JPH0426529U - - Google Patents
Info
- Publication number
- JPH0426529U JPH0426529U JP6811290U JP6811290U JPH0426529U JP H0426529 U JPH0426529 U JP H0426529U JP 6811290 U JP6811290 U JP 6811290U JP 6811290 U JP6811290 U JP 6811290U JP H0426529 U JPH0426529 U JP H0426529U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- nozzle
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811290U JPH0426529U (OSRAM) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811290U JPH0426529U (OSRAM) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426529U true JPH0426529U (OSRAM) | 1992-03-03 |
Family
ID=31602271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6811290U Pending JPH0426529U (OSRAM) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426529U (OSRAM) |
-
1990
- 1990-06-27 JP JP6811290U patent/JPH0426529U/ja active Pending