JPH0430461U - - Google Patents

Info

Publication number

JPH0430461U

JPH0430461U JP7152590U JP7152590U JPH0430461U JP H0430461 U JPH0430461 U JP H0430461U JP 7152590 U JP7152590 U JP 7152590U JP 7152590 U JP7152590 U JP 7152590U JP H0430461 U JPH0430461 U JP H0430461U

Authority

JP

Japan

Prior art keywords

chamber

filter

drain

partition wall

gas outlet

Prior art date

1990-07-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005192 partition Methods 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 1
• 238000005070 sampling Methods 0.000 description 1

Cited By (1)