JPH0432276U - - Google Patents

Info

Publication number

JPH0432276U

JPH0432276U JP7316690U JP7316690U JPH0432276U JP H0432276 U JPH0432276 U JP H0432276U JP 7316690 U JP7316690 U JP 7316690U JP 7316690 U JP7316690 U JP 7316690U JP H0432276 U JPH0432276 U JP H0432276U

Authority

JP

Japan

Prior art keywords

cryopump

continuously supplied

room

temperature

gas

Prior art date

1990-07-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008929 regeneration Effects 0.000 claims description 3
• 238000011069 regeneration method Methods 0.000 claims description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 2
• 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000007796 conventional method Methods 0.000 description 1
• 238000001179 sorption measurement Methods 0.000 description 1