JPH0426016U - - Google Patents

Info

Publication number
JPH0426016U
JPH0426016U JP6828390U JP6828390U JPH0426016U JP H0426016 U JPH0426016 U JP H0426016U JP 6828390 U JP6828390 U JP 6828390U JP 6828390 U JP6828390 U JP 6828390U JP H0426016 U JPH0426016 U JP H0426016U
Authority
JP
Japan
Prior art keywords
vacuum chamber
refrigerant
immersed
thermal conductivity
good thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6828390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0733862Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990068283U priority Critical patent/JPH0733862Y2/ja
Publication of JPH0426016U publication Critical patent/JPH0426016U/ja
Application granted granted Critical
Publication of JPH0733862Y2 publication Critical patent/JPH0733862Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Filtering Materials (AREA)
  • Drying Of Gases (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1990068283U 1990-06-27 1990-06-27 真空チャンバのガス供給装置 Expired - Lifetime JPH0733862Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990068283U JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990068283U JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Publications (2)

Publication Number Publication Date
JPH0426016U true JPH0426016U (OSRAM) 1992-03-02
JPH0733862Y2 JPH0733862Y2 (ja) 1995-08-02

Family

ID=31602586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990068283U Expired - Lifetime JPH0733862Y2 (ja) 1990-06-27 1990-06-27 真空チャンバのガス供給装置

Country Status (1)

Country Link
JP (1) JPH0733862Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066250A (ja) * 2000-08-31 2002-03-05 Ulvac Kuraio Kk ドライエアー製造装置
JP2010012373A (ja) * 2008-07-01 2010-01-21 Mitsubishi Heavy Ind Ltd ドレインセパレータ及び冷却・除湿ユニット

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735941U (OSRAM) * 1971-05-17 1972-12-21
JPS5666685U (OSRAM) * 1979-10-23 1981-06-03
JPS56108501A (en) * 1980-01-31 1981-08-28 Ckd Corp Refrigerator for compressed air
JPS58170501A (ja) * 1982-03-30 1983-10-07 Mitsubishi Electric Corp 蒸気除去装置
JPS6042330U (ja) * 1983-09-02 1985-03-25 エスエムシ−株式会社 空気除湿機

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4735941U (OSRAM) * 1971-05-17 1972-12-21
JPS5666685U (OSRAM) * 1979-10-23 1981-06-03
JPS56108501A (en) * 1980-01-31 1981-08-28 Ckd Corp Refrigerator for compressed air
JPS58170501A (ja) * 1982-03-30 1983-10-07 Mitsubishi Electric Corp 蒸気除去装置
JPS6042330U (ja) * 1983-09-02 1985-03-25 エスエムシ−株式会社 空気除湿機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066250A (ja) * 2000-08-31 2002-03-05 Ulvac Kuraio Kk ドライエアー製造装置
JP2010012373A (ja) * 2008-07-01 2010-01-21 Mitsubishi Heavy Ind Ltd ドレインセパレータ及び冷却・除湿ユニット

Also Published As

Publication number Publication date
JPH0733862Y2 (ja) 1995-08-02

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