JPH0432430U - - Google Patents
Info
- Publication number
- JPH0432430U JPH0432430U JP7341890U JP7341890U JPH0432430U JP H0432430 U JPH0432430 U JP H0432430U JP 7341890 U JP7341890 U JP 7341890U JP 7341890 U JP7341890 U JP 7341890U JP H0432430 U JPH0432430 U JP H0432430U
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- air outlet
- clean
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7341890U JPH0432430U (cs) | 1990-07-11 | 1990-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7341890U JPH0432430U (cs) | 1990-07-11 | 1990-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432430U true JPH0432430U (cs) | 1992-03-17 |
Family
ID=31612217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7341890U Pending JPH0432430U (cs) | 1990-07-11 | 1990-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432430U (cs) |
-
1990
- 1990-07-11 JP JP7341890U patent/JPH0432430U/ja active Pending