JPH0434783A - Negative pressure slider and its production - Google Patents

Abstract

PURPOSE:To obtain stable floating characteristic with the simple control of the yield of positive and negative pressures by engraving a small groove on the boundary between a positive pressure rail and a negative pressure generation part. CONSTITUTION:Positive pressure rails 16 are provided on both surfaces of the opposite surface to a magnetic disk, and a small groove 13 is formed on the boundary between the positive pressure rail 16 and a negative pressure generation part 18 in a negative pressure slider forming the negative generation part 18 while surrounding the positive pressure rail 16 and a cross rail 17 by linking the positive rail 16 with the cross rail 17. The positive pressure and the negative pressure can be clearly generated by the existence of this small groove 13. Thus, the amount of floating can be easily and surely controlled, further, the small groove 13 can collect dust generated at the time of starting the contact with the magnetic disk of the magnetic head.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a negative pressure slider and a method for manufacturing the same.

"Prior Art" FIGS. 10(a) to 10(d) show a conventional negative pressure slider manufacturing method in order of steps.

First, as shown in FIG.
02 is polished to a mirror surface.

Next, as shown in FIG. 10Cb), a mask 1 is placed on the mirror-polished surface 102 of the material 101 of the negative pressure slider.
03 and ion etching is performed to a depth of 2 to 10 mm to provide a negative pressure generating portion 108. Here, as the mask 103, a sputtered film of Cr or Ti is used. The mask 103 is formed into a desired pattern by photolithography.

Next, as shown in FIG. 10(C), the mask 103 is removed.

Furthermore, as shown in FIG. 10(d), the cross rail 1
Cut out the notch part 105 on the front part of 04, and
06 is formed by machining. A negative pressure generating section 108 is surrounded on three sides by the cross rail 104 and the positive pressure rail 107. An air flow flows in between the opposing magnetic disk and the positive pressure rail 107 and floats, causing the negative pressure generating section 1
At 08, negative pressure is generated to reduce the flying height.

"Problems to be Solved by the Invention" In the conventional method for manufacturing a negative pressure slider described above, etching of the negative pressure generating section 108 takes a very long time, resulting in poor productivity.

It is also possible to form the cross rail 104 and the negative pressure generating part 10 by machining instead of the conventional etching process.
8, and the boundary between the positive pressure rail 107 and the negative pressure generating section 10
8 cannot be precisely ground, the amount of positive pressure generated and the amount of negative pressure generated cannot be limited, and stable flying characteristics cannot be obtained.

"Means for Solving the Problems" In view of the above circumstances, the present invention provides a manufacturing method that improves the productivity of negative pressure sliders, and further provides control of the amount of positive pressure generated and the amount of negative pressure generated. The purpose of the present invention is to provide a negative pressure slider that is easy to operate and provides stable flying characteristics.

In order to achieve the above object, the present invention provides positive pressure rails on both sides of the surface facing the magnetic disk, connects the positive pressure rails with cross rails, and surrounds the positive pressure rails with the cross rails to create a negative pressure rail. The negative pressure slider is characterized in that a small groove is carved in the boundary between the positive pressure rail and the negative pressure generating part in the negative pressure slider having a pressure generating part formed therein.

Furthermore, a method for manufacturing a negative pressure slider in which positive pressure rails are provided on both sides of the surface facing the magnetic disk, the positive pressure rails are connected by a cross rail, and a negative pressure generating section is formed by surrounding the positive pressure rail and the cross rail. The trailing has a negative pressure generating section machined in the center so that the positive pressure rails are located on both sides, and a small groove is carved at the boundary between the positive pressure rail and the negative pressure generating section. This method of manufacturing a negative pressure slider includes the step of joining an edge side chip and a leading edge side chip on which a cross rail is formed.

"Embodiments" The present invention will be described in detail below based on specific embodiments shown in the accompanying drawings.

FIG. 1 shows the manufacturing process of a negative pressure slider according to the present invention.

First, we will describe the creation of the leading edge side chip.

As shown in FIG. 1, grooves 2 are carved at appropriate intervals in a rectangular parallelepiped-shaped material 1 made of calcium titanate or the like by machining such as grinding.

Next, it is cut out at the location indicated by the two-dot chain line in FIG. 1 to produce the leading edge side chip 3 as shown in FIG.

Subsequently, as shown in FIG. 3, the joint surface 3a of the leading edge side chip 3 and the trailing edge side chip is lapped.

Next, the production of the trailing edge side chip will be described.

As shown in FIG. 4, grooves 12 are carved at appropriate intervals in a rectangular parallelepiped-shaped material 11 made of calcium titanate or the like by machining such as grinding. A small groove 13 is carved by grinding on the groove bottom 12a side at the connection portion between the groove bottom 12a and the groove inner wall 12b.

Due to the presence of the small mantle 13, the connecting portion between the groove bottom 12a of the groove 12 and the groove inner wall 12b is not formed in an arc shape.

Since this connecting portion is not arc-shaped, the positive pressure generating portion and the negative pressure generating portion are clearly distinguished, and the positive pressure and negative pressure are generated adjacent to each other.

Subsequently, as shown in FIG. 5, a glass sputtered film 14 is formed on the joint surface with the leading edge side chip 3.

This glass sputtered film 14 may be provided only on the bonding surface of the chip 3 on the leading edge side instead of on the end face of the chip 15 on the trailing edge side.

Next, the trailing edge side chip 15 as shown in FIG. 6 is created by cutting out at the location indicated by the two-dot chain line in FIG. 4.

As shown in FIG. 7, a negative pressure slider 19 is formed by joining the leading edge side chip 3 and the trailing edge side chip 15. In this case, the positive pressure rail 16,
A cross rail 17 and a negative pressure generating section 18 are formed.

An air flow flows between the facing magnetic disk and the positive pressure rail 16, causing the magnetic disk to float, and negative pressure is generated in the negative pressure generating section 18 to reduce the flying height.

Next, as shown in FIG. 8, the air bearing surface (ABS surface) 20 side of the negative pressure slider 19 formed by joining the leading edge side chip 3 and the trailing edge side chip 15 is the surface facing the magnetic disk. Chamfer 21 is processed on both sides.

Subsequently, as shown in FIG. 9, the ABS surface 20 is lapped.

In the present invention, the negative pressure generating part 18 is processed by grinding, and the leading edge side chip 3 and the trailing edge side chip 15 are separately provided, and the trailing edge side chip 15 joint surface or the leading edge By forming a glass sputtered film 14 on the joint surface of the side chip 3 and fusing the glass sputtered film 14, the leading edge side chip 3 and the trailing edge side chip 1 are bonded.
5 is glued together, and a small groove 13 is formed at the boundary between the positive pressure rail 16 and the negative pressure generating section 18.

By adopting this process, negative pressure sliders can be produced without using ion etching, which requires a long time.
Productivity will be greatly improved.

Another possibility is to fuse the bonding surface with glass or resin adhesive, as in the magnetic head described in Japanese Patent Application Laid-open No. 61-240487, but if the glass does not flow in at all or the leading edge side chip A gap may be generated between the tip and the tip on the trailing edge side, worsening the flying posture.

Furthermore, if the negative pressure generating part of 2 to 10n is processed by grinding,
An arc R is generated at the bottom corner due to grinding, and the positive pressure generating section and the negative pressure generating section cannot be clearly distinguished, resulting in large variations in the width of the positive pressure rail.

[Effects of the Invention] According to the method for manufacturing a negative pressure slider of the present invention, the negative pressure generating portion of the negative pressure slider is processed by grinding instead of etching, so that the productivity of the negative pressure slider is improved.

Furthermore, the present invention provides the following advantages:) A glass sputtered film is formed on the bonding surface of the trailing edge side chip or the leading edge side chip, and by fusing the glass sputtered film, the trailing edge side chip and the leading edge side chip are bonded. Enables stable bonding with no gaps between the chip and the chip.

Furthermore, according to the negative pressure slider of the present invention, there is a small groove at the boundary between the positive pressure rail and the negative pressure generating part, and the existence of this small groove allows positive pressure and negative pressure to be clearly generated, and the flying height can be reduced. Control is easy and reliable, and furthermore, the small groove can accommodate dust generated when the magnetic head starts contacting the magnetic disk.

[Brief explanation of drawings]

Figures 1 to 9 show the method of manufacturing this negative pressure slider.
~Figure 3 shows the manufacturing process of the trailing edge side chip.
Fig. 1 is a perspective view of the groove cut into the material, Fig. 2 is an end view of the leading edge chip cut out from the material, and Fig. 3 is the relationship between the leave-behind chip and the trailing edge chip. An end view showing the lapped surface of the joint surface, and Figures 4 to 6 are process diagrams for creating the trailing edge side chip, and Figure 4 shows a state in which grooves and small grooves are carved in the trailing edge side chip material. Figure 5 is a rear view showing a glass sputtered film formed on the joint surface of the trailing edge side chip with the leading edge side chip, and Figure 6 is a perspective view showing the trailing edge side chip compared to the material. FIG. 7 is a plan view showing the cut-out state, and FIG.
) is a plan view of the same, (b) is a side view of (a), (C) is a right side view of (a), and Figure 8 shows the trailing edge side chip and the leading edge. This is a diagram showing chamfer processing of a negative pressure slider with side chips joined.
FIG. 9(a) is a plan view of the same, FIG. 9(b) is a right side view of FIG. 9(a), FIG. 9 is a diagram showing the wrap of the air bearing surface, and FIG. Figure (b) is a right side view of figure (a), Figure 10 is a perspective view showing the processing state of a conventional slider, figure (a) is a perspective view of the material, and figure (b) is a mask. (C) is a perspective view with the mask removed. Figure (D) is a perspective view with the notch cut out and the tapered surface cut out. It is a perspective view of the formed state. 16... Positive pressure rail 17... Cross rail 18... Negative pressure generating section 19... Negative pressure slider 15... Trailing edge side tip 3... Leading edge side tip 12... Mizo 13...Komizo Applicant Kyocera Co., Ltd. Agent Yoshiteru Takagi Figure 1 Figure 2 Figure 3 Figure 4 Figure 10 (a)

Claims (2)

[Claims] (1) In a negative pressure slider in which positive pressure rails are provided on both sides of the surface facing the magnetic disk, the positive pressure rails are connected by a cross rail, and a negative pressure generating section is formed by surrounding the positive pressure rail and the cross rail. . A negative pressure slider, characterized in that a small groove is carved at the boundary between the positive pressure rail and the negative pressure generating section. (2) A negative pressure slider in which a positive pressure rail is provided on the screen facing the magnetic disk, the positive pressure rail is connected by a cross rail, and a negative pressure generating section is formed by surrounding the positive pressure rail and the cross rail. This is a manufacturing method in which a negative pressure generating section is machined in the center so that positive pressure rails are located on both sides, and a small groove is carved at the boundary between the positive pressure rail and the negative pressure generating section. A method for manufacturing a negative pressure slider comprising the step of joining a ring edge side chip and a leading edge side chip on which a cross rail is formed.