JPH04274781A - Highly sensitive detector of magnetic field - Google Patents
Highly sensitive detector of magnetic fieldInfo
- Publication number
- JPH04274781A JPH04274781A JP3036356A JP3635691A JPH04274781A JP H04274781 A JPH04274781 A JP H04274781A JP 3036356 A JP3036356 A JP 3036356A JP 3635691 A JP3635691 A JP 3635691A JP H04274781 A JPH04274781 A JP H04274781A
- Authority
- JP
- Japan
- Prior art keywords
- primary coil
- electromagnetic wave
- coil
- wave shielding
- secondary coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 19
- 241000238366 Cephalopoda Species 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000059 patterning Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910020174 Pb-In Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は高感度磁気センサ、電
流計、変位計、または高周波信号増幅器などに応用する
直流駆動型超伝導量子干渉素子（ ＤＣ Ｓｕｐｅｒ
ｃｏｎｄｕｃｔｉｎｇ ＱｕａｎｔｕｍＩｎｔｅｒｆ
ｅｒｅｎｃｅ Ｄｅｖｉｃｅ ： ＤＣ ＳＱＵＩＤと
略す） に関するものである。[Industrial Application Field] This invention is a direct current-driven superconducting quantum interference device (DC Super) that is applied to high-sensitivity magnetic sensors, ammeters, displacement meters, high-frequency signal amplifiers, etc.
conducting QuantumInterf
erence Device (abbreviated as DC SQUID).
【０００２】0002
【従来の技術】ＤＣ ＳＱＵＩＤは高感度磁気センサ、
電流計、変位計、または高周波信号増幅器などに応用さ
れる超伝導素子である。検出コイルで検出された磁場信
号は信号電流として入力コイルに伝達され、信号磁束と
してワッシャーコイルに入力される。ワッシャーコイル
に伝達された信号磁束は２つのジョセフソン素子によっ
て信号電圧に変換され、トランスを介して増幅およびイ
ンピーダンス変換され外部制御回路へ伝送される。[Prior art] DC SQUID is a highly sensitive magnetic sensor,
A superconducting element used in ammeters, displacement meters, high-frequency signal amplifiers, etc. The magnetic field signal detected by the detection coil is transmitted to the input coil as a signal current, and is input to the washer coil as a signal magnetic flux. The signal magnetic flux transmitted to the washer coil is converted into a signal voltage by two Josephson elements, amplified and impedance-converted via a transformer, and transmitted to an external control circuit.
【０００３】図２は従来の超伝導薄膜トランスの構成を
示す図である。１は１次コイル、２は２次コイルである
。従来の超伝導薄膜トランスは、１次コイル１と２次コ
イル２は層間絶縁膜を介して形成され、１次コイル１と
２次コイル２間に電磁波遮蔽手段を有していなかった。FIG. 2 is a diagram showing the structure of a conventional superconducting thin film transformer. 1 is a primary coil, and 2 is a secondary coil. In the conventional superconducting thin film transformer, the primary coil 1 and the secondary coil 2 are formed with an interlayer insulating film interposed therebetween, and there is no electromagnetic shielding means between the primary coil 1 and the secondary coil 2.
【０００４】0004
【発明が解決しようとする課題】超伝導薄膜トランスは
１次コイルと２次コイル間に浮遊容量を有する。従来の
超伝導薄膜トランスは、１次コイルと２次コイル間に電
磁波遮蔽手段を有していなかったため、２次コイル側へ
の高周波電磁波雑音が浮遊容量を介して１次コイル側の
ＳＱＵＩＤ４に伝達される。SUMMARY OF THE INVENTION A superconducting thin film transformer has stray capacitance between the primary coil and the secondary coil. Conventional superconducting thin film transformers did not have electromagnetic wave shielding means between the primary coil and the secondary coil, so high-frequency electromagnetic wave noise on the secondary coil side was transmitted to the SQUID4 on the primary coil side via stray capacitance. be done.
【０００５】高周波雑音はＳＱＵＩＤの特性を悪化させ
、磁場測定器の感度が低下する問題があった。そこで、
この発明の目的は従来のこのような課題を解決するため
ＳＱＵＩＤに高周波雑音が伝送されない超伝導薄膜トラ
ンスを得ることである。[0005] High frequency noise deteriorates the characteristics of the SQUID, and there is a problem in that the sensitivity of the magnetic field measuring device decreases. Therefore,
The purpose of the present invention is to obtain a superconducting thin film transformer in which high frequency noise is not transmitted to the SQUID in order to solve the above-mentioned conventional problems.
【０００６】[0006]
【課題を解決するための手段】上記課題を解決するため
に、この発明は超伝導薄膜トランスにおいて、１次コイ
ルと２次コイルの間にアース電位の導電性の良い薄膜を
配置することにより、電磁波を遮蔽して、１次コイルと
２次コイルの間で電磁波が伝送されないようにした。[Means for Solving the Problems] In order to solve the above problems, the present invention provides a superconducting thin film transformer by arranging a highly conductive thin film at ground potential between the primary coil and the secondary coil. Electromagnetic waves are shielded to prevent them from being transmitted between the primary and secondary coils.
【０００７】[0007]
【作用】上記のように構成された超伝導薄膜トランスに
おいては、１次コイルと２次コイルの間のアース電位の
導電性の良い薄膜は電磁波を遮蔽する作用を有するため
、１次コイルと２次コイルの間で電磁波が伝送されない
ことになる。[Function] In the superconducting thin film transformer configured as described above, the thin film with good conductivity at ground potential between the primary coil and the secondary coil has the effect of shielding electromagnetic waves. Electromagnetic waves will not be transmitted between the next coils.
【０００８】[0008]
【実施例】以下に本発明の実施例について図面を参照し
て説明する。図１は本発明の実施例を示す超伝導薄膜ト
ランスの構成を示す図である。１は１次コイル、２は２
次コイル、３は電磁波遮蔽膜、４はＳＱＵＩＤ、５は外
部制御回路である。１次コイル１上に電磁波遮蔽膜３が
１次コイル１全体を覆うように配置され、さらに電磁波
遮蔽膜３上に２次コイルが配置された構造を示している
。１次コイル電磁波遮蔽膜３はアースに接続されている
。DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the configuration of a superconducting thin film transformer showing an embodiment of the present invention. 1 is the primary coil, 2 is the 2
The next coil, 3 is an electromagnetic wave shielding film, 4 is a SQUID, and 5 is an external control circuit. A structure is shown in which an electromagnetic wave shielding film 3 is placed on the primary coil 1 so as to cover the entire primary coil 1, and a secondary coil is further placed on the electromagnetic wave shielding film 3. The primary coil electromagnetic wave shielding film 3 is connected to ground.
【０００９】１次コイル１および２次コイル２の材料と
しては、例えばニオブ（Ｎｂ）、窒化ニオブ（ＮｂＮ）
、鉛（Ｐｂ）、鉛インジウム（Ｐｂ−Ｉｎ）合金などの
超伝導材料が用いられるが、他の超伝導材料を用いても
良い。電磁波遮蔽膜３の材料としては、例えば銅（Ｃｕ
）、アルミニウム（Ａｌ）などの導電性の良い材料が用
いられる。図１に示した構成の超伝導薄膜トランスは、
半導体の製造プロセスなどで公知の薄膜プロセスを用い
容易に製造することができる。例えば、１次コイル膜堆
積、１次コイルパターニング、層間絶縁膜堆積、電磁波
遮蔽膜堆積、電磁波遮蔽膜パターニング、２次コイル膜
堆積、２次コイルパターニングの工程を用いて製造する
ことができる。Materials for the primary coil 1 and the secondary coil 2 include, for example, niobium (Nb) and niobium nitride (NbN).
, lead (Pb), lead-indium (Pb-In) alloy, and other superconducting materials are used, but other superconducting materials may also be used. As a material for the electromagnetic wave shielding film 3, for example, copper (Cu
), aluminum (Al), and other materials with good conductivity are used. The superconducting thin film transformer with the configuration shown in Figure 1 is
It can be easily manufactured using a thin film process known in the semiconductor manufacturing process. For example, it can be manufactured using the steps of primary coil film deposition, primary coil patterning, interlayer insulating film deposition, electromagnetic shielding film deposition, electromagnetic shielding film patterning, secondary coil film deposition, and secondary coil patterning.
【００１０】上記のような構成の超伝導薄膜トランスに
よれば、ＳＱＵＩＤからの信号電圧は１次コイル１から
２次コイル２に伝達されるが、外部制御回路５からの高
周波電磁波雑音は電磁波遮蔽膜３によって遮蔽され、２
次コイル２から１次コイル１には伝達されず、ＳＱＵＩ
Ｄの特性を悪化させることなく、磁場測定器の感度を向
上させることができる。According to the superconducting thin film transformer configured as described above, the signal voltage from the SQUID is transmitted from the primary coil 1 to the secondary coil 2, but the high frequency electromagnetic noise from the external control circuit 5 is shielded from the electromagnetic wave. shielded by membrane 3, 2
SQUI is not transmitted from the secondary coil 2 to the primary coil 1.
The sensitivity of the magnetic field measuring device can be improved without deteriorating the characteristics of D.
【００１１】図１に示した実施例において、１次コイル
１と２次コイル２の形成層を入れ換えても、電磁波遮蔽
膜３は電磁波を遮蔽する作用を有し、その作用及び効果
は前の実施例と変わるところはない。In the embodiment shown in FIG. 1, even if the formation layers of the primary coil 1 and the secondary coil 2 are exchanged, the electromagnetic wave shielding film 3 still has the function of shielding electromagnetic waves, and its function and effect are the same as those of the previous one. There is no difference from the embodiment.
【００１２】0012
【発明の効果】以上説明したように本発明によれば、超
伝導薄膜トランスにおいて電磁波雑音を電磁波遮蔽膜で
遮蔽し、ＳＱＵＩＤへ伝達される電磁波雑音を減少させ
、信号雑音の減少やＳＱＵＩＤの素子特性悪化の防止が
可能となり、感度を向上させることができる。As explained above, according to the present invention, electromagnetic wave noise is shielded by an electromagnetic wave shielding film in a superconducting thin film transformer, and the electromagnetic wave noise transmitted to the SQUID is reduced, and signal noise is reduced and the SQUID element is It is possible to prevent deterioration of characteristics and improve sensitivity.
【図１】本発明の第１実施例を示す超伝導薄膜トランス
の構造を示した図である。FIG. 1 is a diagram showing the structure of a superconducting thin film transformer showing a first embodiment of the present invention.
【図２】従来例を示す超伝導薄膜トランスの構造を示し
た図である。FIG. 2 is a diagram showing the structure of a conventional superconducting thin film transformer.
【符号の説明】 １ １次コイル ２ ２次コイル ３ 電磁波遮蔽膜 ４ ＳＱＵＩＤ ５ 外部制御回路[Explanation of symbols] 1 Primary coil 2 Secondary coil 3 Electromagnetic wave shielding film 4 SQUID 5 External control circuit
Claims (1)
ルと、前記信号電流を信号電圧に変換するジョセフソン
素子と、前記信号電圧を増幅しインピーダンス変換を行
うトランスとを備えた超伝導量子干渉素子において、前
記トランスが１次コイルと２次コイル間に電磁波遮蔽手
段を有する超伝導薄膜トランスで構成されることを特徴
とする高感度磁場検出器。1. A superconducting quantum interference device comprising: a detection coil that detects a magnetic field and converts it into a signal current; a Josephson element that converts the signal current into a signal voltage; and a transformer that amplifies the signal voltage and converts impedance. A highly sensitive magnetic field detector, characterized in that the transformer is a superconducting thin film transformer having electromagnetic shielding means between a primary coil and a secondary coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3036356A JPH04274781A (en) | 1991-03-01 | 1991-03-01 | Highly sensitive detector of magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3036356A JPH04274781A (en) | 1991-03-01 | 1991-03-01 | Highly sensitive detector of magnetic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04274781A true JPH04274781A (en) | 1992-09-30 |
Family
ID=12467554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3036356A Pending JPH04274781A (en) | 1991-03-01 | 1991-03-01 | Highly sensitive detector of magnetic field |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04274781A (en) |
-
1991
- 1991-03-01 JP JP3036356A patent/JPH04274781A/en active Pending
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