JPH0423250U - - Google Patents
Info
- Publication number
- JPH0423250U JPH0423250U JP6272190U JP6272190U JPH0423250U JP H0423250 U JPH0423250 U JP H0423250U JP 6272190 U JP6272190 U JP 6272190U JP 6272190 U JP6272190 U JP 6272190U JP H0423250 U JPH0423250 U JP H0423250U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- tank
- chambers
- chamber
- polished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272190U JPH0423250U (h) | 1990-06-15 | 1990-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6272190U JPH0423250U (h) | 1990-06-15 | 1990-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0423250U true JPH0423250U (h) | 1992-02-26 |
Family
ID=31592129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6272190U Pending JPH0423250U (h) | 1990-06-15 | 1990-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423250U (h) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4947280U (h) * | 1972-07-27 | 1974-04-25 |
-
1990
- 1990-06-15 JP JP6272190U patent/JPH0423250U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4947280U (h) * | 1972-07-27 | 1974-04-25 |