JPH0434712A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0434712A JPH0434712A JP14071990A JP14071990A JPH0434712A JP H0434712 A JPH0434712 A JP H0434712A JP 14071990 A JP14071990 A JP 14071990A JP 14071990 A JP14071990 A JP 14071990A JP H0434712 A JPH0434712 A JP H0434712A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- permeability
- magnetic head
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 80
- 239000010409 thin film Substances 0.000 title claims abstract description 23
- 239000000696 magnetic material Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 43
- 239000011241 protective layer Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 4
- 230000035699 permeability Effects 0.000 abstract description 18
- 230000000694 effects Effects 0.000 abstract description 7
- 238000009413 insulation Methods 0.000 abstract 5
- 238000010586 diagram Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、薄膜形成技術の応用により製造されるWI膜
磁気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a WI film magnetic head manufactured by applying thin film forming technology.
「従来の技術」
この種の薄膜磁気ヘッドの一従来例を第5図に示す。こ
の薄膜磁気ヘッドは、底面1a(第5図においては上面
として示されている)を磁気ディスク等の媒体に向けて
配されるスライダlの前面部に、フォトリングラフィ技
術により薄膜磁気ヘッド素子2を設けてなるものである
。"Prior Art" A conventional example of this type of thin film magnetic head is shown in FIG. This thin-film magnetic head has a thin-film magnetic head element 2 mounted on the front surface of a slider l with its bottom surface 1a (shown as the top surface in FIG. 5) facing a medium such as a magnetic disk. It is made up of the following.
その薄膜磁気ヘッド素子2は、第6図にその要部の詳細
断面を示すように、上記スライダlの筋面1bを基板と
してその表面に、絶縁層3、下部磁性層(下部コア)4
、ギャップ層5、絶縁層6で被包されたコイル導体7、
上部磁性層(上部コア)8、保護層(オーバーコート層
)9を順次積層してなるものであって、各磁性層4,8
の先端部をギャップ層5を介して重ね合わせることでそ
れら磁性層4,8の先端部を対の磁極(ボール)10.
11となしたものである。As shown in FIG. 6, which shows a detailed cross-section of the main part, the thin-film magnetic head element 2 uses the striped surface 1b of the slider 1 as a substrate, and has an insulating layer 3, a lower magnetic layer (lower core) 4 on the surface thereof.
, a gap layer 5, a coil conductor 7 encapsulated with an insulating layer 6,
It is formed by sequentially laminating an upper magnetic layer (upper core) 8 and a protective layer (overcoat layer) 9, and each magnetic layer 4, 8
By overlapping the tips of the magnetic layers 4 and 8 with the gap layer 5 in between, the tips of the magnetic layers 4 and 8 form a pair of magnetic poles (balls) 10.
11.
この場合、下部磁性層4および上部磁性層8はたとえば
パーマロイ等の強磁性材料により形成され、絶縁層3お
よび保護層9はいずれもたとえばA I20、.5i0
2等の酸化物からなる非磁性材料により形成されている
。In this case, the lower magnetic layer 4 and the upper magnetic layer 8 are made of a ferromagnetic material such as permalloy, and the insulating layer 3 and the protective layer 9 are made of a material such as AI20, . 5i0
It is made of a non-magnetic material made of an oxide such as No. 2.
「発明が解決しようとする課題」
ところで、上記従来の薄膜磁気ヘッドは、その磁気的な
特性に起因して次のような問題点を有している。"Problems to be Solved by the Invention" By the way, the conventional thin film magnetic head described above has the following problems due to its magnetic characteristics.
すなわち、この薄膜磁気ヘッドは、第7図および第8図
に模式的に示すように、各磁性層4.8の透磁率μmが
十分に大きく、他の部分の透磁率μ2は小さくされ(通
常、CGS単位系においてはμ2=1とされる)、した
がって、透磁率μの分布は、磁極端12.13(磁性層
4.8の先端における絶縁層3および保護層9との境界
)において急激にかつ大きく変化するものとなっている
。そしト
て、そのために、この薄膜磁気ヘッドにおける記録磁場
の分布は、第9図に示すように磁極端12゜13の位置
において大きなデイツプが生じるものとなり、しかも、
それら磁極端12.13はギャップと平行となっている
ので、磁極端12.13が疑似ギャップとなってしまっ
ていわゆるコンタ−効果が顕著に生じ、その結果、第1
0図に示すように周波数特性の波打ち現象が生じてしま
うものであった。そして、そのために、隣接波形に対し
て悪影響が及んで誤り率が増大し、高記録密度化を図る
上での障害となっていた。That is, in this thin film magnetic head, as schematically shown in FIGS. 7 and 8, the magnetic permeability μm of each magnetic layer 4.8 is sufficiently large, and the magnetic permeability μ2 of other parts is small (usually , μ2=1 in the CGS unit system), therefore, the distribution of magnetic permeability μ becomes sharp at the magnetic pole tip 12.13 (the boundary between the insulating layer 3 and the protective layer 9 at the tip of the magnetic layer 4.8). Things are changing rapidly and dramatically. Therefore, the distribution of the recording magnetic field in this thin film magnetic head has a large dip at the positions of the magnetic pole tips 12° and 13, as shown in FIG.
Since these magnetic pole tips 12.13 are parallel to the gap, the magnetic pole tips 12.13 become a pseudo gap, and a so-called contour effect occurs significantly, and as a result, the first
As shown in Figure 0, a wavy phenomenon of frequency characteristics occurred. As a result, adjacent waveforms are adversely affected and the error rate increases, which is an obstacle to achieving higher recording density.
本発明は上記の事情に鑑みてなされたもので、より一層
の高記録密度化を図ることのできる薄膜磁気ヘッドを提
供することを目的としている。The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a thin film magnetic head that can achieve even higher recording density.
「課題を解決するだめの手段」
本発明は、基板の表面に、絶縁層、下部磁性層、ギャッ
プ層、上部磁性層、保護層が順次積層されて形成されて
なる薄膜磁気ヘッドにおいて、前記絶縁層および保護層
を、それぞれ磁性材料、もしくは磁性材料を添加した非
磁性材料により形成してなることを特徴としている。"Means for Solving the Problem" The present invention provides a thin film magnetic head in which an insulating layer, a lower magnetic layer, a gap layer, an upper magnetic layer, and a protective layer are sequentially laminated on the surface of a substrate. It is characterized in that the layer and the protective layer are each made of a magnetic material or a nonmagnetic material added with a magnetic material.
「作用」
本発明の薄膜磁気ヘッドでは、下部磁性層、上部磁性層
にそれぞれ隣接している絶縁層および保護層が、それぞ
れ磁性材料、もしくは磁性材料が添加された非磁性材料
により形成されていることにより、それらの透磁率の値
は、非磁性材料により形成されている従来の場合に比し
て大きなものとなっている。これによって、磁極端にお
ける透磁率の差が従来のものに比して低減し、その結果
、磁極端における磁場のデイツプが解消してコンタ−効
果が抑制され、周波数特性の波打ち現象が解消する。"Function" In the thin film magnetic head of the present invention, the insulating layer and the protective layer adjacent to the lower magnetic layer and the upper magnetic layer are respectively formed of a magnetic material or a non-magnetic material to which a magnetic material is added. As a result, their magnetic permeability values are larger than in conventional cases made of non-magnetic materials. As a result, the difference in magnetic permeability at the pole tip is reduced compared to the conventional one, and as a result, the dip in the magnetic field at the pole tip is eliminated, the contour effect is suppressed, and the waving phenomenon in the frequency characteristics is eliminated.
「実施例」
以下、本発明に係る薄膜磁気ヘッドの一実施例を第1図
〜第4図を参照して説明する。"Embodiment" Hereinafter, an embodiment of the thin film magnetic head according to the present invention will be described with reference to FIGS. 1 to 4.
本実施例の薄膜磁気ヘッドは、第5図および第6図に示
した従来のものと同様の構造とされたものであるが、本
実施例においては、絶縁層3および保護層9が、いずれ
も弱磁性材料(たとえばNi−Znフェライト)、もし
くは磁性材料が添加された非磁性材料(たとえばA 1
.03にN1、Co、Fe等を添加したもの)により形
成されたものとなっている。それら絶縁層3および保護
層9を形成するには、上記のような材料をターゲットと
してそれを基板lの表面および上部磁性層8の表面に直
接的にスパッタすれば良い。The thin film magnetic head of this embodiment has a structure similar to that of the conventional one shown in FIGS. 5 and 6, but in this embodiment, the insulating layer 3 and the protective layer 9 are Also, weakly magnetic materials (e.g. Ni-Zn ferrite) or non-magnetic materials doped with magnetic materials (e.g. A1
.. 03 with N1, Co, Fe, etc. added thereto). In order to form the insulating layer 3 and the protective layer 9, the materials mentioned above may be used as a target and sputtered directly onto the surface of the substrate 1 and the surface of the upper magnetic layer 8.
上記の薄膜磁気ヘッドでは、絶縁層3および保護層9を
上記のような材料により形成したことによって、それら
絶縁層3および保護層9の透磁率μ3の値は第2図に示
すように非磁性材料により形成する場合に比して大きな
ものとなり、その結果、絶縁層3と下部磁性層4の境界
面における透磁率の差、上部磁性層8と保護層9の境界
面における透磁率の差は従来のものに比して自ずと小さ
くなる。これによって、従来においては生じていた記録
磁場のデイツプが第3区に示すよ)に生じることがなく
、したがって、従来においては顕著に生じていたコンタ
−効果が抑制され、その結果、第4図に示すように周波
数特性の波打ちが解消されて優れた周波数特性が得られ
る。そして、そのために、隣接波形に対する悪影響が一
解消されて、より一層の高記録密度化を図ることができ
るものとなっている。In the thin film magnetic head described above, since the insulating layer 3 and the protective layer 9 are formed of the above materials, the value of the magnetic permeability μ3 of the insulating layer 3 and the protective layer 9 becomes non-magnetic as shown in FIG. As a result, the difference in magnetic permeability at the interface between the insulating layer 3 and the lower magnetic layer 4 and the difference in magnetic permeability at the interface between the upper magnetic layer 8 and the protective layer 9 are It is naturally smaller than the conventional one. As a result, the dip in the recording magnetic field that occurred in the past does not occur (as shown in Section 3), and therefore the contour effect that occurred noticeably in the past is suppressed, and as a result, as shown in FIG. As shown in the figure, the waving in the frequency characteristics is eliminated and excellent frequency characteristics are obtained. As a result, the adverse effects on adjacent waveforms are eliminated, making it possible to achieve even higher recording density.
「発明の効果」
以上で詳細に説明したように、本発明の薄膜磁気ヘッド
は、絶縁層および保護層を、それぞれ磁性材料、もしく
は磁性材料を添加した非磁性材料により形成してなるも
のであるから、絶縁層と下部磁性層との透磁率の差、保
護層と上部絶縁層との透磁率の差が小さくなり、このた
め、記録磁場にデイツプが生じることがなくなってコン
タ−効果が抑制され、その結果、優れた周波数特性を得
ることができ、ひいてはより一層の高記録密度化を図る
ことができる、という効果を奏する。"Effects of the Invention" As explained in detail above, in the thin film magnetic head of the present invention, the insulating layer and the protective layer are each made of a magnetic material or a nonmagnetic material added with a magnetic material. As a result, the difference in magnetic permeability between the insulating layer and the lower magnetic layer and the difference in magnetic permeability between the protective layer and the upper insulating layer become smaller, and therefore, dips do not occur in the recording magnetic field and the contour effect is suppressed. As a result, it is possible to obtain excellent frequency characteristics, and as a result, it is possible to achieve an even higher recording density.
第1図〜第4図は本発明に係る薄膜磁気ヘッドの一実施
例を説明するだめの図であって、第1図はこの薄膜磁気
ヘッドの要部を模式的に示した図、第2図はその透磁率
の分布を示す図、第3図は記録磁場の分布を示す図、第
4図は周波数特性を示す図である。
第5図〜第10図は薄膜磁気ヘッドの一従来例を示すも
ので、第5図は全体概略構成を示す斜視図、第6図は薄
膜磁気ヘッド素子の要部拡大断面図、第7図は要部を模
式的に示した図、第8図は透磁率の分布を示す図、第9
図は記録磁場の分布を示す図、第10図は周波数特性を
示す図である。
5・・・・・・ギャップ層、8・・・・・・上部磁性層
、9・・・・・・保
護層、lo、11・・・・・・磁極、
2.13・・・・・・磁極端、
μ(μm、μ2.μ、)・・・・・・透磁率。1 to 4 are diagrams for explaining one embodiment of the thin film magnetic head according to the present invention, and FIG. 1 is a diagram schematically showing the main parts of this thin film magnetic head, and FIG. FIG. 3 shows the distribution of magnetic permeability, FIG. 3 shows the distribution of the recording magnetic field, and FIG. 4 shows the frequency characteristics. 5 to 10 show a conventional example of a thin-film magnetic head, in which FIG. 5 is a perspective view showing the overall schematic structure, FIG. 6 is an enlarged cross-sectional view of essential parts of the thin-film magnetic head element, and FIG. 7 is a diagram schematically showing the main part, Figure 8 is a diagram showing the distribution of magnetic permeability, and Figure 9 is a diagram showing the distribution of magnetic permeability.
The figure shows the distribution of the recording magnetic field, and FIG. 10 shows the frequency characteristics. 5...Gap layer, 8...Top magnetic layer, 9...Protective layer, lo, 11...Magnetic pole, 2.13...・Magnetic tip, μ (μm, μ2.μ,)...Magnetic permeability.
Claims (1)
磁性層、保護層が順次積層されて形成されてなる薄膜磁
気ヘッドにおいて、前記絶縁層および保護層を、それぞ
れ磁性材料、もしくは磁性材料を添加した非磁性材料に
より形成してなることを特徴とする薄膜磁気ヘッド。In a thin film magnetic head in which an insulating layer, a lower magnetic layer, a gap layer, an upper magnetic layer, and a protective layer are sequentially laminated on the surface of a substrate, the insulating layer and the protective layer are each made of a magnetic material or a magnetic material. A thin film magnetic head characterized in that it is formed of a nonmagnetic material doped with.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14071990A JP2731449B2 (en) | 1990-05-30 | 1990-05-30 | Thin film magnetic head |
US07/707,730 US5146379A (en) | 1990-05-30 | 1991-05-30 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14071990A JP2731449B2 (en) | 1990-05-30 | 1990-05-30 | Thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0434712A true JPH0434712A (en) | 1992-02-05 |
JP2731449B2 JP2731449B2 (en) | 1998-03-25 |
Family
ID=15275119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14071990A Expired - Fee Related JP2731449B2 (en) | 1990-05-30 | 1990-05-30 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2731449B2 (en) |
-
1990
- 1990-05-30 JP JP14071990A patent/JP2731449B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2731449B2 (en) | 1998-03-25 |
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