JPH0429660U - - Google Patents
Info
- Publication number
- JPH0429660U JPH0429660U JP6728290U JP6728290U JPH0429660U JP H0429660 U JPH0429660 U JP H0429660U JP 6728290 U JP6728290 U JP 6728290U JP 6728290 U JP6728290 U JP 6728290U JP H0429660 U JPH0429660 U JP H0429660U
- Authority
- JP
- Japan
- Prior art keywords
- circulator
- dry gas
- low
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728290U JPH0429660U (ko) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728290U JPH0429660U (ko) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429660U true JPH0429660U (ko) | 1992-03-10 |
Family
ID=31600722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6728290U Pending JPH0429660U (ko) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429660U (ko) |
-
1990
- 1990-06-27 JP JP6728290U patent/JPH0429660U/ja active Pending