JPH0428430U - - Google Patents
Info
- Publication number
- JPH0428430U JPH0428430U JP7007490U JP7007490U JPH0428430U JP H0428430 U JPH0428430 U JP H0428430U JP 7007490 U JP7007490 U JP 7007490U JP 7007490 U JP7007490 U JP 7007490U JP H0428430 U JPH0428430 U JP H0428430U
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- semiconductor manufacturing
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007490U JPH0428430U (de) | 1990-06-29 | 1990-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007490U JPH0428430U (de) | 1990-06-29 | 1990-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0428430U true JPH0428430U (de) | 1992-03-06 |
Family
ID=31605935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7007490U Pending JPH0428430U (de) | 1990-06-29 | 1990-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0428430U (de) |
-
1990
- 1990-06-29 JP JP7007490U patent/JPH0428430U/ja active Pending