JPH0425645Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Purpose of the Invention] Industrial Application Field The present invention relates to an apparatus for measuring the local current density of a surface to be treated which is subjected to an electrolytic treatment such as electroplating.

Prior Art When performing electrolytic treatments such as electroplating and electrolytic polishing, it is essential to adjust the current density of the surface to be treated within an appropriate range in order to obtain a good electrolytically treated surface. In order to know the current density in such electrolytic treatment, there is a method of calculating it from the area of the surface to be treated and the total current value. There is a problem in that the current is concentrated and only a small amount of current flows to the recesses or the back surface, so it is not possible to obtain a good electrolytically treated surface just by knowing the average current density as described above.

Therefore, when performing electrolytic treatment, it would be possible to know the local current density at different locations on the contact surface between the conductor to be treated and the electrolytic bath.
This should make it possible to perform electrolytic treatment efficiently and with excellent results by adjusting the electrolytic treatment conditions, the shape of the counter electrode, the relative positional relationship with the counter electrode, etc. However, even if there is a laboratory measurement method for determining the local current density of a liquid-contacted surface, the reality is that there is still no measurement method that can be used in industrial operations. Ta.

In contrast, one of the inventors of the present invention proposed a bipolar electrode type sensor in which a pair of mutually insulated conductor electrodes are arranged facing each other at a predetermined distance, and the sensor is placed close to the wetted surface of the conductor to be measured for current density. The sensor is placed in an electrolytic solution, and the potential gradient proportional to the current density in the solution generated by the current flowing through the electrolytic solution is detected as the potential difference between the electrodes of the sensor. The current density in the liquid near the liquid contact surface of the conductor to be measured is determined by substituting it into the potential difference-current density function obtained by measuring the liquid, and from this, the current passing through a specific point on the liquid contact surface is determined. It has been found that a means for approximately measuring the density of is industrially practical. He then invented a current density measuring device based on this principle and filed a separate patent application (Japanese Patent Laid-Open No. 62-27655).

Problems to be Solved This current density measuring device includes a sensor having a conductor disposed at its tip facing each other at a distance, an electric wire that derives the potential difference between the conductors as a signal, and an output that amplifies and displays the signal. It consists of equipment. and,
The measurement accuracy of current density obtained by such a measuring device is determined by fixing the electrode attached to the sensor in a position that maximizes the potential gradient at a position close to the wetted surface of the conductor to be measured. This can only be ensured by implementing the following.

However, the shape of the conductor to be measured is not necessarily simple, and positioning the sensor is not easy when trying to accurately measure current density at many parts of a conductor with a complex surface shape. Furthermore, it is not easy to fix the sensor in a position where the potential gradient is maximum, and in some cases, it has been impossible to even bring the electrode of the sensor close to the part to be measured.

Accordingly, the present invention allows electrodes to be easily brought close to each of various locations when measuring the current density on the liquid contact surface of a conductor with a complex surface shape. The present invention aims to provide a sensor that can be used on the current density side with flexibility.

[Structure of the idea]

Means for Solving the Problems The object of the present invention as described above is to provide two wetted electrodes insulated from each other at the tip of an insulating cylindrical body. The cylindrical body is provided with support arms whose respective liquid contact surfaces are arranged opposite each other with a predetermined distance apart, and which are configured such that at least a portion thereof can be bent and maintain the bent state. This is achieved by using a sensor for measuring current density on the surface of a conductor in contact with liquid, which is characterized by:

Hereinafter, the sensor of the present invention will be explained with reference to the drawings. Reference numeral 1 designates an electrically insulating cylindrical body, from the tip of which two liquid contact electrodes 2, 2' are protruded in parallel. The distance between the wetted electrodes 2 and 2' is, for example, 5 mm.
It is as follows. Further, a two-core insulated wire 3 is provided passing through the inside of the cylindrical body 1, and each core wire is connected to the wetted electrodes 2 and 2' inside the cylindrical body 1, and is also connected to an external meter. It is designed to be able to transmit electrode potential.

The wetted electrodes 2, 2' are made of a corrosion-resistant metal such as platinum, or a metal of the same type as the ions contained in the electrolyte, and are made of a metal that does not contaminate the electrolyte even if it elutes. Preferably metal.

Furthermore, a flexible support arm 4 is connected to, for example, a side surface of the cylindrical body 1. The other end of the support arm 4 may be provided with a fixing means for the support column 7, etc., such as a combination of a sleeve 5 and a set screw 6, but in some cases, a separate fixing means such as a simple bar may be provided. There is no problem even if the support arm 4 is held by the support arm 4. The support arm 4 is made of, for example, a flexible tube whose surface is coated with soft vinyl chloride resin or silicone rubber, or annealed copper wire or lead that is hard to cause stress hardening. It may be formed of a resin-coated wire made of metal, or the like. The support arm 4 made of such flexible material can be bent arbitrarily,
Once bent, it suffices if the state is maintained as it is by internal friction.
The present invention is not limited to the above-mentioned examples.

Function Since the current density measuring sensor of the present invention is constructed as described above, by bending the support arm 4, the potential difference detection direction of the wetted electrodes 2, 2' can be arbitrarily changed. It can be brought close to any part of the liquid contact surface of the conductor to be measured.
Therefore, even if the surface in contact with the liquid is a recess, the electrodes 2, 2' can be inserted therein, or can be approached from below on the surface facing downward.

[Effect of idea]

As explained above, the sensor for measuring current density on the surface of a conductor in contact with liquid according to the present invention has an insulating cylindrical body with two electrodes in contact with liquid at the tip, and at least a portion thereof is bendable. Moreover, since the supporting arms are connected in a way that can maintain the bent state, the current density at each part of the liquid contact surface of the conductor to be measured, which has a complex surface shape, can be measured with one measurement sensor. This makes it possible to perform measurements.

[Brief explanation of drawings]

FIG. 1 is an external perspective view of a sensor for measuring current density on a surface of a conductor in contact with liquid according to the present invention. 1... Cylindrical body, 2, 2'... Wetted electrode, 3...
Insulated wire, 4... Support arm, 5... Sleeve, 6...
...Set screw.

Claims (1)

[Scope of utility model registration request] Two liquid contact electrodes are provided at the tip of an insulating cylindrical body in a mutually insulated state, and the liquid contact surfaces of the liquid contact electrodes are arranged oppositely with a predetermined distance apart, and at least A sensor for measuring current density on a surface of a conductor in contact with liquid, characterized in that a support arm is connected to the cylindrical body, a part of which is bendable and which is configured to maintain the bent state.