JPH04301602A - Formation of color filter - Google Patents
Formation of color filterInfo
- Publication number
- JPH04301602A JPH04301602A JP3066475A JP6647591A JPH04301602A JP H04301602 A JPH04301602 A JP H04301602A JP 3066475 A JP3066475 A JP 3066475A JP 6647591 A JP6647591 A JP 6647591A JP H04301602 A JPH04301602 A JP H04301602A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- resin layer
- color filter
- transparent substrate
- alignment marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 title 1
- 229920005989 resin Polymers 0.000 claims abstract description 32
- 239000011347 resin Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 21
- 239000010410 layer Substances 0.000 description 29
- 239000011521 glass Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 6
- 241000519995 Stachys sylvatica Species 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明はカラー液晶用基板の製造
に使用されるカラーフイルターの作成方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing color filters used in the production of color liquid crystal substrates.
【０００２】0002
【従来の技術】液晶用カラーフィルターの作成方法とし
ては、顏料分散法、印刷法、染色法等が知られており、
現在、その性能面から顏料分散法が注目されてきている
。顏料分散法は、透明ガラス基板上に赤（Ｒ）、緑（Ｇ
）、青（Ｂ）、黒（ＢＬ）のモザイクあるいはストライ
プパターンをフォトリソにより順次形成し、カラーフィ
ルターを作成する。この方法においては、特に各パター
ンの位置精度が重要で位置精度が悪いと白抜け等の欠陥
が発生する。その位置精度を確保する為に通常、ガラス
基板上に位置合せマーク（アライメントマーク）を形成
し、そのアライメントマークとフォトマスクのアライメ
ントマークを顕微鏡等で観察しながら精度良く位置合せ
し、露光し、現像する事により各色の位置精度の良いカ
ラーフィルターを作成している。[Prior Art] Known methods for producing color filters for liquid crystals include a pigment dispersion method, a printing method, and a dyeing method.
Currently, the material dispersion method is attracting attention due to its performance. The pigment dispersion method uses red (R) and green (G) on a transparent glass substrate.
), blue (B), and black (BL) mosaic or stripe patterns are sequentially formed by photolithography to create a color filter. In this method, the positional accuracy of each pattern is particularly important, and if the positional accuracy is poor, defects such as white spots will occur. In order to ensure the positional accuracy, alignment marks are usually formed on the glass substrate, and the alignment marks and the alignment marks on the photomask are precisely aligned while being observed with a microscope, etc., and exposed. By developing it, we create color filters with high positional accuracy for each color.
【０００３】しかし、２色目以降のパターンニング工程
に於いて、フォトマスクと基板との位置合せの際に以下
の様な不都合が発生する。例えば透明ガラス基板にＲ色
で第１のパターンとアライメントマークを形成し、次に
Ｇ色着色層をロールコーターあるいはスピンコーターで
前記透明ガラス基板全面に塗布形成し、顕微鏡でＲ色ア
ライメントマークとフォトマスクのアライメントマーク
と位置合せする場合、前記透明ガラス基板全面に形成さ
れたＧ色着色層によってＲ色アライメントマークも覆わ
れ、顕微鏡に入射される前記透明基板上からの反射光と
透明基板上のＲ色アライメントマークからの反射光との
明暗比が低下し、Ｒ色アライメントマークが非常に観察
しにくくなり、正確に位置合せされず、結果としてカラ
ーフィルターとして白抜けの欠陥が発生してしまう。こ
の問題は１色目の色に関係無く、発生する。特に２色目
以降に黒色層を設ける場合はまったくアライメントマー
クは見えなくなってしまう。特開平３−２７０１５には
透明保護層を位置決めマーク以外に形成し、後のＩＴＯ
パターンニングの際のアライメントマークの位置合せに
関する記載が在るが、カラーフィルター作成時に関する
考察はいっさい無い。However, in the patterning process for the second and subsequent colors, the following inconvenience occurs when aligning the photomask and the substrate. For example, a first pattern and an alignment mark are formed in R color on a transparent glass substrate, then a G color colored layer is coated on the entire surface of the transparent glass substrate using a roll coater or a spin coater, and the R color alignment mark and alignment mark are photographed using a microscope. When aligning with the alignment mark of the mask, the R color alignment mark is also covered by the G colored layer formed on the entire surface of the transparent glass substrate, and the reflected light from the transparent substrate entering the microscope and the light on the transparent substrate are The brightness ratio with the light reflected from the R color alignment mark decreases, making it extremely difficult to observe the R color alignment mark, preventing accurate alignment, and as a result, defects such as white spots occur as a color filter. This problem occurs regardless of the first color. In particular, when a black layer is provided after the second color, the alignment mark becomes completely invisible. In JP-A-3-27015, a transparent protective layer was formed on areas other than the positioning marks, and later ITO
Although there is a description regarding the positioning of alignment marks during patterning, there is no consideration at all regarding the time of creating color filters.
【０００４】0004
【発明が解決しようとする課題】本発明は前記問題点を
解決する為に位置精度良くカラーフィルターを作成する
方法を提供する事を目的とする。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, it is an object of the present invention to provide a method for producing a color filter with high positional accuracy.
【０００５】[0005]
【課題を解決するための手段】本発明はの目的は、仮支
持体上に着色感光性樹脂層を設けた感光性転写シートの
着色感光性樹脂層とアライメントマークの形成された透
明基板とを少なくとも加熱しながら張合わせ、該仮支持
体を剥離除去し、該透明基板上に着色感光性樹脂層を形
成する工程を繰り返すことによりカラーフイルターを作
成する方法において、該アライメントマークを避けて該
感光性転写シートを張合わせることを特徴とするカラー
フィルターの作成方法により達成された。この方法によ
り透明基板上のアライメントマーク部分には、着色樹脂
層が形成されていないので透明基板上のアライメントマ
ークからの反射光と透明基板上からの反射光の明暗比が
大きく、顕微鏡観察が非常にしやすくなる。これによっ
て位置合せの良好なカラーフィルターを作成する事が可
能となる。[Means for Solving the Problems] An object of the present invention is to combine a colored photosensitive resin layer of a photosensitive transfer sheet with a colored photosensitive resin layer provided on a temporary support and a transparent substrate on which alignment marks are formed. In a method of producing a color filter by repeating the steps of laminating the substrate while at least heating, peeling off the temporary support, and forming a colored photosensitive resin layer on the transparent substrate, the photosensitive resin layer is formed while avoiding the alignment mark. This was achieved by a method for producing a color filter characterized by laminating color transfer sheets together. With this method, no colored resin layer is formed on the alignment marks on the transparent substrate, so the brightness ratio between the light reflected from the alignment marks on the transparent substrate and the light reflected from the transparent substrate is large, making microscopic observation very difficult. It becomes easier to do. This makes it possible to create a color filter with good alignment.
【０００６】仮支持体は特願平３−９２９２、２−４０
００４７に記載されたいずれの物も使用可能であるが、
化学的および熱的に安定であって、また撓曲性の物質で
構成されるべきであり、具体的にはポリエチレンテレフ
タレート、ポリカーボネート等の薄いシートが特に好ま
しい。[0006] The temporary support is disclosed in Japanese Patent Application No. 3-9292, 2-40.
Any of those listed in 0047 can be used, but
It should be composed of a chemically and thermally stable and flexible material, with thin sheets of polyethylene terephthalate, polycarbonate, etc. being particularly preferred.
【０００７】着色感光性樹脂層は少なくとも１５０℃以
下の温度で軟化もしくは粘着性になることが好ましいの
で、熱可塑性である必要がある。公知の光重合層の大部
分はこの性質を有するが、公知層の一部はなお改質する
ことができる。これは簡単な方法で熱可塑性結合剤の添
加あるいは相溶性の可塑剤の添加によって行なうことが
できる。[0007] The colored photosensitive resin layer preferably softens or becomes sticky at a temperature of at least 150°C or lower, and therefore needs to be thermoplastic. Although most of the known photopolymerizable layers have this property, some of the known layers can still be modified. This can be achieved in a simple manner by adding thermoplastic binders or by adding compatible plasticizers.
【０００８】本発明で使用する感光性樹脂としては公知
であり、たとえば特願平３−９２９２に記載されている
感光性樹脂がすべて使用できる。具体的には、ネガ型ジ
アゾ樹脂とバインダーかなる感光性樹脂層、光重合性組
成物、アジド化合物とバインダーとからなる感光性樹脂
組成物、桂皮酸型感光性樹脂組成物等が挙げられる。そ
の中でも特に好ましいのは光重合性樹脂である。その光
重合性樹脂は光重合開始剤、光重合性モノマーおよびバ
インダーを基本構成要素として含む。As the photosensitive resin used in the present invention, all known photosensitive resins, such as those described in Japanese Patent Application No. 3-9292, can be used. Specifically, examples thereof include a photosensitive resin layer consisting of a negative diazo resin and a binder, a photopolymerizable composition, a photosensitive resin composition consisting of an azide compound and a binder, a cinnamic acid type photosensitive resin composition, and the like. Among these, photopolymerizable resins are particularly preferred. The photopolymerizable resin contains a photopolymerization initiator, a photopolymerizable monomer, and a binder as basic components.
【０００９】感光性樹脂層と仮支持体の間に転写性を向
上させる為に特願平３−９２９２に記載されている様な
熱可塑性樹脂層−分離層あるいは特願平２−４０００４
７に記載されている様な分離層を設けても良い。In order to improve transferability between the photosensitive resin layer and the temporary support, a thermoplastic resin layer-separation layer as described in Japanese Patent Application No. 3-9292 or Japanese Patent Application No. 2-40004 is used.
A separation layer as described in 7 may also be provided.
【００１０】感光性樹脂層の支持体に相対する側には、
貯蔵の際の汚れや損傷から保護するために薄い被覆シー
トを設けることが好ましい。被覆シートは支持体と同じ
かまたは類似の材料からなっても良いが、感光性樹脂層
から容易に分離されねばならない。被覆シート材料とし
ては例えばシリコーン紙、ポリオレフィンもしくはポリ
テトラフルオルエチレンシートが適当である。[0010] On the side of the photosensitive resin layer facing the support,
Preferably, a thin covering sheet is provided to protect against dirt and damage during storage. The cover sheet may be made of the same or similar material as the support, but must be easily separated from the photopolymer layer. Suitable covering sheet materials are, for example, silicone paper, polyolefin or polytetrafluoroethylene sheets.
【００１１】本発明で使用する転写シートは、支持体上
に分離層材料の溶液を塗布し、乾燥し、その後感光性樹
脂層を分離層を溶解しない溶剤で塗布、乾燥して設ける
か、あるいは被覆シート上に光重合層を設けて、両方の
シートを相互に貼り合わせることにより製造される。本
発明において転写シートは以下の様にして使用される。
転写シートの被覆シートを取除き、光重合性層を少なく
とも加温下で基体上に貼り合わせる。この際同時に加圧
しても良い。これは特願平３−９２９２の明細書に記載
されている方法で行なうことができる。その後仮支持体
を剥がし、所定のマスクを介して露光し、次いで現像す
る。現像は同様に公知の方法で溶剤もしくは現像液、特
にアルカリ水溶液で処理することにより行なわれる。具
体的には特願平３−９２９２明細書に記載されている方
法で行なうことができる。さらに同様な工程を複数回繰
り返しカラーフイルターが形成される。The transfer sheet used in the present invention can be prepared by applying a solution of the separation layer material onto a support, drying it, and then applying a photosensitive resin layer with a solvent that does not dissolve the separation layer and drying it. It is produced by providing a photopolymerizable layer on a covering sheet and laminating both sheets together. In the present invention, the transfer sheet is used in the following manner. The cover sheet of the transfer sheet is removed, and the photopolymerizable layer is laminated onto the substrate at least under heating. At this time, pressure may be applied at the same time. This can be done by the method described in the specification of Japanese Patent Application No. 3-9292. Thereafter, the temporary support is peeled off, exposed through a predetermined mask, and then developed. Development is likewise carried out in known manner by treatment with a solvent or developer, in particular an aqueous alkaline solution. Specifically, it can be carried out by the method described in Japanese Patent Application No. 3-9292. Further, the same process is repeated multiple times to form a color filter.
【００１２】本発明の方法においては、予め作成した感
光性転写シートを用いるので、アライメントマークの位
置の異なる基板を用いても容易にその位置を避けて着色
感光性樹脂層を設けることが可能であり、基板上に直接
塗布を行う方法に比べ、工程を単純化できる特徴がある
。以下、実施例に基づいて本発明を更に詳細に説明する
が、本発明はこれらに限定されるものではない。[0012] In the method of the present invention, since a pre-prepared photosensitive transfer sheet is used, even if a substrate with a different alignment mark position is used, it is possible to easily provide a colored photosensitive resin layer avoiding that position. This method has the advantage of simplifying the process compared to the method of directly coating the substrate. Hereinafter, the present invention will be explained in more detail based on Examples, but the present invention is not limited thereto.
【００１３】[0013]
【実施例】実施例１
特願平３−９２９２の実施例５に記載のＲ色感光性樹脂
シートを用い、保護フィルムを剥離し、１．１ｍｍ厚さ
のガラス板の上に該感光性樹脂層層が、ガラス板に接す
るように重ね合わせた後、ラミネーター（ファーストラ
ミネーター８Ｂ−５５０−８０、大成商事（株）社製）
を用いて圧力２ｋｇ／ｍ２、ローラー温度１０５℃、ラ
ミネート速度０．９ｍ／ｍｉｎの条件でラミネートを行
った。その後赤色の感光性樹脂シートの仮支持体を剥す
事により、赤色の感光性樹脂層をガラス板上に転写した
。ついで、この赤色の感光性樹脂層側から所定のマスク
を介して露光した。続いて露光済みの赤色感光性樹脂層
を下記組成の現像液を用いて３５℃の温度で２０秒間現
像した。引き続く水洗、乾燥によりガラス板上に赤色の
画像が得られた。
現像液
炭酸ナトリウム
１５ｇブチルセロソルブ
１ｇ水
１ｇアライメントマークはガラス基板中央線の左右両
端、幅２８０ｍｍの所に位置し、赤色画像はその中に形
成された。さらに特願平３−９２９２の実施例５に記載
のＧ色感光性樹脂シートを用い、前記方法と同様にして
ガラス基板全面に転写したが、その際にＧ色感光性樹脂
シートは幅２７０ｍｍの物を用い、赤色アライメントマ
ーク部にはＧ色感光性樹脂シートを張り付けず、パター
ン部を覆うように該シートを張り付けた。その後、所定
のフォトマスクの位置決めを行ない、露光し、現像して
Ｒ、Ｇの画像をガラス基板上に作成した。同様な工程を
特願平３−９２９２の実施例５の青色感光性樹脂シート
を用いて行ない、最終的にはＲ、Ｇ、Ｂのカラーフィル
ターを作成した。ガラス基板上のアライメントマークは
非常に見やすく、したがってフォトマスクの位置合せが
しやすく、結果として位置精度の良い、白抜けの無いカ
ラーフィルターが作成された。[Example] Example 1 Using the R color photosensitive resin sheet described in Example 5 of Japanese Patent Application No. 3-9292, the protective film was peeled off and the photosensitive resin was placed on a 1.1 mm thick glass plate. After the layers are superimposed so as to be in contact with the glass plate, a laminator (First Laminator 8B-550-80, manufactured by Taisei Shoji Co., Ltd.) is used.
Lamination was carried out under the conditions of a pressure of 2 kg/m 2 , a roller temperature of 105° C., and a lamination speed of 0.9 m/min. Thereafter, the red photosensitive resin layer was transferred onto a glass plate by peeling off the temporary support of the red photosensitive resin sheet. Next, the red photosensitive resin layer was exposed to light through a predetermined mask. Subsequently, the exposed red photosensitive resin layer was developed at a temperature of 35° C. for 20 seconds using a developer having the following composition. A red image was obtained on the glass plate by subsequent washing with water and drying. developer sodium carbonate
15g butyl cellosolve
1g water
The 1g alignment marks were located at both left and right ends of the center line of the glass substrate with a width of 280 mm, and the red image was formed therein. Furthermore, using the G color photosensitive resin sheet described in Example 5 of Japanese Patent Application No. 3-9292, the image was transferred onto the entire surface of the glass substrate in the same manner as described above. Using a material, the G-color photosensitive resin sheet was not attached to the red alignment mark section, but the sheet was attached so as to cover the pattern section. Thereafter, a predetermined photomask was positioned, exposed, and developed to create R and G images on the glass substrate. A similar process was carried out using the blue photosensitive resin sheet of Example 5 of Japanese Patent Application No. 3-9292, and finally R, G, and B color filters were prepared. The alignment marks on the glass substrate are very easy to see, so it is easy to align the photomask, and as a result, a color filter with high positional accuracy and no white spots was created.
【００１４】比較例１
実施例１と同様にＲ、Ｂ、Ｇのカラーフィルターを作成
したが、ただし２色目以降の感光性シートの幅を３００
ｍｍとし、赤色アライメントマーク部にも感光性樹脂層
を転写した。この場合、ガラス基板上のアライメントマ
ークは非常に観察しづらく、したがってフォトマスクと
の位置合せもしづらく、結果として位置精度の悪い白抜
けのあるカラーフィルターが作成された。Comparative Example 1 R, B, and G color filters were prepared in the same manner as in Example 1, except that the width of the photosensitive sheet for the second and subsequent colors was 300 mm.
mm, and a photosensitive resin layer was also transferred to the red alignment mark portion. In this case, the alignment mark on the glass substrate was very difficult to observe and therefore difficult to align with the photomask, resulting in a color filter with poor positional accuracy and white spots.
【００１５】[0015]
【発明の効果】本発明の方法に依れば透明基板上のアラ
イメントマークとフォトマスクのアライメントマークの
位置合せを行なう際に前記透明基板上のアライメントマ
ーク部には着色層が形成されていないので、透明基板上
のアライメントマークとフォトマスクのアライメントマ
ークのコントラストが大きく、位置合せを行ないやすく
なり、結果として位置精度の良い、白抜けの無いカラー
フィルターが作成可能である。According to the method of the present invention, when aligning the alignment marks on the transparent substrate and the alignment marks on the photomask, no colored layer is formed on the alignment marks on the transparent substrate. , the contrast between the alignment marks on the transparent substrate and the alignment marks on the photomask is large, making alignment easier, and as a result, it is possible to create a color filter with good positional accuracy and no white spots.
Claims (3)
た感光性転写シートの着色感光性樹脂層とアライメント
マークの形成された透明基板とを少なくとも加熱しなが
ら張合わせ、該仮支持体を剥離除去し、該透明基板上に
着色感光性樹脂層を形成する工程を繰り返すことにより
カラーフイルターを作成する方法において、該アライメ
ントマークを避けて該感光性転写シートを張合わせるこ
とを特徴とするカラーフィルターの作成方法。[Claim 1] A colored photosensitive resin layer of a photosensitive transfer sheet having a colored photosensitive resin layer provided on a temporary support and a transparent substrate on which alignment marks are formed are laminated together while at least heating the temporary support. A method for producing a color filter by repeating the steps of peeling off and forming a colored photosensitive resin layer on the transparent substrate, characterized by laminating the photosensitive transfer sheet while avoiding the alignment mark. How to create a color filter.
ークが赤、緑、青、あるいは黒色の有機材料で形成され
ていることを特徴とするカラーフィルターの作成方法。2. The method for producing a color filter according to claim 1, wherein the alignment mark is formed of a red, green, blue, or black organic material.
ークが遮光性無機材料で形成されていることを特徴とす
るカラーフィルターの作成方法。3. The method for producing a color filter according to claim 1, wherein the alignment mark is made of a light-shielding inorganic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6647591A JP2741111B2 (en) | 1991-03-29 | 1991-03-29 | How to make a color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6647591A JP2741111B2 (en) | 1991-03-29 | 1991-03-29 | How to make a color filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04301602A true JPH04301602A (en) | 1992-10-26 |
| JP2741111B2 JP2741111B2 (en) | 1998-04-15 |
Family
ID=13316847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6647591A Expired - Fee Related JP2741111B2 (en) | 1991-03-29 | 1991-03-29 | How to make a color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2741111B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327270C (en) * | 2001-03-15 | 2007-07-18 | 精工爱普生株式会社 | Liquid crystal device, projection display device and, manufacturing method for substrate for liquid crystal device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6199102A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
| JPS61251823A (en) * | 1985-03-28 | 1986-11-08 | Stanley Electric Co Ltd | Production of color display element |
| JPS61256303A (en) * | 1985-05-10 | 1986-11-13 | Fuji Photo Film Co Ltd | Production of color filter |
| JPS61295503A (en) * | 1985-06-25 | 1986-12-26 | Seikosha Co Ltd | Production of color filter |
| JPH0327015A (en) * | 1989-06-26 | 1991-02-05 | Matsushita Electric Ind Co Ltd | Production of substrate for color liquid crystal |
-
1991
- 1991-03-29 JP JP6647591A patent/JP2741111B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6199102A (en) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | Preparation of color filter |
| JPS61251823A (en) * | 1985-03-28 | 1986-11-08 | Stanley Electric Co Ltd | Production of color display element |
| JPS61256303A (en) * | 1985-05-10 | 1986-11-13 | Fuji Photo Film Co Ltd | Production of color filter |
| JPS61295503A (en) * | 1985-06-25 | 1986-12-26 | Seikosha Co Ltd | Production of color filter |
| JPH0327015A (en) * | 1989-06-26 | 1991-02-05 | Matsushita Electric Ind Co Ltd | Production of substrate for color liquid crystal |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1327270C (en) * | 2001-03-15 | 2007-07-18 | 精工爱普生株式会社 | Liquid crystal device, projection display device and, manufacturing method for substrate for liquid crystal device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2741111B2 (en) | 1998-04-15 |
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