JPH04347571A - Linear pulse motor - Google Patents

Abstract

PURPOSE:To provide a linear pulse motor which shows very small change of a driving force even when thickness of a slit plate fixed on a base plate is changed. CONSTITUTION:Since linear guides 3 are fixed on a stator base plate 1 in both sides of slit plates 2, even if thickness of slit plates 2 changes due to fluctuation of material or place of attachment, change of air gap between the slit plates 2 and a mover 5 is very small and thereby change of a driving force is also very small.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention is applicable to robots, machine tools,
The present invention relates to a linear pulse motor that can be used for transporting semiconductor manufacturing equipment, etc.

0002

BACKGROUND OF THE INVENTION In recent years, the range of applications of linear pulse motors has been gradually expanding due to their simple structure and higher reliability than wires or pulleys for obtaining linear motion. A conventional linear pulse motor will be explained below. FIG. 3 shows the structure of a conventional linear pulse motor, and FIG. 4 is a view taken along the arrow in FIG. In FIGS. 3 and 4, reference numeral 1 denotes a stator base, which is made of a magnetic material. Reference numeral 2-1 denotes a slit plate, on which groove-shaped magnetic pole teeth are formed at a constant pitch in the longitudinal direction, and is fixed to the stator base 1. 3 is a linear guide, which is fixed to the stator base 1 at mutually parallel positions. 4
is a slider, which is fitted into the linear guide 3 and runs (two on one side, total of four). 5 is a mover, which is fixed to the slider 4 and is connected to the slit plate 2-1 by an air gap g1.
They are facing each other. Numeral 5-1 is a coil, and the mover 5 is equipped with a plurality of coils, and by energizing them in order, the mover 5 generates thrust between it and the slit plate 2-1.
It runs guided by a linear guide 3.

0003

However, in the above-mentioned conventional configuration, although dimensional changes other than the thickness of the slit plate 2-1 can be ignored, the thickness of the slit plate 2-1 varies from part to part, There is a gradual change in the longitudinal direction (t1~
t2), the air gap g1 changes (with a variation of approximately ±30 μm), and as a result, the thrust force of the mover 5 varies depending on the motor or the position of the mover (with a variation of ±50%). Ta.

The present invention has been made to solve the above-mentioned conventional problems, and it is an object of the present invention to provide a linear pulse motor that can stably obtain thrust even if the thickness of the slit plate changes.

[0005]

[Means for Solving the Problems] In order to achieve this object, the linear pulse motor of the present invention has a linear guide fixed on a slit plate.

[0006]

[Operation] With this structure, even if the thickness of the slit plate changes, the linear guide is fixed on top of the slit plate, so the air gap change can be minimized.

[0007]

Embodiment An embodiment of the present invention will be described below with reference to FIG. FIG. 2 is a view taken along the arrows in FIG. 1 and 2, a slit plate 2 has groove-shaped magnetic pole teeth formed at a constant pitch in the longitudinal direction, and is fixed to the stator base 1. As shown in FIG. 3 is a linear guide,
They are fixed on the slit plate 2 at mutually parallel positions. Reference numeral 4 denotes a slider, which is fitted into the linear guide 3 and runs (two on one side, a total of four sliders). 5 is a mover, which is fixed to the slider 4 and is separated from the slit plate 2 by an air gap g2.
They are facing each other. A plurality of coils 5-1 are provided in the mover 5, and by energizing them in order, the mover 5 generates a thrust between it and the slit plate 2, and is guided by the linear guide 3 to travel.

Even if the plate thickness t3 of the slit plate 2 changes (±
(about 30 μm), and the accuracy of other parts is several μm, so the air gap g2 is secured to be about 50 to 60 μm.
As a result, a linear pulse motor with stable thrust (with a variation of approximately ±10%) can be obtained.

As described above, according to this embodiment, by fixing the linear guide 3 to the stator base 1 via the slit plate 2, the variation in the air gap g2 is extremely small, and therefore the variation in the thrust force is extremely reduced. can do.

0010

As is clear from the above description, the present invention makes it possible to realize an excellent linear pulse motor in which the variation in air gap is extremely small, and therefore the variation in thrust is very small.

[Brief explanation of the drawing]

[Fig. 1] A perspective view of a linear pulse motor in an embodiment of the present invention.

[Figure 2] View from the arrow in Figure 1

[Figure 3] Perspective view of a conventional linear pulse motor

[Figure 4] Arrow view in Figure 3

[Explanation of symbols]

1 Stator base 2 Slit plate 3 Linear guide 4 Slider 5 Mova 5-1 Coil

Claims (1)

[Claims] Claim 1: a stator base; a slit plate fixed on the stator base; on which groove-shaped magnetic pole teeth are formed at a constant pitch in the longitudinal direction; and a linear plate fixed on the slit plate. A guide, a slider that fits into this linear guide and can run in the longitudinal direction, is fixed to this slider, faces the slit plate with a gap in between, and generates thrust between it and the magnetic pole teeth of the slit plate. A linear pulse motor with a mover.