JPH0432241B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a regulator that adjusts fluid pressure using electrical signals, and more specifically, it is capable of adjusting the output pressures of multiple types of fluids almost simultaneously, and ,
The present invention relates to an electrical signal-fluid pressure regulator that can accurately regulate the pressure of a fluid that is not desirable to bleed into the atmosphere and output it as a predetermined output pressure.

[Background of the Invention] Conventionally, electric signal-fluid pressure regulators, which are a combination of an electro-pneumatic converter and a pressure transducer, have been widely used in order to adjust the output pressure of a fluid to a constant level using an electric signal. In this case, an electro-pneumatic converter,
That is, a torque motor is used as a device that converts an electrical signal into pneumatic pressure. In the torque motor, a current is supplied to the coil that constitutes the motor, and the rotational force corresponding to this current value is converted into a displacement amount, which is then converted to air pressure through the nozzle back pressure of the nozzle flapper or the flow rate adjustment of the pilot valve. are doing.

When constructing a control device such as an electro-pneumatic converter using such a torque motor, the larger the force generated by the torque motor, the stronger it will be against the effects of mechanical vibration, etc. A product with stable performance can be obtained.

However, recently, there has been a demand for control equipment to be smaller and lighter, so how to make the torque motor smaller has become an important issue. In other words, the smaller the torque motor is, the smaller the force generated in response to the current value will be, so it will inevitably become more susceptible to the mechanical vibrations mentioned above, and depending on the usage conditions of the control equipment, the torque Using a motor itself is technically impossible.

Therefore, in order to overcome the above-mentioned disadvantages, the present applicant has already proposed a regulator using an electro-pneumatic converter, which has improved vibration resistance and shock resistance, and is smaller and lighter in weight (Japanese Patent Application Laid-Open No. (See No. 60-231001). The regulator has a nozzle flapper mechanism that can easily convert voltage changes into nozzle back pressure using an electrostrictive element that is displaced by a predetermined amount due to voltage changes, and a supply port and a diaphragm that responds to the nozzle back pressure. It is configured to be combined with a non-bleed type pilot valve section that controls the opening and closing of the output port to obtain a desired output air pressure.

With this configuration, the regulator has improved vibration resistance and impact resistance, and is also smaller and smaller.
This makes it possible to easily reduce the weight and obtain the desired output air pressure with high accuracy.

[Object of the Invention] The present invention relates to a regulator of this type, and includes a nozzle flapper mechanism and a nozzle back pressure of the nozzle flapper mechanism that is displaced through a diaphragm to control communication between a supply port and an output port. A first pilot valve section is integrated with a second pilot valve section that is displaced via a diaphragm in response to the fluid pressure on the output port side and controls communication between the other supply port and the output port. This makes it possible to control the pressure of multiple types of fluids almost simultaneously, and also to keep the output port airtight between the supply port and the output port whose communication is controlled by the first pilot valve section. By closing the valve, it is possible to accurately adjust the pressure of fluids that are not desirable to be discharged into the atmosphere, such as oxygen and acetylene gas, through the second pilot valve part. It is an object of the present invention to provide an electrical signal-hydraulic pressure regulator that can achieve the

[Means for Achieving the Object] In order to achieve the above object, the present invention provides an electrical signal-fluid pressure regulator that adjusts fluid pressure in response to an electrical signal, the regulator comprising at least a nozzle flapper mechanism. a non-bleed type first pilot valve portion that opens and closes a passage communicating a first fluid supply port and an output port via a diaphragm that responds to changes in nozzle back pressure of the nozzle flapper mechanism; A non-bleed type second pilot valve part that opens and closes a passage connecting the second fluid supply port and the output port in response to the pressure on the fluid output port side is integrally provided. Features.

[Embodiments] Next, preferred embodiments of the electric signal/fluid pressure regulator according to the present invention will be described in detail with reference to the accompanying drawings.

In FIG. 1, reference numeral 10 indicates an electric signal/fluid pressure regulator according to the present invention, and the electric signal/fluid pressure regulator 10 is provided approximately in the center of the main body 11 and the nozzle flapper mechanism 12 provided above the main body 11. First pilot valve part 1
4 and a second pilot valve section 16 provided at the lower part of the interior.

The nozzle flapper mechanism 12 includes a nozzle 18 of a predetermined diameter communicating with the nozzle back pressure chamber 17 of the first pilot valve portion 14, and a plate-shaped flapper 20. One end of the flapper 20 is positioned as a free end with a predetermined distance from the nozzle 18, and the other end is fixed to the main body 11 via a screw 22. The flapper 20, as shown in FIG.
4, 24, piezoelectric ceramics 24, 24, and an intermediate electrode plate 26 sandwiched between them.
A lead wire 27 connected to an intermediate electrode plate 26 formed of a so-called electrostrictive element and piezoelectric ceramics 24, 2
A predetermined voltage is applied through a lead wire 28 connected to 4.

On the other hand, the first pilot valve section 14 includes two diaphragms 30 and 32 arranged vertically,
It includes an exhaust valve 34 and an inner valve 36 that operate in conjunction with these diaphragms 30 and 32. The inner valve 36 has an air supply valve section 38 and an exhaust valve section 40, and the inner valve 36 is formed separately from the exhaust valve 34. Further, a coil spring 42 is engaged with the lower part of the air supply valve part 38 that constitutes the inner valve 36, and
6 is configured to close an air supply port 48 connecting the first supply port 44 and the first output port 46 by the elastic force of the coil spring 42 in a normal state. Furthermore, at this time, the exhaust valve section 40 formed integrally with the inner valve 36 closes an exhaust passage 34a formed in the exhaust valve 34 and communicating with an atmospheric pressure chamber to be described later. Therefore, it is easily understood that the first pilot valve section 14 is constructed of a non-bleed type in which exhaust is not performed during equilibrium.

Next, supply pressure (pressurized air) is supplied to the nozzle back pressure chamber 17 defined above the diaphragm 30 through passages 50a, 50b, 50c, 50d, and 50e communicating with the first supply port 44. be introduced. In this case, a fixed orifice 52 for regulating the flow rate of the pressurized air is provided in the passage 50d. Note that the supply pressure chamber 53 defined by the diaphragms 30 and 32 includes the passage 5.
Supply pressure from the first supply port 44 is directly introduced through a passage 50f branched from 0b. Further, the atmospheric pressure chamber 54 defined by the diaphragm 32 and the main body 11 is in communication with the atmosphere via a passage 56.

Furthermore, the hole 6 in which the exhaust valve 34 slides is provided.
2 is provided with an O-ring 64, and together with the aforementioned atmospheric pressure chamber 54, the output pressure within the first output port 46 is not fed back to the diaphragm 32 or the like. Instead, the output pressure is sent to a pressure sensor 66 via, for example, a pipe, as shown by the broken line in FIG. 1, and the output pressure is converted into an electrical signal by the pressure sensor 66. It is configured to receive electrical feedback to the input side.

That is, as shown in FIG. 3, after the output pressure from the first pilot valve section 14 is detected as an electrical signal by the pressure sensor 66, the amplification circuit 68 is
Feedback is provided to the controller 70 via the . Then, the controller 70 compares the signal with the electric signal - the input signal to the fluid pressure regulator 10 , and the deviation is amplified by the successive amplifier circuit 72 and converted into a voltage as appropriate, and then applied to the flapper 20 . It is configured so that

Next, a second pilot valve section 16 is disposed below the first pilot valve section 14. In this case, the second pilot valve section 16 is of a non-bleed type that does not discharge the fluid whose pressure is regulated thereby into the atmosphere. Said second pilot valve section 16
includes two diaphragms 74, 76 arranged vertically in parallel in substantially the same way as the diaphragms 30, 32 constituting the first pilot valve section 14; 11 defines a pressure chamber 78. The diaphragms 74 and 76 are selected so that their pressure receiving areas are approximately the same, and
The chamber 78 communicates with the first output port 46 via a passageway 80.

A diaphragm receiving plate 84 is disposed in a chamber 82 defined by the diaphragms 74 and 76 and communicating with atmospheric pressure, and one end of the diaphragm receiving plate 84 extends downward from approximately the center of the diaphragm 76. A concave portion 86 that protrudes in a direction and has a substantially conical shape is defined at its end. A valve body 88 engages in the recess 86 of the diaphragm receiving plate 84, and the valve body 88 substantially includes a bullet-shaped protrusion 90 that engages the recess 86 and extends downward from the protrusion 90. It basically consists of a rod 92 and an air supply valve part 94 fixed to the tip of the rod 92. The protrusion 90 of the valve body 88 is always in pressure contact with the recess 86 under the pressing action of a coil spring 96 that is in pressure contact with the air supply valve part 94. Therefore, in a normal state, the side part of the air supply valve part 94 is It seats against a valve seat 98 defined by the main body 11 and closes a hole 104 communicating a second supply port 100 and a second output port 102 defined in the main body 11 .

Note that in the embodiment described above, the diaphragm 74
and 76 have a two-layer structure, and the diaphragm receiving plate 84 is substantially interposed between them, but using only one of the diaphragms,
Of course, the diaphragm receiving plate 84 may be fixed to this.

The electrical signal/fluid pressure regulator according to the present invention is basically configured as described above.
Next, its action and effects will be explained.

First, it is assumed that air at a predetermined pressure is supplied from the first supply port 44, and that air is supplied from the second supply port 1.
It is assumed that a fluid which is not preferable to bleed into the atmosphere, such as acetylene gas, is supplied from 00. Therefore, it is assumed that air and acetylene gas whose pressures are regulated by the inner valve 36 and the valve body 88 are led out from the first output port 46 and the second output port 102, respectively.

Therefore, when an input electrical signal is supplied to the controller 70, the controller 70
0 applies a predetermined voltage to the nozzle flapper mechanism 12. That is, the piezoelectric ceramics 24, 24 constituting the flapper 20 are displaced depending on the polarity of the voltage supplied from the controller 70, and as a result, the nozzle back pressure in the nozzle back pressure chamber 17 via the nozzle 18 changes. For example, suppose that the nozzle back pressure in the nozzle back pressure chamber 17 increases due to the above-described actions. In this case, the exhaust valve 34 is displaced downward, thereby pressing the exhaust valve portion 40 of the inner valve 36.
This pressing force pushes down the inner valve 36 against the elastic force of the coil spring 42 which pushes the inner valve 36 upward, and as a result, the first supply port 44 and the first output port 46 are connected to the air supply port 48. The air supplied from the first supply port 44 is led out from the first output port 46.
Air at a predetermined pressure led out from the first output port 46 is guided to a pressure sensor 66 , and from this pressure sensor 66 is passed through an amplifier circuit 68 to a controller 70 .
Feedback will be provided to The controller 70 compares this feedback signal with the input signal, and if there is a difference, a voltage-related electrical signal is sent again to the flapper 20 of the nozzle flapper mechanism 12 via the amplifier circuit 72 to correct the difference (see FIG. 3). .

On the other hand, the air led out to the first output port 46 is supplied to the pressure chamber 78 on the second pilot valve section 16 side through the passage 80. Therefore, the pressure inside the pressure chamber 78 changes in response to the pressure on the first output port 46 side, and the pressure is applied to the diaphragm 74. As a result, the diaphragms 74, 76 and the diaphragm receiving plate 84 disposed between them are displaced downward and press the valve body 88. This pressing force resists the elastic force of the coil spring 96 that presses against the air supply valve portion 94 constituting the valve body 88 and causes the valve body 88 to move downward.
As a result, the second supply port 100 and the second output port 102 are in communication via the hole 104, so that the acetylene gas supplied from the second supply port 100 passes through the hole 104 to the second output port 102.
It is led out to the output port 102 side. in this case,
As mentioned above, since the diaphragms 74 and 76 are formed so that their pressure receiving areas are approximately the same, the pressure in the pressure chamber 78 and the output port 102 are
When the pressure on the side becomes substantially the same, the diaphragms 74, 76 and the diaphragm receiving plate 84 are upwardly displaced, and the valve body 88 is accordingly upwardly displaced under the force of the coil spring 96. 88 air supply valves 94 are seated on the valve seats 98 and the holes 104
occlude. Therefore, the second supply port 100
The acetylene gas introduced from the acetylene gas is pressure regulated by the second pilot valve section 16 without being discharged to the atmosphere, and is led out to the second output port 102 side.

In this way, according to this embodiment, the air introduced from the first supply port 44 and the second supply port 1
It is possible to adjust the pressure of the acetylene gas introduced from 00 and the acetylene gas at the same time, and to lead it out to the first output port 46 and second output port 102 sides, respectively. Moreover, the second pilot valve section 16 can suitably adjust the pressure of a fluid such as acetylene gas, which is not preferable to be discharged to the atmosphere.

Next, other embodiments of the electrical signal/fluid pressure regulator according to the present invention will be described.

In addition, in this embodiment, the same reference numerals are given to the same components as in the first embodiment, and detailed explanation thereof will be omitted.

As shown in FIG. 4, the electrical signal/fluid pressure regulator 110 according to this embodiment has a first output port 46 which is hermetically closed by a plug member 112. In this case, the pressure on the first output port 46 side is configured to be supplied to the pressure sensor 66 via a pipe or the like, similar to the first embodiment.

With this configuration, the electrical signal/fluid pressure regulator 110 uses the same effect as the electrical signal/fluid pressure regulator 10 according to the first embodiment to direct the air introduced from the first supply port 44 to the first supply port 44. The pressure is adjusted to a predetermined pressure proportional to the electric signal through the first pilot valve section 14 and then led out to the first output port 46. Furthermore, the first output port 4
The air led out to the second pilot valve section 6 is fed through the passage 80 to the pressure chamber 78 of the second pilot valve section. In this case, according to the electric signal/fluid pressure regulator 110, all the air whose pressure has been regulated by the first pilot valve section 14 is introduced into the pressure chamber 78 side and is filled in the pressure chamber 78, and then the second pilot valve It is used as a pilot pressure for the section 16. For this reason, the pressure inside the pressure chamber 78 becomes extremely stable, and therefore, the acetylene gas supplied from the second supply port 100 is not discharged to the atmosphere.
The pilot valve section 16 allows the pressure to be regulated more accurately and led out to the second output port 102 side.

[Effects of the Invention] As described above, according to the present invention, when regulating the pressure of a plurality of fluids, the output pressure of any one fluid among the plurality of fluids is adjusted to change the nozzle back pressure of the nozzle flapper mechanism. The pressure of other fluids is regulated with high accuracy by the first pilot valve section which responds to the pressure, and the pressure of other fluids is regulated by the second pilot valve section which responds to the output pressure adjusted by the first pilot valve section. Furthermore, the second pilot valve section that regulates the pressure of the other fluid is constructed of a non-bleed type that does not discharge the fluid into the atmosphere. Therefore, it is possible to adjust the pressures of a plurality of fluids almost simultaneously and with high precision using the electric signal/fluid pressure regulator alone.

Further, by airtightly closing the output port side of the fluid whose pressure is regulated by the first pilot valve section, the fluid whose pressure is regulated by the second pilot valve section is not exposed to atmospheric air such as oxygen or acetylene gas. Even if it is a fluid that it is not desirable to discharge directly, an advantage is obtained that the pressure of the fluid can be regulated with extremely high accuracy.

Although the present invention has been described above with reference to preferred embodiments, the present invention is not limited to this embodiment. For example, the pressure receiving area of a set of diaphragms constituting the second pilot valve portion By selecting the ratio, it is possible to adjust the fluid pressure of multiple fluids to a pressure that maintains a predetermined ratio, and by setting the displacement amount of the flapper that constitutes the nozzle flapper mechanism to be relatively large, the diaphragm The atmospheric pressure chamber defined by the main body and the main body is not communicated with the atmosphere, and the pressure on the output port side of the fluid regulated by the first pilot valve section is transferred to the diaphragm constituting the first pilot valve section. Of course, various improvements and changes in design are possible without departing from the gist of the present invention, such as being able to be configured to receive direct feedback.

[Brief explanation of drawings]

FIG. 1 is a partially omitted cross-sectional explanatory view of an electric signal/fluid pressure regulator according to the present invention, FIG. 2 is a partially omitted front view of a nozzle flapper constituting the regulator shown in FIG. 1, and FIG. 3 is the same as that shown in FIG. Block circuit diagram of feedback control of the regulator shown in Fig. 4.
The figure is a partially omitted sectional explanatory view of another embodiment of the electric signal/fluid pressure regulator according to the present invention. 10... Electrical signal - fluid pressure regulator, 11...
Main body, 12... Nozzle flapper mechanism, 14, 16...
Pilot valve section, 17... Nozzle back pressure chamber, 20... Flapper, 24... Piezoelectric ceramic, 30, 32... Diaphragm, 34... Exhaust valve, 36... Inner valve, 66...
Pressure sensor, 70... Controller, 74, 76...
Diaphragm, 88...valve body.

Claims (1)

[Scope of Claims] 1. An electrical signal-fluid pressure regulator that adjusts fluid pressure in response to an electrical signal, the regulator being responsive to at least a nozzle flapper mechanism and a change in nozzle back pressure of the nozzle flapper mechanism. a non-bleed type first pilot valve section that opens and closes a passage communicating between a first fluid supply port and an output port via a diaphragm; An electric signal/fluid pressure regulator characterized in that it is configured to be integrally provided with a non-bleed type second pilot valve portion that opens and closes a passage communicating between a fluid supply port and an output port. 2. The electric signal/fluid pressure regulator according to claim 1, wherein the first pilot valve section is provided with means for preventing the pressure on the output port side of the first fluid from directly acting on the diaphragm. 3. The electric signal/fluid pressure regulator according to claim 1 or 2, wherein the nozzle flapper mechanism includes a flat electrostrictive element. 4. The regulator according to any one of claims 1 to 3, wherein the regulator is provided with a sensor that converts a pressure signal on the output port side of the first fluid into an electrical signal, thereby generating an electrical signal-fluid pressure signal. Regulator. 5. In the regulator according to any one of claims 1 to 4, the output of the sensor is led to the controller, where it is electrically compared with the input signal, and the deviation further causes the controller to send the nozzle flapper. An electrical signal-fluid pressure regulator having a feedback system configured to provide an energizing signal to the mechanism. 6. The electric signal/fluid pressure regulator according to any one of claims 1 to 5, wherein the regulator is provided with a plurality of second pilot valve sections. 7. In the regulator according to any one of claims 1 to 6, the first fluid output port is airtightly closed, and the fluid pressure on the output port side is converted to the pilot pressure of the second pilot valve portion. An electric signal-fluid pressure regulator used as an electric signal-fluid pressure regulator.