JPH0429382A - Gas laser and laser machining system - Google Patents

Abstract

PURPOSE:To perform a uniform glow discharge, to enhance an efficiency of a laser light and an output by continuously emitting an ultraviolet ray emitting lamp light into laser gas to preliminarily ionize it. CONSTITUTION:A small-sized ultraviolet ray emitting lamp 36 is disposed out of a vessel 12 as a preliminary ionization source, and opposed to a totally reflecting mirror 14 through an electromagnetic shutter 38. The lamp 36 is normally lit, and a lamp light 40 from the lamp 36 is emitted to the mirror 14 through an optical system composed of a cylindrical lens, etc., and the shutter 38. Thus, even if a plurality of the lamps 36 are used, a device can be reduced in size as compared with a device using an X-ray or a laser light as the ionization source, easily handled to obtain a uniform glow discharge. Accordingly, deterioration of laser gas due to an arc can be prevented to increase the service life of the device.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a gas laser device and a laser atomization system, and in particular, to a gas laser device suitable for use as a discharge-excited excimer laser operating at high pressure and a method using this device. Concerning laser oxidation systems.

[Conventional technology]

In the conventional gas laser device, Japanese Patent Application Laid-Open No. 63-199
As described in Publication No. 475, X-rays from an X-ray tube are used as a preliminary ionization source for a discharge-excited excimer laser, and X-rays are irradiated from the back side of a cathode electrode with a porous opening structure among the main discharge electrodes. configuration has been adopted.

In addition, as a device that uses laser light as a preliminary ionization source,
The one described in US Pat. No. 4,679,203 is known. This one is a pulse charging circuit (PFL)
At the point when the pulse voltage of shows the peak value, a laser beam for pre-ionization is irradiated between the main discharge electrodes to pre-ionize, and at the same time,
A method has been adopted in which the main discharge is formed by activating the rail gap.

[Problem to be solved by the invention]

Since the above conventional technology uses X-rays or laser light as a pre-ionization source, it is not possible to continuously emit X-rays or laser light due to the function of the device, and the amount of ultraviolet light emitted by the pre-ionization source is a single pulse. It has a typical high peak.

For this reason, even if a certain amount of time is required to obtain sufficient pre-ionization amount necessary for glow discharge, no X-rays or laser light can be emitted during this time, and the voltage between the main discharge electrodes is low. If a pulsed laser beam or X-ray is applied at the same time as the application, the main discharge may start at a relatively low terminal voltage between the main discharge electrodes. On the other hand, if pulsed laser light or X-rays are irradiated between the main discharge electrodes when the terminal voltage between the main discharge electrodes is relatively high, the main discharge is triggered before a sufficient amount of preliminary ionization is obtained. Therefore, with the conventional technology, a similar glow discharge cannot be obtained, an arc is generated, the laser medium gas deteriorates, and the efficiency of the laser output decreases.
There is a possibility that the output may decrease.

Incidentally, as described in JP-A-1-201975, it has been proposed to use an ultraviolet light emitting lamp as a preliminary ionization source and place this lamp inside a laser container. In such a configuration, there is a risk that the laser medium gas will deteriorate due to the heat generated by the lamp's light emission.

An object of the present invention is to provide a gas laser device and a laser processing system that can generate laser light by glow discharge without generating an arc.

[Means to solve the problem]

In order to achieve the above-mentioned object, the present invention provides a first device that includes a container that is equipped with a light transmission window and stores a laser medium gas, and a container that is arranged opposite to each other in the container and that transmits the laser light accompanying the discharge. A pair of main discharge electrodes leading to the window and a circuit connecting the power supply and each main discharge electrode are formed to accumulate charge from the power supply.
It is equipped with electrode excitation means for discharging accumulated charge to each main discharge electrode in response to a discharge command, and an ultraviolet light emitting lamp. This is a gas laser device having preliminary ionization means that continuously irradiates into a medium gas.

The second device includes a container equipped with a light-transmitting window and storing a laser medium gas, a pair of main discharge electrodes that are placed opposite each other in the container and guide the laser light accompanying the discharge to the light-transmitting window, and a power supply and each The terminal voltage between the main discharge electrodes is equipped with an electrode excitation means that forms a circuit connecting the main discharge electrodes to accumulate charges from the power source, and discharges the accumulated charges to each main discharge electrode according to a discharge command, and an ultraviolet light emitting lamp. a first pre-ionization means that continuously irradiates ultraviolet light emitting lamp light into the laser medium gas between the main discharge electrodes when the set voltage is reached; This is a gas laser device having a second preliminary ionization means for continuous irradiation.

The third device includes a container equipped with a light-transmitting window and storing a laser medium gas, a pair of main discharge electrodes that are placed opposite each other in the container and guide the laser light accompanying the discharge to the light-transmitting window, and a power supply and each It is equipped with an electrode excitation means that forms a circuit connecting the main discharge electrodes to accumulate charges from the power source, and discharges the accumulated charges to each main discharge electrode in response to a discharge command, and an ultraviolet light emitting lamp. This gas laser device includes a preliminary ionization means that continuously irradiates the irradiation light into the laser medium gas and increases the irradiation energy of the irradiation light in stages.

1st. Second. or as a fourth device including a third device,
Preliminary ionization means is arranged outside the container, and a plurality of light transmission paths are formed in almost the entire area of one of the pair of main discharge electrodes to guide incident light from the light transmission window of the container to the other electrode. A gas laser device is constructed in which each of the light beam transmission paths is irradiated with lamp light from an ionization means.

1st. Second. or as a fifth device including a third device;
A multilayer main discharge electrode section is constructed by laminating at least two or more sets of these electrode groups, with a high voltage main discharge electrode and a low voltage main discharge electrode arranged facing each other with the laser medium gas in between. A gas laser device is constructed by connecting each set of electrodes of the multilayer main discharge electrode section to an electrode excitation means, and irradiating lamp light from a pre-ionization means into the laser medium gas between the electrodes of each set. be.

1st. Second. Third. 4th. Alternatively, the sixth device including the fifth device is a gas laser device having a condensing device that condenses part of the lamp light from the pre-ionization device onto a specific region between the main discharge electrodes.

The seventh device including the fourth device is a gas laser device including a light transmitting window for emitting laser light from a container and a light transmitting window for entering ultraviolet lamp light.

As an eighth device including the fourth device, the container is equipped with a light transmission window that serves both for laser beam emission and ultraviolet lamp light input, and a beam is transmitted into the laser beam propagation path outside the container and the ultraviolet lamp light propagation path. This is a gas laser device in which a splitter is arranged.

A system using a gas laser device includes any one of the first to eighth devices, and constitutes a laser machining system that uses laser light from a main discharge electrode to cut a workpiece material. It is something.

[Effect]

In the process of applying a voltage between the main discharge electrodes by the electrode excitation means, the laser medium gas between the main discharge electrodes is continuously irradiated with ultraviolet light emitting lamp light from the pre-ionization means. Even if the timing is slightly off, the main discharge is started when a sufficient amount of preliminary ionization is achieved by continuous irradiation with a constant amount of ultraviolet light emitting lamp light. Therefore, laser light can be generated under -like glow discharge without generating an arc between the electrodes. Furthermore, it is possible to uniformly bring the pre-ionization state between the main electrodes, and to obtain a highly efficient and long-life output due to the main discharge triggering action.

When the laser medium gas is continuously irradiated with ultraviolet lamp light, only trace impurities in the chloride fraction of hydrogen chloride can be dissociated from the laser medium gas. Further, by increasing the amount of preliminary ionization in stages, a sufficient amount of preliminary ionization can be ensured, and the discharge starting voltage is stabilized.

If the main discharge electrode is composed of a multilayer main discharge electrode part.

A large-diameter uniform discharge is formed in the electrode width direction in this electrode portion, and a large-diameter laser beam can be obtained.

By arranging the pre-ionization means outside the container and irradiating ultraviolet lamp light between the main discharge electrodes from outside the container, it is possible to prevent the laser medium gas from deteriorating due to the heat accompanying the emission of lamp light. At the same time, maintenance of the pre-ionization means becomes easy. Furthermore, it is possible to prevent the lamp surface from deteriorating and the transmittance from decreasing.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on the drawings.

In FIG. 1, a gas laser device 10 includes a box-shaped container 12 as the device main body, and a total reflection mirror 14 as a light transmission window and an output mirror 16 are arranged facing each other on the side wall of the container 12. There is. Inside the container 12 is a mixed laser gas containing a halogen gas, such as X, which becomes a laser medium gas.
eCQ.

It is filled with KrF gas, Ne, and He, and main discharge electrodes 18 and 20 are arranged in this mixed laser gas to face each other and guide the laser beam to the output mirror 16.

The main discharge electrodes 18 and 20 are connected to both ends of a peaking capacitor 22, and the main discharge electrode 18 is connected to a charging inductance 24 as a high voltage side electrode, and is connected to a high voltage via an inductance 26 and a charging capacitor 28. It is connected to a charging power source 30. A high voltage switch 32 is provided between the input side of the capacitor 28 and ground.

This switch 32 opens and closes its contacts in accordance with a command signal from a trigger device 34.

That is, when the pulse signal 100 as a discharge command is output from the trigger device 34, the contact is closed. When the contacts of switch 32 close,
The accumulated charge stored in the capacitor 28 is transferred to the main discharge electrode 18.
．． It is designed to discharge to 20. That is, an inductance 24, a peaking capacitor 22. The inductance 26, the capacitor 28, and the high voltage switch 32 are configured as electrode excitation means.

A small ultraviolet light emitting lamp 36 is installed outside the container 12 as a preliminary ionization source, and this ultraviolet light emitting lamp 36 is placed opposite to the total reflection mirror 14 via an electromagnetic shutter 38. This ultraviolet lamp 36 is always on, and the lamp light 4o from the ultraviolet light emitting lamp 36 is totally reflected 1 (14) through an optical system composed of a cylindrical lens and the like and an electromagnetic shutter 38. The total reflection mirror 14 and the output mirror 16 are coated so that the wavelength of the lamp light 40 from the ultraviolet lamp 16 is not reflected. The generated lamp light 40 is irradiated onto the mixed laser gas between the main discharge electrodes 18 and 20.The electromagnetic shutter 38 is connected to a trigger device 34 via a delay device 42, and receives a pulse signal from the trigger device 34. 100 is delayed for a certain period of time and then output from the delay device 42 as a pulse signal 102, this pulse signal 1
The electromagnetic shutter 38 is opened while the signal 02 is being output. When the electromagnetic shutter 38 is in an open state, the container 12 is continuously irradiated with lamp light 40 whose amount of ultraviolet light is kept constant. As shown in FIG. 2, the delay time Td of the delay device 42 is set in correspondence with the time when the voltage between the terminals of the main discharge electrode 18.20 reaches the pulse charging voltage Vp, and , electromagnetic shutter 38, delay device 42. The trigger device 34 constitutes a pre-ionization means.

In the above configuration, the relationship between the pulse charging voltage Vp across the peaking capacitor 22 and the discharge starting voltage Va1 between the main discharge electrodes 18°20 is set so that Vp≧Va□, and the pulse charging time Tt is The value of the inductance 26 is adjusted so that the time is longer than the discharge time, for example, 5 to 50 μs. Further, when the trigger device 34 outputs the pulse signal 100 as a discharge command with the delay time Td of the delay device 42 set to be larger than the pulse charging time Tt, the contact of the high voltage switch 32 closes first. When the contact of the high voltage switch 32 is closed, the charge stored in the charging capacitor 28 is transferred to the capacitor 28,
The signal is transferred to the peaking capacitor 22 through a resonant circuit of a loop connecting the high voltage switch 32, the peaking capacitor 22, and the inductance 26, and the peaking capacitor 2
The voltage across the two ends gradually increases. That is, the terminal voltage between the main discharge electrodes 18 and 20 gradually increases.

When the voltage across the peaking capacitor 22 reaches Vp at time Tt, it means that the set voltage, which is the voltage at which discharge is possible, is applied to the main discharge electrode 18.20. after that,
The electromagnetic shutter 38 is activated by the pulse signal 102 at time Td.
When the electromagnetic shutter 38 is opened, a constant amount of ultraviolet light 40 is continuously emitted into the container 12 via the electromagnetic shutter 38 and the total reflection mirror 14. 1 at time t after being irradiated with lamp light 40
For example, discharge starts between the main discharge electrodes 18° and 20° at t=50 ns. At this time, the main discharge electrode 1 has already been subjected to preliminary ionization.
Since seed electrons exist between 8.20 and 20, main discharge electrode 1
A --like glow discharge is performed over the entire region between 8.20 and 20, and laser light 44 is emitted from the output mirror 16.

As described above, according to this embodiment, since the ultraviolet light emitting lamp 36 such as a mercury lamp is used as a pre-ionization source, even if a plurality of light-emitting lamps 36 are used, X-rays or laser light can be used as a pre-ionization source. The device can be made smaller and easier to handle than the one using the . Furthermore, since a -like glow discharge can be obtained, it is possible to prevent the laser gas from being degraded by the arc, contributing to extending the life of the device.

Also, lamp light 40 in which the amount of ultraviolet light emitted is continuously constant
can be irradiated into the laser gas, the main discharge can be started when the cumulative amount of preliminary ionization becomes large, and it becomes possible to increase the efficiency and output of the laser beam 44. Furthermore, there is no need to increase the rate of increase in the voltage applied between the main discharge electrodes 18.20, and
Since it has a trigger action between 0 and 0, the load on the high voltage switch 32 is reduced, and it becomes possible to use a solid state element as the high voltage switch 32. If a solid state element is used instead of a thyratron for the high voltage switch 32, the device can be further miniaturized.

In addition, unlike conventional sources, sparks are not generated from the pre-ionization source, so it is possible to suppress the generation of noise due to discharge, prevent malfunctions of the equipment, and improve the stability of the equipment. It becomes possible to achieve this goal.

Next, a second embodiment of the present invention will be described based on FIGS. 3 and 4.

In this embodiment, an ultraviolet light emitting lamp 46 is installed outside the container 12 as a second preliminary ionization source, a beam splitter 48 is arranged between the electromagnetic shutter 38 and the total reflection mirror 14, and the ultraviolet light emitting lamp 46 Lamp light from 4
0 into the container 12 through the electromagnetic shutter 38 and the beam splitter 48, and lamp light 50 from the ultraviolet lamp 46 into the container 12 through the beam splitter 48.
The circuit constants are set so that the rate of increase in the voltage applied to both ends of the peaking capacitor 22 is, for example, 0.1 to 0.3 kv/ns. In addition, the delay time t of the delay device 42
This embodiment is the same as the previous embodiment except for the different parts, so the same or corresponding parts are given the same reference numerals and their explanation will be omitted.

In this embodiment, as shown in FIG. 4, the lamp light 5o from the ultraviolet light emitting lamp 46 is constantly irradiated into the container 12, and the trigger group! When the electromagnetic shutter 38 is opened at time t1 after the contact of the high voltage switch 32 is closed by the pulse signal 100 from the main discharge electrode 34, pre-ionization has already been performed by the lamp light 50, Discharge occurs at a time Tt when the voltage becomes a discharge voltage Vpx slightly lower than the impulse discharge starting voltage VB1.

According to this embodiment, as in the previous embodiment, since the laser gas is constantly irradiated with ultraviolet light emitting lamp light, -like glow discharge can be obtained, and the same effects as in the previous embodiment can be obtained. Furthermore, in this embodiment, since the laser gas is constantly irradiated with the lamp light 5o from the ultraviolet lamp 46, only trace impurities such as halogen molecules contained in the laser gas, such as hydrogen chloride and chloride, are dissociated. I can do it.

Furthermore, in the above embodiment, if the irradiation energy of the lamp light 5o output from the ultraviolet light emitting lamp 46 is increased in stages, the amount of preliminary ionization can be increased in stages, and the , it is possible to perform more sufficient preliminary ionization, and it becomes possible to achieve higher efficiency and higher output of laser light. It is also possible to increase the irradiation energy of the ultraviolet lamp 36 in stages.

Next, a third embodiment of the present invention will be described based on FIG.

In this embodiment, the main discharge electrode 18 on the high voltage side is an electrode with a mesh structure, and a light transmission window 52 is provided on the side wall of the container 12 on the back side of the main discharge electrode 18, and the ionization is carried out opposite to this light transmission window 52. A shutter 38 and an ultraviolet light emitting lamp 38 are arranged, and the other configurations are the same as those shown in FIG. 1, so the same components are given the same reference numerals and their explanation will be omitted.

The main discharge electrode 18 in this embodiment has a light transmission window 52.
A plurality of light transmission paths 54 are formed over almost the entire area of the main discharge electrode 18 for guiding incident light from the main discharge electrode 20 to the main discharge electrode 20 side. Namely.

Lamp light 40 from the ultraviolet light emitting lamp 38 passes through the light transmission window 52 and each light transmission path 54 to the main discharge electrode 18.20.
Almost the entire area in between is irradiated.

Therefore, according to this embodiment, the preliminary t* can be applied uniformly over the entire area between the main discharge electrodes 18 and 20, and a more -like glow discharge can be realized.

Next, a fourth embodiment of the present invention will be described based on FIGS. 6 and 7.

In this embodiment, the main discharge electrode 18 and the main discharge electrode 20 shown in FIG. is connected to the electrode excitation means and the main discharge electrode section 56
The lamp light 4o from the ultraviolet light emitting lamp 36 is irradiated onto the lamp.

The multilayer main discharge electrode section 56 includes the high voltage side main discharge electrodes 18A, 18
B, 18C, low voltage side main discharge electrode 2OA.

20B, and the electrodes are arranged alternately so as to be parallel to the laser optical axis. Small discharge portions 58, 60, 62, and 64 are formed in multiple layers between each electrode.

And peaking capacitors 66, 68. between each electrode.
70 is connected, and the main discharge electrodes 18A, 1 on the high voltage side
8B and 18C have inductances of 74 and 76.7, respectively.
8 to a charging capacitor 80 and a charging inductance 82. The input side of the capacitor 80 is connected to the power supply 30, and the high voltage switch 32 is connected to the output side of the power supply 30. Further, a reflection mirror 1!84 is installed between the total reflection mirror 14 and the electromagnetic shutter 38, and lamp light 40 from the ultraviolet light emitting lamp 36 is transmitted to the electromagnetic shutter 3.
The container 12 is bent at 90 degrees by the reflection plate 84 through the reflection plate 84.
It is designed to be irradiated internally.

In the above configuration, the pulse signal 1 is output from the trigger device 34.
When 00 is output, the contact of the high voltage switch 32 closes, and the electric charge charged in the charging capacitor 80 is transferred to the loop of capacitor 80 → switch 32 → peaking capacitor 66 → inductance 74, and capacitor 80 → switch 3.
2 -> peaking capacitor 68 -> inductance 76 loop, capacitor 80 -> switch 32 -> peaking capacitor 70 -> inductance 76 loop, capacitor 80 -> switch 32 -> peaking capacitor 72 -> peaking capacitor 66° via a resonant circuit consisting of the loop of inductance 78 68.70.72, and the terminal voltage between each electrode 18A, 18B, 18C and electrode 2OA, 20B gradually increases. Note that the charge discharge time is set to be sufficiently longer than the discharge time of the main discharge depending on the values of the inductances 74 and 76.78.

When the electromagnetic shutter 38 operates after a delay time Td after the contact of the switch 32 is closed, the lamp light 40 from the ultraviolet light emitting lamp 36 passes through the reflector 84 and reaches the multilayer main discharge electrode section 5.
Irradiation is applied between each of the 6 electrodes.

As a result, preliminary ionization is performed in the small discharge portions 58, 60, 62, and 64, and a --like glow discharge is formed over the entire area of each electrode. Therefore, according to this embodiment, in each region of the small discharge portions 58, 60, 62° 64 of the multilayer structure,
At the same time, a large-diameter laser beam can be obtained because pre-ionization can be performed in a similar manner.

In this example, the main electrode space is formed as a collection of multilayer small gap discharge spaces, so a single small gap can be adjusted according to the applied voltage, and main discharge can be performed even with a relatively low voltage. Insulation measures for the laser device can be easily taken, and the high voltage charging type 130 can be made smaller.

In the embodiment, each electrode 18A to 18C920A,
It is also possible to make 20B a double structure or an electrode with a porous opening structure, and the peaking capacitor 66
．． It is also possible to use high dielectric materials as 68, 70, and 72.

Furthermore, according to this embodiment, a large-diameter laser beam can be obtained, so if this laser beam is used to cut a workpiece material such as an LSI, the quality of the cutting process can be improved even by irradiation with a single laser beam. It becomes possible to achieve this goal.

The wavelength of the ultraviolet light emitting lamp 36 in each of the above embodiments is preferably 500 nm or less, and if a lamp having a wavelength shorter than the oscillation frequency of the laser gas is used, a good pre-ionization effect can be obtained.

Further, in the above embodiment, the lamp light 40 is irradiated from the total reflection mirror 14, but a beam splitter is arranged on the output side [16], and the laser light from the output mirror 16 is emitted via the beam splitter. , UV lamp 3
The lamp light 40 from 6 is connected to the beam splitter and the output mirror 16
It is also possible to irradiate the inside of the container 12 through the irradiation. In this case, only the output [16] needs to be provided as a light transmission window.

Further, in each of the embodiments described above, if the ultraviolet light emitting lamp 36 is operated in combination with a thyratron or a discharge tube, it is possible to omit the delay device. In this case, it becomes possible to further improve the reliability of control.

〔Effect of the invention〕

As explained above, according to this embodiment, since preliminary ionization is performed by continuously irradiating the laser gas with ultraviolet light emitting lamp light, -like glow discharge is possible, resulting in high efficiency and high efficiency of laser light. It becomes possible to output.

Furthermore, since the ultraviolet lamp light is irradiated from outside the container into the container, it is possible to prevent the laser gas from being degraded by the ultraviolet lamp light, contributing to a longer life of the device.

If the electrode has a multilayer structure, a large diameter laser beam can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a first embodiment of the present invention, FIG. 2 is an explanatory diagram of the operation of the apparatus shown in FIG. 1, FIG. 3 is a block diagram showing a second embodiment of the present invention, and FIG. 3 is an explanatory diagram of the operation of the apparatus shown in FIG. 3, FIG. 5 is a configuration diagram showing the third embodiment of the present invention, and FIG.
This figure is a block diagram showing a fourth embodiment of the present invention, and FIG. 7 is a block diagram of main parts of the apparatus shown in FIG. 6. 10... Gas laser device, 12... Container, 14...
- Total reflection mirror, 16... Output mirror, 18.20... Main discharge electrode. 32... High voltage switch, 34... Trigger device, 3
6... Ultraviolet light emitting lamp, 38... Electromagnetic shutter, 42... Delay device, 52...
...Light transmission window, 54...Light transmission path, 56...Multilayer main discharge electrode section, 58.60, 62, 64...Small discharge section, 84...Reflector.

Claims (1)

[Scope of Claims] 1. A container having a light transmission window and storing a laser medium gas, a pair of main discharge electrodes arranged opposite to each other in the container and guiding laser light accompanying discharge to the light transmission window; Forms a circuit connecting the power source and each main discharge electrode to accumulate charge from the power source,
It is equipped with electrode excitation means for discharging accumulated charge to each main discharge electrode in response to a discharge command, and an ultraviolet light emitting lamp. A gas laser device comprising preliminary ionization means for continuously irradiating into a medium gas. 2. A container equipped with a light-transmitting window and storing a laser medium gas, a pair of main discharge electrodes that are placed opposite each other in the container and guide the laser light accompanying the discharge to the light-transmitting window, a power source, and each main discharge electrode. forms a circuit connecting the
It is equipped with electrode excitation means for discharging accumulated charge to each main discharge electrode in response to a discharge command, and an ultraviolet light emitting lamp. A gas laser device comprising a first preliminary ionization means that continuously irradiates a medium gas into a medium gas, and a second preliminary ionization means that continuously irradiates an ultraviolet lamp light into a laser medium gas between main discharge electrodes. 3. A container equipped with a light transmission window and storing a laser medium gas, a pair of main discharge electrodes that are arranged opposite to each other in the container and guide the laser light accompanying the discharge to the light transmission window, a power source, and each main discharge electrode. forms a circuit connecting the
It is equipped with an electrode excitation means for discharging the accumulated charge to each main discharge electrode in response to a discharge command, and an ultraviolet light emitting lamp, which continuously irradiates the laser medium gas between the main discharge electrodes with light from the lamp, and stages the irradiation energy of the irradiation light. A gas laser device having a preliminary ionization means for increasing the temperature. 4. Pre-ionization means is arranged outside the container, and a plurality of light transmission paths are formed in almost the entire area of one of the pair of main discharge electrodes to guide incident light from the light transmission window of the container to the other electrode. 4. A gas laser apparatus according to claim 1, wherein lamp light from a preliminary ionization means is irradiated into each of said light beam transmission paths. 5. A high-pressure main discharge electrode and a low-pressure main discharge electrode arranged opposite to each other with the laser medium gas in between are set as a set, and at least two or more sets of these electrode groups are stacked to form a multilayer main discharge electrode part. wherein each set of electrodes of the multilayer main discharge electrode section is connected to electrode excitation means, and lamp light from the preionization means is irradiated into the laser medium gas between the electrodes of each set,
Gas laser device according to 2 or 3. 6. Claim 1, further comprising a condensing means for concentrating a part of the lamp light from the pre-ionization means on a specific area between the main discharge electrodes.
Gas laser device according to 2, 3, 4 or 5. 7. The gas laser device according to claim 4, wherein the container is provided with a light transmitting window for emitting laser light and a light transmitting window for entering ultraviolet lamp light. 8. Claim 4, wherein the container is provided with a light transmitting window that serves both for laser beam emission and ultraviolet lamp light input, and a beam splitter is arranged in the laser beam propagation path and the ultraviolet lamp light propagation path outside the container. gas laser equipment. 9. A laser processing system comprising the gas laser device according to any one of claims 1 to 8, and using laser light from the main discharge electrode to cut a workpiece material.