 | E.G.O. Elektro-Gerätebau GmbH | A method for manufacturing a fast response accurate temperature sensor has two conductors between which a thin wire is connected assembled on a ceramic carrier |
DE102005014106B4 (en) * | 2005-03-22 | 2014-02-13 | E.G.O. Elektro-Gerätebau GmbH | Temperature sensor and method of manufacture |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980514 |