JPH04339220A - Coriolis type mass flowmeter - Google Patents

Coriolis type mass flowmeter

Info

Publication number
JPH04339220A
JPH04339220A JP1377591A JP1377591A JPH04339220A JP H04339220 A JPH04339220 A JP H04339220A JP 1377591 A JP1377591 A JP 1377591A JP 1377591 A JP1377591 A JP 1377591A JP H04339220 A JPH04339220 A JP H04339220A
Authority
JP
Japan
Prior art keywords
flow rate
mass
back pressure
mass flow
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1377591A
Other languages
Japanese (ja)
Inventor
Shoichiro Hayashi
林 昇一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oval Corp
Original Assignee
Oval Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oval Corp filed Critical Oval Corp
Priority to JP1377591A priority Critical patent/JPH04339220A/en
Publication of JPH04339220A publication Critical patent/JPH04339220A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To achieve a reduction in cost of filling by a method wherein a plurality of vibration pipes are driven between a pair of support members and a mass flow rate of a fluid is measured from a Coriolis force generated in the vibration pipes to correct the mass flowrate passing through a plurality of passages with a back pressure adjusting unit. CONSTITUTION:U-shaped conduits 3a and 3b equal in shape and dimensions are supported with support members 4 and 5 and a filling liquid flowing through a flow tube 1 is shunted within the member 4 and then, to shunt tubes 1a and 1b through the conduits 3a and 3b. The conduits 3a and 3b are driven at a fixed amplitude with a mass flow rate converter 7 through a driver and a detector 6, speeds of arm parts of the conduits 3a and 3b are detected with detectors at parts B and C and a Coriolis force is detected with the converter 7 as time difference in the passage of the arm parts through a reference surface to be converted into a mass flow rate. A mass flow rate signal is transmitted to a built-in batch unit 8 and a valve 2 is closed when the mass flow rate reaches a set value. Filling containers 11a and 11b are filled with a filling liquid having a pressure loss adjusted constant with back pressure flow rate adjusting units 9a and 9b.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【技術分野】本発明は、流体充填に用いられる質量流量
計に関し、より詳細には一つの質量流量計を用いて同時
に複数の流体充填を可能とするコリオリ式質量流量計に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass flowmeter used for filling fluids, and more particularly to a Coriolis mass flowmeter that allows a plurality of fluids to be filled simultaneously using one mass flowmeter.

【0002】0002

【従来技術】流体の充填、特に液体の充填は液体搬送の
ために必要な一工程であり、製品およびマーケットの多
用化に伴って容器形状、大きさも多くの種類をもってい
る。また充填の合理化が叫ばれており、迅速に充填がで
き、しかも安価で高精能な充填ができる充填機が要求さ
れている。
BACKGROUND OF THE INVENTION Fluid filling, particularly liquid filling, is a necessary step for liquid transportation, and as the products and markets become more diverse, containers come in many different shapes and sizes. There is also a call for rationalization of filling, and there is a need for a filling machine that can perform filling quickly, at low cost, and with high precision.

【0003】従来、液体の充填に当っては、通常計量機
として力計が用いられており重量で充填量が測定されて
いる。力計としては、ひずみ計を用いたロードセルとか
台秤等のはかりが使用されているが、ロードセルは、弾
性体を受圧部としたひずみ量を、台秤は、レバーの平衡
を検知するものであり、何れも被測定体の力平衡後の撓
みを検知するための平衡までに時間を要し迅速な計測に
不向きであった。
Conventionally, when filling a liquid, a force meter is usually used as a weighing device, and the amount of filling is measured by weight. As a force meter, a load cell using a strain gauge or a platform scale is used.A load cell uses an elastic body as a pressure receiving part to measure the amount of strain, and a platform scale detects the balance of a lever. In either case, it takes time to detect the deflection of the object to be measured after the force is balanced, and these methods are unsuitable for rapid measurement.

【0004】流量計は配管内を流通する体積流量を計測
するものであり流量計の読みによって弁を閉止するので
応答性がすぐれているが、特に質量流量計は前記力計と
同様に質量の計測ができる点で前記力計にない特徴をも
っている。
[0004] Flowmeters measure the volumetric flow rate flowing through pipes, and close valves based on the readings from the flowmeter, so they have excellent responsiveness, but mass flowmeters, like the force meters mentioned above, have particularly good response. It has a feature that the force meter mentioned above does not have in that it can perform measurements.

【0005】質量流量計としては、コリオリの力を利用
したコリオリ式質量流量計が挙げられる。コリオリ式質
量流量計にも多くの形状のものが用いられているが、基
本的には流管を2点で支持し支持位置間において流管を
振動した場合、コリオリの力は、振動方向と流体流れと
のベクトル積方向に発生し、質量流量に比例した量であ
ることを利用したものである。
[0005] Examples of mass flowmeters include Coriolis mass flowmeters that utilize Coriolis force. Many shapes of Coriolis mass flowmeters are used, but basically, when a flow tube is supported at two points and the flow tube is vibrated between the support positions, the Coriolis force is This takes advantage of the fact that it occurs in the vector product direction with the fluid flow and is proportional to the mass flow rate.

【0006】代表的なコリオリ式質量流量計としては、
流管を支持点として流入、流出口を有する同形等寸のU
字形導管を平行に配設して、前記流管のU字形導管の流
入口、流出口間を閉止し平行して配設されたU字形導管
の各々に被測流体が等量に流通するようにし、該U字形
導管を前記流管とU字形導管とが音叉状に振動するよう
に加振し流管に垂直なU字導管軸まわりに発生するコリ
オリの力をU字導管の腕が、基準面を通過する時間差と
して計量し、該コリオリの力から質量流量を計測する。
Typical Coriolis mass flowmeters include:
A U of the same shape and size with an inlet and an outlet using the flow tube as a support point.
The U-shaped conduits are arranged in parallel, and the inlet and outlet of the U-shaped conduit of the flow tube are closed so that an equal amount of fluid to be measured flows through each of the U-shaped conduits arranged in parallel. Then, the U-shaped conduit is vibrated so that the flow tube and the U-shaped conduit vibrate like a tuning fork, and the arms of the U-shaped conduit absorb the Coriolis force generated around the U-shaped conduit axis perpendicular to the flow tube. The time difference in passing through the reference plane is measured, and the mass flow rate is measured from the Coriolis force.

【0007】前記コリオリ式質量流量計は、音叉を形成
する一対のU字導管からなるものであるが、導管がU字
管に限らず、真管の場合も、S字形の場合も多くは共振
を利用するために対をなす二つの流管から構成されてい
る。
[0007] The Coriolis mass flowmeter is composed of a pair of U-shaped conduits that form a tuning fork, but the conduit is not limited to a U-shaped conduit, and in many cases, whether it is a true tube or an S-shaped conduit, resonance occurs. It consists of two flow tubes that form a pair to utilize the flow.

【0008】叙上のコリオリ式質量流量計を充填に使用
する場合は、流管を流通する同一流体を前記コリオリ式
質量流量計を構成する対をなす導管に流してコリオリの
力を計測後、再び排出側流管に戻す方式が採用されるの
で、一つの容器に充填するためには前記の構成をもつ一
つの質量流量計が必要であり、複数の充填に当っては、
同じ数の質量流量計の数が必要であった。
When the Coriolis mass flowmeter described above is used for filling, the same fluid flowing through the flow tube is passed through the pair of conduits constituting the Coriolis mass flowmeter and the Coriolis force is measured, and then the Coriolis force is measured. Since a method is adopted in which the flow is returned to the discharge side flow pipe, one mass flowmeter with the above configuration is required to fill one container, and when filling multiple containers,
The same number of mass flow meters was required.

【0009】図3は従来の充填システムを説明するため
の図で、図中、21は流管、22は分岐管、23,24
は分流管、26,27,29,30は支持部材、25,
28はコリオリ式質量流量計、25a,25b,28a
,28bはU字導管、31,32は駆動及び検出器、3
3,34は質量変換器、35,36は仕込用バッチユニ
ット、37,38は制御弁、39,40は排出管、41
,42は充填容器、41a,42aは充填口、43a,
43b,43c,44a,44b,44cは導線である
FIG. 3 is a diagram for explaining a conventional filling system, in which 21 is a flow tube, 22 is a branch tube, 23, 24
26, 27, 29, 30 are support members, 25,
28 is a Coriolis mass flowmeter, 25a, 25b, 28a
, 28b is a U-shaped conduit, 31 and 32 are drive and detectors, 3
3, 34 are mass converters, 35, 36 are batch units for preparation, 37, 38 are control valves, 39, 40 are discharge pipes, 41
, 42 is a filling container, 41a, 42a are filling ports, 43a,
43b, 43c, 44a, 44b, and 44c are conducting wires.

【0010】図示の充填システムは2系列の充填を行う
場合のものである。被充填液は流管21を通って分岐管
22により略々等流量に分流されて分岐管23,24に
送られる。分流された被充填液は各々コリオリ式質量流
量計25,28で計測される。コリオリ式質量流量計2
5は、同形等寸のU字形導管25a,25bを流入側に
おいて支持部材26、流出側において支持部材27によ
り各々が平行に支持した構造であり、被充填液体を支持
部材26側でU字形導管25a,25bにより略等流と
なるように分流して支持部材27側で再び合流して分岐
管23に流出する。
The illustrated filling system is for carrying out two series of filling. The liquid to be filled passes through the flow pipe 21 and is divided into approximately equal flow rates by the branch pipe 22 and sent to the branch pipes 23 and 24. The divided liquids to be filled are measured by Coriolis mass flowmeters 25 and 28, respectively. Coriolis mass flowmeter 2
5 has a structure in which U-shaped conduits 25a and 25b of the same shape and size are supported in parallel by a support member 26 on the inflow side and a support member 27 on the outflow side, and the liquid to be filled is transferred to the U-shaped conduits on the support member 26 side. 25a and 25b so that the flow is approximately equal, and then merges again on the support member 27 side and flows out into the branch pipe 23.

【0011】U字形導管25a,25bは駆動および検
出器31により、支持部材26,27に対してお互いが
近接、反溌する方向の共振振動で駆動し、質量変換器3
3により定振幅に制御駆動されコリオリの力をU字導管
25a,25bの基準面を通過する時間差として求める
ことにより質量流量が検知される。質量流量信号は導線
43a,bにより仕込用バッチユニット35に伝送され
る。仕込用バッチユニット35は充填容器41に充填す
る充填質量を予め設定する設定器で、設定値に達すると
制御弁37を閉弁し排出管への充填液の移送を停止し、
次回の充填の準備に当る。
The U-shaped conduits 25a and 25b are driven by a drive and detector 31 by resonant vibrations in the directions of approaching and repulsing each other with respect to the support members 26 and 27, and the mass transducer 3
3, the mass flow rate is detected by determining the Coriolis force as the time difference in passing the reference plane of the U-shaped conduits 25a and 25b. The mass flow signal is transmitted to the batch unit 35 by conductors 43a,b. The batch unit 35 for preparation is a setting device that presets the filling mass to be filled into the filling container 41, and when the set value is reached, the control valve 37 is closed and the transfer of the filling liquid to the discharge pipe is stopped.
Preparing for the next filling.

【0012】コリオリ式質量流量計28も、前記同様に
分岐管24に分流した被充填液の質量流量を計測し仕込
用バッチユニット36に設定した量に達したとき制御弁
38が閉止し充填容器42への充填を停止する。
Similarly to the above, the Coriolis mass flowmeter 28 measures the mass flow rate of the liquid to be filled which has been branched into the branch pipe 24, and when the amount reaches the amount set in the batch unit 36 for preparation, the control valve 38 closes and the filling container is closed. 42 is stopped.

【0013】叙上の如く、従来の方式によると、各々の
質量流量計に対応する質量変換器、仕込用バッチユニッ
トを必要とするため充填系の数が増すと、それだけ充填
装置は高価なものとなった。又、充填装置を安価にする
為に、例えば1台の質量流量計の後流に出口選択バルブ
を備えて、時分割にてAライン、Bラインを交互に充填
する方法もあるが、充填能力は1台分でしかない。
As mentioned above, according to the conventional method, a mass converter and a batch unit for preparation are required for each mass flow meter, so as the number of filling systems increases, the filling equipment becomes more expensive. It became. In addition, in order to reduce the cost of the filling device, there is a method, for example, of installing an outlet selection valve downstream of one mass flowmeter and filling the A line and B line alternately in a time-sharing manner, but the filling capacity is only for one car.

【0014】[0014]

【目的】本発明は、上述のごとき実情に鑑みてなされた
もので、複数の容器に対して一つのコリオリ式質量流量
計を用いて、該コリオリ式質量流量計を構成する導管の
一つを、一つの容器に対応して充填するもので、力計方
式に対して流量計方式の充填作業に対する応答面での優
位性を生かすとともに、計量精度を低下することなく安
価な充填装置を可能とするコリオリ式質量流量計を提供
することを目的とするものである。
[Purpose] The present invention was made in view of the above-mentioned circumstances, and uses one Coriolis mass flowmeter for a plurality of containers, and one of the conduits constituting the Coriolis mass flowmeter. , which fills a single container, takes advantage of the flow meter method's superiority in response to filling operations over the force meter method, and enables inexpensive filling equipment without reducing measurement accuracy. The object of the present invention is to provide a Coriolis mass flowmeter that provides a Coriolis mass flowmeter.

【0015】[0015]

【構成】本発明は、上記目的を達成するために、(1)
流体の流れを複数の流路に分岐し、分岐した各々の流路
の質量流量を等しくして排出する流路において、前記複
数の流路を共通した一対の支持部材間に支持される複数
の同一形状振動管と該振動管の各々に直列に接続される
背圧調整ユニットからなり、前記複数の振動管を一対の
支持部材間において同一振動数、定振幅で駆動し、駆動
により該振動管に生ずるコリオリの力から流体の質量流
量を計測し、複数の各々の流路を流通する質量流量を前
記背圧調整ユニットにより補正し等質量流量にすること
、更には、(2)前記背圧調整ユニットはオリフィスと
し該オリフィスに流量調整孔を設けたこと、更には、(
3)前記背圧調整ユニットは流れ方向に複数の小口径流
路を並置したこと、更には、(4)前記背圧調整ユニッ
トと排出口との区間の配管長さおよび又は口径を可変と
して接続し背圧の微調整を行うことを特徴としたもので
あり、以下、本発明の実施例に基づいて説明する。
[Structure] In order to achieve the above objects, the present invention provides (1)
In a flow path that branches a fluid flow into a plurality of flow paths and discharges the fluid by equalizing the mass flow rate of each of the branched flow paths, a plurality of Consisting of vibrating tubes of the same shape and a back pressure adjustment unit connected in series to each of the vibrating tubes, the plurality of vibrating tubes are driven at the same frequency and constant amplitude between a pair of support members, and the vibrating tubes are (2) measuring the mass flow rate of the fluid from the Coriolis force generated in the flow path, and correcting the mass flow rate flowing through each of the plurality of flow paths using the back pressure adjustment unit to make the mass flow rate equal; The adjustment unit is an orifice, and a flow rate adjustment hole is provided in the orifice;
3) The back pressure adjustment unit has a plurality of small-diameter channels arranged side by side in the flow direction, and (4) The back pressure adjustment unit and the discharge port are connected so that the length and/or diameter of the piping is variable. This is characterized by fine adjustment of back pressure, and will be explained below based on embodiments of the present invention.

【0016】図1は、本発明の概要を説明するためのブ
ロック図で、図中、1は流管、1a,1bは分流管、2
は制御弁、3はコリオリ式質量流量計、4,5は支持部
材、6は駆動および検出器、7は質量流量変換器、8は
仕込用バッチユニット、9a,9bは背圧流量調整ユニ
ット、10a,10bは排出管、11a,11bは充填
容器である。
FIG. 1 is a block diagram for explaining the outline of the present invention, in which 1 is a flow tube, 1a and 1b are branch tubes, and 2 is a block diagram for explaining the outline of the present invention.
is a control valve, 3 is a Coriolis mass flowmeter, 4 and 5 are support members, 6 is a drive and detector, 7 is a mass flow rate converter, 8 is a batch unit for preparation, 9a and 9b are back pressure flow rate adjustment units, 10a and 10b are discharge pipes, and 11a and 11b are filling containers.

【0017】コリオリ式質量流量計3は、同形等寸のU
字形導管3a,3bを僅かに隔てて平行に配置して上流
側の支持部材4と下流側の支持部材5とに各々支持され
、流管1を流れる被充填液を支持部材4内で略等流に分
流してU字形導管3a,3bに流出し、分流した被充填
液は合流することなく分流管1a,1bに流れる。
The Coriolis mass flowmeter 3 has the same shape and size as U.
The shape-shaped conduits 3a and 3b are arranged in parallel with a slight distance between them, and are supported by an upstream support member 4 and a downstream support member 5, respectively, so that the liquid to be filled flowing through the flow tube 1 is approximately equally distributed within the support member 4. The liquid to be filled flows into the U-shaped conduits 3a and 3b, and the divided liquid flows into the branch pipes 1a and 1b without merging.

【0018】U字管導管3a,3bは、駆動および検出
器6により、図示A部分でお互いが近接反溌する振動を
支持部材4,5により音叉状構成してなる共振周波数で
質量流量変換器7により定振幅に駆動され、B,C部に
設けられた検出器によりU字導管3a,3bの腕部の速
度を検知し、質量流量変換器7において前記速度信号よ
り前記腕部が基準面を通過する時間差としてコリオリの
力を検知し、質量流量に変換される。
The U-shaped conduits 3a and 3b are driven by a drive and a detector 6 to generate vibrations that repel each other in close proximity to each other at a portion A shown in the figure.The U-shaped conduits 3a and 3b are connected to a mass flow rate converter at a resonant frequency formed by a tuning fork-like structure formed by support members 4 and 5. 7 with a constant amplitude, the speeds of the arms of the U-shaped conduits 3a and 3b are detected by the detectors provided in the B and C parts, and the mass flow converter 7 detects the velocity of the arm parts from the reference plane based on the speed signal. The Coriolis force is detected as the time difference passing through the sensor and converted to mass flow rate.

【0019】質量流量信号は仕込用バッチユニット8に
伝送され質量流量が設定値に達したとき制御弁2を閉弁
する。U字形導管3a,3bは同形等寸であるから各々
に分流した充填液は等質量流量になることが期待される
が、実際は多少異る。
The mass flow rate signal is transmitted to the batch unit 8 for preparation, and the control valve 2 is closed when the mass flow rate reaches a set value. Since the U-shaped conduits 3a and 3b are of the same shape and size, it is expected that the filling liquid divided into each will have an equal mass flow rate, but in reality this is somewhat different.

【0020】背圧流量調整ユニット9a,9bは、流管
1から上流側の支持部材4において分流してから背圧流
量調整ユニット9a,9bに到る間の圧力損失を一定に
調整して等質量流量にするためのものである。
The back pressure flow rate adjustment units 9a, 9b adjust the pressure loss at a constant level between the flow branched from the flow pipe 1 at the support member 4 on the upstream side and the flow reaching the back pressure flow rate adjustment units 9a, 9b. This is to make the mass flow rate.

【0021】図2(a),(b)は、背圧流量調整ユニ
ット9a,9bの構造を示す図で、図(a)はオリフィ
ス、図(b)は多連パイプである。
FIGS. 2(a) and 2(b) are diagrams showing the structure of the back pressure flow rate adjustment units 9a, 9b, with FIG. 2(a) showing an orifice and FIG. 2(b) showing a multiple pipe.

【0022】図(a)において12はオリフィス、12
aは開口、13は調整孔である。背圧流量調整ユニット
9a,9bとして用いられるときは開口12aは等しい
口径で圧損は等しく選ばれ、調整孔13の口径により等
質量流量となる圧損が得られるように調節される。
In Figure (a), 12 is an orifice;
a is an opening, and 13 is an adjustment hole. When used as the back pressure flow rate adjustment units 9a and 9b, the openings 12a are selected to have the same diameter and the pressure loss is equal, and the diameter of the adjustment hole 13 is adjusted so that the pressure loss resulting in equal mass flow rate is obtained.

【0023】図(b)の多連パイプにおいて、14は長
さL3の多連パイプで、軸方向に多数の細孔15が貫通
して長さ方向に長さに比例した圧損が得られる。圧損の
調整は、長さΔLを調整するか、細孔15の一つ或いは
複数閉止することにより行われる。
In the multiple pipe shown in FIG. 3(b), reference numeral 14 is a multiple pipe having a length L3, and a large number of pores 15 penetrate in the axial direction, so that a pressure loss proportional to the length can be obtained in the length direction. The pressure drop is adjusted by adjusting the length ΔL or by closing one or more of the pores 15.

【0024】叙上の如く、各々の分流管1a,1b内の
質量流量は一定となるように調整され排出管10a,1
0bより各々充填容器11a,11bに充填されるが、
叙上の調整によっても同一の質量流量が得られない場合
はアダプタ(図示せず)を設けて排出管10a,10b
の長さをL1,L2を変更するか又は管径を僅かに変更
する等の微差圧調整することにより同一の質量流量を得
ることができる。
As mentioned above, the mass flow rate in each of the branch pipes 1a, 1b is adjusted to be constant, and the mass flow rate in each of the flow pipes 10a, 1b is
The filling containers 11a and 11b are filled from 0b, respectively.
If the same mass flow rate cannot be obtained even with the above adjustments, an adapter (not shown) may be provided to connect the discharge pipes 10a and 10b.
The same mass flow rate can be obtained by adjusting the differential pressure slightly by changing the lengths L1 and L2 or by slightly changing the pipe diameter.

【0025】叙上の如く、対をなし共振駆動されるU字
形導管3a,3bの各々に分流する質量流量を一定にす
ることにより1台の質量流量計で2つの等質量流量に分
流でき、2台分の充填ができる。
As mentioned above, by keeping the mass flow rate divided into each of the pair of resonantly driven U-shaped conduits 3a and 3b constant, it is possible to divide the flow into two equal mass flow rates with one mass flowmeter. Can fill two cars.

【0026】以上は、U字導管3a,3bの二本の場合
に説明したが、更に並列に配設し一つの駆動装置により
4本の分流が可能となり、更には6本…8本と偶数の等
分流を可能とすることができる。
[0026] The above has been explained in the case of two U-shaped conduits 3a and 3b, but if they are arranged in parallel, it is possible to divide the flow of four lines with one driving device, and furthermore, it is possible to divide the flow of four lines with one drive device, and even an even number of lines such as 6...8. It is possible to divide the flow into equal parts.

【0027】なお、以上の説明においては、U字導管を
あげたが、U字導管に限らず、直管、S字形管等からな
るコリオリ式質量流量計に適用することができる。
In the above description, a U-shaped conduit has been mentioned, but the present invention is not limited to a U-shaped conduit, and can be applied to a Coriolis mass flowmeter made of a straight tube, an S-shaped tube, or the like.

【0028】[0028]

【効果】以上の説明から明らかなように、本発明のコリ
オリ式流量計によると、流体充填に当って一台の質量流
量計により複数の充填容器に同時に充填できるので、質
量流量計の特徴である迅速充填を精度損うことなく安価
充填可能とするコリオリ式質量計を提供することができ
る。
[Effect] As is clear from the above explanation, according to the Coriolis flowmeter of the present invention, multiple filling containers can be filled simultaneously with a single mass flowmeter, which is a characteristic feature of a mass flowmeter. It is possible to provide a Coriolis mass meter that allows quick filling at low cost without sacrificing accuracy.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の概要を説明するためのブロック図であ
る。
FIG. 1 is a block diagram for explaining an overview of the present invention.

【図2】(a),(b)背圧流量調整ユニット構造を示
す図で、図(a)はオリフィス、図(b)は多連パイプ
である。
FIGS. 2(a) and 2(b) are diagrams showing the structure of a back pressure flow rate adjustment unit; FIG. 2(a) shows an orifice, and FIG. 2(b) shows a multiple pipe.

【図3】従来の充填システムを説明するための図である
FIG. 3 is a diagram for explaining a conventional filling system.

【符号の説明】[Explanation of symbols]

1  流管 1a,1b  分流管 2  制御弁 3  コリオリ式質量流量計 3a,3b  同形等寸のU字形導管 4,5  支持部材 6  駆動および検出器 7  質量流量変換器 8  仕込用バッチユニット 9a,9b  背圧流量調整ユニット 10a,10b  排出管 11a,11b  充填容器 1 Flow tube 1a, 1b Diversion pipe 2 Control valve 3 Coriolis mass flowmeter 3a, 3b U-shaped conduits of the same shape and size 4,5 Support member 6 Drive and detector 7 Mass flow converter 8 Batch unit for preparation 9a, 9b Back pressure flow adjustment unit 10a, 10b Discharge pipe 11a, 11b Filling container

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】  流体の流れを複数の流路に分岐し、分
岐した各々の流路の質量流量を等しくして排出する流路
において、前記複数の流路を共通した一対の支持部材間
に支持される複数の同一形状振動管と該振動管の各々に
直列に接続される背圧調整ユニットからなり、前記複数
の振動管を一対の支持部材間において同一振動数、定振
幅で駆動し、駆動により該振動管に生ずるコリオリの力
から流体の質量流量を計測し、複数の各々の流路を流通
する質量流量を前記背圧調整ユニットにより補正し等質
量流量にすることを特徴としたコリオリ式質量流量計。
Claim 1: In a flow path in which a fluid flow is branched into a plurality of flow paths and the mass flow rate of each branched flow path is equalized and discharged, the plurality of flow paths are connected between a pair of common support members. consisting of a plurality of supported vibrating tubes of the same shape and a back pressure adjustment unit connected in series to each of the vibrating tubes, driving the plurality of vibrating tubes at the same frequency and constant amplitude between a pair of support members, A Coriolis device characterized in that the mass flow rate of the fluid is measured from the Coriolis force generated in the vibrating tube by driving, and the mass flow rate flowing through each of the plurality of flow channels is corrected by the back pressure adjustment unit to equalize the mass flow rate. type mass flowmeter.
【請求項2】  前記背圧調整ユニットはオリフィスと
し該オリフィスに流量調整孔を設けたことを特徴とする
請求項1記載のコリオリ式質量流量計。
2. The Coriolis mass flowmeter according to claim 1, wherein the back pressure adjustment unit is an orifice, and the orifice is provided with a flow rate adjustment hole.
【請求項3】  前記背圧調整ユニットは流れ方向に複
数の小口径流路を並置したことを特徴とする請求項1記
載のコリオリ式質量流量計。
3. The Coriolis mass flowmeter according to claim 1, wherein the back pressure adjustment unit has a plurality of small diameter channels arranged side by side in the flow direction.
【請求項4】  前記背圧調整ユニットと排出口との区
間の配管長さおよび又は口径を可変として接続し背圧の
微調整を行うことを特徴とした請求項1記載のコリオリ
式質量流量計。
4. The Coriolis mass flowmeter according to claim 1, wherein the back pressure is finely adjusted by connecting the back pressure adjustment unit and the discharge port with variable piping length and/or diameter. .
JP1377591A 1991-01-11 1991-01-11 Coriolis type mass flowmeter Pending JPH04339220A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1377591A JPH04339220A (en) 1991-01-11 1991-01-11 Coriolis type mass flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1377591A JPH04339220A (en) 1991-01-11 1991-01-11 Coriolis type mass flowmeter

Publications (1)

Publication Number Publication Date
JPH04339220A true JPH04339220A (en) 1992-11-26

Family

ID=11842623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1377591A Pending JPH04339220A (en) 1991-01-11 1991-01-11 Coriolis type mass flowmeter

Country Status (1)

Country Link
JP (1) JPH04339220A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469747A (en) * 1994-01-21 1995-11-28 Detroit Diesel Corporation System and method of using Coriolis mass flow rate meter
JPH08303910A (en) * 1995-05-12 1996-11-22 Touou Kogyo Kk Refrigerant charging device
JP2008531990A (en) * 2005-02-23 2008-08-14 マイクロ・モーション・インコーポレーテッド Flowmeter with one input and multiple outputs
JP2009544983A (en) * 2006-07-28 2009-12-17 マイクロ・モーション・インコーポレーテッド Flow meter with 3 pick-off sensors
JP2010521001A (en) * 2007-03-14 2010-06-17 マイクロ・モーション・インコーポレーテッド Vibrating flow meter and method for determining the viscosity of a flowing material
CN110793584A (en) * 2019-11-13 2020-02-14 四川奥达测控装置有限公司 Multiphase flow mass flow measurement system and measurement method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5469747A (en) * 1994-01-21 1995-11-28 Detroit Diesel Corporation System and method of using Coriolis mass flow rate meter
JPH08303910A (en) * 1995-05-12 1996-11-22 Touou Kogyo Kk Refrigerant charging device
JP2008531990A (en) * 2005-02-23 2008-08-14 マイクロ・モーション・インコーポレーテッド Flowmeter with one input and multiple outputs
JP2009544983A (en) * 2006-07-28 2009-12-17 マイクロ・モーション・インコーポレーテッド Flow meter with 3 pick-off sensors
JP2010521001A (en) * 2007-03-14 2010-06-17 マイクロ・モーション・インコーポレーテッド Vibrating flow meter and method for determining the viscosity of a flowing material
CN110793584A (en) * 2019-11-13 2020-02-14 四川奥达测控装置有限公司 Multiphase flow mass flow measurement system and measurement method

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