JPH0424405Y2 - - Google Patents

Info

Publication number
JPH0424405Y2
JPH0424405Y2 JP1985039498U JP3949885U JPH0424405Y2 JP H0424405 Y2 JPH0424405 Y2 JP H0424405Y2 JP 1985039498 U JP1985039498 U JP 1985039498U JP 3949885 U JP3949885 U JP 3949885U JP H0424405 Y2 JPH0424405 Y2 JP H0424405Y2
Authority
JP
Japan
Prior art keywords
stage
axis direction
scare
electrode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985039498U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155706U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985039498U priority Critical patent/JPH0424405Y2/ja
Publication of JPS61155706U publication Critical patent/JPS61155706U/ja
Application granted granted Critical
Publication of JPH0424405Y2 publication Critical patent/JPH0424405Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1985039498U 1985-03-19 1985-03-19 Expired JPH0424405Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985039498U JPH0424405Y2 (fr) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985039498U JPH0424405Y2 (fr) 1985-03-19 1985-03-19

Publications (2)

Publication Number Publication Date
JPS61155706U JPS61155706U (fr) 1986-09-27
JPH0424405Y2 true JPH0424405Y2 (fr) 1992-06-09

Family

ID=30547496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985039498U Expired JPH0424405Y2 (fr) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPH0424405Y2 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212710A (ja) * 1983-05-18 1984-12-01 Mitsutoyo Mfg Co Ltd 静電容量型変位検出器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212710A (ja) * 1983-05-18 1984-12-01 Mitsutoyo Mfg Co Ltd 静電容量型変位検出器

Also Published As

Publication number Publication date
JPS61155706U (fr) 1986-09-27

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