JPH04284334A - Magnetron - Google Patents

Abstract

PURPOSE:To reduce manufacturing cost, prevent a manufacturing process from becoming complicated, and prevent the degree of vacuum from lowering by attaching a cooling block provided with three holes arranged in a U shape to an anode by means of mechanical tightening. CONSTITUTION:The tightening area 3 of a cooling block 1 is provided with three holes arranged in a U shape. A cooling liquid passage 4 is formed by closing the opening other than the inlets and outlets of these holes for the cooling liquid. Placing an anode 9 in the anode insertion hole 2 of the block 1, the block 1 is attached to the anode 9 by mechanically tightening an attachment bolts. The eliminates the need for a soldering device, reduces manufacturing cost prevents a manufacturing process from becoming complicated, and prevents degree of vacuum from lowering. By forming the passage 4 with three holes provided in the block 1, the passage 4 can be formed easily. As a result, manufacturing cost is reduced. The performance of a magnetron is increased by cooling it by bringing the outer surface of the block 1 into contact with a yoke 10.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a liquid-cooled magnetron.

0002

[Prior art] In microwave ovens, etc.,
As shown in Japanese Utility Model Publication No. 65752 and Japanese Utility Model Application Publication No. 56-159957, air-cooled magnetrons are used, but liquid-cooled magnetrons are used in industrial microwave equipment such as plasma etching equipment. A type magnetron is used.

FIG. 3 is a schematic diagram showing a conventional liquid-cooled magnetron. In the figure, 9 is an anode, 11 is a magnet provided on both sides of the anode 9, 10 is a yoke provided in contact with the magnet 11, and 8 is a cooling pipe attached to the anode 9 by brazing. The end is connected to a coolant supply (not shown).

FIG. 4 is a schematic diagram showing another conventional liquid-cooled magnetron. In the figure, 7 is a cooling jacket attached to the anode 9 by brazing, and the cooling jacket 7 is connected to a cooling liquid supply device.

[0005]

In these magnetrons, since the cooling pipe 8 and the cooling jacket 7 are brazed to the anode 9, a brazing device is required, which increases the manufacturing cost. Furthermore, if the cooling pipe 8 and the cooling jacket 7 are brazed to the anode 9 before the vacuum evacuation process, the subsequent process will be complicated, and if the cooling pipe 8 and the cooling jacket 7 are brazed to the anode 9 after the vacuum evacuation process. Then, since the anode 9 is exposed to high temperature, the degree of vacuum decreases, and additional steps such as re-aging are required.

The present invention was made to solve the above-mentioned problems, and it is an object of the present invention to provide a magnetron that is inexpensive to manufacture, does not complicate the manufacturing process, and does not reduce the degree of vacuum. purpose.

[0007]

[Means for Solving the Problems] In order to achieve this object, in the present invention, in a magnetron in which the anode is cooled by liquid cooling, the anode is located in an anode insertion hole of a cooling block having a cooling liquid passage, Attach the cooling block to the anode by mechanical tightening.

In this case, it is preferable to provide the cooling liquid passage by providing three U-shaped holes in the cooling block and closing the openings of the holes other than the cooling liquid entrance and exit.

[0009] Furthermore, it is preferable that the outer surface of the cooling block is in contact with the yoke.

0010

[Function] In this magnetron, the cooling block is not brazed to the anode, so no brazing equipment is required, so manufacturing costs are low, the manufacturing process is not complicated, and the vacuum level never decreases.

[0011] Furthermore, the cooling liquid passage can be easily provided by providing three U-shaped holes in the cooling block and closing the openings of the holes other than the cooling liquid entrance and exit. This makes manufacturing costs even cheaper.

Furthermore, by bringing the outer surface of the cooling block into contact with the yoke, the yoke can be cooled, thereby improving the performance of the magnetron.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic view showing a magnetron according to the present invention, and FIG. 2 is a perspective view showing a cooling block of the magnetron shown in FIG. In the figure, 1 is a cooling block;
Reference numeral 2 denotes an anode insertion hole provided in the center of the cooling block 1, and the diameter of the anode insertion hole 2 is approximately equal to the diameter of the anode 9. 13 is a slit provided in the cooling block 1, and the slit 13 communicates with the anode insertion hole 2. 3
is a tightening portion provided in the slit 13 of the cooling block 1, and 14 is a hole provided in the tightening portion 3. 4 is a cooling liquid passage provided in the cooling block 1, and the cooling liquid passage 4 is provided in a U-shape. In order to provide this coolant passage 4, firstly, three holes 4a to 4c with only one side open are provided.
The opening of the hole 4b is closed with a blind stopper 5. Reference numeral 6 denotes a piping holder attached to the inlet and outlet of the coolant of the coolant passage 4, that is, the openings of the holes 4a and 4c. The cooling block 1 is attached to the anode 9 by positioning the anode 9 in the anode insertion hole 2 of the cooling block 1 and inserting the tightening screw 12 into the hole 14 and tightening it.

[0014] In this magnetron, since the cooling block 1 is not brazed to the anode 9, a brazing device is not required, so the manufacturing cost is low, the manufacturing process is not complicated, and The degree of vacuum does not decrease. Furthermore, since the coolant passage 4 is provided by providing three U-shaped holes in the cooling block 1 and closing the opening of the hole 4b with a blind stopper 5, the coolant passage 4 can be easily provided. This makes manufacturing costs even cheaper. Furthermore, since the outer surface of the cooling block 1 is brought into contact with the yoke 10, the yoke 10 can be cooled, so that the performance of the magnetron can be improved. Further, since a cooling block can be attached in place of the radiator fins of a conventional air-cooled magnetron, the air-cooled magnetron can be manufactured at extremely low cost.

[0015]

Effects of the Invention As explained above, in the magnetron according to the present invention, since the cooling block is not brazed to the anode, a brazing device is not required, so the manufacturing cost is reduced and the manufacturing process is improved. The system does not become complicated and the degree of vacuum does not decrease.

[0016] Furthermore, the cooling liquid passage can be easily provided by providing three U-shaped holes in the cooling block and closing the openings of the holes other than the cooling liquid inlet and outlet. This makes manufacturing costs even cheaper.

Furthermore, by bringing the outer surface of the cooling block into contact with the yoke, the yoke can be cooled, thereby improving the performance of the magnetron.

[0018] As described above, the effects of the present invention are remarkable.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing a magnetron according to the present invention.

FIG. 2 is a perspective view showing a cooling block of the magnetron shown in FIG. 1;

FIG. 3 is a schematic diagram showing a conventional liquid-cooled magnetron.

FIG. 4 is a schematic diagram showing another conventional liquid-cooled magnetron.

[Explanation of symbols]

1...Cooling block 2...Anode insertion hole 3...Tightening part 4...Cooling fluid passage 9...Anode 12...Mounting screw

Claims (1)

[Claims] 1. A magnetron in which an anode is cooled by a liquid cooling method, wherein the anode is positioned in an anode insertion hole of a cooling block having a cooling fluid passage, and the cooling block is attached to the anode by mechanical tightening. Features a magnetron.