JPH04254751A - Measuring method of concentration of ozone - Google Patents

Measuring method of concentration of ozone

Info

Publication number
JPH04254751A
JPH04254751A JP3037950A JP3795091A JPH04254751A JP H04254751 A JPH04254751 A JP H04254751A JP 3037950 A JP3037950 A JP 3037950A JP 3795091 A JP3795091 A JP 3795091A JP H04254751 A JPH04254751 A JP H04254751A
Authority
JP
Japan
Prior art keywords
oxygen
sensor
stabilized zirconia
ozone
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3037950A
Other languages
Japanese (ja)
Inventor
Masahiro Hirakawa
雅弘 平川
Kazuo Kasai
一夫 笠井
Yutaka Shimada
豊 島田
Takeshi Nakatsuka
豪 中塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Precision Products Co Ltd
Original Assignee
Sumitomo Precision Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Precision Products Co Ltd filed Critical Sumitomo Precision Products Co Ltd
Priority to JP3037950A priority Critical patent/JPH04254751A/en
Publication of JPH04254751A publication Critical patent/JPH04254751A/en
Pending legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

PURPOSE:To enable execution of efficient and highly precise measurement by a simple device by using, as a sensor, stabilized zirconia prepared by dissolving a metal oxide of low valence such as CaO and MgO in zirconia. CONSTITUTION:Porous platinum electrodes 2 are fitted on the opposite sides of stabilized zirconia and a reference gas is made to flow on one side of the stabilized zirconia 1, while a measuring gas is made to flow on the other side thereof. Thereby an electromotive force corresponding to a difference in the partial pressure of oxygen between the reference gas and the measuring gas is generated between the porous platinum electrodes 2 and the partial pressure of oxygen of the measuring gas is measured from this electromotive force. Such an oxygen concentration cell as the above can be used also as an ozone sensor of high precision. For this sensor, the type of it does not matter on condition that it is an oxygen sensor using the stabilized zirconia, and a sensor of a limiting current type which measures an oxygen diffusion controlled current by using an oxygen pump and detects the concentration of oxygen from the current value thereof is used as well other than the oxygen concentration cell.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明はオゾン濃度測定法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring ozone concentration.

【0002】0002

【従来の技術】オゾン濃度測定法は、その測定原理によ
り物理的方法、物理化学的方法、及び化学的方法に分類
される。現在一般に使用されいるオゾン濃度測定法のう
ち、紫外線吸収法は物理的方法であり、化学発光法、電
量法、隔膜電極法は物理的化学的方法である。また、化
学的方法には吸光光度法、検知管法、ヨウ素滴定法があ
る。
2. Description of the Related Art Ozone concentration measuring methods are classified into physical methods, physicochemical methods, and chemical methods depending on the measurement principle. Among the ozone concentration measurement methods commonly used at present, the ultraviolet absorption method is a physical method, and the chemiluminescence method, coulometric method, and diaphragm electrode method are physical and chemical methods. Further, chemical methods include spectrophotometry, detector tube method, and iodine titration method.

【0003】0003

【発明が解決しようとする課題】従来のオゾン濃度測定
法のうち、化学的方法は、装置が大掛かりであり、測定
に時間を要する。また、電解液等の液体を使用するもの
は、バッチ処理となるために非能率であり、液寿命の問
題もある。これに対し、物理的方法は、装置が比較的簡
単で測定能率も高いが、光と電気の混成回路を用いるた
めに、ランプの寿命、光路の汚れなどによる精度低下の
問題がある。物理的化学的方法は、物理的方法、化学的
方法の少なくともいずれかの問題を避け得ない。
[Problems to be Solved by the Invention] Among the conventional methods for measuring ozone concentration, the chemical method requires a large-scale apparatus and requires time for measurement. Furthermore, methods that use liquids such as electrolytes are inefficient due to batch processing, and there are also problems with the lifespan of the liquid. On the other hand, the physical method uses a relatively simple device and has high measurement efficiency, but because it uses a hybrid optical and electrical circuit, there are problems with reduced accuracy due to lamp life and contamination of the optical path. Physical and chemical methods cannot avoid problems with at least one of physical methods and chemical methods.

【0004】本発明の目的は、簡単な装置で能率よく高
精度にオゾン濃度を測定し得るオゾン濃度測定法を提供
することにある。
An object of the present invention is to provide an ozone concentration measuring method that can efficiently and accurately measure ozone concentration using a simple device.

【0005】[0005]

【課題を解決するための手段】本発明のオゾン濃度測定
法は、安定化ジルコニアを用いたセンサでオゾン濃度を
測定する点に特徴がある。
[Means for Solving the Problems] The ozone concentration measuring method of the present invention is characterized in that ozone concentration is measured with a sensor using stabilized zirconia.

【0006】安定化ジルコニアは、ジルコニア(ZrO
2 )にCaO,MgOなどの低原子価の金属酸化物を
固溶させたものであり、酸素ガスセンサとして使用され
ている。安定化ジルコニアを用いた酸素ガスセンサの基
本構成を図2に示す。
[0006] Stabilized zirconia is zirconia (ZrO
2) in which a low valence metal oxide such as CaO or MgO is dissolved as a solid solution, and is used as an oxygen gas sensor. Figure 2 shows the basic configuration of an oxygen gas sensor using stabilized zirconia.

【0007】安定化ジルコニアを用いた酸素ガスセンサ
は、基本的には酸素濃淡電池により構成されている。安
定化ジルコニア1の両面に多孔質白金電極2,2が取り
付けられ、安定化ジルコニア1の一方の側に基準ガス、
他方の側に測定ガスをそれぞれ流すことにより、基準ガ
スと測定ガスとの酸素分圧差に応じた起電力が多孔質白
金電極2,2間に生じ、この起電力から測定ガスの酸素
分圧が測定される。
[0007] An oxygen gas sensor using stabilized zirconia is basically constructed of an oxygen concentration cell. Porous platinum electrodes 2, 2 are attached to both sides of the stabilized zirconia 1, and a reference gas is attached to one side of the stabilized zirconia 1.
By flowing the measurement gas to the other side, an electromotive force corresponding to the oxygen partial pressure difference between the reference gas and the measurement gas is generated between the porous platinum electrodes 2, and from this electromotive force, the oxygen partial pressure of the measurement gas is determined. be measured.

【0008】このような酸素濃淡電池は、従来は酸素セ
ンサとして使用されていたが、高精度なオゾンセンサと
しても使用可能なことが本発明者らの調査から明らかに
なった。酸素濃淡電池では、酸素がO2−イオンの状態
で電子を運ぶ。ここで、白金が触媒として酸素に働き、
電子を与えてO2−となるのを助け、これがジルコニア
内部をイオン移動する。オゾン又はオゾン含有の空気に
おいては、活性な酸素が存在するため、O2−への移転
を高めることでO2−のイオン移動量を増加させる。
[0008] Such an oxygen concentration battery has conventionally been used as an oxygen sensor, but it has become clear through research by the present inventors that it can also be used as a highly accurate ozone sensor. In oxygen concentration batteries, oxygen carries electrons in the form of O2- ions. Here, platinum acts as a catalyst on oxygen,
It donates electrons to help it become O2-, which causes ions to move inside the zirconia. Since active oxygen exists in ozone or ozone-containing air, the amount of ion transfer of O2- is increased by increasing the transfer to O2-.

【0009】本発明のオゾン濃度測定法によると、装置
が簡単で測定能率が高く、その上、光を使わず純電気的
に測定が行われるために、高精度で安定性も優れる。
According to the ozone concentration measuring method of the present invention, the apparatus is simple and the measurement efficiency is high.Moreover, since the measurement is performed purely electrically without using light, it has high accuracy and excellent stability.

【0010】本発明のオゾン濃度測定法に用いるセンサ
は、安定化ジルコニアを用いた酸素センサであれば型式
を問わず、酸素濃淡電池型以外にも、酸素ポンプを利用
して酸素拡散律速電流を測定し、その電流値から酸素濃
度を検出する限界電流型等を用いることができる。
The sensor used in the ozone concentration measurement method of the present invention can be of any type as long as it uses stabilized zirconia.In addition to the oxygen concentration battery type, the sensor can also be of any type, as long as it uses stabilized zirconia. It is possible to use a limiting current type or the like that measures the oxygen concentration and detects the oxygen concentration from the current value.

【0011】[0011]

【実施例】次に、本発明のオゾン濃度測定法の実施結果
を説明する。オゾン発生機で発生したオゾン化空気のオ
ゾン濃度を、オゾンモニタと安定化ジルコニアを用いた
センサで測定した。オゾンモニタは紫外線吸収式オゾン
濃度計である。安定化ジルコニアを用いたセンサは、一
端閉管型の酸素センサで、センサ出力0〜10mmV−
DCが酸素濃度0〜100%に相当する。オゾン濃度の
測定結果を表1および図1に示す。
[Example] Next, the results of implementing the ozone concentration measuring method of the present invention will be explained. The ozone concentration of ozonized air generated by an ozone generator was measured using an ozone monitor and a sensor using stabilized zirconia. The ozone monitor is an ultraviolet absorption type ozone concentration meter. The sensor using stabilized zirconia is an oxygen sensor with a closed tube at one end, and the sensor output is 0 to 10 mmV-
DC corresponds to an oxygen concentration of 0 to 100%. The measurement results of ozone concentration are shown in Table 1 and FIG. 1.

【0012】0012

【表1】[Table 1]

【0013】表1および図1から明らかなように、オゾ
ンモニタの値にセンサ出力が正確に対応し、センサ出力
からオゾン濃度が高精度に測定される。
As is clear from Table 1 and FIG. 1, the sensor output accurately corresponds to the ozone monitor value, and the ozone concentration can be measured with high precision from the sensor output.

【0014】[0014]

【発明の効果】本発明のオゾン濃度測定法は、従来の化
学的方法に比して装置が簡単で能率が高く、物理的方法
に匹敵する合理性を有し、しかも、従来の物理的方法で
問題となる光の使用による精度低下等を生じない。
[Effects of the Invention] The ozone concentration measuring method of the present invention has a simpler device and higher efficiency than conventional chemical methods, and has rationality comparable to physical methods. There is no problem such as deterioration in accuracy due to the use of light.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明法の測定精度を示すグラフである。FIG. 1 is a graph showing the measurement accuracy of the method of the present invention.

【図2】本発明法に使用するセンサの動作原理を示す模
式図である。
FIG. 2 is a schematic diagram showing the operating principle of a sensor used in the method of the present invention.

【符号の説明】[Explanation of symbols]

1  安定化ジルコニア 2  多孔質白金電極 1 Stabilized zirconia 2 Porous platinum electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  安定化ジルコニアを用いたセンサでオ
ゾン濃度を測定することを特徴とするオゾン濃度測定法
1. An ozone concentration measuring method characterized by measuring ozone concentration with a sensor using stabilized zirconia.
JP3037950A 1991-02-06 1991-02-06 Measuring method of concentration of ozone Pending JPH04254751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3037950A JPH04254751A (en) 1991-02-06 1991-02-06 Measuring method of concentration of ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037950A JPH04254751A (en) 1991-02-06 1991-02-06 Measuring method of concentration of ozone

Publications (1)

Publication Number Publication Date
JPH04254751A true JPH04254751A (en) 1992-09-10

Family

ID=12511830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3037950A Pending JPH04254751A (en) 1991-02-06 1991-02-06 Measuring method of concentration of ozone

Country Status (1)

Country Link
JP (1) JPH04254751A (en)

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