JPH04251929A - Vapor cleaning and drying apparatus - Google Patents

Vapor cleaning and drying apparatus

Info

Publication number
JPH04251929A
JPH04251929A JP40819690A JP40819690A JPH04251929A JP H04251929 A JPH04251929 A JP H04251929A JP 40819690 A JP40819690 A JP 40819690A JP 40819690 A JP40819690 A JP 40819690A JP H04251929 A JPH04251929 A JP H04251929A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
solvent
cleaning
drying apparatus
vapor
apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP40819690A
Other versions
JP2913564B2 (en )
Inventor
Tadashi Akiyama
Michihito Sasaki
Original Assignee
Dan Kagaku:Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To provide a vapor cleaning and drying apparatus which ensures high application efficiency of solvent without using quartz which is expensive and easily damaged as a material of a cleaning vessel.
CONSTITUTION: A title apparatus comprises a shutter 9 which opens only when a cleaning object is loaded and unloaded, a cooling coil 11 for condensing vapor of solvent, a cleaning object supporting board 13, a nozzle 12 for poring solvent to the cleaning object 14, an exhaust pipe 15 for collecting solvent and a cleaning vessel 10 having a gas supply pipe 16 for the purging and moreover includes an apparatus for high purity solvent of the predetermined temperature.
COPYRIGHT: (C)1992,JPO&Japio
JP40819690A 1990-12-27 1990-12-27 Vapor cleaning and drying apparatus Expired - Fee Related JP2913564B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40819690A JP2913564B2 (en) 1990-12-27 1990-12-27 Vapor cleaning and drying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40819690A JP2913564B2 (en) 1990-12-27 1990-12-27 Vapor cleaning and drying apparatus

Publications (2)

Publication Number Publication Date
JPH04251929A true true JPH04251929A (en) 1992-09-08
JP2913564B2 JP2913564B2 (en) 1999-06-28

Family

ID=18517684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40819690A Expired - Fee Related JP2913564B2 (en) 1990-12-27 1990-12-27 Vapor cleaning and drying apparatus

Country Status (1)

Country Link
JP (1) JP2913564B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5520744A (en) * 1993-05-17 1996-05-28 Dainippon Screen Manufacturing Co., Ltd. Device for rinsing and drying substrate
CN104039467A (en) * 2012-06-08 2014-09-10 日本原野株式会社 Method for vapor-cleaning object to be cleaned and device therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5520744A (en) * 1993-05-17 1996-05-28 Dainippon Screen Manufacturing Co., Ltd. Device for rinsing and drying substrate
CN104039467A (en) * 2012-06-08 2014-09-10 日本原野株式会社 Method for vapor-cleaning object to be cleaned and device therefor

Also Published As

Publication number Publication date Type
JP2913564B2 (en) 1999-06-28 grant

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