JPH04294319A - Formation of electrode of plzt light valve - Google Patents
Formation of electrode of plzt light valveInfo
- Publication number
- JPH04294319A JPH04294319A JP8364791A JP8364791A JPH04294319A JP H04294319 A JPH04294319 A JP H04294319A JP 8364791 A JP8364791 A JP 8364791A JP 8364791 A JP8364791 A JP 8364791A JP H04294319 A JPH04294319 A JP H04294319A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plzt
- groove
- pellet
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 title abstract description 4
- 239000008188 pellet Substances 0.000 claims abstract description 34
- 239000012212 insulator Substances 0.000 claims abstract description 10
- 238000000206 photolithography Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 13
- 230000003014 reinforcing effect Effects 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 230000002787 reinforcement Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
- 229910001120 nichrome Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は光シャッタ、ディスプレ
イなどに用いられるＰＬＺＴライトバルブの電極形成方
法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming electrodes of PLZT light valves used in optical shutters, displays, etc.
【０００２】0002
【従来の技術】ＰＬＺＴライトバルブには、画素形成用
電極の電極面がＰＬＺＴペレットの表面に平行な表面電
極構成のものと、画素形成用電極の電極面がＰＬＺＴペ
レットの表面に垂直な溝型電極構成のものとがあり、溝
型電極構成のＰＬＺＴライトバルブは表面電極構成のも
のよりも駆動電圧を低くすることができる。このような
溝型電極構成のＰＬＺＴライトバルブは、従来、図９に
示すように形成されていた。すなわち、ＰＬＺＴペレッ
ト１０の電極形成個所に、ダイシングソー等で深さ５０
〜１００μｍ、幅３０〜４０μｍ程度の溝１２、…を形
成し、ついで、この溝１２、…の内壁面を含むＰＬＺＴ
ペレット１０の表面に蒸着やスパッタ法でＮｉＣｒ等の
導電性金属薄膜を形成し、ついで、フォトリソグラフィ
工程によってパタ−ンニングを行い画素形成用電極１４
、…を形成していた。Ｄは隣接する画素形成用電極１４
、１４間に駆動電圧を印加したときの電気力線を表わす
。[Prior Art] PLZT light valves include a surface electrode structure in which the electrode surface of the pixel forming electrode is parallel to the surface of the PLZT pellet, and a groove type light valve in which the electrode surface of the pixel forming electrode is perpendicular to the surface of the PLZT pellet. PLZT light valves with an electrode configuration are available, and a PLZT light valve with a groove-type electrode configuration can have a lower driving voltage than one with a surface electrode configuration. A PLZT light valve having such a groove-type electrode structure has conventionally been formed as shown in FIG. 9. That is, a 50 mm deep cut is made using a dicing saw or the like at the electrode formation location of the PLZT pellet 10.
Grooves 12, . . . ~100 μm in width and approximately 30 to 40 μm in width are formed, and then PLZT including the inner wall surfaces of the grooves 12, .
A conductive metal thin film such as NiCr is formed on the surface of the pellet 10 by vapor deposition or sputtering, and then patterned by a photolithography process to form the pixel forming electrode 14.
,... was formed. D is an adjacent pixel forming electrode 14
, 14 represents the lines of electric force when a driving voltage is applied between them.
【０００３】そして、図１０に原理的に示すように、偏
光方向１６ａ、１８ａが互いに直交する偏光子１６と検
光子１８をＰＬＺＴペレット１０の両側に配置し、駆動
電源２０から画素形成用電極１４、１４に印加する駆動
電圧を制御することによって、光源２２から偏光子１６
、ＰＬＺＴペレット１０および検光子１８を透過する光
２４の光量を制御するライトバルブとして使用するよう
にしていた。As shown in principle in FIG. 10, a polarizer 16 and an analyzer 18 whose polarization directions 16a and 18a are perpendicular to each other are arranged on both sides of the PLZT pellet 10, and a driving power source 20 is connected to the pixel forming electrode 14. , 14 from the light source 22 to the polarizer 16.
, the PLZT pellet 10 and the analyzer 18 were used as a light valve to control the amount of light 24 transmitted through the analyzer 18.
【０００４】0004
【発明が解決しようとする課題】しかしながら、図９に
示した従来の電極構造のものは、溝１２の深さをＰＬＺ
Ｔペレット１０の厚さの半分ぐらいにしかすることがで
きないため、駆動電圧をさらに低くすることができない
という問題点があった。すなわち、精細な表示をするた
めには微細な画素（例えば電極間隔が１００〜２００μ
ｍの大きさの画素）にする必要があり、溝１２の幅を大
きくすることができない。溝１２の幅が小さいのに溝１
２の深さを深くしようとすると、溝１２の開口部に欠け
が生じ光漏れの原因になるからである。本発明は上述の
問題点に鑑みなされたもので、微細な画素を形成するよ
うな場合についても、駆動電圧を低くすることのできる
電極を形成する方法を提供することを目的とする。However, in the conventional electrode structure shown in FIG.
Since the thickness of the T-pellet 10 can only be reduced to about half, there is a problem in that the driving voltage cannot be lowered further. In other words, fine pixels (for example, electrode spacing of 100 to 200 μm) are required for fine display.
Therefore, the width of the groove 12 cannot be increased. Although the width of groove 12 is small, groove 1
This is because if the depth of the groove 2 is increased, the opening of the groove 12 will be chipped, causing light leakage. The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a method for forming electrodes that can reduce the driving voltage even when forming fine pixels.
【０００５】[0005]
【課題を解決するための手段】本発明による電極形成方
法は、ＰＬＺＴペレットの一面側に第１の溝を形成し、
この第１溝の内壁面に導電膜を固着することによって第
１の電極を形成し、この第１電極の内壁面に補強用の絶
縁体を固着形成し、ついでＰＬＺＴペレットの他面側に
第１溝に連通する第２の溝を形成し、この第２溝の内壁
面に第１電極と電気的に接続する導電膜を固着すること
によって第２の電極を形成し、第１および第２電極を画
素形成用電極としてなることを特徴とするものである。[Means for Solving the Problems] An electrode forming method according to the present invention includes forming a first groove on one side of a PLZT pellet;
A first electrode is formed by fixing a conductive film to the inner wall surface of this first groove, a reinforcing insulator is fixedly formed to the inner wall surface of this first electrode, and then a second electrode is fixed to the other surface of the PLZT pellet. A second groove is formed that communicates with the first groove, and a conductive film that is electrically connected to the first electrode is fixed to the inner wall surface of the second groove, thereby forming a second electrode. It is characterized in that the electrode is used as a pixel forming electrode.
【０００６】[0006]
【作用】ＰＬＺＴペレットの一面側と他面側から互いに
連通する第１溝と第２溝を形成し、この第１溝と第２溝
の内壁面に電気的に接続する導電膜を固着することによ
って第１電極と第２電極を形成する。この第１電極およ
び第２電極は画素形成用電極を構成する。このため、微
細な画素を形成するために第１溝と第２溝の幅を大きく
することができない場合でも、ＰＬＺＴペレットの一面
側からのみ溝を形成していた従来例と比べて、実質的な
溝の深さを２倍にすることができ、画素形成用電極の面
積を２倍にすることができる。また、第１電極の内壁面
に固着形成された補強用の絶縁体は、第２溝の形成を可
能にしている。[Operation] Forming a first groove and a second groove communicating with each other from one side and the other side of the PLZT pellet, and fixing a conductive film electrically connected to the inner wall surfaces of the first groove and the second groove. A first electrode and a second electrode are formed by the following steps. The first electrode and the second electrode constitute a pixel forming electrode. Therefore, even if it is not possible to increase the width of the first and second grooves to form fine pixels, compared to the conventional example in which the grooves were formed only from one side of the PLZT pellet, the width of the grooves can be substantially reduced. The depth of the groove can be doubled, and the area of the pixel forming electrode can be doubled. Further, the reinforcing insulator fixedly formed on the inner wall surface of the first electrode enables the formation of the second groove.
【０００７】[0007]
【実施例】以下、本発明による電極形成方法の一実施例
を図１から図８までを用いて説明する。
（イ）図１に示すように、ＰＬＺＴペレット１０の一面
側の電極を形成すべき所定個所に、ダイシングソー、レ
ーザー、エッチングなどにより、所定形状（例えば深さ
１００μｍ、幅３０〜４０μｍ）の第１の溝２２、…を
形成する。
（ロ）ついで、図２に示すように、この第１溝２２、…
の内壁面を含むＰＬＺＴペレット１０の一面側の全面に
導電膜２４（例えばＮｉＣｒ）を固着する。Embodiment An embodiment of the electrode forming method according to the present invention will be described below with reference to FIGS. 1 to 8. (b) As shown in FIG. 1, a groove of a predetermined shape (for example, 100 μm in depth and 30 to 40 μm in width) is formed at a predetermined location on one side of the PLZT pellet 10 where an electrode is to be formed using a dicing saw, a laser, etching, etc. 1 grooves 22, . . . are formed. (b) Next, as shown in FIG. 2, this first groove 22,...
A conductive film 24 (for example, NiCr) is fixed to the entire surface of one side of the PLZT pellet 10, including the inner wall surface of the PLZT pellet.
【０００８】（ハ）ついで、この導電膜２４をフォトリ
ソグラフィ工程でパタ−ニングし、最後のレジスト剥離
工程の手前まで行うことによって、図３に示すように、
第１の電極２６、…及び補強用の絶縁体２８、…が形成
される。すなわち、第１電極２６は第１溝２２の内壁面
および開口部周辺に固着した導電膜２４で形成され、補
強用の絶縁体２８は第１電極２６の内壁面側に充填して
固着されたレジストによって形成される。
（ニ）ついで、ＰＬＺＴペレット１０を裏返し、硬化時
に体積変化のない透明な接着剤（例えばＵＶ硬化型透明
樹脂）３０を用いて、図４に示すように、ガラス板３２
の表面に固着する。(c) Next, this conductive film 24 is patterned in a photolithography process up to just before the final resist stripping process, as shown in FIG.
First electrodes 26, ... and reinforcing insulators 28, ... are formed. That is, the first electrode 26 is formed of the conductive film 24 fixed to the inner wall surface of the first groove 22 and around the opening, and the reinforcing insulator 28 is filled and fixed to the inner wall surface of the first electrode 26. Formed by resist. (d) Next, the PLZT pellet 10 is turned over, and a glass plate 32 is attached using a transparent adhesive (for example, UV-curable transparent resin) 30 that does not change in volume during curing, as shown in FIG.
adheres to the surface.
【０００９】（ホ）ついで、図５に示すように、ＰＬＺ
Ｔペレット１０の他面側の前記第１電極２６、…に対応
した個所に、ダイシングソー、レーザー、エッチングな
どにより、所定形状（例えば深さ１００μｍ、幅３０〜
４０μｍ）の第２の溝３４、…を形成する。この第２溝
３４、…は前記第１溝２２、…に連通し、前記第１電極
２６、…の端部を露出するように形成される。
（ヘ）ついで、後述する電気的接続をよくするために、
レジスト剥離液を用いて絶縁体２８、…の一部を剥離し
、図６に示すように、第１電極２６、…の露出部を多く
する。(e) Next, as shown in FIG.
A predetermined shape (for example, a depth of 100 μm and a width of 30 to
40 μm) second grooves 34, . . . are formed. The second grooves 34, . . . communicate with the first grooves 22, . . . and are formed so as to expose the ends of the first electrodes 26, . (F) Next, in order to improve the electrical connection described later,
A portion of the insulators 28, . . . are removed using a resist stripping solution to increase the exposed portion of the first electrodes 26, .
【００１０】（ト）ついで、図７に示すように、第２溝
３４、…の内壁面を含むＰＬＺＴペレット１０の全面に
導電膜３６（例えばＮｉＣｒ）を固着する。
（チ）ついで、この導電膜３６をフォトリソグラフィ工
程でパタ−ニングし、図８に示すように、第２の電極３
８、…が形成される。すなわち、第２電極３８は第２溝
３４の内壁面および開口部周辺に固着した導電膜３６で
形成される。前記第２電極３８、…はそれぞれ第１電極
２６、…の対応する電極と電気的に接続し、画素形成用
電極４０、…を形成している。隣接する画素形成用電極
４０、４０間に駆動電圧を印加することによって、ＰＬ
ＺＴペレット１０内の対応する画素部分に電場が作用し
、この電場の電気力線Ｄの数は従来例より増大する。(G) Next, as shown in FIG. 7, a conductive film 36 (for example, NiCr) is fixed on the entire surface of the PLZT pellet 10, including the inner wall surfaces of the second grooves 34, . (H) Next, this conductive film 36 is patterned by a photolithography process to form the second electrode 36 as shown in FIG.
8,... are formed. That is, the second electrode 38 is formed of a conductive film 36 fixed to the inner wall surface of the second groove 34 and around the opening. The second electrodes 38, . . . are electrically connected to corresponding electrodes of the first electrodes 26, . . . to form pixel forming electrodes 40, . By applying a driving voltage between adjacent pixel forming electrodes 40, 40, PL
An electric field acts on a corresponding pixel portion within the ZT pellet 10, and the number of lines of electric force D of this electric field is increased compared to the conventional example.
【００１１】[0011]
【発明の効果】本発明によるＰＬＺＴライトバルブの電
極形成方法は、上記のように、ＰＬＺＴペレットの一面
側と他面側から互いに連通する第１溝と第２溝を形成し
、この第１溝と第２溝の内壁面に電気的に接続する導電
膜を固着することによって第１電極と第２電極を形成し
、この第１及び第２電極で画素形成用電極を構成するよ
うにしたので、微細な画素を形成するために第１溝と第
２溝の幅を大きくすることができない場合でも、ＰＬＺ
Ｔペレットの一面側からのみ溝を形成していた従来例と
比べて、実質的な溝の深さを２倍にすることができ、画
素形成用電極の面積を２倍にすることができる。このた
め、駆動電圧を従来より低くすることができる。Effects of the Invention As described above, the method for forming electrodes of a PLZT light valve according to the present invention includes forming a first groove and a second groove that communicate with each other from one side and the other side of a PLZT pellet, and A first electrode and a second electrode are formed by fixing a conductive film electrically connected to the inner wall surface of the second groove, and the first and second electrodes constitute a pixel forming electrode. , even if the width of the first groove and the second groove cannot be increased to form fine pixels, PLZ
Compared to the conventional example in which grooves were formed only from one side of the T pellet, the actual depth of the grooves can be doubled, and the area of the pixel forming electrode can be doubled. Therefore, the driving voltage can be lower than that of the conventional method.
【図１】ＰＬＺＴペレットの一面側に第１の溝を形成し
た状態を示す断面図である。FIG. 1 is a cross-sectional view showing a state in which a first groove is formed on one side of a PLZT pellet.
【図２】第１溝を含むＰＬＺＴペレットの一面側の全面
に導電膜を形成した状態を示す断面図である。FIG. 2 is a cross-sectional view showing a state in which a conductive film is formed on the entire surface of one side of a PLZT pellet including a first groove.
【図３】ＰＬＺＴペレットの一面側に第１の電極及び補
強用の絶縁体を形成した状態を示す断面図である。FIG. 3 is a cross-sectional view showing a state in which a first electrode and a reinforcing insulator are formed on one side of a PLZT pellet.
【図４】図３のＰＬＺＴペレットを裏返してガラス板に
固着した状態を示す断面図である。FIG. 4 is a cross-sectional view showing a state where the PLZT pellet of FIG. 3 is turned over and fixed to a glass plate.
【図５】ＰＬＺＴペレットの他面側に第２の溝を形成し
た状態を示す断面図である。FIG. 5 is a cross-sectional view showing a state in which second grooves are formed on the other side of the PLZT pellet.
【図６】第１電極の電気的接続部を多くした状態を示す
断面図である。FIG. 6 is a cross-sectional view showing a state in which the number of electrical connection parts of the first electrode is increased.
【図７】第２溝を含むＰＬＺＴペレットの他面側の全面
に導電膜を形成した状態を示す断面図である。FIG. 7 is a cross-sectional view showing a state in which a conductive film is formed on the entire other surface of the PLZT pellet including the second groove.
【図８】ＰＬＺＴペレットの他面側に第２の電極を形成
した状態を示す断面図である。FIG. 8 is a cross-sectional view showing a state in which a second electrode is formed on the other side of the PLZT pellet.
【図９】従来例を示す断面図である。FIG. 9 is a sectional view showing a conventional example.
【図１０】ＰＬＺＴライトバルブの原理的な構成を説明
する斜視図である。FIG. 10 is a perspective view illustrating the basic configuration of a PLZT light valve.
１０…ＰＬＺＴペレット ２２…第１溝 ２６…第１電極 ２８…絶縁体 ３４…第２溝 ３８…第２電極 ４０…画素形成用電極 10...PLZT pellets 22...First groove 26...First electrode 28...Insulator 34...Second groove 38...Second electrode 40... Pixel forming electrode
Claims (3)
を形成し、この第１溝の内壁面に導電膜を固着すること
によって第１の電極を形成し、この第１電極の内壁面に
補強用の絶縁体を固着形成し、前記ＰＬＺＴペレットの
他面側に前記第１溝に連通する第２の溝を形成し、この
第２溝の内壁面に前記第１電極と電気的に接続する導電
膜を固着することによって第２の電極を形成し、前記第
１および第２電極を画素形成用電極としてなることを特
徴とするＰＬＺＴライトバルブの電極形成方法。Claim 1: A first groove is formed on one surface side of a PLZT pellet, a first electrode is formed by fixing a conductive film to the inner wall surface of the first groove, and a first electrode is formed on the inner wall surface of the first electrode. A reinforcing insulator is firmly formed, a second groove communicating with the first groove is formed on the other side of the PLZT pellet, and an inner wall surface of the second groove is electrically connected to the first electrode. A method for forming an electrode for a PLZT light valve, characterized in that a second electrode is formed by fixing a conductive film, and the first and second electrodes serve as pixel forming electrodes.
むＰＬＺＴペレットの表面に導電膜を成膜し、この成膜
した導電膜の不要部分をフォトリソグラフィ工程で除去
してなる請求項１記載のＰＬＺＴライトバルブの電極形
成方法。2. The first and second electrodes are formed by forming a conductive film on the surface of the PLZT pellet including the first and second grooves, and removing unnecessary portions of the formed conductive film using a photolithography process. The method for forming electrodes of a PLZT light valve according to claim 1.
ーザーまたはエッチングによってＰＬＺＴペレットに形
成してなる請求項１または２記載のＰＬＺＴライトバル
ブの電極形成方法。3. The method for forming electrodes of a PLZT light valve according to claim 1, wherein the first and second grooves are formed in the PLZT pellet by a dicing saw, a laser, or etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8364791A JPH04294319A (en) | 1991-03-22 | 1991-03-22 | Formation of electrode of plzt light valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8364791A JPH04294319A (en) | 1991-03-22 | 1991-03-22 | Formation of electrode of plzt light valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04294319A true JPH04294319A (en) | 1992-10-19 |
Family
ID=13808245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8364791A Pending JPH04294319A (en) | 1991-03-22 | 1991-03-22 | Formation of electrode of plzt light valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04294319A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1526400A4 (en) * | 2003-06-10 | 2006-07-05 | Nippon Telegraph & Telephone | Electrooptic modulation element |
| WO2009061579A1 (en) * | 2007-11-07 | 2009-05-14 | Kla-Tencor Technologies Corporation | Dynamic pattern generator with cup-shaped structure |
| US8089051B2 (en) | 2010-02-24 | 2012-01-03 | Kla-Tencor Corporation | Electron reflector with multiple reflective modes |
| US8253119B1 (en) | 2009-07-27 | 2012-08-28 | Kla-Tencor Corporation | Well-based dynamic pattern generator |
| US8373144B1 (en) | 2010-08-31 | 2013-02-12 | Kla-Tencor Corporation | Quasi-annular reflective electron patterning device |
-
1991
- 1991-03-22 JP JP8364791A patent/JPH04294319A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1526400A4 (en) * | 2003-06-10 | 2006-07-05 | Nippon Telegraph & Telephone | Electrooptic modulation element |
| US7433111B2 (en) | 2003-06-10 | 2008-10-07 | Nippon Telegraph And Telephone Corporation | Electrooptic modulation element |
| WO2009061579A1 (en) * | 2007-11-07 | 2009-05-14 | Kla-Tencor Technologies Corporation | Dynamic pattern generator with cup-shaped structure |
| US7755061B2 (en) | 2007-11-07 | 2010-07-13 | Kla-Tencor Technologies Corporation | Dynamic pattern generator with cup-shaped structure |
| US8253119B1 (en) | 2009-07-27 | 2012-08-28 | Kla-Tencor Corporation | Well-based dynamic pattern generator |
| US8089051B2 (en) | 2010-02-24 | 2012-01-03 | Kla-Tencor Corporation | Electron reflector with multiple reflective modes |
| TWI483281B (en) * | 2010-02-24 | 2015-05-01 | Kla Tencor Corp | Methods and apparatus for reflecting electrons |
| US8373144B1 (en) | 2010-08-31 | 2013-02-12 | Kla-Tencor Corporation | Quasi-annular reflective electron patterning device |
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