JPH0425231U - - Google Patents

Info

Publication number
JPH0425231U
JPH0425231U JP6777590U JP6777590U JPH0425231U JP H0425231 U JPH0425231 U JP H0425231U JP 6777590 U JP6777590 U JP 6777590U JP 6777590 U JP6777590 U JP 6777590U JP H0425231 U JPH0425231 U JP H0425231U
Authority
JP
Japan
Prior art keywords
clamp claw
wafer
tip
curved surface
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6777590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6777590U priority Critical patent/JPH0425231U/ja
Publication of JPH0425231U publication Critical patent/JPH0425231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP6777590U 1990-06-25 1990-06-25 Pending JPH0425231U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6777590U JPH0425231U (US20090163788A1-20090625-C00002.png) 1990-06-25 1990-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6777590U JPH0425231U (US20090163788A1-20090625-C00002.png) 1990-06-25 1990-06-25

Publications (1)

Publication Number Publication Date
JPH0425231U true JPH0425231U (US20090163788A1-20090625-C00002.png) 1992-02-28

Family

ID=31601652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6777590U Pending JPH0425231U (US20090163788A1-20090625-C00002.png) 1990-06-25 1990-06-25

Country Status (1)

Country Link
JP (1) JPH0425231U (US20090163788A1-20090625-C00002.png)

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