JPH0429860U - - Google Patents
Info
- Publication number
- JPH0429860U JPH0429860U JP6900490U JP6900490U JPH0429860U JP H0429860 U JPH0429860 U JP H0429860U JP 6900490 U JP6900490 U JP 6900490U JP 6900490 U JP6900490 U JP 6900490U JP H0429860 U JPH0429860 U JP H0429860U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- optical fiber
- particle
- signal
- signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 9
- 239000013307 optical fiber Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案にかかる一実施例の半導体製造
ライン液中粒子監視システムの要部構成図、第２
図は液中粒子光サンプラの一構成図、第３図は計
算器の処理フローチヤート図、第４図は従来の液
中粒子監視システムの粒子サンプラ構成図である
。
１，２，３，ｎ−２，ｎ−１，ｎ……微粒子信
号出力光フアイバ、１１……同期モータ、１２…
…光フアイバ信号選択分離板、１２′……アパー
チヤ、１３……光フアイバ結束線、１４……モー
タ同期信号出力、１５……集光レンズ系、１６…
…光電変換器、１７……同期信号発生器、１８…
…電流／電圧変換器、１９……ノイズフイルタ、
２０……サンプルホールド、２１……アナログ・
デジタル変換器、２２……計算器用インターフエ
ース、２３……計算機、２４……光源、２５……
導光用光フアイバ、２６……支持器、２７……集
光レンズ系（投光用）、２８……集光レンズ系（
受光用）、２９……被検流体、３０……光フアイ
バ結束線１３への接続光フアイバ、３１……液中
粒子電気信号出力、３２……散乱光。
Figure 1 is a configuration diagram of the main parts of a semiconductor manufacturing line liquid particle monitoring system according to an embodiment of the present invention;
This figure is a block diagram of a particle sampler in liquid, FIG. 3 is a processing flowchart of a computer, and FIG. 4 is a block diagram of a particle sampler of a conventional particle in liquid monitoring system. 1, 2, 3, n-2, n-1, n...Particle signal output optical fiber, 11...Synchronous motor, 12...
...Optical fiber signal selection separation plate, 12'...Aperture, 13...Optical fiber binding wire, 14...Motor synchronization signal output, 15...Condensing lens system, 16...
...Photoelectric converter, 17...Synchronization signal generator, 18...
...Current/voltage converter, 19...Noise filter,
20...Sample hold, 21...Analog
Digital converter, 22... Calculator interface, 23... Calculator, 24... Light source, 25...
Optical fiber for light guide, 26... Supporter, 27... Condensing lens system (for light projection), 28... Condensing lens system (
(for light reception), 29... Fluid to be tested, 30... Optical fiber connected to optical fiber binding wire 13, 31... Output of electric signal for particles in liquid, 32... Scattered light.
Claims (1)
込まれた粒子信号を、複数信号から各サンプル別
に単信号に分離する光フアイバ信号選択分離器と
、 その分離された光を電気信号化する光電変換器
と、 その光電変換出力を計算器入力可能ならしめる
信号処理器とを有することを特徴とする液中粒子
監視システム。[Claims for Utility Model Registration] An optical fiber signal selection separator that separates particle signals obtained by capturing the number of particles in liquid in multiple samples as optical signals into a single signal for each sample from the multiple signals, and the separated light. What is claimed is: 1. A particle monitoring system in liquid, comprising: a photoelectric converter that converts the photoelectric conversion output into an electrical signal; and a signal processor that allows the photoelectric conversion output to be input into a computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6900490U JPH0429860U (en) | 1990-06-28 | 1990-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6900490U JPH0429860U (en) | 1990-06-28 | 1990-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429860U true JPH0429860U (en) | 1992-03-10 |
Family
ID=31603937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6900490U Pending JPH0429860U (en) | 1990-06-28 | 1990-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002071035A1 (en) * | 2001-03-01 | 2002-09-12 | Otsuka Electronics Co., Ltd. | Light scattering measuring probe |
| JP2013541717A (en) * | 2010-10-25 | 2013-11-14 | アキュリ サイトメーターズ，インコーポレイテッド | System and user interface for collecting flow cytometer data sets |
-
1990
- 1990-06-28 JP JP6900490U patent/JPH0429860U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002071035A1 (en) * | 2001-03-01 | 2002-09-12 | Otsuka Electronics Co., Ltd. | Light scattering measuring probe |
| JP2013541717A (en) * | 2010-10-25 | 2013-11-14 | アキュリ サイトメーターズ，インコーポレイテッド | System and user interface for collecting flow cytometer data sets |
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