JPH0425241U - - Google Patents

Info

Publication number
JPH0425241U
JPH0425241U JP6777990U JP6777990U JPH0425241U JP H0425241 U JPH0425241 U JP H0425241U JP 6777990 U JP6777990 U JP 6777990U JP 6777990 U JP6777990 U JP 6777990U JP H0425241 U JPH0425241 U JP H0425241U
Authority
JP
Japan
Prior art keywords
wafer
fixing plate
resist
hole
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6777990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6777990U priority Critical patent/JPH0425241U/ja
Publication of JPH0425241U publication Critical patent/JPH0425241U/ja
Pending legal-status Critical Current

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  • Weting (AREA)

Description

【図面の簡単な説明】
第1図は、この考案の透孔付きウエーハ固着板
の平面図、第2図は、その断面図である。第3図
は、従来のウエーハ固着板のウエーハ貼付け時の
概念図である。 1……ウエーハ固着板、2……透孔部、3……
ウエーハ、4a,4b……レジスト。

Claims (1)

    【実用新案登録請求の範囲】
  1. レジストを用いて、ウエーハを貼り付ける固着
    板において、その固着板のウエーハ固着位置に透
    孔があけてあることを特徴とするウエーハ固着板
JP6777990U 1990-06-25 1990-06-25 Pending JPH0425241U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6777990U JPH0425241U (ja) 1990-06-25 1990-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6777990U JPH0425241U (ja) 1990-06-25 1990-06-25

Publications (1)

Publication Number Publication Date
JPH0425241U true JPH0425241U (ja) 1992-02-28

Family

ID=31601660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6777990U Pending JPH0425241U (ja) 1990-06-25 1990-06-25

Country Status (1)

Country Link
JP (1) JPH0425241U (ja)

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