JPH0426012U - - Google Patents

Info

Publication number
JPH0426012U
JPH0426012U JP6862990U JP6862990U JPH0426012U JP H0426012 U JPH0426012 U JP H0426012U JP 6862990 U JP6862990 U JP 6862990U JP 6862990 U JP6862990 U JP 6862990U JP H0426012 U JPH0426012 U JP H0426012U
Authority
JP
Japan
Prior art keywords
air
clean room
space
outlet
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6862990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6862990U priority Critical patent/JPH0426012U/ja
Publication of JPH0426012U publication Critical patent/JPH0426012U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP6862990U 1990-06-28 1990-06-28 Pending JPH0426012U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6862990U JPH0426012U (US07923587-20110412-C00022.png) 1990-06-28 1990-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6862990U JPH0426012U (US07923587-20110412-C00022.png) 1990-06-28 1990-06-28

Publications (1)

Publication Number Publication Date
JPH0426012U true JPH0426012U (US07923587-20110412-C00022.png) 1992-03-02

Family

ID=31603228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6862990U Pending JPH0426012U (US07923587-20110412-C00022.png) 1990-06-28 1990-06-28

Country Status (1)

Country Link
JP (1) JPH0426012U (US07923587-20110412-C00022.png)

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