JPH0425869U - - Google Patents
Info
- Publication number
- JPH0425869U JPH0425869U JP6498490U JP6498490U JPH0425869U JP H0425869 U JPH0425869 U JP H0425869U JP 6498490 U JP6498490 U JP 6498490U JP 6498490 U JP6498490 U JP 6498490U JP H0425869 U JPH0425869 U JP H0425869U
- Authority
- JP
- Japan
- Prior art keywords
- cold trap
- growth chamber
- cryopump
- exhausts
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6498490U JPH0425869U (cs) | 1990-06-21 | 1990-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6498490U JPH0425869U (cs) | 1990-06-21 | 1990-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0425869U true JPH0425869U (cs) | 1992-03-02 |
Family
ID=31596406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6498490U Pending JPH0425869U (cs) | 1990-06-21 | 1990-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425869U (cs) |
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1990
- 1990-06-21 JP JP6498490U patent/JPH0425869U/ja active Pending