JPH04330607A - Evaluation method for recording magnetic field of magnetic head - Google Patents
Evaluation method for recording magnetic field of magnetic headInfo
- Publication number
- JPH04330607A JPH04330607A JP10011691A JP10011691A JPH04330607A JP H04330607 A JPH04330607 A JP H04330607A JP 10011691 A JP10011691 A JP 10011691A JP 10011691 A JP10011691 A JP 10011691A JP H04330607 A JPH04330607 A JP H04330607A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- head
- magnetic field
- magnetic head
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 104
- 238000011156 evaluation Methods 0.000 title abstract description 11
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 17
- 230000005415 magnetization Effects 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000010408 film Substances 0.000 abstract description 34
- 239000000463 material Substances 0.000 abstract description 11
- 239000010409 thin film Substances 0.000 abstract description 10
- 229910045601 alloy Inorganic materials 0.000 abstract description 2
- 239000000956 alloy Substances 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 12
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 6
- 230000005374 Kerr effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 3
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は磁気ヘッドの記録磁界評
価方法に関し、特に、磁気ディスク装置、磁気テープ装
置などの磁気記録装置に搭載される薄膜磁気ヘッドを構
成する磁極材料の如何に係わりなく、ヘッド単体の記録
磁界の評価を、簡便にしかも通常雰囲気中で行うことが
可能な評価方法に関する。[Field of Industrial Application] The present invention relates to a recording magnetic field evaluation method for a magnetic head, and in particular, regardless of the magnetic pole material that constitutes a thin-film magnetic head mounted on a magnetic recording device such as a magnetic disk device or a magnetic tape device. , relates to an evaluation method that allows the evaluation of the recording magnetic field of a single head to be easily performed in a normal atmosphere.
【0002】従来、磁気ヘッドの記録能力を評価する方
法としては、一度磁気記録媒体上に情報を記録し、記録
された情報を再生することによって評価する方法が一般
的である。しかし、このような記録媒体を介した評価方
法では、記録媒体のマクロなヒステリシス特性や膜厚、
あるいはミクロな磁性体の磁気特性、更には、ヘッドの
浮上特性などに大きく影響されるため、媒体を介さずに
ヘッドの記録能力を評価できる方法が望ましい。Conventionally, a common method for evaluating the recording ability of a magnetic head is to record information once on a magnetic recording medium and then reproduce the recorded information. However, in this evaluation method using recording media, the macro hysteresis characteristics, film thickness,
Alternatively, since it is greatly influenced by the magnetic properties of the microscopic magnetic material and further by the flying characteristics of the head, it is desirable to have a method that can evaluate the recording ability of the head without using a medium.
【0003】0003
【従来の技術】磁気記録媒体を通さずに磁気ヘッドの記
録能力を評価する手法の一つとして、磁気光学効果を用
いて評価する方法が知られている。図3はこの従来の磁
気ヘッドの記録能力を評価する手法の一つを示すもので
あり、この図には薄膜磁気ヘッド20が、その浮上面(
ギャップ7の露出面)を上側にした状態で部分的な断面
図により示されている。この従来の磁気ヘッドの記録能
力を評価する手法では、薄膜磁気ヘッド20の磁化を、
極カー(Kerr)効果を用いて測定する。2. Description of the Related Art A method using the magneto-optic effect is known as one of the methods for evaluating the recording ability of a magnetic head without passing through a magnetic recording medium. FIG. 3 shows one of the methods for evaluating the recording ability of this conventional magnetic head. This figure shows a thin film magnetic head 20 with its air bearing surface
It is shown in a partial cross-sectional view with the exposed surface of the gap 7 facing upward. In this conventional method of evaluating the recording ability of a magnetic head, the magnetization of the thin film magnetic head 20 is
Measured using the polar Kerr effect.
【0004】図3において、1は浮上型薄膜磁気ヘッド
20の基板30上における下部磁極、2は上部磁極、3
はコイル、4は層間絶縁層、5はヘッドの浮上面、6は
保護膜、7はギャップ、8はヘッドの浮上面5に対して
垂直に入射されるレーザ光をそれぞれ表わしている。ヘ
ッド20の浮上面5に垂直に、直線偏光したレーザ光8
を入射させると、ヘッド磁極の磁化によって反射光は楕
円偏光となり、かつ、その偏光面が回転することはよく
知られている。In FIG. 3, 1 is a lower magnetic pole on a substrate 30 of a floating thin film magnetic head 20, 2 is an upper magnetic pole, and 3 is a lower magnetic pole on a substrate 30 of a floating thin film magnetic head 20.
4 is a coil, 4 is an interlayer insulating layer, 5 is an air bearing surface of the head, 6 is a protective film, 7 is a gap, and 8 is a laser beam incident perpendicularly to the air bearing surface 5 of the head. Laser light 8 linearly polarized perpendicular to the air bearing surface 5 of the head 20
It is well known that when a beam is incident, the reflected light becomes elliptically polarized light due to the magnetization of the head magnetic pole, and the plane of polarization rotates.
【0005】一方、極カー効果における出力は、磁化の
大きさに比例する。したがって、レーザ光を基板30側
から保護膜6のX方向に走査させることにより、図4に
示す検出出力Yが得られる。この検出出力Yは、レーザ
光8が基板30から下部磁極1に近づくにつれて大きく
なり、レーザ光8が磁極1上を走査すると更に大きくな
り、磁極1のギャップ7側の端部で最大になり、ギャッ
プ7上では低下する。レーザ光8がギャップ7の中央を
過ぎると出力が反転し、上部磁極2のギャップ7側の端
部で最大になり、ギャップ7から遠ざかるにつれて次第
に低下する。よって、この検出出力のピーク値Vを読め
ば磁気ヘッドの磁化の大きさが分かり、ヘッド間の記録
能力の相互比較が行える。On the other hand, the output in the polar Kerr effect is proportional to the magnitude of magnetization. Therefore, by scanning the protective film 6 in the X direction with the laser beam from the substrate 30 side, the detection output Y shown in FIG. 4 can be obtained. This detection output Y increases as the laser beam 8 approaches the lower magnetic pole 1 from the substrate 30, further increases as the laser beam 8 scans over the magnetic pole 1, and becomes maximum at the end of the magnetic pole 1 on the gap 7 side. It decreases above gap 7. When the laser beam 8 passes through the center of the gap 7, the output is reversed, becomes maximum at the end of the upper magnetic pole 2 on the gap 7 side, and gradually decreases as it moves away from the gap 7. Therefore, by reading the peak value V of this detection output, the magnitude of magnetization of the magnetic head can be determined, and the recording capabilities of the heads can be compared with each other.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、以上説
明した従来の磁気ヘッドの記録能力を評価する手法にお
いては、磁極1,2に用いる磁極材料によって反射光の
カー回転角や磁極面での反射率等が変わるため、同一磁
極材料を使用した磁気ヘッドの記録磁界強度の比較は行
えるが、異種磁極材料の磁気ヘッドの記録磁界強度の比
較ができないという問題があった。[Problems to be Solved by the Invention] However, in the conventional method of evaluating the recording ability of a magnetic head described above, the Kerr rotation angle of reflected light and the reflectance on the magnetic pole surface are determined depending on the magnetic pole materials used for the magnetic poles 1 and 2. etc., it is possible to compare the recording magnetic field strengths of magnetic heads using the same magnetic pole material, but there is a problem in that it is not possible to compare the recording magnetic field strengths of magnetic heads using different magnetic pole materials.
【0007】そこで、本発明は、前記従来の磁気ヘッド
の記録能力を評価する手法における課題を解消し、同一
磁極材料を使用した磁気ヘッドの記録磁界強度の比較は
勿論のこと、異種磁極材料の磁気ヘッドの記録磁界強度
の比較も可能な磁気ヘッドの記録磁界評価方法を提供す
ることを目的とする。Therefore, the present invention solves the problems in the conventional method of evaluating the recording ability of magnetic heads, and allows not only comparison of the recording magnetic field strength of magnetic heads using the same magnetic pole material, but also comparison of the recording magnetic field strength of magnetic heads using different magnetic pole materials. It is an object of the present invention to provide a method for evaluating the recording magnetic field of a magnetic head, which also allows comparison of the recording magnetic field strength of the magnetic head.
【0008】[0008]
【課題を解決するための手段】前記目的を達成する本発
明の磁気ヘッドの記録磁界評価方法は、磁気ヘッドのギ
ャップ露出面に、絶縁層を介して強磁性膜を形成し、磁
気ヘッドのコイルに電流を流したときのこの強磁性膜の
磁化成分を磁気光学効果を用いて検出し、この検出値の
比較によってヘッドの発生磁界を評価することを特徴と
している。なお、磁気光学効果としては極カー効果を用
いれば良く、強磁性膜としては、Co,Ni、あるいは
Feから成る薄膜、またはこれらの成分から成る合金薄
膜を用いれば良い。[Means for Solving the Problems] A recording magnetic field evaluation method for a magnetic head according to the present invention that achieves the above object includes forming a ferromagnetic film on the gap-exposed surface of the magnetic head via an insulating layer, and forming a ferromagnetic film on the gap-exposed surface of the magnetic head. The magnetization component of this ferromagnetic film when a current is passed through the head is detected using the magneto-optical effect, and the magnetic field generated by the head is evaluated by comparing the detected values. Note that the polar Kerr effect may be used as the magneto-optical effect, and the ferromagnetic film may be a thin film made of Co, Ni, or Fe, or an alloy thin film made of these components.
【0009】[0009]
【作用】本発明の磁気ヘッドの記録磁界評価方法によれ
ば、従来のように浮上面磁化を直接極カー効果により評
価する代わりに、浮上面近傍にセンサーとなる強磁性膜
を配置し、ヘッド磁界により磁化された強磁性膜表面を
レーザ光で照射する。すると、強磁性膜の磁化量に比例
したカー検出電圧を得ることができるので、磁極材料の
異なるヘッドに対しても, 同一材料の強磁性センサー
膜を配置すれば、カー回転角や反射率などを一致させた
同一条件で磁気ヘッドの記録磁界の評価を行うことがで
きる。[Function] According to the recording magnetic field evaluation method of the magnetic head of the present invention, instead of directly evaluating the air bearing surface magnetization by the polar Kerr effect as in the past, a ferromagnetic film serving as a sensor is placed near the air bearing surface, and the magnetic head The surface of the ferromagnetic film magnetized by the magnetic field is irradiated with laser light. Then, it is possible to obtain a Kerr detection voltage that is proportional to the amount of magnetization of the ferromagnetic film, so if ferromagnetic sensor films made of the same material are arranged for heads with different magnetic pole materials, Kerr rotation angle, reflectance, etc. can be obtained. The recording magnetic field of the magnetic head can be evaluated under the same conditions with the same conditions.
【0010】0010
【実施例】以下添付図面を用いて本発明の実施例を詳細
に説明する。図1は本発明の磁気ヘッドの記録磁界評価
方法の一実施例を説明するものである。簡単のため、従
来の磁気ヘッドの記録磁界評価方法を説明した図3の磁
気ヘッド20と同一の物には同じ番号を付してある。従
って、図1において、1は薄膜磁気ヘッド20の下部磁
極、2は上部磁極、3はコイル、4は層間絶縁層、5は
ヘッドの浮上面、6は保護膜、7はギャップ、8はヘッ
ドの浮上面5に対して垂直に入射されるレーザ光をそれ
ぞれ表わしている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 illustrates an embodiment of the recording magnetic field evaluation method for a magnetic head according to the present invention. For the sake of simplicity, the same numbers are given to the same parts as the magnetic head 20 of FIG. 3, which describes a conventional method for evaluating the recording magnetic field of a magnetic head. Therefore, in FIG. 1, 1 is the lower magnetic pole of the thin film magnetic head 20, 2 is the upper magnetic pole, 3 is the coil, 4 is the interlayer insulating layer, 5 is the air bearing surface of the head, 6 is the protective film, 7 is the gap, and 8 is the head. The laser beams incident perpendicularly to the air bearing surface 5 are respectively shown.
【0011】本発明の磁気ヘッドの記録磁界評価方法で
は、磁気ヘッド20の浮上面5の上に、所定の膜厚で絶
縁膜10をスパッタにて形成し、更に、センサーとなる
強磁性膜9をスパッタ、蒸着あるいはめっきにより絶縁
膜10の上に形成する。この実施例では、絶縁膜10と
して、膜厚 0.1〜0.2 μmのAl2 O3 膜
を採用し、強磁性膜9として、NiFe膜をスパッタ、
蒸着、あるいはめっきにより形成する。In the recording magnetic field evaluation method of a magnetic head according to the present invention, an insulating film 10 is formed with a predetermined thickness on the air bearing surface 5 of the magnetic head 20 by sputtering, and a ferromagnetic film 9 serving as a sensor is further formed. is formed on the insulating film 10 by sputtering, vapor deposition, or plating. In this embodiment, an Al2O3 film with a thickness of 0.1 to 0.2 μm is used as the insulating film 10, and a NiFe film is sputtered as the ferromagnetic film 9.
Formed by vapor deposition or plating.
【0012】磁気ヘッド20のコイル3に電流を流すと
、磁極1,2の先端部は矢印で示す方向に磁化され、磁
気ヘッド20の発生磁界によりセンサーとなる強磁性膜
であるNiFe膜9も磁化される。この状態で、直線偏
光のレーザ光8をNiFe膜9に垂直に入射し、これを
保護膜6からX方向に走査することによって反射波の偏
光状態を検出する。When current is passed through the coil 3 of the magnetic head 20, the tips of the magnetic poles 1 and 2 are magnetized in the direction shown by the arrow, and the magnetic field generated by the magnetic head 20 also causes the NiFe film 9, which is a ferromagnetic film, to become a sensor. Become magnetized. In this state, a linearly polarized laser beam 8 is perpendicularly incident on the NiFe film 9, and by scanning this from the protective film 6 in the X direction, the polarization state of the reflected wave is detected.
【0013】図2はレーザ光7をX方向に走査した結果
得られた検出出力Yの分布を示すものである。この検出
出力Yは、センサーNiFe膜9の垂直方向の磁化強度
に比例し、またこの磁化強度は磁気ヘッド20の発生磁
界に比例することから、レーザ光8が基板30から下部
磁極1に近づくにつれて大きくなり、レーザ光8が磁極
1上を走査すると更に大きくなり、磁極1のギャップ7
側の端部で最大になり、ギャップ7上では低下する。レ
ーザ光8がギャップ7の中央を過ぎると出力が反転し、
上部磁極2のギャップ7側の端部で最大になり、ギャッ
プ7から遠ざかるにつれて次第に低下する。即ち、検出
出力Yは結局ヘッドの発生磁界に比例したセンサーNi
Fe膜9の垂直方向の磁化強度のカー検出電圧となる。FIG. 2 shows the distribution of the detection output Y obtained as a result of scanning the laser beam 7 in the X direction. This detection output Y is proportional to the magnetization strength of the sensor NiFe film 9 in the vertical direction, and since this magnetization strength is proportional to the magnetic field generated by the magnetic head 20, as the laser beam 8 approaches the lower magnetic pole 1 from the substrate 30, When the laser beam 8 scans over the magnetic pole 1, it becomes even larger, and the gap 7 of the magnetic pole 1 increases.
It is maximum at the side edges and decreases above the gap 7. When the laser beam 8 passes through the center of the gap 7, the output is reversed,
It is maximum at the end of the upper magnetic pole 2 on the gap 7 side, and gradually decreases as it moves away from the gap 7. That is, the detection output Y is ultimately proportional to the magnetic field generated by the head.
This is the Kerr detection voltage of the magnetization intensity in the vertical direction of the Fe film 9.
【0014】よって、この検出出力Yのピーク値Vo
を読めば、磁気ヘッド20の磁化の大きさが分かり、し
かも、検出出力YはセンサーNiFe膜9の垂直方向の
磁化強度であるので、ヘッドの磁極材料の種類を問わず
、磁気ヘッド間の記録能力の相互比較が行える。Therefore, the peak value Vo of this detection output Y
By reading , the magnitude of the magnetization of the magnetic head 20 can be determined, and since the detection output Y is the magnetization strength in the perpendicular direction of the sensor NiFe film 9, recording between the magnetic heads is possible regardless of the type of magnetic pole material of the head. Comparison of abilities can be made.
【0015】[0015]
【発明の効果】以上説明したように、本発明によれば、
磁極材料の異なるヘッドに対して、従来法では非常に困
難であったヘッド間相互の発生磁界強度の比較が可能と
なり、今後の高密度磁気ヘッドの開発、評価に資すると
ころが大きいという効果がある。[Effects of the Invention] As explained above, according to the present invention,
This makes it possible to compare the magnetic field strengths generated between heads with different magnetic pole materials, which was extremely difficult using conventional methods, and has the effect of greatly contributing to the development and evaluation of future high-density magnetic heads.
【図1】本発明の極カー効果による測定法を示す図であ
る。FIG. 1 is a diagram showing a measurement method using the polar Kerr effect of the present invention.
【図2】図1の測定法による検出出力の変化を示す特性
図である。FIG. 2 is a characteristic diagram showing changes in detection output according to the measurement method of FIG. 1;
【図3】従来の極カー効果による測定法を示す説明図で
ある。FIG. 3 is an explanatory diagram showing a conventional measurement method using the polar Kerr effect.
【図4】図3の測定法による検出出力の変化を示す特性
図である。FIG. 4 is a characteristic diagram showing changes in detection output according to the measurement method of FIG. 3;
1…下部電極 2…上部電極 3…コイル 4…層間絶縁層 5…ヘッドの浮上面 6…保護膜 7…ギャップ 8…レーザ光 9…強磁性膜(NiFe膜) 10…絶縁膜(Al2 O膜) 30…基板 X…レーザ光 1...Lower electrode 2...Top electrode 3...Coil 4...Interlayer insulation layer 5... Flying surface of the head 6...Protective film 7...Gap 8...Laser light 9...Ferromagnetic film (NiFe film) 10...Insulating film (Al2O film) 30...Substrate X...Laser light
Claims (1)
層を介して強磁性膜を形成し、磁気ヘッドのコイルに電
流を流したときのこの強磁性膜の磁化成分を磁気光学効
果を用いて検出し、この検出値の比較によってヘッドの
発生磁界を評価することを特徴とする磁気ヘッドの記録
磁界評価方法。Claim 1: A ferromagnetic film is formed on the gap-exposed surface of the magnetic head with an insulating layer interposed therebetween, and the magnetization component of this ferromagnetic film when a current is passed through the coil of the magnetic head is determined using the magneto-optic effect. A method for evaluating a recording magnetic field of a magnetic head, comprising: detecting the magnetic field, and evaluating the magnetic field generated by the head by comparing the detected values.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10011691A JPH04330607A (en) | 1991-05-01 | 1991-05-01 | Evaluation method for recording magnetic field of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10011691A JPH04330607A (en) | 1991-05-01 | 1991-05-01 | Evaluation method for recording magnetic field of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04330607A true JPH04330607A (en) | 1992-11-18 |
Family
ID=14265392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10011691A Withdrawn JPH04330607A (en) | 1991-05-01 | 1991-05-01 | Evaluation method for recording magnetic field of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04330607A (en) |
-
1991
- 1991-05-01 JP JP10011691A patent/JPH04330607A/en not_active Withdrawn
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6249405B1 (en) | Magnetic head including magnetoresistive element | |
US6392849B2 (en) | Magnetic head with dual spin valve element for differential operation | |
US5850323A (en) | Magnetoresistive head and magnetic recording drive | |
US4413297A (en) | Magnetic recording and playback apparatus of perpendicular recording type | |
US8824100B2 (en) | Overcoats that include magnetic materials | |
JPS62184616A (en) | Magnetoresistance effect type magnetic head | |
Khizroev et al. | MFM quantification of magnetic fields generated by ultra-small single pole perpendicular heads | |
JPH04330607A (en) | Evaluation method for recording magnetic field of magnetic head | |
US4363052A (en) | Thermomagnetic recording device | |
JPH0426227B2 (en) | ||
EP0472188B1 (en) | Magnetic head | |
Re et al. | Magneto-optic determination of magnetic recording head fields | |
JPS6289201A (en) | Magnetic recording and reproducing device | |
JP2614203B2 (en) | Magnetoresistance head | |
JP2000200405A (en) | Magneto-resistive element and magnetic head | |
JPH0719343B2 (en) | Method of manufacturing magnetoresistive type magnetic head | |
JPH07176020A (en) | Magneto-resistance effect head and its production | |
JPS5936330B2 (en) | magnetic head | |
JP2000113416A (en) | Magnetoresistive head and its manufacturing method | |
JPS5819753A (en) | Vertical magnetic recording medium and reproducing method of vertical magnetizing signal using said recording medium | |
JPH053665B2 (en) | ||
Abe et al. | H/sub c/measurement of microscopic regions on thin film magnetic disc using longitudinal Kerr effect | |
JP2001185418A (en) | Granular film and magnetic memory | |
JP2546481B2 (en) | Thermal shutter and recording medium | |
JP3397159B2 (en) | Magnetic head |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980806 |