JPH0433633U - - Google Patents
Info
- Publication number
- JPH0433633U JPH0433633U JP7344090U JP7344090U JPH0433633U JP H0433633 U JPH0433633 U JP H0433633U JP 7344090 U JP7344090 U JP 7344090U JP 7344090 U JP7344090 U JP 7344090U JP H0433633 U JPH0433633 U JP H0433633U
- Authority
- JP
- Japan
- Prior art keywords
- backing plate
- sputter target
- thin film
- cooled
- advance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 2
- 238000005219 brazing Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7344090U JPH0433633U (es) | 1990-07-11 | 1990-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7344090U JPH0433633U (es) | 1990-07-11 | 1990-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0433633U true JPH0433633U (es) | 1992-03-19 |
Family
ID=31612257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7344090U Pending JPH0433633U (es) | 1990-07-11 | 1990-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0433633U (es) |
-
1990
- 1990-07-11 JP JP7344090U patent/JPH0433633U/ja active Pending