JPH0431539Y2 - - Google Patents

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Publication number
JPH0431539Y2
JPH0431539Y2 JP13020184U JP13020184U JPH0431539Y2 JP H0431539 Y2 JPH0431539 Y2 JP H0431539Y2 JP 13020184 U JP13020184 U JP 13020184U JP 13020184 U JP13020184 U JP 13020184U JP H0431539 Y2 JPH0431539 Y2 JP H0431539Y2
Authority
JP
Japan
Prior art keywords
measuring
measuring device
measurement surface
slider
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13020184U
Other languages
Japanese (ja)
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JPS6144506U (en
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Filing date
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Priority to JP13020184U priority Critical patent/JPS6144506U/en
Publication of JPS6144506U publication Critical patent/JPS6144506U/en
Application granted granted Critical
Publication of JPH0431539Y2 publication Critical patent/JPH0431539Y2/ja
Granted legal-status Critical Current

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Description

【考案の詳細な説明】 (1) 産業上の技術分野 本考案は、工作機械の刃物台等に設置され、被
測定物の段差位置を迅速、かつ正確に計測するに
好適な段差位置計測装置に関する。
[Detailed description of the invention] (1) Industrial technical field The present invention is a step position measuring device that is installed in the tool rest of a machine tool and is suitable for quickly and accurately measuring the step position of a workpiece. Regarding.

(2) 従来の技術 NC旋盤等において、主軸台側の回転可能な主
軸にチヤツクを設け、該チヤツクで加工物を把持
し、対向する位置に配設される刃物台に所要工具
を保持せしめ、上記刃物台および工具を移動制御
して加工が行われる。
(2) Conventional technology In NC lathes, etc., a chuck is provided on the rotatable main shaft on the headstock side, the chuck grips the workpiece, and a tool rest disposed at the opposite position holds the required tool. Machining is performed by controlling the movement of the tool rest and tool.

上記の手段で、内径切削加工が施された被加工
物、例えば、第7図イに示す如き被加工物Wの内
径d1とd2の差が0.5〜1mm程度の段部である測定
面と刃物台側端面までの軸線方向の段差寸法1を
測定する場合、従来は第7図ロに示すようにプラ
グゲージTを被加工物Wに嵌入し、測定面にプラ
グゲージTの一方の端面を当接して、該プラグゲ
ージTの他方の端面と該被加工物Wの端面との寸
法差Sを測定してプラグゲージTの基準長さLと
の差値から軸線方向の段差寸法1を求めていた。
The measurement surface of a workpiece whose inner diameter has been cut by the above method, for example, a stepped portion of the workpiece W as shown in FIG. When measuring the step dimension 1 in the axial direction from the turret side end face to the turret side end face, conventionally, the plug gauge T is inserted into the workpiece W as shown in Fig. 7B, and one end face of the plug gauge T is placed on the measurement surface. Measure the dimensional difference S between the other end surface of the plug gauge T and the end surface of the workpiece W, and calculate the step dimension 1 in the axial direction from the difference value from the reference length L of the plug gauge T. I was looking for it.

また、最近になつてからは自動計測装置を使用
して測定するようになつてきている。
Furthermore, recently, automatic measuring devices have been used for measurements.

(3) 解決しようとする問題点 従来のプラグゲージを用いて測定する手段で
は、手作業で行うため非能率的で、かつ測定精度
が悪いという問題があつた。
(3) Problems to be solved The conventional method of measuring using a plug gauge has the problem of being inefficient and having poor measurement accuracy because it is done manually.

また、今までに開発されている自動計測装置
は、接触子を正確に段差位置に位置決めした後、
計測しなければならず、計測に相当の時間を要す
るという問題があつた。
In addition, the automatic measuring devices that have been developed so far have been able to accurately position the contact at the step position and then
There was a problem in that the measurement had to be performed and it took a considerable amount of time.

(4) 目的 本考案の目的は、上述の問題を解決するために
提案されたものであつて、迅速、かつ正確な計測
が可能となると共に、自動計測が出来、しかも簡
便、軽量に形成される段差位置計測装置を提供す
ることにある。
(4) Purpose The purpose of this invention was proposed to solve the above-mentioned problems, and it is possible to perform quick and accurate measurements, to perform automatic measurements, and to be simple and lightweight. An object of the present invention is to provide a level difference position measuring device.

(5) 問題点を解決するための手段 本考案は、上記目的を達成するために、本計測
装置を数値制御NC旋盤の刃物台等の固定部に保
持する。被測定物に形成された第1の測定面と、
この第1の測定面に対して平行に、かつ、所定寸
法離間して形成された第2の測定面との段差位置
を計測するための段差位置計測装置であつて、前
記被測定物の第1の測定面および第2の測地面と
平行な第1の方向と、この第1の方向に対して直
交する段差方向に、相対移動可能に設けられる計
測装置本体と、この計測装置本体に前記段差方向
に摺動可能に設けられるスライダと、このスライ
ダに前記第1の方向および前記段差方向と直交す
る方向に固着される支軸と、このスライダ内に、
前記段差方向に延在し、前記支軸を支点として揺
動自在に設けられる支持部材と、一端側をこの支
持部材に固定され、他端側に前記第1の測定面お
よび第2の測定面に当接するため前記第1の方向
と平行に位置することが可能な平面を形成した測
定子が設けられ、前記被測定物側に延在するロツ
ドと、前記スライダと前記支持部材とのあいだに
設けられ、前記支持部材に固着されたロツドを常
時前記第1の方向に付勢する第1の付勢手段と、
前記計測装置本体と前記スライダとのあいだに設
けられ、このスライダを計測装置本体に対して常
時前記測定子側に付勢している第2の付勢手段
と、前記計測装置本体に設けられ、前記支持部材
に当接して前記測定子の段差方向の移動位置を検
知するタツチスイツチとからなり、前記計測装置
本体を前記被測定物に対して相対移動させ、前記
測定子をこの被測定物の測定面に当接させ、この
測定子の平面が前記第1の方向と平行になるよう
にして、前記第1の測定面に対する前記第2の測
定面の段差位置を計測する段差位置計測装置の構
成とした。
(5) Means for Solving the Problems In order to achieve the above object, the present invention holds the measuring device in a fixed part such as a turret of a numerically controlled NC lathe. a first measurement surface formed on the object to be measured;
A step position measuring device for measuring a step position between the first measurement surface and a second measurement surface formed parallel to the first measurement surface and spaced apart by a predetermined dimension, a measuring device main body provided so as to be relatively movable in a first direction parallel to the first measurement surface and the second datum plane and in a step direction perpendicular to the first direction; a slider provided to be slidable in the step direction; a support shaft fixed to the slider in the first direction and a direction orthogonal to the step direction;
a support member extending in the step direction and swingably provided around the support shaft; one end side fixed to the support member, and the other end side having the first measurement surface and the second measurement surface. A measuring element having a flat surface that can be positioned parallel to the first direction in order to come into contact with the object is provided, and is provided between the rod extending toward the object to be measured, the slider, and the supporting member. a first biasing means that is provided and that constantly biases the rod fixed to the support member in the first direction;
a second biasing means provided between the measuring device main body and the slider and constantly biasing the slider toward the measuring tip with respect to the measuring device main body; and a second biasing means provided in the measuring device main body, a touch switch that comes into contact with the support member to detect the moving position of the measuring stylus in the step direction, and moves the measuring device main body relative to the object to be measured, and moves the measuring stylus to measure the object. Configuration of a step position measuring device that measures a step position of the second measurement surface with respect to the first measurement surface by bringing the contact point into contact with a surface so that the plane of the contact point is parallel to the first direction. And so.

(6) 作用 本考案の段差位置計測装置は数値制御NC旋盤
等の刃物台にホルダを介して挿着される。そして
計測装置本体をX軸方向およびZ軸方向に移動
し、被加工物内に、ロツドの先端部に取付けられ
ている測定子を第1の測定面および第2の測定面
に接触させることによつて、測定面が0.5〜1mm
程度の寸法の段部であつても段差寸法を迅速に精
度よく測定することができる。しかもNC装置が
軸移動を制御するとともにタツチスイツチよりの
信号入力時の位置を読み取り段差寸法を演算処理
することから自動計測も可能である。
(6) Effect The step position measuring device of the present invention is inserted into a tool rest of a numerically controlled NC lathe or the like via a holder. Then, the main body of the measuring device is moved in the X-axis direction and the Z-axis direction, and the measuring head attached to the tip of the rod is brought into contact with the first measuring surface and the second measuring surface within the workpiece. Therefore, the measurement surface is 0.5 to 1 mm.
Even in the case of a step portion having a size of about 100 yen, the step size can be measured quickly and accurately. Moreover, automatic measurement is also possible because the NC device controls the axis movement and reads the position when the signal is input from the touch switch and calculates the step size.

(7) 実施例 以下、本考案の一実施態様について、図面に基
ずいて詳細に説明する。
(7) Example Hereinafter, one embodiment of the present invention will be described in detail based on the drawings.

第1図は本考案の段差位置計測装置の軸方向断
面図である。
FIG. 1 is an axial cross-sectional view of the step position measuring device of the present invention.

第1図において、本計測装置1の主要部である
ロツド2(以下プローブと称す)は、細長状に形
成され、その一端側はネジ2aのおねじで支持部
材3の前部支持部材3a内のめねじに螺着される
と共に、他端側の端部には、略半円球状をした測
定子4が着脱自在に螺着されている。この測定子
4の測定面には被測定物(被加工物)の第1の測
定面および第2の測定面に当接するように形成し
た後述する平面部を備えている。プローブ2を支
持する支持部材3は前部支持部材3aと後部支持
部材3bとから形成されている。後部支持部材3
bはスライダ5の内面に嵌入され、支持部材3の
支軸であるピン6は第2図に示す如く後部支持部
材3bに嵌合し、カラー7を介してネジ8でスラ
イダ5に螺着されている。従つて支持部材3に支
持されたプローブ2はピン6を支点として上下に
揺動する。
In FIG. 1, a rod 2 (hereinafter referred to as a probe), which is the main part of the measuring device 1, is formed into an elongated shape, and one end of the rod 2 is inserted into the front support member 3a of the support member 3 with a male thread of a screw 2a. A measuring element 4 having a substantially semicircular spherical shape is removably screwed onto the other end. The measurement surface of the probe 4 is provided with a flat portion, which will be described later, which is formed so as to come into contact with a first measurement surface and a second measurement surface of the object to be measured (workpiece). The support member 3 that supports the probe 2 is formed from a front support member 3a and a rear support member 3b. Rear support member 3
b is fitted into the inner surface of the slider 5, and the pin 6, which is the support shaft of the support member 3, is fitted into the rear support member 3b as shown in FIG. ing. Therefore, the probe 2 supported by the support member 3 swings up and down using the pin 6 as a fulcrum.

スライダ5の外周はスリーブ9の穴内に摺動自
在に支持される。刃物台に取付けるためのホルダ
ー10がスリーブ9の外周に嵌着されている。
The outer periphery of the slider 5 is slidably supported within the hole of the sleeve 9. A holder 10 for attachment to the tool rest is fitted around the outer periphery of the sleeve 9.

スリーブ9のプローブ側の開放端には、カバー
11がOリング12を介してネジ13で螺着さ
れ、又スリーブ9のカバー11側と反対の開放端
には、カバー14がOリング15を介してネジ1
6で螺着されている。カバー14の内面にはタツ
チスイツチ17のねじ部17aがナツト18,1
9で螺着されている。
A cover 11 is screwed onto the open end of the sleeve 9 on the probe side with a screw 13 through an O-ring 12, and a cover 14 is screwed onto the open end of the sleeve 9 on the opposite side from the cover 11 through an O-ring 15. screw 1
It is screwed on with 6. The screw portion 17a of the touch switch 17 is attached to the nut 18,1 on the inner surface of the cover 14.
It is screwed on with 9.

スライダ5とカバー14との間には、スライダ
5をプローブ2側に付勢する第2の付勢手段たる
スプリング20が介装される。又カバー11と前
部支持部材3a間には、ダストカバー21が跨設
され、プローブ2側からスリーブ9内への塵埃の
侵入の防止を図つている。
A spring 20 serving as a second biasing means for biasing the slider 5 toward the probe 2 is interposed between the slider 5 and the cover 14 . Further, a dust cover 21 is provided between the cover 11 and the front support member 3a to prevent dust from entering into the sleeve 9 from the probe 2 side.

タツチスイツチ17は、支持部材3の後部支持
部材3bの後部端3cに接触可能な接触子17
b、上記したねじ部17aおよび明示していない
動作部等とから形成され、ねじ部17aによりプ
ローブ2の軸線方向に位置調整可能に配設され
る。タツチスイツチ17は高精度のON−OFFス
イツチで形成され、接触子17bが後部支持部材
3bの後端3cに接触して上記の動作部に一定の
圧力が付加されると動作するように形成されてい
る。タツチスイツチ17よりの電線は図略の制御
装置に接続されている。
The touch switch 17 includes a contactor 17 that can come into contact with the rear end 3c of the rear support member 3b of the support member 3.
(b) It is formed from the above-mentioned threaded portion 17a and an operating portion (not shown), and is arranged so that its position can be adjusted in the axial direction of the probe 2 by the threaded portion 17a. The touch switch 17 is formed of a high-precision ON-OFF switch, and is configured to operate when the contactor 17b comes into contact with the rear end 3c of the rear support member 3b and a certain pressure is applied to the above operating part. There is. An electric wire from the touch switch 17 is connected to a control device (not shown).

スライダ5が後方へ摺動することにより、後部
支持部3bの後端部3cが接触子17bに接触す
るわけであるが、後端部3cの外側形状はピン6
を支点として上下揺動しても常に一定の位置関係
で接触子17bに接触するよう円弧状を呈してい
る。
When the slider 5 slides rearward, the rear end 3c of the rear support portion 3b comes into contact with the contactor 17b.
It has an arcuate shape so that it always contacts the contactor 17b in a constant positional relationship even when it swings up and down using the fulcrum as the fulcrum.

支持部材3に支持されたプローブ2が被加工物
を計測する前の状態は常時前方下方に付勢の構造
をとるようにする。すなわちスライダ5内にプロ
ーブ2の軸線方向に対し直交する方向に、穴2
3,24さらに穴23,24に一致する後部支持
部材3bに穴25を穿孔し、穴23,24および
25を連通させ、第1の付勢手段であるスプリン
グ22を嵌入して穴24からネジ27aで螺着
し、スプリング22の力を利用して常時第1図に
おける前方下方に付勢の状態にセツトする。27
bはプラグネジである。
Before the probe 2 supported by the support member 3 measures the workpiece, it is always biased forward and downward. That is, a hole 2 is formed in the slider 5 in a direction perpendicular to the axial direction of the probe 2.
3, 24 Furthermore, a hole 25 is bored in the rear support member 3b that corresponds to the holes 23, 24, the holes 23, 24, and 25 are made to communicate with each other, and the spring 22, which is the first biasing means, is fitted and the screw is inserted through the hole 24. 27a, and by using the force of the spring 22, it is set in a state where it is always biased forward and downward in FIG. 27
b is a plug screw.

なお、後部支持部材3bの後端部3cの近傍に
は、プローブ2が前方下方に付勢の位置を適宜な
状態にしておくストツパー28が固着されてい
る。また、ストツパー28は上下の調整が可能な
構成にしておくと便利である。
A stopper 28 is fixed near the rear end 3c of the rear support member 3b to keep the probe 2 in an appropriate forward and downward biasing position. Further, it is convenient to configure the stopper 28 so that it can be adjusted up and down.

第3図は本計測装置1がX軸方向およびZ軸方
向に移動して、本計測装置1の測定子4が被加工
物Wの切削加工された段部(第2の測定面)に接
触し計測状態にある図で、プローブ2がピン6を
支点として上方へ揺動して平行位置をとり、スト
ツパー28はスライダ5から非接触となる。この
状態で被加工物Wの段部(第2の測定面)におけ
る軸線方向位置長さlを計測するのである。
FIG. 3 shows that the measuring device 1 moves in the X-axis direction and the Z-axis direction, and the measuring stylus 4 of the measuring device 1 comes into contact with the cut step (second measurement surface) of the workpiece W. In this figure, the probe 2 swings upward about the pin 6 as a fulcrum and assumes a parallel position, and the stopper 28 is out of contact with the slider 5. In this state, the axial position length l at the stepped portion (second measurement surface) of the workpiece W is measured.

第4図が被加工物Wの段部(第2の測定面)
に、本計測装置1の測定子4が接触している拡大
図で、測定子4の半円球の平面部4aが被加工物
Wの段部(第2の測定面)に接触して計測される
のである。平面部4aの反対側には平面部4aに
対して所定の角度を有する平面部4bが形成さ
れ、第5図に示すように、例えば被加工物Wの端
面部(第1の測定面)を計測する場合、前方下方
に付勢の状態でも充分に計測できるようにしてあ
るのである。
Figure 4 shows the step part of the workpiece W (second measurement surface)
2 is an enlarged view showing the measuring element 4 of the measuring device 1 in contact with the semicircular plane part 4a of the measuring element 4 in contact with the stepped part (second measuring surface) of the workpiece W. It will be done. A plane part 4b having a predetermined angle with respect to the plane part 4a is formed on the opposite side of the plane part 4a, and as shown in FIG. When measuring, it is designed so that sufficient measurement can be made even when the force is biased forward and downward.

次に、本計測装置1の動作について、第6図を
用いて説明する。
Next, the operation of the measuring device 1 will be explained using FIG. 6.

第6図において、イは図略の刃物台に挿着され
ている本計測装置1をX軸方向に移動し、プロー
ブ2の先端部に取付けられている測定子4の中心
4cを被加工物の測定穴中心W−aにほぼ一致さ
せる。この場合、本計測装置1のプローブ2の先
端部である測定子4は、第1図に示しているよう
に、支持部材3の前部支持部材3aに内蔵してい
るスプリング22によりピン6を支点にしてθと
なる角度でもつて前方下方に付勢状態となつてい
る。
In FIG. 6, A moves the measuring device 1 installed in a tool post (not shown) in the X-axis direction, and points the center 4c of the measuring head 4 attached to the tip of the probe 2 onto the workpiece. the center of the measurement hole W-a. In this case, the measuring tip 4, which is the tip of the probe 2 of the measuring device 1, holds the pin 6 by the spring 22 built into the front support member 3a of the support member 3, as shown in FIG. It is biased forward and downward at an angle of θ with respect to the fulcrum.

イの状態から、本計測装置1を軸方向(段差方
向)すなわちZ軸方向の左方に移動させて、被加
工物Wの穴に入れ、段部(第2の測定面)の手前
で止め、ロの状態とする。ロの状態において、さ
らに本計測装置1を半径方向(測定面と平行な第
1の方向)すなわちX軸方向の下方に動かし、測
定子4を穴の内面に接触させて、ハの状態にす
る。ハの状態では、スプリング22の作用と、ピ
ン6を支点として支持部材3に支持されたプロー
ブ2が上方へ揺動して加工物の穴の軸線W−aと
ほぼ平行な状態になる。
From the state shown in A, move the measuring device 1 in the axial direction (step direction), that is, to the left in the Z-axis direction, insert it into the hole of the workpiece W, and stop it before the step (second measurement surface). , the state is B. In state B, move the measuring device 1 further in the radial direction (the first direction parallel to the measurement surface), that is, downward in the X-axis direction, and bring the probe 4 into contact with the inner surface of the hole, resulting in state C. . In the state C, the probe 2 supported by the support member 3 with the pin 6 as a fulcrum is swung upward by the action of the spring 22 and becomes substantially parallel to the axis W-a of the hole in the workpiece.

さらに、ハの状態から、この計測装置本体をZ
軸方向の左方に移動させ、段部(第2の測定面)
に突き当てニの状態になる。
Furthermore, from state C, move this measuring device body to Z.
Move it to the left in the axial direction and check the stepped part (second measurement surface).
It will be in a state of 2 when it hits.

ニの状態で、さらに本計測装置1を軸方向すな
わちZ軸方向の左方に或る量移動させると、スラ
イダ5がスリーブ9の内面を摺動して後部支持部
材3bの後端部3cがタツチスイツチ17の接触
子17bに接触し、タツチスイツチ17はタツチ
信号を出力する。この信号をスキツプ信号とし
て、NC装置にとり入れ、本計測装置1を移動を
停止させると同時に位置を読み取る。
When the measuring device 1 is further moved a certain amount to the left in the axial direction, that is, the Z-axis direction, the slider 5 slides on the inner surface of the sleeve 9, and the rear end portion 3c of the rear support member 3b is moved. The contact 17b of the touch switch 17 is contacted, and the touch switch 17 outputs a touch signal. This signal is taken as a skip signal into the NC device, and the position of the measuring device 1 is read at the same time as the movement of the measuring device 1 is stopped.

この読み取り位置のZ軸方向の値から、前記第
5図で示した平面部4bで端面部(第1の測定
面)を当接してタツチ信号が出力されたときのZ
軸方向位置の値を差引いた差値が段差寸法lとな
り、正確な段差寸法の計測がされる。
From the value of this reading position in the Z-axis direction, the Z value when the touch signal is output when the end face part (first measurement surface) is brought into contact with the flat part 4b shown in FIG. 5 is determined.
The difference value obtained by subtracting the value of the axial position becomes the step size l, and the step size can be accurately measured.

上記の動作を順次次の被加工物Wに繰返すこと
によりワンロツトの段部(第2の測定面)位置長
さを自動的に連続して迅速に計測が行われる。
By repeating the above operation for successive workpieces W, the position length of the stepped portion (second measurement surface) of one lot can be automatically and continuously measured rapidly.

(8) 考案の効果 以上の説明によつて明らかな如く、本考案の計
測装置によれば、0.5〜1mm程度の小さな段部の
測定面においてもその位置を迅速、かつ正確な計
測ができると共に、自動計測が可能で、かつ簡
便、軽量に形成し得る効果があげられる。延いて
は作業の能率向上となる。また被測定物の端面部
(第1の測定面)の位置をも計測することが可能
である。
(8) Effects of the invention As is clear from the above explanation, the measuring device of the invention can quickly and accurately measure the position even on a measurement surface with a small step of about 0.5 to 1 mm. , automatic measurement is possible, and it can be formed easily and lightweight. This in turn improves work efficiency. It is also possible to measure the position of the end surface (first measurement surface) of the object to be measured.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の段差位置計測装置の軸方向断
面図、第2図は第1図のA−A矢視断面図であ
る。第3図は本考案の段差位置計測装置をX軸方
向およびZ軸方向に移動し、被加工物Wの段部
(第2の測定面)に接触した状態の軸方向断面図
である。第4図は本考案の段差位置計測装置の測
定子が被加工物Wの段部(第2の測定面)に接触
した状態の拡大断面部、第5図は本考案の段差位
置計測装置の測定子が被加工物Wの端面部(第1
の測定面)に接触した状態の断面図である。第6
図は本計測装置1を被加工物Wの段部(第2の測
定面)位置長さを測定するための動作状態を示す
説明図である。第7図は従来の被測定物段部(第
2の測定面)を計測する説明図である。 1……本計測装置、2……プローブ、3……支
持部材、3a……前部支持部材、3b……後部支
持部材、3c……後部支持部材の後端部、4……
測定子、5……スライダ、6……ピン、9……ス
リーブ、17……タツチスイツチ、17b……接
触子、22……スプリング、28……ストツパ
ー、W……被加工物。
FIG. 1 is an axial sectional view of the level difference position measuring device of the present invention, and FIG. 2 is a sectional view taken along the line A--A in FIG. FIG. 3 is an axial sectional view of the step position measuring device of the present invention moved in the X-axis direction and the Z-axis direction and in contact with the step portion (second measurement surface) of the workpiece W. FIG. 4 shows an enlarged cross-sectional view of the step position measuring device of the present invention in which the probe is in contact with the step (second measurement surface) of the workpiece W, and FIG. 5 shows the step position measuring device of the present invention. The measuring tip is located at the end surface of the workpiece W (the first
FIG. 6th
The figure is an explanatory view showing the operating state of the measuring device 1 for measuring the position length of the stepped portion (second measurement surface) of the workpiece W. FIG. 7 is an explanatory diagram for measuring a conventional stepped portion of an object to be measured (second measurement surface). DESCRIPTION OF SYMBOLS 1... Main measuring device, 2... Probe, 3... Support member, 3a... Front support member, 3b... Rear support member, 3c... Rear end of rear support member, 4...
Measuring element, 5...Slider, 6...Pin, 9...Sleeve, 17...Touch switch, 17b...Contact element, 22...Spring, 28...Stopper, W...Workpiece.

Claims (1)

【実用新案登録請求の範囲】 被測定物に形成された第1の測定面と、この第
1の測定面に対して平行に、かつ、所定寸法離間
して形成された第2の測定面との段差位置を計測
するための段差位置計測装置であつて、 前記被測定物の第1の測定面および第2の測定
面と平行な第1の方向と、この第1の方向に対し
て直交する段差方向に、相対移動可能に設けられ
る計測装置本体と、 この計測装置本体に前記段差方向に摺動可能に
設けられるスライダと、 このスライダに前記第1の方向および前記段差
方向と直交する方向に固着される支軸と、 このスライダ内に、前記段差方向に延在し、前
記支軸を支点として揺動自在に設けられる支持部
材と、 一端側をこの支持部材に固定され、他端側に前
記第1の測定面および第2の測定面に当接するた
め前記第1の方向と平行に位置することが可能な
平面を形成した測定子が設けられ、前記被測定物
側に延在するロツドと、 前記スライダと前記支持部材とのあいだに設け
られ、前記支持部材に固着されたロツドを常時前
記第1の方向に付勢する第1の付勢手段と、 前記計測装置本体と前記スライダとのあいだに
設けられ、このスライダを計測装置本体に対して
常時前記測定子側に付勢している第2の付勢手段
と、 前記計測装置本体に設けられ、前記支持部材に
当接して前記測定子の段差方向の移動位置を検知
するタツチスイツチからなり、 前記計測装置本体を前記被測定物に対して相対
移動させ、前記測定子をこの被測定物の測定面に
当接させ、この測定子の平面が前記第1の方向と
平行になるようにして、前記第1の測定面に対す
る前記第2の測定面の段差位置を計測することを
特徴とする段差位置計測装置。
[Claims for Utility Model Registration] A first measurement surface formed on an object to be measured, and a second measurement surface formed parallel to the first measurement surface and spaced apart by a predetermined dimension. A step position measuring device for measuring the step position of the object, the device comprising: a first direction parallel to a first measurement surface and a second measurement surface of the object to be measured; and a first direction perpendicular to the first direction. a measuring device main body provided so as to be relatively movable in the step direction, a slider provided on the measuring device main body so as to be slidable in the step direction, and a slider provided in the first direction and in a direction orthogonal to the step direction. a support shaft fixed to the slider; a support member provided within the slider so as to extend in the step direction and swing freely about the support shaft; one end side fixed to the support member, and the other end side fixed to the support member; A measuring element is provided with a flat surface that can be positioned parallel to the first direction in order to abut the first measuring surface and the second measuring surface, and extends toward the object to be measured. a rod; a first biasing means provided between the slider and the support member and constantly biasing the rod fixed to the support member in the first direction; the measuring device main body and the slider; a second biasing means provided between the measuring device main body and constantly biasing the slider toward the measuring tip side with respect to the measuring device main body; It consists of a touch switch that detects the moving position of the measuring stylus in the step direction, and moves the measuring device main body relative to the object to be measured, brings the measuring stylus into contact with the measurement surface of the object, and performs the measurement. A step position measuring device characterized in that the step position of the second measurement surface relative to the first measurement surface is measured with a child plane parallel to the first direction.
JP13020184U 1984-08-28 1984-08-28 Step position measuring device Granted JPS6144506U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13020184U JPS6144506U (en) 1984-08-28 1984-08-28 Step position measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13020184U JPS6144506U (en) 1984-08-28 1984-08-28 Step position measuring device

Publications (2)

Publication Number Publication Date
JPS6144506U JPS6144506U (en) 1986-03-24
JPH0431539Y2 true JPH0431539Y2 (en) 1992-07-29

Family

ID=30688817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13020184U Granted JPS6144506U (en) 1984-08-28 1984-08-28 Step position measuring device

Country Status (1)

Country Link
JP (1) JPS6144506U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0716861B2 (en) * 1987-03-24 1995-03-01 ソニ−マグネスケ−ル株式会社 measuring device

Also Published As

Publication number Publication date
JPS6144506U (en) 1986-03-24

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