JPH04268061A - Plasma spraying method with mixed composition - Google Patents
Plasma spraying method with mixed compositionInfo
- Publication number
- JPH04268061A JPH04268061A JP3028849A JP2884991A JPH04268061A JP H04268061 A JPH04268061 A JP H04268061A JP 3028849 A JP3028849 A JP 3028849A JP 2884991 A JP2884991 A JP 2884991A JP H04268061 A JPH04268061 A JP H04268061A
- Authority
- JP
- Japan
- Prior art keywords
- density
- dense
- plasma spraying
- porous
- spraying method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 19
- 238000007750 plasma spraying Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000843 powder Substances 0.000 claims abstract description 17
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000008018 melting Effects 0.000 claims abstract description 8
- 239000002245 particle Substances 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 8
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 10
- 239000000126 substance Substances 0.000 description 10
- 238000005507 spraying Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000007751 thermal spraying Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- 229910018106 Ni—C Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は耐熱、耐摩耗、耐腐食更
には固体電解質型燃料電池などの高機能を目的とする、
合金、サーメット、傾斜機能材料といった2種類以上の
成分からなる領域を有する皮膜を作製する時の膜質制御
に関する。[Industrial Application Field] The present invention aims at high performance in heat resistance, wear resistance, corrosion resistance, and solid electrolyte fuel cells.
The present invention relates to film quality control when producing a film having a region composed of two or more types of components such as alloys, cermets, and functionally graded materials.
【0002】0002
【従来の技術】プラズマ溶射法で形成した皮膜には多数
の気孔が含まれている。そのため機械的強度は一般バル
ク材と比較して 1/5〜1/10であるのが常であっ
た。また、燃料電池の分野において電気的特性、特に溶
射法で形成したZrO2皮膜のイオン伝導率が低いこと
は同分野の最大課題の一つとなっている。このように諸
物性と密接な関係を有する溶射皮膜の高密度化は多分野
から期待されている。2. Description of the Related Art A film formed by plasma spraying contains many pores. Therefore, the mechanical strength was usually 1/5 to 1/10 that of general bulk materials. Furthermore, in the field of fuel cells, one of the biggest challenges in the field is the low electrical properties, particularly the low ionic conductivity of ZrO2 films formed by thermal spraying. High density thermal spray coatings, which are closely related to various physical properties, are expected from many fields.
【0003】この問題点を解決するため、減圧下で溶射
を行う減圧プラズマ溶射法が開発された。密度制御はプ
ラズマの内的パラメーター(プラズマ入力、作動圧力、
ガス流量)やプラズマの外的パラメーター(プラズマガ
ン構造、粉末粒径、基板位置)の最適化により行ってい
る(例えば特開昭63−450号、特開平1−2273
62号他)。
これらの最適パラメーターは融点、比熱等物質の熱的性
質に強く依存している。単一組成皮膜の密度制御は上述
の内的パラメーターの調整によりある程度成功を修めて
いる。[0003] In order to solve this problem, a reduced pressure plasma spraying method was developed in which spraying is carried out under reduced pressure. Density control is based on internal plasma parameters (plasma input, operating pressure,
This is done by optimizing the plasma external parameters (plasma gun structure, powder particle size, substrate position) (e.g., JP-A-63-450, JP-A-1-2273).
No. 62 and others). These optimal parameters strongly depend on the thermal properties of the substance, such as melting point and specific heat. Density control of single composition coatings has been achieved with some success by adjusting the internal parameters described above.
【0004】一方、混合組成皮膜の製造プロセスの代表
例としてもプラズマ溶射法の適応が考えられている。特
にロケット、航空機のエンジン部への傾斜機能材料の適
用手段として、本手法は最も有力な手法の一つとして位
置付けられている。プラズマ溶射法によって混合組成皮
膜を形成するに当たり、本手法は2つに大別できる。一
つは物質毎にプラズマガンを配し、別々のガンによって
溶射を行う方法であり、もう一つは1本のプラズマガン
で全成分を溶射する方法である。[0004] On the other hand, plasma spraying has been considered as a representative example of the manufacturing process for mixed composition coatings. In particular, this method is positioned as one of the most effective methods for applying functionally graded materials to the engine parts of rockets and aircraft. When forming a mixed composition film by plasma spraying, this method can be roughly divided into two types. One method is to arrange a plasma gun for each substance and perform thermal spraying with a separate gun, and the other is to spray all components with one plasma gun.
【0005】[0005]
【発明が解決しようとする課題】物質毎にプラズマガン
を配する方法では各プラズマ毎の入力を変えるなどの方
法により物質毎の密度の独立制御は比較的容易である。
しかしながら、皮膜の均一性、装置設備において重大な
問題点が内在する。また1本のプラズマガンで全成分を
溶射する方法では、物質毎の最適な内的パラメーターが
大きく異なる場合には物質毎の密度制御がきわめて困難
である。そのためこの問題点を克服するには外的パラメ
ーターの最適化が考えられる。例えば、物質毎に1本の
プラズマガン中に粉体供給用の穴を有するプラズマガン
が特開昭63−201039号公報に開示されているが
、現段階ではセラミックス用、金属用の2種類のガン構
造が提案されているにとどまり完全な解決策になってい
ない。一方、粉体粒径比による密度制御は単一組成皮膜
に関してのみ学会や学術論文で発表されている(例えば
、著者: R. Mcperson、雑誌: Thin
Solid Films, 83(1981)297
)が、混合組成皮膜に関して粉体粒径比を変えることに
よる皮膜密度制御について開示されていない。In the method of arranging a plasma gun for each substance, it is relatively easy to independently control the density of each substance by changing the input for each plasma. However, there are serious problems in film uniformity and equipment. Furthermore, with the method of spraying all the components with one plasma gun, it is extremely difficult to control the density of each material if the optimal internal parameters for each material differ greatly. Therefore, optimization of external parameters can be considered to overcome this problem. For example, Japanese Patent Laid-Open No. 63-201039 discloses a plasma gun that has one hole for powder supply in the plasma gun for each substance, but at present there are two types of plasma guns: one for ceramics and one for metals. The gun structure has only been proposed and is not a complete solution. On the other hand, density control by powder particle size ratio has only been announced in academic conferences and academic papers regarding single composition films (for example, author: R. Mcperson, magazine: Thin
Solid Films, 83 (1981) 297
) do not disclose coating density control by changing the powder particle size ratio for mixed composition coatings.
【0006】以上を背景として本発明では粉体粒径比を
理論的に変え、成分毎に緻密−緻密、緻密−多孔質、あ
るいは多孔質−多孔質等の組み合わせが容易な混合組成
プラズマ溶射方法を提供することを目的とする。[0006] Against this background, the present invention provides a mixed composition plasma spraying method in which the powder particle size ratio is theoretically varied and combinations such as dense-dense, dense-porous, or porous-porous are easily achieved for each component. The purpose is to provide
【0007】[0007]
【課題を解決するための手段】本発明は皮膜密度が粒子
の溶融状態に強く依存するプラズマ溶射プロセスにおい
て、混合皮膜密度を形成する際、各物質毎の原料粉末粒
径比を調整することにより皮膜密度の制御を行うことを
特徴としている。この粒径比は例えば式1から算出され
る粒子が完全に溶融するまでの時間(t)を指標として
決定する。これは溶射法で形成する皮膜の密度が、基板
到達時の粒子溶融状態に支配されることを利用したもの
である。例えば各物質の皮膜密度を等しくするには各々
の物質の上記時間(t)が等しくなるように粒径比を定
めることにより、物質毎の粒子の溶融状態を等しくなる
ように調整し密度制御を行う。[Means for Solving the Problems] The present invention provides a plasma spraying process in which film density strongly depends on the melting state of particles, by adjusting the particle size ratio of raw material powder for each substance when forming a mixed film density. It is characterized by controlling the film density. This particle size ratio is determined using, for example, the time (t) until the particles are completely melted, which is calculated from Equation 1, as an index. This takes advantage of the fact that the density of a film formed by thermal spraying is controlled by the melted state of the particles when they reach the substrate. For example, in order to equalize the film density of each substance, by determining the particle size ratio so that the above time (t) of each substance is equal, the melting state of the particles of each substance is adjusted to be equal, and density control is performed. conduct.
【0008】[0008]
【作用】従来の1本のプラズマガンを用いて、全成分が
緻密である混合組成皮膜の形成は非常に困難であったが
、本発明は例えば以下の式1を用いることにより混合皮
膜の密度制御を行い、皮膜特性の多様性を図るものであ
る。室温から溶融完了までの時間tは t=(ρDC
/σα)[log {TO−Tg/Tm−Tg)}+
H/(Tg−Tm)] 式1で表せる。[Function] It was very difficult to form a mixed composition film in which all the components were dense using one conventional plasma gun, but the present invention can improve the density of the mixed film by using, for example, the following equation 1. This is to control the properties of the film and achieve diversity in film properties. The time t from room temperature to completion of melting is t=(ρDC
/σα) [log {TO-Tg/Tm-Tg)}+
H/(Tg-Tm)] It can be expressed by Formula 1.
【0009】ρ:粉体密度、 D:出発粉体の直径、
C:比熱、σ:分子量、
α:ガスの熱伝達係数、 H:潜熱、
TO:出発粉体の温度、Tg:プラズマガスの平均温度
、Tm:融点
このtを指標として粒子の溶融状態を変え、皮膜密度を
制御する。ρ: powder density, D: diameter of starting powder,
C: Specific heat, σ: Molecular weight, α: Heat transfer coefficient of gas, H: Latent heat, TO: Temperature of starting powder, Tg: Average temperature of plasma gas, Tm: Melting point The melting state of particles is changed using this t as an index. , to control film density.
【0010】0010
【実施例】〔実施例1〕2種とも緻密であるY2O3安
定化ZrO2(YSZ) とNi−Cr合金(Ni−C
r)からなる混合組成皮膜を形成する場合
(イ)平均粒径27μmのYSZ の緻密皮膜形成に関
する最適プラズマパラメーターを探索
減圧プラズマ溶射装置では
入力=80kW、プラズマガス流量=Ar: 120l
/min、H2=15l/min 、キャリアーガス流
量=15l/min 、プラズマ作動圧力= 200T
ORR、基板位置=15cm(ロ)YSZ のtを求め
、この値が等しくなるようなNi−CrのD を算出
今回の条件下では D=55μmとなる。[Example] [Example 1] Y2O3 stabilized ZrO2 (YSZ) and Ni-Cr alloy (Ni-C
(a) Search for the optimal plasma parameters for forming a dense film of YSZ with an average particle size of 27 μm Input = 80 kW, plasma gas flow rate = Ar: 120 l
/min, H2=15l/min, carrier gas flow rate=15l/min, plasma working pressure=200T
ORR, substrate position = 15 cm (b) Find t of YSZ, and calculate D of Ni-Cr so that these values are equal. Under the present conditions, D = 55 μm.
【0011】(ハ)この Dに近い平均粒径であるNi
−Crと先の YSZ粉末を用いて混合組成皮膜を形成
(ニ)粒径比は1:2.0である。
(イ)の条件下でNi−Crの原料粉体粒径を変えたと
きの混合比率皮膜密度変化を図1に示す。この(イ)の
条件下では平均粒径57μm(今回入手可能であった平
均粒径)としたとき緻密な混合皮膜を得ることがわかる
。この時の粒径比は1:2.1であり、先の計算結果と
ほぼ一致している。つまり直流プラズマ溶射法によって
緻密な混合組成皮膜を形成するには、粒子の溶融が完了
するまでの時間を指標として、使用する粉体の粒径を調
整することにより容易に可能となった。(c) Ni having an average particle size close to D
A mixed composition film was formed using -Cr and the above-mentioned YSZ powder (d) The particle size ratio was 1:2.0. FIG. 1 shows the change in the mixture ratio film density when the Ni-Cr raw powder particle size was changed under the conditions (a). It can be seen that under this condition (a), a dense mixed film can be obtained when the average particle size is 57 μm (the average particle size available at this time). The particle size ratio at this time was 1:2.1, which is almost in agreement with the previous calculation result. In other words, it has become possible to easily form a dense mixed composition film by direct current plasma spraying by adjusting the particle size of the powder used, using the time taken until the particles are completely melted as an indicator.
【0012】尚、膜質に与える粉末の粒度分布の影響は
非常に重要であるため、分布を±20%以内に限定する
ことが望ましい。通常では溶射に使用される粉末粒径は
10−40μmであり、従来より高密度な混合組成皮膜
が形成可能となった。〔実施例2〕緻密なNi−Crと
多孔質なYSZ からなる混合組成皮膜を形成する場合
図2に使用する出発粉体の粒径比を変えたときの混合比
率に関する混合溶射皮膜の密度変化を示す。実験条件は
入力=80kW、プラズマガス流量=Ar: 120l
/min 、H2=15l/min 、キャリアーガス
流量=15l/min 、プラズマ作動圧力=200T
ORR、基板位置=20cmである。種類Aは緻密なN
i−Crと緻密な YSZとNi−Crから、種類Bは
緻密なNi−Crと多孔質なYSZ から、また種類C
は多孔質なNi−Crと多孔質な YSZとNi−Cr
からなる混合組成皮膜が形成されている。[0012] Since the influence of the particle size distribution of the powder on the film quality is very important, it is desirable to limit the distribution to within ±20%. Normally, the powder particle size used for thermal spraying is 10-40 μm, making it possible to form a mixed composition coating with higher density than before. [Example 2] When forming a mixed composition coating consisting of dense Ni-Cr and porous YSZ Figure 2 shows the change in density of the mixed thermal sprayed coating with respect to the mixing ratio when the particle size ratio of the starting powder used is changed. shows. Experimental conditions were input = 80kW, plasma gas flow rate = Ar: 120l.
/min, H2=15l/min, carrier gas flow rate=15l/min, plasma working pressure=200T
ORR, substrate position = 20 cm. Type A is dense N
Type B is composed of i-Cr, dense YSZ and Ni-Cr, type B is composed of dense Ni-Cr and porous YSZ, and type C is composed of dense Ni-Cr and porous YSZ.
are porous Ni-Cr and porous YSZ and Ni-Cr
A mixed composition film is formed.
【0013】[0013]
【発明の効果】プラズマ溶射法によって形成した皮膜の
機械的強度は通常のバルク材の半分以下であるのが常で
あった。YSZ の溶射皮膜密度とヤング率の関係は単
調増加の関係にあり、従来の手法と比較して高密度な皮
膜の形成により2〜5倍のヤング率を有する皮膜が形成
が可能であった。図3に YSZとNi−Crの混合比
率(VOL%)を変化させた時のヤング率変化を示す。
各物質全てが緻密である混合組成皮膜を形成した例はな
く、本発明により機械的性質が一般バルク材に近い混合
溶射皮膜の形成が可能となった。[Effects of the Invention] The mechanical strength of coatings formed by plasma spraying is usually less than half that of ordinary bulk materials. The relationship between the thermal spray coating density and Young's modulus of YSZ is a monotonically increasing relationship, and it was possible to form a coating with a Young's modulus 2 to 5 times higher than that of conventional methods by forming a dense coating. FIG. 3 shows the change in Young's modulus when changing the mixing ratio (VOL%) of YSZ and Ni-Cr. There is no example of forming a mixed composition coating in which all of the substances are dense, and the present invention has made it possible to form a mixed thermal spray coating whose mechanical properties are close to those of general bulk materials.
【0014】本発明によりすべての成分が緻密である皮
膜が形成可能となり、更に成分毎の密度制御、皮膜全体
の密度制御が容易に達成可能となった。緻密から多孔質
までの広範囲な膜質制御が可能となったことは機械的、
電気的、熱的諸物性の制御も広がり、プラズマ溶射法の
新たなる応用分野の拡大を示唆する。[0014] The present invention makes it possible to form a film in which all the components are dense, and furthermore, it becomes possible to easily control the density of each component and the density of the entire film. Mechanical,
The control of various electrical and thermal properties will also expand, suggesting the expansion of new fields of application for plasma spraying.
【図1】粒径比を変えたときの混合比率と皮膜密度の関
係を示すグラフ(YSZ 粒径一定)である。FIG. 1 is a graph showing the relationship between the mixing ratio and film density when the particle size ratio is changed (YSZ particle size is constant).
【図2】粒径比を変えたときの混合比率と皮膜密度の関
係を示すグラフである。FIG. 2 is a graph showing the relationship between the mixing ratio and film density when changing the particle size ratio.
【図3】緻密皮膜の混合比率と弾性率の関係を示すグラ
フである。FIG. 3 is a graph showing the relationship between the mixing ratio and elastic modulus of a dense film.
Claims (2)
成分からなる混合組成皮膜を製造する方法において、出
発粉体の平均粒径比を各成分毎に変え、溶融状態を調整
することにより溶射皮膜の密度を制御することを特徴と
する混合組成プラズマ溶射方法。Claim 1: A method for producing a mixed composition coating consisting of two or more components by plasma spraying, in which the average particle size ratio of the starting powder is varied for each component and the molten state is adjusted. A mixed composition plasma spraying method characterized by controlling density.
各成分毎に等しくなるように各成分の平均粒径比を設定
する請求項1記載の混合組成プラズマ溶射方法。2. The mixed composition plasma spraying method according to claim 1, wherein the average particle diameter ratio of each component is set so that the time (t) from room temperature to completion of melting is equal for each component.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3028849A JP2947626B2 (en) | 1991-02-22 | 1991-02-22 | Mixed composition plasma spraying method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3028849A JP2947626B2 (en) | 1991-02-22 | 1991-02-22 | Mixed composition plasma spraying method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04268061A true JPH04268061A (en) | 1992-09-24 |
JP2947626B2 JP2947626B2 (en) | 1999-09-13 |
Family
ID=12259824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3028849A Expired - Lifetime JP2947626B2 (en) | 1991-02-22 | 1991-02-22 | Mixed composition plasma spraying method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2947626B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009011342A1 (en) * | 2007-07-13 | 2009-01-22 | Kagoshima University | Spray gun and its control system |
-
1991
- 1991-02-22 JP JP3028849A patent/JP2947626B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009011342A1 (en) * | 2007-07-13 | 2009-01-22 | Kagoshima University | Spray gun and its control system |
JPWO2009011342A1 (en) * | 2007-07-13 | 2010-09-24 | 独立行政法人物質・材料研究機構 | Spray gun and its control system |
Also Published As
Publication number | Publication date |
---|---|
JP2947626B2 (en) | 1999-09-13 |
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