JPH04335226A - Apparatus for producing optical disk - Google Patents

Abstract

PURPOSE:To provide the apparatus for producing optical disks which allows mastering at a high recording density in a short period of time. CONSTITUTION:This apparatus has a holding means for holding an optical master plate 10 having a recording surface subjected to an electron ray resist treatment within a housing where a vacuum space is formed, at least one cold cathode emitter elements 1' which irradiate the optical master plate 10 with the electron beams when driven, a magnetic field lens 21 which is disposed between the emitter elements 1' and the optical master plate 10 and focus the electron beams 23 emitted from the emitter elements 1', and a driving means for driving the emitter elements 1'. The irradiation of the optical master plate at the high recording density without generating the crosstalks between the cold cathode emitter elements is executed and the deflection of the electron beams is possible as well.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing an information recording carrier, and more particularly to an apparatus for manufacturing an optical disc that records information by irradiating the surface of the carrier with a recording beam in a mastering process for producing an optical disc master.

0002

BACKGROUND ART As a method for recording video and audio information on a disc-shaped recording medium, for example, there is a method for optically recording on a master disc of a video disc. This method uses a so-called bit-by-bit method in which a laser beam focused on a minute point is blinked on a photoresist film with a thickness of 1000 to 1500 Å on a glass disk serving as a substrate, making it blink in response to video and audio information. This is then developed to record information based on the length of the pits (dents) obtained and their repetition period.

[0003] In mastering such an optical disc, the photoresist master is rotated and one or several laser beams are traced and stored, so the track length of the entire circumference must be traced. It takes a long time. Furthermore, since the photoresist master disk is exposed to laser light, it is difficult to obtain a smaller light spot due to its optical limitations, and it is not easy to increase the recording density of the photoresist master disk.

0004

OBJECTS OF THE INVENTION The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an optical disc manufacturing apparatus that enables mastering with high recording density in a short time.

[0005]

SUMMARY OF THE INVENTION An optical disc manufacturing apparatus according to the present invention includes: a housing forming a vacuum space; a holding means for holding an optical disc master having a recording surface subjected to an electron beam resist treatment within the housing; at least one cold cathode emitter element that irradiates an electron beam toward an optical disc master, and an electron beam emitted from the cold cathode emitter element that is disposed between the cold cathode emitter element and the optical disc master. It is characterized by comprising a focusing magnetic field lens and a driving means for driving the cold cathode emitter element.

The optical disc manufacturing apparatus according to the present invention includes a housing forming a vacuum space, a holding means for holding an optical disc master having a recording surface subjected to an electron beam resist treatment in the housing, and a holding means for holding an optical disc master having a recording surface subjected to electron beam resist treatment within the housing, and when driven, the optical disc manufacturing apparatus It is characterized by comprising at least one cold cathode emitter element that irradiates an electron beam toward the optical disk, voltage application means that applies a voltage to the optical disc master, and drive means that drives the cold cathode emitter element. .

[0007]

The optical disc manufacturing apparatus according to the present invention holds an optical disc master having a recording surface treated with electron beam resist in a vacuum housing, and includes at least one cold cathode emitter element driven by a driving means. The emitted electron beam is focused by a magnetic field lens placed between the cold cathode emitter element and the optical disk master, and is irradiated onto the optical disk master.

Further, the optical disc manufacturing apparatus according to the present invention holds an optical disc master having a recording surface subjected to electron beam resist treatment in a vacuum housing, applies a voltage to the optical disc master by a voltage applying means, and applies a voltage to the optical disc master by a driving means. An optical disc master is irradiated with an electron beam emitted from at least one cold cathode emitter element driven by.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an example of a conceptual diagram of a cold cathode emitter element. In the figure, the cold cathode emitter element 1 is composed of Si(1
00) It has a conical field emission emitter 3 formed by anisotropically etching the substrate 2, and the surrounding S
It has a structure in which an insulating layer 4 made of, for example, SiO2 is laminated in a cylindrical shape on the main surface of the i-substrate 2. Between the laminated layers in the insulating layer 4, an electrode layer 5 serving as a gate for the emitter 3 is provided.
are laminated, and an electrode layer 6 serving as an anode is further laminated on top of the electrode layer 6. These electrode layers 5 and 6 are made of Mo, W, Ta, etc., and are formed into a cylindrical shape with an inner diameter slightly smaller than that of the insulating layer 4.

The emitter element 1 having such an open cavity structure maintains a vacuum state at least between the emitter 3 and the anode 6, and when a high potential is applied to the anode 6, the emitter element 1 is discharged from the emitter 3, which is a cathode, to the anode. electronic e towards 6
- is emitted, while electrons e- are controlled by the gate 5, a part of which enters the gate 5, and a large part of which passes through the gate 5 and further passes through the anode 6. In this way, the cold cathode emitter device 1 operates like a vacuum triode device.

In order to obtain an electron beam from such an emitter element 1, the external space is kept in a vacuum state and the emitted electrons e.
This is done by configuring the emission destination to induce - and operating it like a microelectron gun. Further, the emitter element 1 has the feature that the inner diameter of the anode 6 thereof can be formed as small as 1 um or less, and the transit time of emitted electrons can be extremely shortened.

FIG. 2 is a schematic diagram showing the case where the cold cathode emitter element 1 is used to cut an optical disk master. In the figure, a master 10 is placed opposite a cold cathode emitter element 1 in a housing having a vacuum space (not shown).
is arranged so that the emitted electron beam 11 is irradiated onto any position on the recording surface of the master 10. The constant voltage source 12 provides negative and positive potentials to the emitter 3 and anode 6, respectively, and supplies the gate voltage from the input terminal 13.
The emitter 3 supplies electrons emitted from the emitter 3 in response to a recording signal supplied to the emitter 5.

On the other hand, the recording surface of the master 10 is coated with an electron beam resist agent such as PMMA (polymethyl methacrylate), which is sensitive to electron beams. In addition, a predetermined positive voltage is applied to the electrode section 15 by a constant voltage source 14 using an electrode layer on the master disk 10 or a support base for fixing the master disk 10 as an electrode, and the electrode section 15 is a cold cathode emitter. It plays a role as a so-called collector for the element 1, which absorbs electrons.

Since almost no electrons are emitted from the emitter 3 of the cold cathode emitter element 1 as long as the gate 5 maintains a predetermined voltage, the emission of electrons can be controlled on and off by the so-called binary signal of the recording signal. Since the master 10 side, which is the tip, acts as a collector to collect and attract electrons, it is possible to generate an electron beam with a substantially straight irradiation axis toward the master 10, and to form pits on the master 10. The electronic spot can be made to blink.

In cutting such an optical disc master, the electron beam from the cold cathode emitter element 1 does not converge but diverges, resulting in a large electron spot on the master disc 10, making it impossible to obtain an optical disc with high recording density. When cutting is performed using a plurality of cold cathode emitter elements 1, if the density of these emitter elements is increased, crosstalk may occur between adjacent elements.

FIG. 3 is a diagram for explaining a first embodiment constructed in view of the disadvantages of high density in the cold cathode emitter element, and the anode 6 in FIG. 2 is replaced. . In the figure, parts equivalent to those in FIG. 2 are given the same reference numerals. The anode 20 in this embodiment has a shape that wraps around a magnetic field lens 21, and the magnetic field lens 21 has a printed coil 22 wound therein.
have. The magnetic field lens 21 is a deflection means that determines the directivity of the electron beam, and there is no major difference in principle from a known deflection circuit.

In the cold cathode emitter element 1' configured as described above, unlike the electron beam 11 shown in FIG. It can be focused. Then, this focused electron beam 23 is irradiated onto the master disc 10 as a minute spot, and an optical disc master disc with high recording density is obtained.
Even if the density of cold cathode emitter elements is increased, a fine electron beam without crosstalk can be obtained.

On the other hand, as a so-called electron beam lithography technique, EBES is used for manufacturing semiconductor integrated circuits.
(Electron beam exposure system: ElectronBeam
There are electron beam exposure techniques such as the Exposure System, but when applied to mastering optical disk masters, the problem is that the amount of current is small and the information recording speed (transfer rate) is slow.

FIG. 4 shows a second embodiment designed to solve this problem, and is a schematic diagram in which a recording head is constructed using a plurality of cold cathode emitter elements. Note that parts equivalent to those in FIGS. 1 to 3 are given the same reference numerals. In the figure, four cold cathode emitter elements 1a, 1b, 1c, and 1d are arranged and formed in a unit forming a recording head 30 so that the centers (emitter tips) thereof are the vertices of a square. As described above, since the electron beam emitted from the cold cathode emitter element is narrow and crosstalk can be eliminated, the cold cathode emitter elements can be arranged and formed close to each other in the unit. Further, a negative potential is commonly applied to each emitter of these cold cathode emitter elements from a constant voltage power supply 12, and each gate is connected to input terminals 13a, 13b, 13c, and 13d for supplying recording signals. has been done. Each cold cathode emitter element is individually controlled by four recording signals applied to this gate input terminal.

As in the past, an optical disk master placed on a turntable is rotated, the rotation is controlled by a spindle servo system, and the recording head 30 is traced on the track 32 of the master. This not only makes it possible to record four pits at once, but also makes it possible to sufficiently reduce the size of the electron spot, that is, the recording pit, created by each electron beam. Therefore, it is suitable for the method of reading four recording pits at once by including a plurality of recording pits in one reading light spot 31 (FIG. 4), as also seen in, for example, Japanese Unexamined Patent Publication No. 2-267733. Recording pits can be formed. In addition, the arrangement and number of recording pits and emitter elements are not only square, but also equilateral triangular (as shown in FIG. 5), as described in the above-mentioned literature, or Arrangement of two recording pits if possible (as shown in Figure 6)
It is also easily possible to do this.

Furthermore, it is also easy to construct a recording head by arranging cold cathode emitter elements in a line for each recording track. 7 and 8 are diagrams for explaining mastering of an optical disk master using the linear recording head array. Note that parts equivalent to those in FIGS. 1 to 3 are given the same reference numerals. In FIG. 7, the linear recording head array 301 has cold cathode emitter elements Ei (i=0, 1, 2, . . . , at least as many as the number of tracks to be recorded).
w: (w-1) is the number of tracks), and these cold cathode emitter elements Ei are arranged linearly with a predetermined track interval. Further, similarly to the recording head in FIG. 4, a negative voltage is applied to each emitter of these cold cathode emitter elements from a constant voltage source 12, and each gate is connected to an input terminal Ii for supplying a recording signal. It is connected to the. Each emitter element is individually controlled by drive signals supplied to these signal input terminals.

[0022] Such a linear recording head array 301 is
If the optical disk master 10 is fixed in the radial direction on the optical disk master and rotated once in the direction of the arrow as shown in the figure, one master will be cut. FIG. 8 shows the overall configuration. In the figure, the optical disc master 10 is a turntable that is rotationally driven by a motor 302.
It is placed on the bull 303. A positive voltage is applied to the optical disc master 10 by a constant voltage source 14, and the linear recording head array 301 is fixedly disposed at a radial position on its main surface.

The recording information signal is supplied to a scanning control circuit 305 via an input terminal 304. Scan control circuit 305
consists of a microcomputer, shift register, drive circuit, timing generation circuit, memory, etc., and performs predetermined processing to drive the linear recording head array 301 according to recording information signals and scan the optical disc master 10 with an electron beam. will be done. That is, the linear recording head array 301 selects a signal line specifying a track to be irradiated from among the signal lines via its input terminal Ii and supplies a drive signal to the motor 301. A so-called angle signal φ is supplied which corresponds in time and specifies the recording position in the track direction to be irradiated. In this way, the motor 302 rotates by an angle corresponding to the angle signal φ to determine the relative radial position between the optical disc master 10 and the linear recording head 301, and the recording head 301 is kept at the determined radial position. The electron beam is irradiated according to the drive signal. Therefore, one rotation of the optical disc master allows one disc to be cut, thereby significantly shortening the recording time.

As described above, in the second embodiment, the electronic beam
By using a plurality of microscopic cold cathode emitter elements and using them as a recording head, recording density or recording capacity can be improved with a relatively simple configuration without much difference from conventional mastering methods, and A large current can be obtained from the recording head, which contributes to improving the transfer speed.

FIG. 9 is a diagram illustrating the principle of producing an optical disc master in order to further shorten the recording time, and is for showing the third embodiment. In the figures, parts equivalent to those in FIGS. 1 to 3 are given the same reference numerals. In this embodiment, an optical disk master is cut using a so-called electron beam source panel formed by two-dimensionally arranging or distributing a large number of cold cathode emitter elements.

In the electron beam source panel 40, the cold cathode emitter elements, sufficient to at least satisfy the recording capacity of the optical disk to be recorded, are arranged, for example, in a spiral shape or concentrically, and the wiring of these emitter elements is An example is shown in FIG. In FIG. 10, the cold cathode emitter element E rθ (r=0, 1, 2,..., n, θ=0, 1,
2, . shall be taken as a thing. Each gate g is an electron beam source panel 40
Cold cathode elements E0θ, E1θ, E with the same radial direction
2θ, ..., Enθ are commonly connected, and these common connection lines are connected to input terminals g0, g1, g2, ..., respectively.
gn. Furthermore, each anode a has a cold cathode emitter element Er0, Er1 having a circumference of the same radius.
, ..., Erm are commonly connected, and these common connection lines are led out to input terminals a0, a1, ..., am. However, n is the number of elements arranged in the radial direction, m is the number of elements arranged in the circumferential direction, and the number of cold cathode emitter elements that the electron beam source panel 40 has is (n-1) x (m-1
).

On the other hand, in the scan control circuit 42 as shown in FIG. 9, when recording information signals are supplied via the input terminal 41, the recording information signals are sequentially processed and sent to the electron beam source panel 40 as described above. The radius information and angle information of the element to be driven are supplied to the electron beam source panel 40. That is, the scan control circuit 42 determines the value of r representing the radius information and the value of θ representing the angle information based on the supplied recording information signal, and adjusts the input terminal of the electron beam source panel 40 accordingly. A drive signal is given to gr and aθ. and,
A drive signal is supplied to the input terminal aθ which is the anode voltage supply end, and one row of cold cathode emitter elements in the radial direction having an angle θ is selected and becomes driveable, and the input terminal which is the gate voltage supply end A recording information signal corresponding to the drive signal is supplied to the terminal gr, and one row of cold cathode emitter elements in the circumferential direction having a radial distance r is selected to enable emission of an electron beam.

[0028] Once the element arrays in the radial and circumferential directions are determined in this way, only one cold cathode emitter element Er θ, which is spaced a distance r from the center and has an angle θ, is driven to emit an electron beam. becomes. And these input terminals g
By performing the operation of specifying r and aθ in series, it is possible to transfer the recorded information signal at high speed, and the transferred recorded information signal can also be immediately converted into an electron beam at the electron beam source panel 40. can be converted. By doing so, the recording information can be recorded electrically, so that recording pits can be formed in a short recording time.

It goes without saying that the electron beam source panel in the third embodiment can be driven by other methods. Further, the present invention is not limited to optical discs, but may be applied to a mastering process for optical cards. This is particularly useful for the linear recording head array described with reference to FIG.

[0030]

[Effects of the Invention] As explained above, according to the present invention,
In a vacuum, a predetermined voltage is applied between the emitter and anode of the cold cathode emitter element to cause the emitter to emit electrons, and the electrons are focused by a deflection means provided on the anode to perform electron beam resist processing. Since the configuration is such that an electron beam focused by a deflection means is irradiated onto an optical disc master having a flat recording surface and a voltage applied, crosstalk between cold cathode emitter elements occurs at a high recording density. It is possible to irradiate the master optical disc without any problems. Further, it is also possible to deflect the focused electron beam using such a deflecting means to irradiate an arbitrary point on the master optical disc.

[Brief explanation of drawings]

[Figure 1] Conceptual diagram of a cold cathode emitter element applied to the present invention

[Figure 2] Principle diagram of optical disc mastering using cold cathode emitter elements

[Figure 3] Principle diagram of optical disc mastering according to the first embodiment

FIG. 4 Diagram for explaining the configuration of the recording head according to the second embodiment

[Figure 5] Diagram for explaining a modification of the second embodiment

[Fig. 6] Diagram for explaining a modification of the second embodiment

[Fig. 7] A diagram for explaining the configuration of a linear recording head array according to a second embodiment.

[Figure 8] Principle diagram of mastering of an optical disc master using the linear recording head array in Figure 7

[Figure 9] Principle diagram of optical disc mastering according to the third embodiment

[Figure 10] Diagram for explaining element wiring in the electron beam source panel of the third embodiment

[Explanation of symbols of main parts]

1... Cold cathode emitter element 2... Si (100) substrate 3... Emitter 4... Insulating layer 5... Gate 6... Anode 10... Optical disk master 11... Electron beam 12... ... Constant voltage source 13 ... Input terminal 14 ... Constant voltage source 15 ... Electrode section 20 ... Anode 21 ... Magnetic field coil 22 ... Print coil 23 ... Electron beam 1' ... Cold cathode emitter Element 30... Recording head 31... Reading light spot 32... Track lines 1a, 1b, 1c, 1d... Cold cathode emitter element 13a
, 13b, 13c, 13d...Gate voltage input terminal 301...Linear recording head array E0-E8...Cold cathode emitter elements I0-I6...Signal input terminal 302...Motor 303...Tar Table 304...Input terminal 305...Scan control circuit 40...Electron beam source panel 41...Input terminal 42...Scan control circuit Erθ, E00 to E21...Cold cathode emitter element g
0~g2...Gate voltage input terminal

Claims (3)

[Claims] 1. A housing for forming a vacuum space; a holding means for holding an optical disc master having a recording surface subjected to an electron beam resist treatment within the housing; at least one cold cathode emitter element that irradiates the electron beam; a magnetic field lens that is disposed between the cold cathode emitter element and the optical disk master and focuses the electron beam emitted from the cold cathode emitter element; What is claimed is: 1. An optical disc manufacturing apparatus comprising: a driving means for driving a cathode emitter element. 2. A housing for forming a vacuum space, a holding means for holding an optical disc master having a recording surface subjected to an electron beam resist treatment within the housing, and an electronic beam that, when driven, directs an electron beam toward the optical disc master. 1. An optical disk manufacturing apparatus comprising: at least one cold cathode emitter element that irradiates the optical disk; voltage application means that applies a voltage to the optical disk master; and drive means that drives the cold cathode emitter element. 3. The cold cathode emitter element has a gate between the emitter and the anode, a predetermined voltage being applied between the emitter and the anode, and the driving means comprising:
3. The optical disc manufacturing apparatus according to claim 1, wherein electrons emitted from said emitter are controlled by a signal supplied to said gate.