JPH0432586Y2 - - Google Patents
Info
- Publication number
- JPH0432586Y2 JPH0432586Y2 JP15805285U JP15805285U JPH0432586Y2 JP H0432586 Y2 JPH0432586 Y2 JP H0432586Y2 JP 15805285 U JP15805285 U JP 15805285U JP 15805285 U JP15805285 U JP 15805285U JP H0432586 Y2 JPH0432586 Y2 JP H0432586Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure rod
- case
- sensor element
- pedestal
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 23
- 125000006850 spacer group Chemical group 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805285U JPH0432586Y2 (zh) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805285U JPH0432586Y2 (zh) | 1985-10-15 | 1985-10-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6265527U JPS6265527U (zh) | 1987-04-23 |
JPH0432586Y2 true JPH0432586Y2 (zh) | 1992-08-05 |
Family
ID=31081175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15805285U Expired JPH0432586Y2 (zh) | 1985-10-15 | 1985-10-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0432586Y2 (zh) |
-
1985
- 1985-10-15 JP JP15805285U patent/JPH0432586Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6265527U (zh) | 1987-04-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2677678B2 (ja) | 圧力又は力センサ | |
JPH09504100A (ja) | 容量性圧力センサ | |
US4211951A (en) | Shear type prestressed piezoelectric force transducer | |
US20090308180A1 (en) | Axial force transducer | |
WO1986000143A1 (en) | Suspension system for a transducer | |
US4104921A (en) | Piezoelectric acceleration transducer | |
US3402609A (en) | Semiconductor mechanical-to-electrical transducer | |
JPH06323898A (ja) | 押圧スリーブ | |
US5090243A (en) | Preload system for accelerometer | |
JPH0432586Y2 (zh) | ||
WO2019039146A1 (ja) | トルク検出器 | |
JPH0432587Y2 (zh) | ||
JPH05118935A (ja) | マイクロロードセル | |
JP2019066375A (ja) | トルク検出装置 | |
JP3584790B2 (ja) | ロードセルの製造方法 | |
JP3126672B2 (ja) | 圧電式加速度センサ | |
JPH0439552Y2 (zh) | ||
JPH0387622A (ja) | 力覚センサ及びその製造方法 | |
JP2558556B2 (ja) | 圧力センサ | |
JP2631299B2 (ja) | 重量検出装置 | |
JPH0526515Y2 (zh) | ||
JPH085475A (ja) | 荷重センサ | |
JPH0810133B2 (ja) | 位置検出器 | |
JPH0781922B2 (ja) | 力覚センサ及びその製造方法 | |
JPH056502Y2 (zh) |