JPH04343000A - Continuous operation type sor device - Google Patents

Abstract

PURPOSE:To allow continuous operation of a SOR utilization system, which uses SOR generated by accumulation ring. CONSTITUTION:Two accumulation rings 22, 22a are installed for one incidence device 17, and for six photo-exposure devices 28, six beam channels 26, 26a are installed at the accumulation rings 22, 22a, wherein the exposure devices 28 and beam channels 26, 26a are mounted removably with the aid of flanges 29, 34. Even though one of the accumulation rings has stopped, all exposure devices 28 are connected to the beam channel of the other accumulation ring, and thus the rate of device service is enhanced. Also continuous operation can be ensured by making maintenance and repair while accumulation ring is at a standstill, which should further enhance the rate of service.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] This invention relates to a continuous operation type SOR device that is capable of continuously operating an SOR utilization system such as an exposure device that utilizes SOR (synchrotron radiation) generated by a synchrotron. It is something.

0002

[Prior Art] In recent years, synchrotrons have been developed as relatively small particle accelerators with a diameter of 10 m or less, and synchrotrons are being developed that use low-energy injection devices and have advantages such as low radiation generation and cost reduction. Synchrotron radiation (SOR) is expected to be used in various fields such as the creation of ultra-super LSI circuits, medical diagnosis, molecular analysis, and structural analysis.

The outline of this synchrotron radiation device is as follows:
For example, as shown in FIG. 2, it is equipped with a charged particle injection device 17 composed of a charged particle generator (such as an electron gun) 10, a linear accelerator (linac) 12, and a beam transport section 14. Charged particles generated by an electron gun (electron gun, etc.) 10 are accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflection electromagnet 16 of a beam transport unit 14, and accumulated via a cutoff valve 16a and an inflector 18. The light is input into the ring 22. The charged particles incident on the storage ring 22 are given energy by the high-frequency acceleration cavity 21, are held in a predetermined trajectory by the focusing electromagnet 23, are deflected by the deflection electromagnet 24, and continue to circulate in the storage ring 22.

Synchrotron radiation (SOR) generated when the charged particles accelerated in the storage ring 22 are deflected by the deflection magnet 24 is transmitted through a beam channel 26 to an exposure device 28, which is one of the SOR utilization systems.
The light is sent to the wafer and used as a light source for creating ultra-super LSI circuits. When using SOR as a light source for creating such ultra-super LSI circuits, a plurality of beam channels 26 are provided in the storage ring 22, and the same number of exposure devices 28 as the beam channels 26 are installed to expand production capacity. do it like this.

[0005]

[Problem to be Solved by the Invention] However, if the storage ring 22 breaks down or requires maintenance and inspection,
The storage ring 22 had to be stopped and all exposure devices 28
There is a problem in that the operation of the ultra-super LSI circuit becomes impossible and all production of ultra-super LSI circuits is stopped, resulting in a decrease in operating rate and production efficiency. Particularly, when SOR is used in place of a light source in a conventional device, this may pose a big problem. The present invention aims to solve the drawbacks of the conventional techniques and provide a continuously operating SOR device that can continuously operate a system that utilizes SOR.

[0006]

[Means for solving the problem] Continuous operation type S of this invention
The OR device has two storage rings installed for one input device, and each storage ring has more S than the number of SOR utilization systems.
A beam channel for OR extraction is provided, and the SOR utilization system is operated by being detachably connected to the beam channel of at least one of the two storage rings.

[0007]

[Operation] According to the continuous operation type SOR device of this invention, 1
If two storage rings are installed for one input device, and the number of SOR utilization systems such as exposure devices is N for the entire system, each storage ring should be equipped with N or more beam channels. , the SOR utilization system and beam channel are removable, so that even if one storage ring stops, all SOR utilization systems can be connected to the beam channel of the other storage ring, allowing continuous operation. . Therefore, even if one of the two storage rings breaks down or needs to be inspected, all SOR utilization systems can be operated by operating the other storage ring, and by performing maintenance on the other storage ring while it is stopped. , continuous operation is possible and the operating rate can be improved. In normal operation when both units are normal, both storage rings can be operated and use a portion of each of their beam channels, or one storage ring can be operated and only that beam channel can be used. can be used.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a plan configuration diagram of an embodiment of a continuously operating SOR apparatus of the present invention, which is applied to a case where six exposure apparatuses are used as an SOR utilization system. In this continuously operating SOR device 30, two storage rings 22, 22a are installed for one input device 17, and charged particles deflected by the deflection electromagnet 16 are transferred to the respective inflectors 18, 18a. Storage ring 22 through
, 22a. By opening and closing a shutoff valve 16a installed at the inlet of the inflector 18, 18a, charged particles are removed from one of the storage rings 22 or 2.
2a only, or both storage rings 22 and 22.
It is now possible for the light to be incident on a.

[0009] In this continuous operation type SOR device 30, the SO
As an R utilization system, for example, six (N=6) exposure devices 28
-1 to 28-6 are used, and each storage ring 22, 22a is provided with six or more beam channels 26, 26a for SOR extraction (in the illustrated example, there are six channels). That is, one storage ring 22
Six beam channels 26-1 to 26-6 are installed, of which three beam channels 26-1 to 26-2 are installed.
Three exposure devices 28-1 to 28-3 are detachably connected to 6-3. Also, another storage ring 22a
has six beam channels 26a-1 to 26a-6.
are installed, of which three beam channels 26a-
Three exposure devices 28-4 to 28-6 are removably connected to 1 to 26a-3.

Beam channels 26, 26a in this case
As a detachable connection method for connecting the exposure device 28 and the exposure device 28, for example, a cutoff valve 3 is installed at the tip of the beam channels 26, 26a.
2, 32a, and attach the flange 34 at the leading edge.
, 34a are provided, and a flange 29 is provided on the exposure device 28 side.
, 29a, these flanges 34, 3
4a and the flanges 29, 29a can be connected or disconnected.

The storage ring 22 and beam channels 26-1 to 26-6 and the storage ring 22a and beam channels 26a-1 to 26a-6 are separately shielded, so that during operation of one, the other is shielded. This allows maintenance and inspection work to be carried out safely.

The continuous operation type SOR device 30 is operated as follows. (1) Normal case where the two storage rings 22, 22a can operate normally. ■ In this case, for example, as shown in Figure 1,
Exposure devices 28-1 to 28 that constitute six SOR utilization systems
-6 are used by connecting three units to the beam channels 26, 26a of each storage ring 22, 22a. That is, 1
The storage ring 22 of the stand has six beam channels 26.
-3 beam channels 26-1 from 26-6
26-3, three exposure devices 28-1 to 28-3 are removably connected via flanges 29, 34, and the other storage ring 22a has six beam channels 26a.
- three beam channels 26a from 1 to 26a-6;
-1 to 26a-3, three exposure devices 28-4 to 28-6
are removably connected via flanges 29a and 34a.

[0013] Also, as another operating method, one storage ring 22a is stopped and the other storage ring 22a is stopped.
2, all the exposure devices 28 are connected and operated. That is, six beam channels 26 of one storage ring 22
Six exposure devices 28-1 to 28-6 are removably connected to -1 to 26-6 via flanges 29 and 34. It goes without saying that the other storage ring may be inactive.

(2) When one storage ring (for example, storage ring 22) fails. In this case, since only the storage ring 22a can be operated, all the exposure devices 28 are connected to one normal storage ring 22a and operated. That is, six exposure devices 28-1 to 28-6 are removably connected to six beam channels 26a-1 to 26a-6 of one storage ring 22a via flanges 29a and 34a.

As described above, the two storage rings 22, 22
Even if one of the storage rings 22 or 22a fails, by operating the other storage ring 22a or 22, all six exposure devices 2 that are SOR utilization systems can be operated.
8-1 to 28-6 can be operated, and SOR can be utilized without reducing productivity. In addition, by repairing the failed storage ring 22 or 22a during suspension, it is possible to deal with the next failure, enabling continuous operation, and improving the operating rate. Furthermore, regardless of the number of beam channels used in the storage ring during operation, SOR light is always emitted from the storage ring, so there is no problem with light intensity.

[0016] In the above embodiment, the case was explained in which six exposure apparatuses were operated in the entire SOR utilization system.
The system is not limited to this, and may be further increased or decreased, and the SOR utilization system is not limited to the exposure apparatus. Further, the arrangement of the two storage rings is not limited to the case where they are arranged side by side as in the embodiment, but may be arranged one above the other, and may be determined depending on the installation space and the like. Furthermore, changes may be made to each component without changing the gist of the invention.

[0017]

[Effects of the Invention] As specifically explained in conjunction with the above embodiment, according to the continuous operation type SOR device of the present invention,
If two storage rings are installed for one input device, and the number of SOR utilization systems such as exposure devices is set to N in the entire system, each storage ring is equipped with N or more beam channels, Since the SOR utilization system and the beam channel are removable, even if one storage ring stops, all SOR will be transferred to the beam channel of the other storage ring.
Utilization systems can be connected, and the operating rate can be improved. Furthermore, since one input device can be used in common for two storage rings, the configuration is simplified and the cost is low.

[Brief explanation of the drawing]

FIG. 1 is a plan configuration diagram of an embodiment of a continuously operating SOR device of the present invention.

FIG. 2 is a plan configuration diagram of an SOR device to which the present invention is applied.

[Explanation of symbols]

10 Charged particle generator 12 Linear accelerator 14 Beam transport section 16 Bending electromagnet 17 Injection device 22, 22a Storage ring 26-1 to 26-6 Beam channel 26a-1 to
26a-6 Beam channels 28-1 to 28-6
Exposure device (SOR utilization system) 29, 29a Flange (removable part) 30 Continuously movable SOR device 32, 32a Shutoff valve

Claims (1)

[Claims] Claim 1: Two storage rings are installed for one input device, and each storage ring is provided with beam channels for SOR extraction that are greater than the number of SOR utilization systems, and the SOR
A continuously operating SOR device characterized in that a utilization system is operated by being detachably connected to a beam channel of at least one of the two storage rings.